CN108265264A - A kind of vacuum coating production line transmission mechanism - Google Patents
A kind of vacuum coating production line transmission mechanism Download PDFInfo
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- CN108265264A CN108265264A CN201711353380.7A CN201711353380A CN108265264A CN 108265264 A CN108265264 A CN 108265264A CN 201711353380 A CN201711353380 A CN 201711353380A CN 108265264 A CN108265264 A CN 108265264A
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- shaft
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- driving
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Abstract
The invention discloses a kind of vacuum coating production line transmission mechanisms, it includes a driving component, a driven subassembly and a magnetic coupling, driving component and driven subassembly are separately positioned on the both sides of magnetic coupling, the movement of driving component is passed to driven subassembly by driving component by electric drive by magnetic coupling.Compared with prior art, the transmission mechanism is using magnetic coupling connection driving shaft and driven shaft, and nothing is in direct contact between driving shaft and driven shaft, without machine driving, abrasion is reduced, dynamic sealing is converted into static seal, keep the air-tightness of each chamber in each coating film production line, the phenomenon generation that leaks air is effectively prevent, the transmission mechanism is simple in structure, and energy consumption is reduced, it economizes on resources, easy to use, service life extends, and the safety is improved therefore its application prospect is very wide.
Description
This case is the divisional application of application number 2013106885790.
Technical field
The present invention relates to vacuum coating production line fields, are to be related to a kind of vacuum coating production line driver specifically
Structure.
Background technology
Vacuum coating technology is begun to show in the 1930s, four the fifties start commercial Application occur, and industrialization is big to advise
Mould production starts from widely should in the 1980s, obtaining in the industry such as electronics, aerospace, packaging, decoration, gold stamping printing
With.Vacuum coating technology is a kind of novel materials synthesis and the new technology of processing, is the important set of field of surface engineering technique
Into part.Vacuum coating technology is the plated film that the surface of solids is coated to one layer of property using physics, chemical means, so as to make
There is the surface of solids wear-resistant, high temperature resistant, corrosion-resistant, anti-oxidant, radiation protection, conduction, magnetic conduction, insulation and ornament lamp many to be better than
The superior function of solid material in itself reaches and improves product quality, extends life of product, the notable technology warp of energy saving and acquisition
The effect for benefit of helping.The substrate that is referred to as of plated film is needed, the material of plating is referred to as target.
In order to reduce the complexity of technique, each cavity space in coating film production line is narrow, is only capable of holding substrate frame and passes through, base
Horse is transmitted in each chamber by being mounted on the transmission mechanism of each chamber.In the prior art, it is usually driven in transmission mechanism
Actuator of the wheel in the interior transmission for being used for substrate frame of each chamber, transmission mechanism is mounted on each chamber in coating film production line
Outside, the drive shaft in actuator is extend into drives drive to rotate in each chamber, then seals again, but this sealing belongs to
Dynamic sealing, the rotation of drive shaft still can cause the gas leak phenomenon of each chamber to occur.In vacuum coating production line, vacuum ring is needed
Border plated film, the air-tightness needs of each chamber of coating film production line are very excellent, and the possibility that can all increase gas leakage is punched in each cavity wall
Property, even if being likely to cause seal failure using various mechanical seals or packing seal, therefore how by the movement of actuator
The indoor drive of chamber is passed to, and the air-tightness for not influencing each chamber in plated film assembly line is a urgent problem needed to be solved.
Magnetic drives are using latest modern technological permanent-magnet material or electromagnetic force, are made between driving link and driven member by the super of magnetic force
Square characteristic realizes that contactless, No leakage transmits a kind of new technology of torque.Realize that the device of this technology is known as magnetic drive
Device or magnetic coupling, magnetic force clutch etc..
