CN109612639A - A kind of dedicated helium measurement fixture of laser-welded product - Google Patents
A kind of dedicated helium measurement fixture of laser-welded product Download PDFInfo
- Publication number
- CN109612639A CN109612639A CN201811280018.6A CN201811280018A CN109612639A CN 109612639 A CN109612639 A CN 109612639A CN 201811280018 A CN201811280018 A CN 201811280018A CN 109612639 A CN109612639 A CN 109612639A
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- CN
- China
- Prior art keywords
- helium
- cover board
- cavity
- detecting instrument
- surveys
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention is a kind of dedicated helium measurement fixture of laser-welded product, it is mainly used for the air-tight test of welding product, include twice cavity weld seam, detection process is as follows: 1) surveys detection for the helium of the formed inner cavity of top welding seam and is carried out by two cover board one and cover boards two, specific as follows: (1) cover board one being passed through two through-holes of screw connection to welding product upper surface during helium is surveyed；(2) cover board two is connected to helium survey leakage detecting instrument to product upper surface through-hole, and by 3 hole Ф by screw connection, is evacuated to 1 × 10‑9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data variation.2) is mainly detected by cover board three for intermediate weld, and cover board three surveys leakage detecting instrument by M8 and 3 hole connection surface preformed hole of Ф and helium, is evacuated to 1 × 10‑9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data variation.The complexity laser-welded product cavity hermeticity experiment is solved the problems, such as by design specialized jig.
Description
Technical field
The invention belongs to the detection jig of semiconductor key components and parts Emax liner critical welding seams, the results of helium detection
And helium surveys process tightness and has a great impact to product, this detection technique is also the more complicated and important original of this product
Cause.The present invention illustrates that a kind of helium of laser-welded product surveys detecting tool.
Background technique
With the fast development of semiconductor field, key components and parts require increasingly laser welding technology and cavity leak detection
Height, helium surveys method and helium surveys tool fixture and has a significant impact to result.Therefore, special jig is designed for critical product, guaranteed
Key components and parts laser welding rear interior cavity hermeticity experiment can satisfy needs.
Summary of the invention
In view of the above problems, in order to reach inner cavity hermeticity experiment requirement, by the design of special fixture, in conjunction with
Different stations designs different toolings, to guarantee that helium surveys the accuracy of result.The object of the present invention is to provide a kind of laser
The dedicated helium measurement fixture of welding product.
The technical solution adopted by the present invention is that:
A kind of dedicated helium measurement fixture of laser-welded product, is mainly used for the air-tight test of welding product, includes twice
Cavity weld seam, detection process are as follows:
1) surveys detection for the helium of the formed inner cavity of top welding seam and is carried out by two cover board one and cover boards two, specifically
It is as follows:
(3) cover board one is passed through into two through-holes of screw connection to welding product upper surface during helium is surveyed；
(4) cover board two is connected to helium survey leak detector to product upper surface through-hole, and by 3 hole Ф by screw connection
Device is evacuated to 1 × 10-9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data variation.
2) is mainly detected by cover board three for intermediate weld, and cover board three passes through 3 hole connection surface preformed hole of M8 and Ф
Leakage detecting instrument is surveyed with helium, is evacuated to 1 × 10-9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data
Variation.
The invention has the benefit that
1. the present invention is designed and produced by special fixture, guarantee that helium surveys the accuracy of result.
2. the present invention improves processing efficiency using the production of special fixture, prepare to realize to stably produce.
Detailed description of the invention
Fig. 1 is helium measurement fixture perspective view.
Fig. 2 is helium measurement fixture cross-sectional view.
Fig. 3 is one schematic diagram of cover board.
Fig. 4 is two schematic diagram of cover board.
Fig. 5 is three schematic diagram of cover board.
Specific embodiment
The present invention is described in more detail by 1-5 with reference to the accompanying drawings of the specification.
A kind of dedicated helium measurement fixture of laser-welded product, is mainly used for the air-tight test of welding product, includes twice
Cavity weld seam, detection process are as follows:
1) surveys detection for the helium of the formed inner cavity of top welding seam and is carried out by two cover board one and cover boards two, specifically
It is as follows:
(5) cover board one is connected to the two of welding product upper surface by screw (9/16-18UNF-2B) during helium is surveyed
A through-hole；
(6) cover board two is connected to helium survey leak detector to product upper surface through-hole, and by 3 hole Ф by screw connection
Device is evacuated to 1 × 10-9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data variation.
