CN108213706A - Aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique - Google Patents
Aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique Download PDFInfo
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- CN108213706A CN108213706A CN201711493114.4A CN201711493114A CN108213706A CN 108213706 A CN108213706 A CN 108213706A CN 201711493114 A CN201711493114 A CN 201711493114A CN 108213706 A CN108213706 A CN 108213706A
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- Prior art keywords
- welding
- wire
- laser
- aluminium alloy
- reaction chamber
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/20—Bonding
- B23K26/21—Bonding by welding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
- B23K37/04—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work
- B23K37/047—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Engineering (AREA)
- Plasma & Fusion (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to IC equipment manufacture Special Welding Techniques, it is a kind of aluminium alloy etching vacuum reaction chamber magnet body part laser filling wire welding technique, is the welding procedure for being welded 3mm thickness magnet seal cover boards and 300mm main body vacuum cavities using advanced wire filling laser welding connection technology.It carries out chemical cleaning, welding process, assembling process and after welding treatment before weldering to carry out in ten thousand grades of clean rooms, wherein welding process technological parameter is：3.5~4KW of laser power；Speed of welding：4.2~5.5m/min；Fill silk speed：5.5~6.5m/min；Protective gas：Ar, 99.99%；Group is to gap：0.4~0.6mm, defocusing amount 7mm；0.8~1.5mm of chevilled silk spacing；Gas flow：10~12L/min.When the present invention can solve edge magnet part welding in aluminium alloy etching vacuum reaction chamber body, magnet is to electric arc, the influence of electronic beam current, good appearance, and part deformation is small.
Description
Technical field
The present invention relates to aluminium alloys to etch vacuum reaction chamber magnet body part laser filling wire welding technique, produces semiconductor device
The production equipment special of part, IC chip and flat-panel monitor, manufacturing industry etching vacuum reaction chamber magnet body part are extraordinary
Welding technique, IC equip the technology of 300mm liner aluminum alloy part laser filling wire weldings.
Background technology
300m liner reaction chambers are kernel components in wafer etching production equipment, because element precision requires height, it is desirable that weldering
It connects very accurate, this welding requirements first choice electron beam welding can be met at present, but because studding with magnet in part, magnetic field is to electronics
Beam can have an impact, this so that the such part of electron beam welding is very difficult, therefore with the laser welding of similary high-energy density
It is welded into instead of electron beam as primary research and development subject both at home and abroad, breaks through laser filling wire welding and replace electron beam welding technology, it not only can be with
Overseas market is opened, the development of domestic IC equipment industry can also be promoted.
300mm liners aluminium alloy etches vacuum reaction cavity welding difficulty；
1) laser filling wire welding is affected by many factors, the matching of laser power and speed of welding, and welding hastens and fills silk
The matching of speed, group to micro variations such as the size in gap, defocusing amount, chevilled silk spacing, all to weld blowhole and weld appearance into
Type has a significant impact, and the mismatch of welding parameter is very easy to the generation for leading to weld defect.Such as stomata, face of weld bumps
Injustice, reinforcement is much or lack of fill etc. for welding.
2) laser filling wire welding Deformation control, welding requirements group should ensure that two side clearances are consistent, prevent again to gap
Side is welded, and opposite side seam deformation is caused to shrink, and postwelding does not allow to process.
3) laser filling wire welding aluminium alloy belongs to Special Welding Technique, domestic at present still immature, can experience for reference it is few；
4) welding process is full-automatic, and a welding fabrication, process can not interrupt, can not observe welding process whether generate it is scarce
It falls into.
5) parts cleanliness requirement is high, and any pollution may all lead to the generation of weld blowhole and weld defect, it is desirable that
Necessary chemical cleaning, assembling process must be completed in clean room before weldering, and all contact parts must wear clean rubber gloves, not permit
Perhaps using cotton string gloves etc., and welding is completed in the short time, preventing washes rear part recontamination.
Invention content
It is an object of the present invention to provide a kind of aluminium alloys to etch vacuum reaction chamber magnet body part laser filling wire welding technique.
The technical solution adopted by the present invention is：
It is an advantage of the invention that：
1. the Laser Welding of high-energy density is unaffected by the magnetic field, welding deformation is small, and welding performance is good, laser filling wire welding
Similar product is welded instead of electron beam welding technology.
2. welding deformation is small, welding quality stable, welding efficiency is high.
