CN216998565U - Magnetic force control mechanism for vacuum cavity - Google Patents
Magnetic force control mechanism for vacuum cavity Download PDFInfo
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- CN216998565U CN216998565U CN202122367891.2U CN202122367891U CN216998565U CN 216998565 U CN216998565 U CN 216998565U CN 202122367891 U CN202122367891 U CN 202122367891U CN 216998565 U CN216998565 U CN 216998565U
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Abstract
The utility model discloses a magnetic force control mechanism for a vacuum cavity, which comprises a magnetic force driven mechanism (1), a sealing flange (2), a cavity wall (3), a sealing ring (4), a magnetic force driving mechanism (5) and two groups of magnets (6), wherein the magnetic force driving mechanism (5) penetrates into the vacuum cavity from the outside of the cavity wall (3), the head part of the magnetic force driving mechanism (5) is sleeved with the sealing flange (2), the sealing flange (2) and the sealing ring (4) seal an opening on the cavity wall (3), the head part of the magnetic force driving mechanism (5) is provided with a fixed magnet, the magnetic force driven mechanism (1) is fixed with a matched magnet, and the two mechanisms realize specific movement through interaction of magnetic force lines on the two sides of the sealing flange (2) so as to realize vacuum sealing and movement matching transmission. Through the mode, the utility model has the advantages of simple structure, convenient assembly and disassembly and low cost, and converts the external rotation or translation motion of the cavity into the rotation, deflection or jacking motion in the cavity and the like.
Description
Technical Field
The utility model relates to the technical field of mechanism design, in particular to a magnetic control mechanism for a vacuum cavity.
Background
Along with the development of society and the progress of science and technology, the updating speed of electronic products is faster and faster, products with single function can not meet the requirements of people, in the existing society, electronic products such as smart phones, tablet computers and the like gradually develop towards lightness, thinness, intellectualization and high performance, tasks such as lightness, thinness, light transmittance improvement, user experience improvement and the like are mainly played by touch panels and display panels, key film layers of the semiconductor devices are prepared by adopting a vacuum coating mode, the vacuum coating can be divided into physical vapor deposition, chemical vapor deposition and the like, the coating processes are required to be finished in an extremely low vacuum environment, the vacuum coating equipment is required to finish the process, the vacuum coating equipment firstly needs a vacuum cavity capable of forming a vacuum environment, and the condition that the vacuum cavity achieves the vacuum environment is that the vacuum cavity is sealed into a sealed space by the vacuum cavity, the atmosphere is isolated outside the cavity, and the gas in the cavity is pumped out of the cavity by a vacuum pump system, so that the space in the vacuum cavity is required to be small and the interior is not too complex; however, the vacuum cavity generally needs to have various functional requirements, such as substrate transmission, and the like, so that mechanisms such as the complex servo motor and the like are all placed outside the cavity, and then the motion needs to be transmitted into the cavity, not only can the external power be transmitted into the cavity, but also the tightness of the cavity can be guaranteed, and generally, the function is realized by magnetic fluid, but the cost of the magnetic fluid is extremely high, and the simple and extremely low-frequency mechanism action is realized by the magnetic fluid, so that the realization is very cost-effective; there is thus a need for a more easily removable, less costly solution.
SUMMERY OF THE UTILITY MODEL
The utility model aims to solve the technical problems and provide a magnetic control mechanism which is simple in structure, convenient to install and disassemble and low in cost.
In order to solve the technical problems, the utility model adopts a technical scheme that: the utility model provides a magnetic force control mechanism for vacuum cavity, this kind of magnetic force control mechanism for vacuum cavity include magnetic force driven mechanism, sealing flange, chamber wall, sealing washer, magnetic force driving mechanism and two sets of magnet, magnetic force driving mechanism wears the vacuum chamber from the chamber wall extraluminal, and magnetic force driving mechanism head cover has sealing flange, sealing flange and sealing washer are sealed with trompil on the chamber wall, magnetic force driving mechanism's head has fixed magnet, and magnetic force driven mechanism is fixed with cooperation magnet, and two mechanisms realize specific motion through magnetic line of force interact on sealing flange both sides, realize vacuum seal and motion cooperation transmission.
Preferably, the two sets of magnets are cooperating magnets, either magnets of opposite polarity mounted to attract each other or magnets of like polarity mounted to repel each other.
Preferably, the sealing flange is designed to be in a shape corresponding to the head of the magnetic driving mechanism, the magnetic driving mechanism is in a shape of a cylinder or a cuboid and the like, the corresponding sealing flange is a corresponding hat-shaped groove, and the head of the magnetic driving mechanism is accommodated in the groove.
Preferably, the sealing flange is made of a non-magnetic material.
Preferably, when the magnetic driving mechanism rotates or translates, the magnetic driven mechanism correspondingly generates rotation, deflection or jacking and other movements.
Compared with the prior art, the utility model has the beneficial effects that:
the prior art generally adopts a magnetic fluid packaging technology to realize vacuum packaging and transmission, and the utility model has the advantages of simpler structure, low cost and convenient mechanism installation and disassembly.
Drawings
Fig. 1 is a schematic structural diagram of a magnetic control mechanism for a vacuum chamber according to the present invention for realizing transmission of rotational motion.
FIG. 2 is a schematic structural diagram of a magnetic control mechanism for a vacuum chamber according to the present invention for realizing translational motion transmission.
