CN108277464A - A kind of coating apparatus, film plating process and the readable storage medium storing program for executing of curved surface cover board - Google Patents
A kind of coating apparatus, film plating process and the readable storage medium storing program for executing of curved surface cover board Download PDFInfo
- Publication number
- CN108277464A CN108277464A CN201810111870.4A CN201810111870A CN108277464A CN 108277464 A CN108277464 A CN 108277464A CN 201810111870 A CN201810111870 A CN 201810111870A CN 108277464 A CN108277464 A CN 108277464A
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- China
- Prior art keywords
- curved surface
- cover board
- surface cover
- coating
- nozzle
- Prior art date
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a kind of coating apparatus, film plating process and the readable storage medium storing program for executing of curved surface cover board.The coating apparatus includes：Mechanism is sputtered, for spraying Coating Materials to predetermined direction with certain sputter rate；Coating film area different on the curved surface cover board is moved on predetermined direction by mobile mechanism successively for driving the curved surface cover board to move；Nozzle is corrected, for being corrected successively the Coating Materials by sputter rate to plated film rate corresponding with the coating film area on predetermined direction；Wherein, the amendment nozzle includes entrance port, exit portal and the cavity for being connected to the entrance port and exit portal, and entrance port is socketed on the target nozzle of the sputtering mechanism, and exit portal is towards the curved surface cover board；The size of the exit portal for correcting nozzle is adjustable, and the size by adjusting exit portal is corrected the Coating Materials to plated film rate corresponding with the coating film area on predetermined direction by sputter rate.The coating apparatus can solve the plated film problem of non-uniform of curved surface cover board, improve the image quality of camber display screen.
Description
Technical field
The present invention relates to coating technique more particularly to a kind of coating apparatus, film plating process and the readable storages of curved surface cover board
Medium.
Background technology
Vehicle-carrying display screen is one of the ost important components in car-mounted display equipment, typically liquid crystal display, liquid crystal display
Volume it is smaller, be easily installed, instrument board can be installed to nearby, after roof, backrest, or even be mounted on sunshading board
On, it is convenient to use in all cases.In addition, car-mounted display equipment is integrated with other functions toward contact, such as with simple
Power amplifier, television receiving function, audio output etc., type and function ratio TV or computer display are more various, therefore, in vehicle
Installation car-mounted display equipment is increasingly welcomed by the general public on, and the quality of the display picture of car-mounted display equipment is straight
Connect the usage experience for influencing user.
Since vehicle-carrying display screen needs the function of meeting wide viewing angle picture, just need vehicle-carrying display screen being fabricated to song
Face display screen, the glass cover-plate of corresponding car-mounted display screen surfaces are also required to be curved surface cover board, but to curved surface cover board plated film
When, the non-uniform situation of plated film is often led to due to the bending of curved surface cover board so that the display picture of vehicle-carrying display screen produces
Raw different degrees of distortion, to influence the viewing impression of user.
Invention content
In order to solve above-mentioned the deficiencies in the prior art, the present invention provides a kind of coating apparatus, the film plating process of curved surface cover board
And readable storage medium storing program for executing.The coating apparatus can solve the plated film problem of non-uniform of curved surface cover board, improve the picture of camber display screen
Face quality.
The technical problems to be solved by the invention are achieved by the following technical programs：
A kind of coating apparatus of curved surface cover board, including：
Mechanism is sputtered, for spraying Coating Materials to predetermined direction with certain sputter rate；
Mobile mechanism moves coating film area different on the curved surface cover board for driving the curved surface cover board to move successively
To predetermined direction；
Nozzle is corrected, for being corrected successively the Coating Materials by sputter rate to opposite with the coating film area on predetermined direction
The plated film rate answered；
Wherein, the amendment nozzle includes entrance port, exit portal and the cavity for being connected to the entrance port and exit portal, entrance port
It is socketed on the target nozzle of the sputtering mechanism, exit portal is towards the curved surface cover board；The exit portal for correcting nozzle
Size is adjustable, by adjust exit portal size by the Coating Materials by sputter rate correct to on predetermined direction
The corresponding plated film rate of coating film area.
Further, the amendment nozzle is towards being provided with roller shutter structure or aperture knot on one end of the curved surface cover board
Structure, the variable window on the roller shutter structure or iris diaphragm structure is as exit portal.