3. the present invention can open block of the IC equipment parts to international technology, the laser welding of similary high-energy density
Cost is reduced instead of electron beam weldering, solves the problems, such as that electron beam weldering is affected by magnetic fields, breaks through laser filling wire welding and replace electron beam
Welding technology can promote the development of domestic IC equipment industry.
Description of the drawings
Fig. 1 is laser filling wire welding schematic diagram of the present invention.
Fig. 2 is part schematic diagram of the present invention.
Fig. 3 is main body and strap joint schematic diagram.
Fig. 4 is weld path schematic diagrams.
Specific embodiment
The present invention is described in more detail by 1-4 below in conjunction with the accompanying drawings.
A kind of aluminium alloy etches vacuum reaction chamber magnet body part special welding professional technique, using advanced wire filling laser welding
Connection technology, the welding procedure that 3mm thickness magnet seal cover boards and 300mm main body vacuum cavities are welded, chamber body outer wall
One week embedded magnet, magnet 1.5~3mm aluminium alloy cover plate for sealing；The used welding wire trade mark：R4047(AWS A5.10/
A5.8 F23)；Gage of wire：φ1.2mm；Power supply：IPG 6KW lasers are marked including being cleaned before welding according to Applied Materials
Quasi- 0250-20000, carries out chemical cleaning, welding process and assembling process and after welding treatment carries out in ten thousand grades of clean rooms,
Middle welding process technological parameter is：
3.5~4KW of laser power；Speed of welding：4.2~5.5m/min；Fill silk speed：5.5~6.5m/min；Protect gas
Body：Ar, 99.999%；Group is to gap：0.4~0.6mm, defocusing amount -7mm；0.8~1.5mm of chevilled silk spacing；Gas flow：10
~12L/min, 9 ° of laser head tilt, 45 ± 10 ° of wire feed angle, protection gas and workpiece 12 ± 1mm of distance, silk do extension elongation and are
6-7mm。
Its welding system composition is as follows：1. type of laser：6KW IPG optical fiber lasers；2. robot：KUKA KR3HA③
Beam delivery system：Optical fiber core diameter：200μm；4. focusing system：Head plumb joints：(302FF focuses on focal length/150CF to HIGHYAG
Collimate focal length；5. wire feed system,:Good fortune Nice automatic wire feeder KD7000；6. weld seam monitoring system：CCD；7. positioner：Germany
KUKA DKP400 positioners.
Overall process is automatic welding, uses library card robot teaching and programming, the auxiliary welding displacement of library card positioner, Fu Ni
This welding wire system automatic feeding.
It is as follows：
(1) welded cover plate simulating piece welds：
Boss is positioned at welded cover plate design two, you can as tooling, to carry out axially position to part, and can be with
Effectively control welding axial deformation, makes both sides even weld
(2) use of part special tooling：
Welding tooling is divided into inner support and external pressure, and inner support ensures that part is concentric, and part is driven to be rotated with positioner, external pressure
Tooling ensures in welding process that cover board is only fitted on part parent, and controls welding deformation
(3) arc is received in the starting the arc：
Laser filling wire welding, light extraction is automatic simultaneously to fill silk, and silk filling terminates, and 100 μ s of light are received in delay, ensures ending joint,
Without excessive overlap joint, no arc crater, protection gas delay 5s is closed
(4) gas is protected；
Welding protection gas, using high purity argon (Ar, 99.99%), semiconductor parts product forbids contact containing copper
Product, protection gas nozzle need to select stainless steel, and gas nozzle is in addition protected, apart from being 12 ± 2mm, should to meet and weld apart from workpiece
Journey protection welding pool is not oxidized, and welding is avoided to interfere again.
3mm thickness aluminum alloy laser filling wire weldings, weld seam one-pass molding, weld seam do not allow the welderings such as undercut, stomata, crackle occur
Defect is connect, reinforcement is less than 0.75mm, and appearance uniform in shaping is continuous, metal luster.