2) is mainly detected by cover board three for intermediate weld, and cover board three passes through 3 hole connection surface preformed hole of M8 and Ф
Leakage detecting instrument is surveyed with helium, is evacuated to 1 × 10-9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data
Variation.
Claims (1)
1. a kind of dedicated helium measurement fixture of laser-welded product, it is characterised in that: it is mainly used for the air-tight test of welding product,
Comprising twice cavity weld seam, detection process is as follows:
1) surveys detection for the helium of the formed inner cavity of top welding seam and is carried out by two cover board one and cover boards two, specific as follows:
(1) cover board one is passed through into two through-holes of screw connection to welding product upper surface during helium is surveyed；
(2) cover board two is connected to helium survey leakage detecting instrument to product upper surface through-hole, and by 3 hole Ф by screw connection, taken out
Vacuum is to 1 × 10-9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data variation.
2) is mainly detected by cover board three for intermediate weld, and cover board three passes through M8 and 3 hole connection surface preformed hole of Ф and helium
Leakage detecting instrument is surveyed, is evacuated to 1 × 10-9SCC/SEC sprays helium in cavity commissure, checks that helium surveys leakage detecting instrument data variation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811280018.6A CN109612639A (en) | 2018-10-30 | 2018-10-30 | A kind of dedicated helium measurement fixture of laser-welded product |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811280018.6A CN109612639A (en) | 2018-10-30 | 2018-10-30 | A kind of dedicated helium measurement fixture of laser-welded product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109612639A true CN109612639A (en) | 2019-04-12 |
Family
ID=66001849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811280018.6A Pending CN109612639A (en) | 2018-10-30 | 2018-10-30 | A kind of dedicated helium measurement fixture of laser-welded product |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109612639A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005140504A (en) * | 2003-11-04 | 2005-06-02 | Ulvac Japan Ltd | Helium gas leak detector and helium gas leak detection method |
| CN202329960U (en) * | 2011-11-14 | 2012-07-11 | 中国电子科技集团公司第十八研究所 | Leak detecting device for lithium-ion batteries |
| CN104390747A (en) * | 2014-11-27 | 2015-03-04 | 中国船舶重工集团公司第七二四研究所 | Connector welding seal detection method |
| CN206399613U (en) * | 2017-01-21 | 2017-08-11 | 富曜精密组件（昆山）有限公司 | Cavity work-piece helium measurement fixture |
| CN206504833U (en) * | 2016-12-30 | 2017-09-19 | 山东衡远新能源科技有限公司 | A kind of seal welding leak-checking apparatus of pressure limiting cover plate |
| CN108213706A (en) * | 2017-12-30 | 2018-06-29 | 沈阳富创精密设备有限公司 | Aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique |
-
2018
- 2018-10-30 CN CN201811280018.6A patent/CN109612639A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005140504A (en) * | 2003-11-04 | 2005-06-02 | Ulvac Japan Ltd | Helium gas leak detector and helium gas leak detection method |
| CN202329960U (en) * | 2011-11-14 | 2012-07-11 | 中国电子科技集团公司第十八研究所 | Leak detecting device for lithium-ion batteries |
| CN104390747A (en) * | 2014-11-27 | 2015-03-04 | 中国船舶重工集团公司第七二四研究所 | Connector welding seal detection method |
| CN206504833U (en) * | 2016-12-30 | 2017-09-19 | 山东衡远新能源科技有限公司 | A kind of seal welding leak-checking apparatus of pressure limiting cover plate |
| CN206399613U (en) * | 2017-01-21 | 2017-08-11 | 富曜精密组件（昆山）有限公司 | Cavity work-piece helium measurement fixture |
| CN108213706A (en) * | 2017-12-30 | 2018-06-29 | 沈阳富创精密设备有限公司 | Aluminium alloy etches vacuum reaction chamber magnet body part laser filling wire welding technique |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| CB02 | Change of applicant information | ||
| CB02 | Change of applicant information |
Address after: No.18a-1, Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Applicant after: Shenyang fuchuang precision equipment Co.,Ltd. Address before: No.18a-1, Feiyun Road, Dongling District, Shenyang, Liaoning Province, 110000 Applicant before: Shenyang Fortune Precision Equipment Co.,Ltd. |
|
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190412 |