Magnetic coupling select permanent-magnet material be made, using the high energy product of permanent-magnet material, high-coercive force characteristic not
Together, when not having external force effect, the opposite opposed polarity in active both sides is mutually pull-in on the magnet dense arrangement of same polarity
Together, when master end, the lower generation displacement of external force effect, slave end make active, driven two due to the effect of inertia and load together
The magnetic pole of side misplaces, at this time actively, the magnetic poles of driven both sides other than heteropolar mutual attractive force, the also phase of homopolarity
Repulsive interaction acts on.Suction and repulsion form " push-and-pull " active force, so as to drive slave end displacement, realize magnetic drives.Magnetic force
It is driven in entire transmission process, dynamic sealing is converted to static seal, so as to keep gas by being in direct contact for no driven shaft and driving shaft
Close property.
Invention content
In view of the above-mentioned problems existing in the prior art, the object of the present invention is to provide a kind of transmissions of vacuum coating production line
Dynamic sealing is converted to static seal, reduces abrasion, keeps the air-tightness of each chamber in each coating film production line by mechanism.
For achieving the above object, the technical solution adopted by the present invention is as follows：
A kind of vacuum coating production line transmission mechanism, including：One driving component, a driven subassembly and a magnetic coupling
Device, driving component and driven subassembly are separately positioned on the both sides of magnetic coupling, and driving component is passed through magnetic coupling by electric drive
Device makes driving component driving driven subassembly movement.
Preferably, driving component includes a driving shaft, and driven subassembly includes a driven shaft and a drive, and driven shaft drives
Drive rotation, driving shaft and driven shaft are arranged on the both sides of magnetic coupling, magnetic coupling connection driving shaft and driven shaft.
Preferably, driving component further comprises a belt wheel and a belt, and belt wheel is arranged on driving shaft, and belt connection is true
The belt wheel on motor and driving shaft in empty coating film production line, driving shaft motor driving in by vacuum coating production line.
It is highly preferred that driving shaft includes a driving shaft first end, a driving shaft the second end and an active axis body, from master
Moving axis first end extends to form active axis body to driving shaft the second end, and driving shaft the second end is connect with magnetic coupling.
Preferably, belt wheel is arranged on driving shaft first end and passes through key connection.
It is highly preferred that driving component further comprises at least one active axle key, active axle key is arranged on belt wheel and active
Between axis first end.
It is highly preferred that driving shaft first end is equipped at least one active shaft key groove, width and the active of active shaft key groove
The equivalent width of axle key, further comprises a belt wheel inner hole and at least one band wheel key way on belt wheel, the internal diameter of belt wheel inner hole with
The diameter of driving shaft first end is consistent, and band wheel key way carries removal material on wheel endoporus and formed, width and master with wheel key way
The equivalent width of moving axis key.
It is highly preferred that when belt wheel is arranged on driving shaft first end, active shaft key groove is connected with wheel key way, actively
Axle key is placed in active shaft key groove and between wheel key way, and active shaft key groove and the depth with wheel key way are not less than active axle key
Thickness.
It is highly preferred that the quantity of active shaft key groove is consistent with the quantity of active axle key.
Preferably, driven shaft further comprises a driven shaft first end, a driven shaft the second end and a driven axis body,
Driven shaft first end extends to form driven axis body to driven shaft the second end, and driven shaft first end connects with magnetic coupling
It connects.
Preferably, drive is arranged on driven shaft, and drive and driven shaft pass through key connection.
It is highly preferred that driven subassembly further comprises at least one driven shaft key, driven shaft key is arranged on driven shaft and biography
Between driving wheel.
It is highly preferred that driven shaft further comprises at least one driven shaft keyway, driven shaft keyway is since moving axis second end
Portion's removal material is formed, the width of driven shaft keyway and the equivalent width of driven shaft key.
It is highly preferred that drive further comprises a drive endoporus and at least one transmission wheel key way, it is driven wheel key way
It removes material from drive endoporus to be formed, the diameter of drive endoporus is consistent with the diameter of driven shaft the second end, drive
The width of keyway and the equivalent width of drive key.
It is highly preferred that when drive is mounted on driven shaft the second end, driven shaft keyway and drive on driven shaft
Keyway connects, and driven shaft key is placed between driven shaft keyway and transmission wheel key way, the depth of driven shaft keyway and transmission wheel key way
Degree is not less than the thickness of driven shaft key.