Further, further include a calculating mechanism, for being electrically connected and controlling the sputtering mechanism, mobile mechanism and amendment
Nozzle, according to different coating film areas and its corresponding plated film rate on the preset curved surface cover board, described in control
Coating film area different on the curved surface cover board is moved on predetermined direction by mobile mechanism successively；And by described in control
Nozzle is corrected to correct the Coating Materials successively by sputter rate to plated film corresponding with the coating film area on predetermined direction
Rate.
Further, the memory for calculating mechanism and including processor and being electrically connected with the processor, the storage
The computer program executed for the processor is stored in device, the processor carries out as follows when executing the computer program
Step：
Step 1：According to different coating film areas and its corresponding plated film rate on the preset curved surface cover board, respectively to institute
It states mobile mechanism and corrects nozzle and send out control instruction；
Step 2：Coating film area different on the curved surface cover board is moved on predetermined direction by the mobile mechanism successively；
Step 3：The amendment nozzle Coating Materials is corrected successively by sputter rate to the plated film area on predetermined direction
The corresponding plated film rate in domain.
Further, the processor first carries out step 0 before executing step 1：It presets different on the curved surface cover board
Coating film area and its corresponding plated film rate.
A kind of film plating process of curved surface cover board is applied on the coating apparatus of above-mentioned curved surface cover board, includes the following steps：
Step 1：Coating film area different on the curved surface cover board is moved on predetermined direction by the mobile mechanism successively；
Step 2：The amendment nozzle Coating Materials is corrected successively by sputter rate to the plated film area on predetermined direction
The corresponding plated film rate in domain.
Further, further include before step 1 step 0：Preset on the curved surface cover board different coating film area and its
Corresponding plated film rate.
A kind of readable storage medium storing program for executing stores the computer program executed for processor, and the computer program is described
Processor carries out the film plating process of above-mentioned curved surface cover board when executing.
The present invention has the advantages that：The coating apparatus will need the entire curved surface table of plated film on the curved surface cover board
Face is divided into multiple coating film areas, and a coating film area is corresponded to carries out plated film using a plated film rate, the curved surface lid described in this way
Plate is when carrying out plated film, even if relative angle between its each coating film area and the target nozzle of the sputtering mechanism, opposite
Distance etc. differs, can also by control the amendments nozzle by the Coating Materials by sputter rate correct to make a reservation for
The corresponding plated film rate of coating film area on direction finally enables the Coating Materials be made up with different plated film rates
The difference such as relative angle, relative distance between each coating film area improve the plating film uniformity of the curved surface cover board, improve bent
The image quality of face display screen.
Description of the drawings
Fig. 1 is the schematic diagram of the coating apparatus of curved surface cover board provided by the invention；
Fig. 2 is the schematic diagram of the iris diaphragm structure in the coating apparatus of curved surface cover board provided by the invention；
Fig. 3 is the schematic diagram of the iris diaphragm structure in the coating apparatus of curved surface cover board provided by the invention；
Fig. 4 is the action box figure of the computer program in the coating apparatus of curved surface cover board provided by the invention；
Fig. 5 is the step block diagram of the film plating process of curved surface cover board provided by the invention.
Specific implementation mode
The present invention will be described in detail with reference to the accompanying drawings and examples.
Embodiment one
As shown in Figure 1, a kind of coating apparatus of curved surface cover board 1, including：
Mechanism 2 is sputtered, for spraying Coating Materials to predetermined direction with certain sputter rate；
Mobile mechanism 3 moves coating film area different on the curved surface cover board 1 for driving the curved surface cover board 1 to move successively
It moves to predetermined direction；
Correct nozzle 4, for the Coating Materials is corrected by sputter rate successively extremely with the coating film area phase on predetermined direction
Corresponding plated film rate；
Wherein, the amendment nozzle 4 includes entrance port, exit portal and the cavity for being connected to the entrance port and exit portal, incidence
Muzzle is connected on the target nozzle 21 of the sputtering mechanism 2, and exit portal is towards the curved surface cover board 1；It is described to correct going out for nozzle 4
The size of loophole is adjustable, by adjust exit portal size by the Coating Materials by sputter rate correct to predetermined party
The corresponding plated film rate of upward coating film area.
