CN108199619A - 互补型压电能量收集器及其制作方法 - Google Patents
互补型压电能量收集器及其制作方法 Download PDFInfo
- Publication number
- CN108199619A CN108199619A CN201810062460.5A CN201810062460A CN108199619A CN 108199619 A CN108199619 A CN 108199619A CN 201810062460 A CN201810062460 A CN 201810062460A CN 108199619 A CN108199619 A CN 108199619A
- Authority
- CN
- China
- Prior art keywords
- clamped beam
- clamped
- photoresist
- piezoelectric
- beams
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000000295 complement effect Effects 0.000 title claims abstract description 17
- 238000002360 preparation method Methods 0.000 title abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 22
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 5
- 229920002120 photoresistant polymer Polymers 0.000 claims description 32
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 239000010703 silicon Substances 0.000 claims description 13
- 238000001259 photo etching Methods 0.000 claims description 12
- 239000010949 copper Substances 0.000 claims description 11
- 229910052802 copper Inorganic materials 0.000 claims description 11
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 9
- 238000004544 sputter deposition Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical group [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- 238000000151 deposition Methods 0.000 claims description 3
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical class [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- 230000000717 retained effect Effects 0.000 claims description 2
- -1 silicon nitrides Chemical class 0.000 claims 1
- 230000005284 excitation Effects 0.000 abstract description 13
- 238000010521 absorption reaction Methods 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 9
- 230000000644 propagated effect Effects 0.000 description 5
- 230000008859 change Effects 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 241001124569 Lycaenidae Species 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/18—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing electrical output from mechanical input, e.g. generators
- H02N2/186—Vibration harvesters
- H02N2/188—Vibration harvesters adapted for resonant operation
Landscapes
- Micromachines (AREA)
Abstract
Description
Claims (6)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810062460.5A CN108199619B (zh) | 2018-01-23 | 2018-01-23 | 互补型压电能量收集器及其制作方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201810062460.5A CN108199619B (zh) | 2018-01-23 | 2018-01-23 | 互补型压电能量收集器及其制作方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108199619A true CN108199619A (zh) | 2018-06-22 |
CN108199619B CN108199619B (zh) | 2019-06-21 |
Family
ID=62590466
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201810062460.5A Active CN108199619B (zh) | 2018-01-23 | 2018-01-23 | 互补型压电能量收集器及其制作方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN108199619B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111917332A (zh) * | 2020-08-24 | 2020-11-10 | 上海大学 | 一种多压电梁族复合振动能量采集器 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1930777A (zh) * | 2004-06-14 | 2007-03-14 | 松下电器产业株式会社 | 机电信号选择装置 |
CN102170248A (zh) * | 2011-04-22 | 2011-08-31 | 中南大学 | 一种基于二自由度压电振子的环境振动能量采集装置 |
CN1974373B (zh) * | 2005-11-30 | 2012-09-05 | 株式会社半导体能源研究所 | 微结构、其制造方法、以及微电子机械系统 |
US20130154443A1 (en) * | 2011-12-19 | 2013-06-20 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device |
WO2013175449A2 (en) * | 2012-05-25 | 2013-11-28 | Yu Jia | Energy-Harvesting Apparatus and Method |
CN104181582A (zh) * | 2013-05-24 | 2014-12-03 | 北京嘉岳同乐极电子有限公司 | 振动监测器及地震振动监测装置 |
CN106877738A (zh) * | 2015-10-19 | 2017-06-20 | 三角力量管理株式会社 | 发电元件、发电装置与结构体 |
-
2018
- 2018-01-23 CN CN201810062460.5A patent/CN108199619B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1930777A (zh) * | 2004-06-14 | 2007-03-14 | 松下电器产业株式会社 | 机电信号选择装置 |
CN1974373B (zh) * | 2005-11-30 | 2012-09-05 | 株式会社半导体能源研究所 | 微结构、其制造方法、以及微电子机械系统 |
CN102170248A (zh) * | 2011-04-22 | 2011-08-31 | 中南大学 | 一种基于二自由度压电振子的环境振动能量采集装置 |