Preferably, driven subassembly further comprises a drive fixed seat, and drive fixed seat is arranged on driven shaft, passes
Driving wheel is bolted with drive fixed seat, prevents drive from coming off from driven shaft.
Preferably, vacuum coating production line transmission mechanism further comprises a sealing flange, and sealing flange is arranged on magnetic
On mechanical couple, sealing flange further comprises a seal washer and a gasket groove, and seal washer is placed in gasket groove.Sealing
Magnetic coupling is mounted in vacuum coating line by flange, prevents magnetic coupling from coming off.
Preferably, the driving shaft and driven shaft are made of magnetic material.
Compared with prior art, a kind of vacuum coating production line transmission mechanism provided by the invention, using magnetic coupling
Device connects driving shaft and driven shaft, and without being in direct contact between driving shaft and driven shaft, no machine driving reduces abrasion, will be dynamic close
Envelope is converted to static seal, keeps the air-tightness of each chamber in each coating film production line, effectively prevent the phenomenon generation that leaks air, the biography
Motivation structure is simple in structure, energy consumption reduce, economize on resources, it is easy to use, service life extend, the safety is improved therefore its application before
Scape is very wide.
Description of the drawings
Fig. 1 is a kind of schematic diagram of preferred embodiment of vacuum coating production line transmission mechanism provided by the invention；
Fig. 2 is a kind of front view of preferred embodiment of vacuum coating production line transmission mechanism provided by the invention；
Fig. 3 is the sectional view A-A of vacuum coating production line transmission mechanism provided by the invention；
Fig. 4 is the sectional view B-B of vacuum coating production line transmission mechanism provided by the invention.
Specific embodiment
The present invention is made further in detail, completely to illustrate with reference to embodiment and attached drawing.
Fig. 1 to Fig. 4, a kind of preferred embodiment for vacuum coating production line transmission mechanism provided by the invention are shown
It is intended to.The transmission mechanism is used in Mobile vacuum coating film production line substrate movement in vacuum coating chamber.As shown in Figures 1 to 4,
The transmission mechanism includes a driving component 10, a driven subassembly 20 and a magnetic coupling 30, driving component 10 and driven subassembly
20 are separately positioned on the both sides of magnetic coupling 30, and driving component 10 is made driving component by electric drive by magnetic coupling 30
10 driving driven subassembly 20.
Fig. 2 is a kind of front view of preferred embodiment of vacuum coating production line transmission mechanism provided by the invention.
As shown in Fig. 2, driving component 10 include a driving shaft 11, driving shaft 11 in by vacuum coating production line motor drive, driven group
Part 20 includes a driven shaft 21 and a drive 22, and driven shaft 21 drives drive 22 to rotate, and driving shaft 11 and driven shaft 21 are set
It puts in the both sides of magnetic coupling 30, magnetic coupling 30 connects driving shaft 11 and driven shaft 21.The driving shaft 11 and driven shaft
21 are made of magnetic material.
Driving component 10 further comprises 13 (not shown) of a belt wheel 12 and a belt, and belt wheel 12 is arranged on driving shaft
On 11, belt 13 connects the belt wheel 12 on motor and driving shaft 11 in vacuum coating production line, and motor rotation passes through belt 13
The belt wheel 12 on driving shaft 11 is passed motion to, belt wheel 12 drives 11 rotary motion of driving shaft.
Driving shaft 11 includes a driving shaft first end 111, a driving shaft the second end 112 and an active axis body 113, from
Driving shaft first end 111 extends to form active axis body 113, driving shaft the second end 112 and magnetic to driving shaft the second end 112
Mechanical couple 30 contacts.
Fig. 3 show sectional view A-A of the belt wheel 12 on driving shaft 11, and belt wheel 12 is arranged on driving shaft first end
111 pass through key connection.As shown in figure 3, driving component 10 further comprises at least one active axle key 14, active axle key 14 is set
Between belt wheel 12 and driving shaft first end 111.Driving shaft first end 111 is equipped at least one active shaft key groove 1111,
The width of active shaft key groove 1111 and the equivalent width of active axle key 14 further comprise 121 He of a belt wheel inner hole on belt wheel 12
At least one band wheel key way 122, the internal diameter of belt wheel inner hole 121 is consistent with the diameter of driving shaft first end 111, band wheel key way
122 remove material from belt wheel inner hole 121 forms, the equivalent width of the width with wheel key way 122 and active axle key 14.