The coating apparatus will need the entire curved surface of plated film to be divided into multiple coating film areas on the curved surface cover board 1, and one
A coating film area is corresponded to carries out plated film using a plated film rate, the curved surface cover board 1 in this way when carrying out plated film, even if its
Relative angle, relative distance etc. between each coating film area and the target nozzle 21 of the sputtering mechanism 2 differ, can also
By control the amendment nozzle 4 by the Coating Materials by sputter rate correct to the coating film area phase on predetermined direction
Corresponding plated film rate finally enables the Coating Materials be made up between each coating film area with different plated film rates
The difference such as relative angle, relative distance improve the plating film uniformity of the curved surface cover board 1, improve the picture matter of camber display screen
Amount.
For example, close to intermediate coating film area on the curved surface cover board 1, between the target nozzle 21 it is opposite away from
From small, relative angle（Obtuse angle angle between the tangential direction of coating film area and the injection direction of Coating Materials）Also small, then
Intermediate coating film area just needs smaller plated film rate to carry out plated film；Close to the plated film of both sides on the curved surface cover board 1
Relative distance between region, with the target nozzle 21 is big, relative angle is also big, then the coating film area of both sides just needs
Bigger plated film rate carries out plated film.
Sputter rate described in this case refers to target nozzle 21 inner injection of the Coating Materials from the sputtering mechanism 2
Rate out, described plated film rate refer to spraying from the exit portal for correcting nozzle 4 after the Coating Materials is corrected
The rate shot out.
If the target nozzle 21 of the sputtering mechanism 2 ejects the plating to predetermined direction with constant sputter rate V0
Membrane material, then the mobile mechanism 3 coating film area L1, L2, L3 ... Ln different on the curved surface cover board 1 is moved successively
To predetermined direction, and simultaneously, the amendment nozzle 4 by the Coating Materials by sputter rate V0 correct successively to respectively with plating
Corresponding plated film rate V1, V2, V3 ... the Vn of diaphragm area L1, L2, L3 ... Ln, final to make, the Coating Materials is to plate
Film rate V1 is covered on coating film area L1, is covered on coating film area L2 with plated film rate V2, is covered with plated film rate V3
It is covered on coating film area Ln with plated film rate Vn on coating film area L3 ....
In the case where the sputter rate V0 of the Coating Materials is invariable, the exit portal for correcting nozzle 44 is got over
Small, bigger to the barrier force of the Coating Materials, the revised plated film rate of Coating Materials is bigger, wherein plated film speed
Rate≤sputter rate.
Specifically, as shown in Figures 2 and 3, the amendment nozzle 4 is towards being provided with roller shutter on one end of the curved surface cover board 1
Variable window 412 on structure 41 or iris diaphragm structure 41, the roller shutter structure 41 or iris diaphragm structure 41 is used as exit portal.Such as Fig. 2
Shown in roller shutter structure 41, including be oppositely arranged at least a pair of of the door curtain 411 to form the variable window 412, and connection is simultaneously
Drive the movement of the door curtain 411 to change the roller shutter drive component of the size of the variable window 412（It is not shown）；Such as Fig. 3 institutes
The iris diaphragm structure 41 shown, including the more blades 411 for forming the variable window 412 are mutually folded, and connect and drive the leaf
Piece 411 is moved to change the aperture drive component of the size of the variable window 412（It is not shown）.
When the blade of the door curtain 411 of the roller shutter structure 41 or the iris diaphragm structure 41 is opened completely, as outgoing
The variable window 412 of mouth is maximum, and the plated film rate of the Coating Materials is maximum and is equal to sputter rate.
Preferably, the mobile mechanism 3 drives the curved surface cover board 1 to move by translation mode, and translation direction and institute
The jet path for stating Coating Materials is perpendicular.
The coating apparatus further includes a calculating mechanism 4, for being electrically connected and controlling the sputtering mechanism 2,3 and of mobile mechanism
It corrects nozzle 4 and passes through control according to different coating film areas and its corresponding plated film rate on the preset curved surface cover board 1
The mobile mechanism 3 is made to be moved to coating film area different on the curved surface cover board 1 on predetermined direction successively；And pass through
The amendment nozzle 4 is controlled to correct the Coating Materials successively by sputter rate to opposite with the coating film area on predetermined direction
The plated film rate answered.