Technological parameter is：The used welding wire trade mark：R4047(AWS A5.10/A5.8 F23)；Gage of wire：φ
1.2mm；Power supply：IPG 6KW lasers including cleaning standard 0250-20000 according to Applied Materials before welding, carry out chemistry
Cleaning, welding process and assembling process is carried out in ten thousand grades of clean rooms and after welding treatment, wherein welding process technological parameter
For：
3.5~4KW of laser power；Speed of welding：4.2~5.5m/min；Fill silk speed：5.5~6.5m/min；Protect gas
Body：Ar, 99.99%；Group is to gap：0.4~0.6mm, defocusing amount -7mm；0.8~1.5mm of chevilled silk spacing；Gas flow：10~
12L/min。
Welding condition:The used welding wire trade mark：R4047(AWS A5.10/A5.8 F23)；Gage of wire：φ
1.2mm；Power supply：IPG 6KW lasers including cleaning standard 0250-20000 according to Applied Materials before welding, carry out chemistry
Cleaning, welding process and assembling process is carried out in ten thousand grades of clean rooms and after welding treatment, wherein welding process technological parameter
For：
3.5~4KW of laser power；Speed of welding：4.2~5.5m/min；Fill silk speed：5.5~6.5m/min；Protect gas
Body：Ar, 99.99%；Group is to gap：0.4~0.6mm, defocusing amount -7mm；0.8~1.5mm of chevilled silk spacing；Gas flow：10~
12L/min, 9 ° of laser head tilt, 45 ± 10 ° of wire feed angle, protection gas and workpiece 12 ± 1mm of distance, silk do extension elongation as 6-
7mm。
It examines:1) 100% visual detection：Execution standard AWS C7.4Annex D Class A.(2) exemplar macrocorrosion
It examines.(3) helium leaks hunting：Leak rate requires 1 × 10E-9SCC/SEC
Laser filling wire welding (LBW) is using R4047, φ 2.0mm welding wires, test specimen plate thickness 3mm, gap 0.5mm, docking.Examination
Plate postwelding is stretched by AWS B2.1 M2014 standard regulations welding point and bend test method prepares sample, measures performance, really
It is correct to recognize test data sheet.Welding material procedure qualification mechanical test the results are shown in Table 1, table 2.
1 6061 Welded procedure qualification mechanical test result (tension test) of table
2 6061 Welded procedure qualification mechanical test result (bend test) of table
Using：Using said welding method, laser silk filling automatic welding is adopted, solution can not use electron beam welding, and laser is pre-
The problems such as putting filler rod welding, postwelding can be once welded successfully, postwelding appearance is good, welding defect, success almost without deformation
Pass through postwelding visual detection and leak detection.
Claims (5)
1. a kind of aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique, it is characterised in that：Using advanced
Wire filling laser welding connection technology welds 3mm thickness magnet seal cover boards and 300mm main body vacuum cavities, chamber body outer wall
One week embedded magnet, magnet 1.5~3mm aluminium alloy cover plate for sealing；The used welding wire trade mark：R4047；Gage of wire：φ
1.2mm；Power supply：IPG6KW lasers carry out chemical cleaning, welding process and assembling process and after welding treatment at ten thousand grades before welding
It is carried out in clean room；
Wherein welding process technological parameter is：
3.5~4KW of laser power；Speed of welding：4.2~5.5m/min；Fill silk speed：5.5~6.5m/min；Protective gas：
Argon Ar, 99.999%；Group is to gap：0.4~0.6mm, defocusing amount -7mm；0.8~1.5mm of chevilled silk spacing；Gas flow：10
~12L/min, 9 ° of laser head tilt, 45 ± 10 ° of wire feed angle, protection gas and workpiece 12 ± 1mm of distance, silk do extension elongation and are
6-7mm。
2. a kind of aluminium alloy etching vacuum reaction chamber magnet body part laser filling wire welding technique described in accordance with the claim 1,
It is characterized in that：
Welding system composition is as follows：1. type of laser：6KW IPG optical fiber lasers；2. robot：KUKA KR3HA；3. light beam
Transmission system：Optical fiber core diameter：200μm；4. focusing system：Head plumb joints：HIGHYAG focuses on focal length/150CF collimation focal lengths；
5. wire feed system:Good fortune Nice automatic wire feeder KD7000；6. weld seam monitoring system：CCD；7. positioner：German KUKA DKP400
Positioner.
3. a kind of aluminium alloy etching vacuum reaction chamber magnet body part laser filling wire welding technique described in accordance with the claim 1,
It is characterized in that：Overall process is automatic welding, and using library card robot teaching and programming, card positioner auxiliary welding in library conjugates,
Good fortune Nice welding wire system automatic feeding.