As shown in the figure: 1. magnetic driven mechanism 2, sealing flange 3, cavity wall 4, sealing ring 5, magnetic driving mechanism 6 and two groups of magnets
Detailed Description
The following detailed description of the preferred embodiments of the present invention, taken in conjunction with the accompanying drawings, will make the advantages and features of the utility model easier to understand for those skilled in the art, and will thus make the scope of the utility model more clearly and clearly defined.
Referring to fig. 1 and 2, an embodiment of the present invention includes:
the utility model provides a magnetic force control mechanism for vacuum chamber body, this kind of magnetic force control mechanism for vacuum chamber body includes magnetic force follower 1, sealing flange 2, chamber wall 3, sealing washer 4, magnetic force driving mechanism 5 and two sets of magnet 6, in the vacuum chamber is worn to magnetic force driving mechanism 5 outside the chamber wall 3, 5 head covers of magnetic force driving mechanism have sealing flange 2, sealing flange 2 and sealing washer 4 are sealed with the last trompil of chamber wall 3.
The first embodiment is as follows:
with reference to fig. 1, magnets with opposite polarities attracting each other are mounted at the head of the magnetic driving mechanism 5 and the end of the magnetic driven mechanism 1.
The magnetic driving mechanism 5 is cylindrical, the corresponding sealing flange 2 is in a hat shape, and the head of the magnetic driving mechanism 5 is wrapped by the hat-shaped groove.
The magnetic driven mechanism 1 is provided with a cylindrical hole, the cylindrical hole is wrapped by the sealing flange 2, and magnets mounted on the magnetic driven mechanism 1 around the cylindrical hole are annular magnets.
When the magnetic driving mechanism 5 rotates, the magnetic driven mechanism 1 rotates under the influence of the magnetic force lines, and the rotating motion outside the cavity is transmitted into the vacuum cavity.
The second concrete embodiment:
with reference to fig. 2, magnets with the same polarity repelling each other are mounted at the head of the magnetic driving mechanism 5 and the end of the magnetic driven mechanism 1.
The magnetic driving mechanism 5 is cylindrical or cuboid, the corresponding sealing flange 2 is a corresponding hat-shaped groove, and the head of the magnetic driving mechanism 5 is accommodated in the groove.
The magnetic driven mechanism 1 adopts two connecting rods which are mutually rotatably connected, the upper connecting rod is fixed on the cavity wall 3, and the part of the lower connecting rod close to the magnetic driving mechanism is provided with a magnet which is a bar magnet.
When the magnetic driving mechanism 5 makes translational motion, the magnetic driven mechanism 1 will make translational motion under the influence of the magnetic force lines, and then transmit the translational motion outside the cavity to the cavity.
The magnetic control mechanism for the vacuum cavity is simple in structure, convenient to install and detach and low in cost, can convert external rotation or translation motion of the cavity into motion of rotation, deflection or jacking and the like in the cavity, and is stable in operation.
The above description is only an embodiment of the present invention, and is not intended to limit the scope of the present invention, and all equivalent structures or equivalent processes performed by the present invention or directly or indirectly applied to other related technical fields are included in the scope of the present invention.
Claims (4)
1. A magnetic force control mechanism for a vacuum chamber, comprising: the magnetic control mechanism for the vacuum cavity comprises a magnetic driven mechanism (1), a sealing flange (2), a cavity wall (3), a sealing ring (4), a magnetic driving mechanism (5) and two groups of magnets (6), wherein the magnetic driving mechanism (5) penetrates into the vacuum cavity from the outside of the cavity wall (3), the head of the magnetic driving mechanism (5) is sleeved with the sealing flange (2), the sealing flange (2) and the sealing ring (4) seal an upper opening of the cavity wall (3), the head of the magnetic driving mechanism (5) is provided with a fixed magnet, the magnetic driven mechanism (1) is fixed with a matched magnet, the two mechanisms move on two sides of the sealing flange (2) through interaction of magnetic lines of force, so that vacuum sealing and motion matching transmission are realized, and when the magnetic driving mechanism (5) rotates or moves in a translation mode, the magnetic driven mechanism (1) correspondingly generates rotation, Deflection or jacking, etc.
2. The magnetic control mechanism for a vacuum chamber of claim 1, wherein: the two groups of magnets (6) are matched magnets and are arranged into magnets with different polarities which attract each other or magnets with the same polarity which repel each other.
3. The magnetic control mechanism for a vacuum chamber of claim 1, wherein: the sealing flange (2) is designed to be in a shape corresponding to the head of the magnetic driving mechanism (5), the magnetic driving mechanism (5) is in a shape of a cylinder or a cuboid and the like, the corresponding sealing flange (2) is a corresponding cap-shaped groove, and the head of the magnetic driving mechanism (5) is accommodated in the groove.
4. The magnetic control mechanism for a vacuum chamber of claim 1, wherein: the sealing flange (2) is made of a non-magnetic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122367891.2U CN216998565U (en) | 2021-09-28 | 2021-09-28 | Magnetic force control mechanism for vacuum cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122367891.2U CN216998565U (en) | 2021-09-28 | 2021-09-28 | Magnetic force control mechanism for vacuum cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216998565U true CN216998565U (en) | 2022-07-19 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122367891.2U Active CN216998565U (en) | 2021-09-28 | 2021-09-28 | Magnetic force control mechanism for vacuum cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216998565U (en) |
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2021
- 2021-09-28 CN CN202122367891.2U patent/CN216998565U/en active Active
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