Specifically, the memory for calculating mechanism 4 and including processor and being electrically connected with the processor, the memory
It is inside stored with the computer program executed for the processor, as shown in figure 4, when the processor executes the computer program
Carry out following steps：
Step 1：According to different coating film areas and its corresponding plated film rate on the preset curved surface cover board 1, respectively to
The mobile mechanism 3 and amendment nozzle 4 send out control instruction；
Step 2：Coating film area different on the curved surface cover board 1 is moved on predetermined direction by the mobile mechanism 3 successively；
Step 3：The amendment nozzle 4 Coating Materials is corrected successively by sputter rate to the plated film area on predetermined direction
The corresponding plated film rate in domain.
The processor first carries out step 0 before executing step 1：Preset plated film area different on the curved surface cover board 1
Domain and its corresponding plated film rate.
It illustrates, in entire coating process, the sputtering mechanism 2, which can be always maintained to predetermined direction, sprays
The Coating Materials, alternatively, after the completion of previous coating film area plated film, the time slot before latter coating film area plated film starts
In suspend to predetermined direction and spray the Coating Materials, be not limited thereto.
Embodiment two
As shown in figure 5, a kind of film plating process of curved surface cover board, is applied to the coating apparatus of the curved surface cover board described in embodiment two
On, include the following steps：
Step 1：Coating film area different on the curved surface cover board is moved on predetermined direction by the mobile mechanism successively；
Step 2：The amendment nozzle Coating Materials is corrected successively by sputter rate to the plated film area on predetermined direction
The corresponding plated film rate in domain.
Further include step 0 before step 1：Preset different coating film areas and its corresponding plating on the curved surface cover board
Film rate.
It illustrates, in entire coating process, the sputtering mechanism, which can be always maintained to predetermined direction, sprays
The Coating Materials, alternatively, after the completion of previous coating film area plated film, the time slot before latter coating film area plated film starts
In suspend to predetermined direction and spray the Coating Materials, be not limited thereto.
Embodiment three
A kind of readable storage medium storing program for executing stores the computer program executed for processor, and the computer program is by the processing
The film plating process of the curved surface cover board described in embodiment two is carried out when device executes.
Embodiments of the present invention above described embodiment only expresses, the description thereof is more specific and detailed, but can not
Therefore it is interpreted as the limitation to the scope of the claims of the present invention, as long as skill obtained in the form of equivalent substitutions or equivalent transformations
Art scheme should all be fallen within the scope and spirit of the invention.
Claims (8)
1. a kind of coating apparatus of curved surface cover board, which is characterized in that including：
Mechanism is sputtered, for spraying Coating Materials to predetermined direction with certain sputter rate；
Mobile mechanism moves coating film area different on the curved surface cover board for driving the curved surface cover board to move successively
To predetermined direction；
Nozzle is corrected, for being corrected successively the Coating Materials by sputter rate to opposite with the coating film area on predetermined direction
The plated film rate answered；
Wherein, the amendment nozzle includes entrance port, exit portal and the cavity for being connected to the entrance port and exit portal, entrance port
It is socketed on the target nozzle of the sputtering mechanism, exit portal is towards the curved surface cover board；The exit portal for correcting nozzle
Size is adjustable, by adjust exit portal size by the Coating Materials by sputter rate correct to on predetermined direction
The corresponding plated film rate of coating film area.
2. the coating apparatus of curved surface cover board according to claim 1, which is characterized in that the amendment nozzle is towards the song
Roller shutter structure or iris diaphragm structure are provided on one end of surface cover, the variable window conduct on the roller shutter structure or iris diaphragm structure
Exit portal.
3. the coating apparatus of curved surface cover board according to claim 1 or 2, which is characterized in that further include a calculating mechanism, use
In being electrically connected and controlling the sputtering mechanism, mobile mechanism and correct nozzle, according to different on the preset curved surface cover board
Coating film area and its corresponding plated film rate, by controlling the mobile mechanism by plated film area different on the curved surface cover board
Domain is moved on predetermined direction successively；And by control the amendment nozzle by the Coating Materials by sputter rate successively
It corrects to plated film rate corresponding with the coating film area on predetermined direction.