When belt wheel 12 is arranged on driving shaft first end 111, active shaft key groove 1111 is connected with wheel key way 121,
Active axle key 14 is placed in active shaft key groove 1111 and between wheel key way 121, active shaft key groove 1111 and with wheel key way 121
Depth is not less than the thickness of active axle key 14.When belt wheel 12 is driven by belt 13, belt wheel 12 rotates, band wheel key way in belt wheel 12
Active axle key 14 in 121 rotates, while active axle key 14 has the initiative in shaft key groove 1111, when such active axle key 14 rotates
Driving shaft 11 is driven to rotate, therefore motor rotation passes motion to the belt wheel 12 on driving shaft 11, belt wheel 12 by belt 13
Drive 11 rotary motion of driving shaft.
Driving shaft 11 in by vacuum coating production line motor drive when rotating, driving shaft 11 and driven shaft 21 are in magnetic force coupling
The rotation of driving shaft 11 by bonding force, is passed to driven shaft 21 by the both sides of clutch 30.
Vacuum coating production line transmission mechanism further comprises a sealing flange 40, and sealing flange 40 is arranged on magnetic force coupling
In clutch 30, sealing flange 40 further comprises a seal washer 41 and a gasket groove 42, and seal washer 41 is placed on gasket groove
In 42.Magnetic coupling 30 is mounted in vacuum coating line by sealing flange 40, prevents magnetic coupling 30 from coming off.
Driven shaft 21 further comprises a driven shaft first end 211, a driven shaft the second end 212 and a driven axis body
213, driven shaft first end 211 extends to form driven axis body 213, driven shaft first end 211 to driven shaft the second end 212
It is connect with magnetic coupling 30.
Fig. 4 is the sectional view B-B that drive 22 is mounted on driven shaft 21.As shown in figure 4, drive 22 be arranged on it is driven
On axis 21, drive 22 and driven shaft 21 pass through key connection.
Driven subassembly 20 further comprises at least one driven shaft key 23, and driven shaft key 23 is arranged on driven shaft 21 and transmission
Between wheel 22.Driven shaft 21 further comprises at least one driven shaft keyway 214, and driven shaft keyway 214 is from driven shaft second end
Portion 212 removes material and is formed, the width of driven shaft keyway 214 and the equivalent width of driven shaft key 23.
Drive 22 further comprises a drive endoporus 221 and at least one transmission wheel key way 222, is driven wheel key way
222 remove material from drive endoporus 221 forms, the diameter of drive endoporus 221 and the diameter of driven shaft the second end 212
Unanimously, the equivalent width of the width and driven shaft key 23 of transmission wheel key way 222.
Driven subassembly 20 further comprises a drive fixed seat 24, and drive fixed seat 24 is arranged on driven shaft 21,
Drive 22 is bolted with drive fixed seat 24, prevents drive 22 from coming off from driven shaft 21.
When drive 22 is mounted on driven shaft the second end 212, driven shaft keyway 214 and drive on driven shaft 21
Keyway 222 connects, and driven shaft key 23 is placed between driven shaft keyway 214 and transmission wheel key way 222,214 He of driven shaft keyway
The depth for being driven wheel key way 214 is not less than the thickness of driven shaft key 23.When driven shaft 21 rotates, driven shaft key in driven shaft 21
Driven shaft key 23 rotates in slot 214, while driven shaft key 23 is in transmission wheel key way 214, and such driven shaft key 23, which drives, to be passed
Driving wheel 22 rotates, therefore driven shaft 21 drives drive 22 to rotate.