US20130154443A1 (en) * | 2011-12-19 | 2013-06-20 | Canon Kabushiki Kaisha | Piezoelectric material, piezoelectric element, liquid ejection head, ultrasonic motor, and dust removing device |
WO2013175449A2 (en) * | 2012-05-25 | 2013-11-28 | Yu Jia | Energy-Harvesting Apparatus and Method |
CN104904110A (zh) * | 2012-05-25 | 2015-09-09 | 剑桥企业有限公司 | 能量采集设备和方法 |
CN104181582A (zh) * | 2013-05-24 | 2014-12-03 | 北京嘉岳同乐极电子有限公司 | 振动监测器及地震振动监测装置 |
CN106877738A (zh) * | 2015-10-19 | 2017-06-20 | 三角力量管理株式会社 | 发电元件、发电装置与结构体 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111917332A (zh) * | 2020-08-24 | 2020-11-10 | 上海大学 | 一种多压电梁族复合振动能量采集器 |
CN111917332B (zh) * | 2020-08-24 | 2021-06-22 | 上海大学 | 一种多压电梁族复合振动能量采集器 |
Also Published As
Publication number | Publication date |
---|---|
CN108199619B (zh) | 2019-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP3233311B1 (en) | Piezoelectric micromachined ultrasonic transducers with low stress sensitivity and methods of fabrication | |
US7489593B2 (en) | Electrostatic membranes for sensors, ultrasonic transducers incorporating such membranes, and manufacturing methods therefor | |
CN1845453B (zh) | 一种声谐振器和用于制作声谐振器的方法 | |
US5723353A (en) | Process for manufacturing a sensor | |
US20130127295A1 (en) | Piezoelectric micro power generator and fabrication method thereof | |
CN100548504C (zh) | 压电式合成射流器的制作方法 | |
WO2003042721A3 (en) | Trilayered beam mems device and related methods | |
CN101944860A (zh) | 压电悬臂梁振动能量采集器及其制备方法 | |
JPH08248335A (ja) | オプトメカニカルの光学装置 | |
CN101844739A (zh) | 一种超小型mems陀螺仪传感器的制造方法 | |
CN110099344A (zh) | 一种mems结构 | |
CN101575082A (zh) | 基于风致振动机理和压电效应的微型风力发电机 | |
CN100417587C (zh) | 一种微纳组合结构器件的制作方法 | |
CN102556933A (zh) | Mems动能转化 | |
CN108199619B (zh) | 互补型压电能量收集器及其制作方法 | |
CN108716914A (zh) | 一种基于纳米光栅的moems陀螺仪及其加工方法 | |
KR20160130381A (ko) | 대칭 듀얼 압전 스택 미세 전자 기계 압전 디바이스들 | |
CN107947636A (zh) | 六维压电式能量收集器及其制作方法 | |
CN106862045A (zh) | 收发性能平衡的微机电超声换能器面阵探头及其制备方法 | |
WO2000063978A3 (en) | Electrode patterning for a differential pzt activator | |
CN101646119B (zh) | 具有微蜂窝结构振动膜的硅微电容传声器芯片及制备方法 | |
CN106856381B (zh) | 一种集束型双稳态弯曲双叉悬臂梁压电能量收集装置 | |
CN111372178B (zh) | 一种mems麦克风、阵列结构及加工方法 | |
CN101639486A (zh) | 一种微机械可动梳状栅电容及其制作方法 | |
CN101195471A (zh) | Mems器件及其制造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: No. 66, New Model Road, Gulou District, Nanjing City, Jiangsu Province, 210000 Applicant after: Nanjing Post & Telecommunication Univ. Applicant after: Nanjing University of Posts and Telecommunications Nantong Institute Limited Address before: 210023 9 Wen Yuan Road, Qixia District, Nanjing, Jiangsu. Applicant before: Nanjing Post & Telecommunication Univ. Applicant before: Nanjing University of Posts and Telecommunications Nantong Institute Limited |
|
CB02 | Change of applicant information | ||
CB02 | Change of applicant information |
Address after: No. 9 Wenyuan Road, Yadong New District, Nanjing, Jiangsu Province, 210012 Applicant after: Nanjing Post & Telecommunication Univ. Applicant after: Nanjing University of Posts and Telecommunications Nantong Institute Limited Address before: No. 66, New Model Road, Gulou District, Nanjing City, Jiangsu Province, 210000 Applicant before: Nanjing Post & Telecommunication Univ. Applicant before: Nanjing University of Posts and Telecommunications Nantong Institute Limited |
|
CB02 | Change of applicant information | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP02 | Change in the address of a patent holder |
Address after: 226000 No. 33 Xinkang Road, Gangzhao District, Nantong City, Jiangsu Province Co-patentee after: Nanjing University of Posts and Telecommunications Nantong Institute Limited Patentee after: Nanjing Post & Telecommunication Univ. Address before: 210012 9 Wen Yuan Road, Ya Dong new town, Nanjing, Jiangsu. Co-patentee before: Nanjing University of Posts and Telecommunications Nantong Institute Limited Patentee before: Nanjing Post & Telecommunication Univ. |
|
CP02 | Change in the address of a patent holder |