4. the coating apparatus of curved surface cover board according to claim 3, which is characterized in that the calculating mechanism includes processor
With the memory being electrically connected with the processor, the computer program executed for the processor is stored in the memory,
The processor carries out following steps when executing the computer program：
Step 1：According to different coating film areas and its corresponding plated film rate on the preset curved surface cover board, respectively to institute
It states mobile mechanism and corrects nozzle and send out control instruction；
Step 2：Coating film area different on the curved surface cover board is moved on predetermined direction by the mobile mechanism successively；
Step 3：The amendment nozzle Coating Materials is corrected successively by sputter rate to the plated film area on predetermined direction
The corresponding plated film rate in domain.
5. the coating apparatus of curved surface cover board according to claim 4, which is characterized in that the processor is executing step 1
Before, step 0 is first carried out：Preset different coating film areas and its corresponding plated film rate on the curved surface cover board.
6. a kind of film plating process of curved surface cover board, which is characterized in that be applied to any curved surface cover board in claim 1-5
Coating apparatus on, include the following steps：
Step 1：Coating film area different on the curved surface cover board is moved on predetermined direction by the mobile mechanism successively；
Step 2：The amendment nozzle Coating Materials is corrected successively by sputter rate to the plated film area on predetermined direction
The corresponding plated film rate in domain.
7. the film plating process of curved surface cover board according to claim 6, which is characterized in that further include step before step 1
0：Preset different coating film areas and its corresponding plated film rate on the curved surface cover board.
8. a kind of readable storage medium storing program for executing stores the computer program executed for processor, which is characterized in that the computer journey
The film plating process of the curved surface cover board described in claim 6 or 7 is carried out when sequence is executed by the processor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810111870.4A CN108277464B (en) | 2018-02-05 | 2018-02-05 | A kind of coating apparatus, film plating process and the readable storage medium storing program for executing of curved surface cover board |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810111870.4A CN108277464B (en) | 2018-02-05 | 2018-02-05 | A kind of coating apparatus, film plating process and the readable storage medium storing program for executing of curved surface cover board |
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| Publication Number | Publication Date |
|---|---|
| CN108277464A true CN108277464A (en) | 2018-07-13 |
| CN108277464B CN108277464B (en) | 2019-09-10 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109182991A (en) * | 2018-11-06 | 2019-01-11 | 哈尔滨工业大学 | A kind of magnetic control sputtering film plating device relative movement mechanism and its film plating process suitable for conformal substrate surface plated film |
| CN110007539A (en) * | 2019-05-22 | 2019-07-12 | 江苏铁锚玻璃股份有限公司 | The curved surface electrochromism transparent devices and preparation method thereof of efficient uniform discoloration |
| CN110759645A (en) * | 2019-09-18 | 2020-02-07 | 宁波泰意德过滤技术有限公司 | Coating method for curved glass |
| CN114075650A (en) * | 2020-08-18 | 2022-02-22 | 群创光电股份有限公司 | Coating device and coating method for curved substrate |
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| CN107299329A (en) * | 2017-07-14 | 2017-10-27 | 信利光电股份有限公司 | A kind of coating apparatus and film plating process of curved surface cover plate |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109182991A (en) * | 2018-11-06 | 2019-01-11 | 哈尔滨工业大学 | A kind of magnetic control sputtering film plating device relative movement mechanism and its film plating process suitable for conformal substrate surface plated film |
| CN110007539A (en) * | 2019-05-22 | 2019-07-12 | 江苏铁锚玻璃股份有限公司 | The curved surface electrochromism transparent devices and preparation method thereof of efficient uniform discoloration |
| CN110007539B (en) * | 2019-05-22 | 2021-09-21 | 江苏铁锚玻璃股份有限公司 | Efficient and uniform color-changing curved surface electrochromic transparent device and preparation method thereof |
| CN110759645A (en) * | 2019-09-18 | 2020-02-07 | 宁波泰意德过滤技术有限公司 | Coating method for curved glass |
| CN114075650A (en) * | 2020-08-18 | 2022-02-22 | 群创光电股份有限公司 | Coating device and coating method for curved substrate |
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| Publication number | Publication date |
|---|---|
| CN108277464B (en) | 2019-09-10 |
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