Electric motor starting in vacuum coating production line, motor are connect by belt 13 with 11 upper belt-wheel 12 of driving shaft, belt wheel
12 are driven by belt 13, and belt wheel 12 rotates, and are rotated in belt wheel 12 with the active axle key 14 in wheel key way 121, while active axle key
14 have the initiative in shaft key groove 1111, driving shaft 11 are driven to rotate when active axle key 14 rotates, the driving shaft 11 of motor driving at this time
Rotation；Driving shaft 11 and driven shaft 21 by bonding force, the rotation of driving shaft 11 are passed in the both sides of magnetic coupling 30
Driven shaft 21；When driven shaft 21 rotates due to the rotation of the transmission driving shaft 11 of magnetic coupling 30, driven shaft in driven shaft 21
Driven shaft key 23 rotates in keyway 214, while driven shaft key 23 is in transmission wheel key way 214, and such driven shaft key 23 drives
Drive 22 rotates, and driven shaft 21 drives drive 22 to rotate；Substrate in vacuum coating production line is rotated by drive 22
And it is moved in vacuum coating production line.
It is it is necessary to described herein finally：Above example is served only for making technical scheme of the present invention further detailed
Ground explanation, it is impossible to be interpreted as limiting the scope of the invention, those skilled in the art's the above according to the present invention
Some the nonessential modifications and adaptations made all belong to the scope of protection of the present invention.
Claims (10)
1. a kind of vacuum coating production line transmission mechanism, which is characterized in that including：One driving component, a driven subassembly and one
Magnetic coupling, the driving component and the driven subassembly are separately positioned on the both sides of the magnetic coupling, the active
Component is made the driving component that the driven subassembly be driven to move by electric drive by the magnetic coupling.
2. vacuum coating production line transmission mechanism according to claim 1, it is characterised in that：The driving component includes
One driving shaft, the driven subassembly include a driven shaft and a drive, and the driven shaft drives the drive rotation, described
Driving shaft and the driven shaft are arranged on the both sides of the magnetic coupling, and the magnetic coupling connects the driving shaft and institute
State driven shaft.
3. vacuum coating production line transmission mechanism according to claim 2, it is characterised in that：The driving component is into one
Step includes a belt wheel and a belt, and the belt wheel is arranged on the driving shaft, and the belt connects the vacuum coating production
The belt wheel on motor and the driving shaft in line, driving shaft motor driving in by the vacuum coating production line.
4. vacuum coating production line transmission mechanism according to claim 3, it is characterised in that：The driving shaft includes one
Driving shaft first end, a driving shaft the second end and an active axis body, it is described from driving shaft first end to the driving shaft
The second end extends to form active axis body, and the driving shaft the second end is connect with the magnetic coupling, the belt wheel setting
In the driving shaft first end.
5. vacuum coating production line transmission mechanism according to claim 4, it is characterised in that：The driving component is into one
Step includes at least one active axle key, and the active axle key is arranged between the belt wheel and the driving shaft first end.
6. the vacuum coating production line transmission mechanism according to claim 2 or 5, it is characterised in that：The driven shaft into
One step includes a driven shaft first end, a driven shaft the second end and a driven axis body, and the driven shaft first end is to institute
It states driven shaft the second end and extends to form driven axis body, the driven shaft first end is connect with the magnetic coupling, described
Drive is arranged on the driven shaft the second end.
7. vacuum coating production line transmission mechanism according to claim 6, it is characterised in that：The driven subassembly is into one
Step includes a drive fixed seat, and the drive fixed seat is arranged on the driven shaft, the drive and the transmission
Wheel fixed seat is bolted.
8. vacuum coating production line transmission mechanism according to claim 8, it is characterised in that：The vacuum coating production
Line transmission mechanism further comprises a sealing flange, and the sealing flange is arranged on the magnetic coupling.
9. vacuum coating production line transmission mechanism according to claim 5, it is characterised in that：The driving shaft first end
Portion is equipped at least one active shaft key groove, the equivalent width of the width of the active shaft key groove and the active axle key.