4. a kind of aluminium alloy etching vacuum reaction chamber magnet body part laser filling wire welding technique described in accordance with the claim 1,
It is characterized in that, it is as follows：
(1) welded cover plate simulating piece welds：
Boss is positioned at welded cover plate design two, you can as tooling, axially position is carried out, and can be effective to part
Control welding axial deformation, makes both sides even weld；
(2) use of part special tooling：
Welding tooling is divided into inner support and external pressure, and inner support ensures that part is concentric, and part is driven to be rotated with positioner, external pressure tooling
Ensure in welding process, cover board is only fitted on part parent, and controls welding deformation；
(3) arc is received in the starting the arc：
Laser filling wire welding, light extraction is automatic simultaneously to fill silk, and silk filling terminates, and 100 μ s of light are received in delay, ensures ending joint, no mistake
More overlap joints, no arc crater, protection gas delay 5s are closed；
(4) gas is protected：
Welding protection gas, using high purity argon (Ar, 99.99%), semiconductor parts product forbids contact to contain copper product,
Protection gas nozzle need to select stainless steel, in addition protect gas nozzle apart from workpiece apart from being 12 ± 2mm, should meet welding process guarantor
It is not oxidized to protect welding pool, welding is avoided to interfere again.
5. a kind of aluminium alloy etching vacuum reaction chamber magnet body part laser filling wire welding technique described according to right 1, special
Sign is：3mm thickness aluminum alloy laser filling wire weldings, weld seam one-pass molding, weld seam do not allow undercut occur, stomata, crackle welding
Defect, reinforcement are less than 0.75mm, and appearance uniform in shaping is continuous, metal luster.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711493114.4A CN108213706A (en) | 2017-12-30 | 2017-12-30 | Aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711493114.4A CN108213706A (en) | 2017-12-30 | 2017-12-30 | Aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique |
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| CN108213706A true CN108213706A (en) | 2018-06-29 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201711493114.4A Pending CN108213706A (en) | 2017-12-30 | 2017-12-30 | Aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109612639A (en) * | 2018-10-30 | 2019-04-12 | 沈阳富创精密设备有限公司 | A kind of dedicated helium measurement fixture of laser-welded product |
| CN112453710A (en) * | 2020-11-26 | 2021-03-09 | 四川航天长征装备制造有限公司 | Welding method for automatically cleaning weld joints before and after welding |
| CN114378438A (en) * | 2022-03-03 | 2022-04-22 | 华霆（合肥）动力技术有限公司 | Laser welding method |
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| CN201677155U (en) * | 2010-03-10 | 2010-12-22 | 冰人制冰系统设备(重庆)有限公司 | Supporting frame used for welding barrel |
| JP2011251294A (en) * | 2010-05-31 | 2011-12-15 | Nippon Steel Corp | Aluminum alloy tailored blank for warm press forming, and method for manufacturing the same |
| JP2012045582A (en) * | 2010-08-27 | 2012-03-08 | Kobe Steel Ltd | Method for joining dissimilar materials |
| CN105097409A (en) * | 2015-09-06 | 2015-11-25 | 靖江先锋半导体科技有限公司 | Straight cold cathode bush with magnet ring for plasma reaction chamber |
| CN105108442A (en) * | 2015-10-16 | 2015-12-02 | 北京动力机械研究所 | Welding jig used for cylindrical structure |
| CN106670649A (en) * | 2016-12-21 | 2017-05-17 | 南京先进激光技术研究院 | Wire filling laser welding method |
-
2017
- 2017-12-30 CN CN201711493114.4A patent/CN108213706A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201677155U (en) * | 2010-03-10 | 2010-12-22 | 冰人制冰系统设备(重庆)有限公司 | Supporting frame used for welding barrel |
| JP2011251294A (en) * | 2010-05-31 | 2011-12-15 | Nippon Steel Corp | Aluminum alloy tailored blank for warm press forming, and method for manufacturing the same |
| JP2012045582A (en) * | 2010-08-27 | 2012-03-08 | Kobe Steel Ltd | Method for joining dissimilar materials |
| CN105097409A (en) * | 2015-09-06 | 2015-11-25 | 靖江先锋半导体科技有限公司 | Straight cold cathode bush with magnet ring for plasma reaction chamber |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109612639A (en) * | 2018-10-30 | 2019-04-12 | 沈阳富创精密设备有限公司 | A kind of dedicated helium measurement fixture of laser-welded product |
| CN112453710A (en) * | 2020-11-26 | 2021-03-09 | 四川航天长征装备制造有限公司 | Welding method for automatically cleaning weld joints before and after welding |
| CN114378438A (en) * | 2022-03-03 | 2022-04-22 | 华霆（合肥）动力技术有限公司 | Laser welding method |
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