10. vacuum coating production line transmission mechanism according to claim 9, it is characterised in that：The belt wheel enterprising one
Step includes a belt wheel inner hole and at least one band wheel key way, and the internal diameter of the belt wheel inner hole is straight with the driving shaft first end
Diameter is consistent, and the band wheel key way removes material from the belt wheel inner hole and formed, the width with wheel key way and the active
The equivalent width of axle key.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711353380.7A CN108265264A (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line transmission mechanism |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711353380.7A CN108265264A (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line transmission mechanism |
| CN201310688579.0A CN104711517B (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line transmission mechanism |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310688579.0A Division CN104711517B (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line transmission mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108265264A true CN108265264A (en) | 2018-07-10 |
Family
ID=53411228
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711353380.7A Withdrawn CN108265264A (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line transmission mechanism |
| CN201310688579.0A Active CN104711517B (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line transmission mechanism |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310688579.0A Active CN104711517B (en) | 2013-12-16 | 2013-12-16 | A kind of vacuum coating production line transmission mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (2) | CN108265264A (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108265264A (en) * | 2013-12-16 | 2018-07-10 | 湘潭宏大真空技术股份有限公司 | A kind of vacuum coating production line transmission mechanism |
| CN106119772B (en) * | 2016-08-25 | 2018-07-13 | 江苏瑞尔光学有限公司 | A kind of eyeglass vacuum coating equipment screw spindle |
| CN112853306B (en) * | 2021-01-07 | 2023-04-14 | 广东开放大学（广东理工职业学院） | Magnetic coupling transmission mechanism for realizing workpiece rotation |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101056037A (en) * | 2007-05-31 | 2007-10-17 | 上海交通大学 | Multi-axis direct driving magnetic force transfer device |
| CN201490234U (en) * | 2009-08-04 | 2010-05-26 | 东莞宏威数码机械有限公司 | Magnetic transmission mechanism |
| CN202188086U (en) * | 2011-08-08 | 2012-04-11 | 谭定忠 | Disc type magnetic-coupling sealing driver |
| CN103277493A (en) * | 2013-06-21 | 2013-09-04 | 苏州新区枫桥净化设备厂 | Gear transmission device |
| CN203708076U (en) * | 2013-12-16 | 2014-07-09 | 湘潭宏大真空技术股份有限公司 | Magnetic transmission mechanism |
| CN104711517B (en) * | 2013-12-16 | 2018-02-06 | 湘潭宏大真空技术股份有限公司 | A kind of vacuum coating production line transmission mechanism |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002293427A (en) * | 2001-03-29 | 2002-10-09 | Sumitomo Electric Ind Ltd | Rotary carriage |
| US8133143B2 (en) * | 2008-06-16 | 2012-03-13 | Fairfield Manufacturing Company, Inc. | Gear reducer electric motor assembly with internal brake |
| CN201398162Y (en) * | 2009-02-27 | 2010-02-03 | 大连齐维科技发展有限公司 | Magnetic combination linear and rotary driver |
-
2013
- 2013-12-16 CN CN201711353380.7A patent/CN108265264A/en not_active Withdrawn
- 2013-12-16 CN CN201310688579.0A patent/CN104711517B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101056037A (en) * | 2007-05-31 | 2007-10-17 | 上海交通大学 | Multi-axis direct driving magnetic force transfer device |
| CN201490234U (en) * | 2009-08-04 | 2010-05-26 | 东莞宏威数码机械有限公司 | Magnetic transmission mechanism |
| CN202188086U (en) * | 2011-08-08 | 2012-04-11 | 谭定忠 | Disc type magnetic-coupling sealing driver |
| CN103277493A (en) * | 2013-06-21 | 2013-09-04 | 苏州新区枫桥净化设备厂 | Gear transmission device |
| CN203708076U (en) * | 2013-12-16 | 2014-07-09 | 湘潭宏大真空技术股份有限公司 | Magnetic transmission mechanism |
| CN104711517B (en) * | 2013-12-16 | 2018-02-06 | 湘潭宏大真空技术股份有限公司 | A kind of vacuum coating production line transmission mechanism |
Also Published As
| Publication number | Publication date |
|---|---|
| CN104711517B (en) | 2018-02-06 |
| CN104711517A (en) | 2015-06-17 |
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Application publication date: 20180710 |