CN108198794A - A kind of chip packing-body and preparation method thereof - Google Patents

A kind of chip packing-body and preparation method thereof Download PDF

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Publication number
CN108198794A
CN108198794A CN201711499149.9A CN201711499149A CN108198794A CN 108198794 A CN108198794 A CN 108198794A CN 201711499149 A CN201711499149 A CN 201711499149A CN 108198794 A CN108198794 A CN 108198794A
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CN
China
Prior art keywords
chip
substrate
weld part
preparation
scaling powder
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Pending
Application number
CN201711499149.9A
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Chinese (zh)
Inventor
卢海伦
周锋
施陈
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Tongfu Microelectronics Co Ltd
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Tongfu Microelectronics Co Ltd
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Publication date
Application filed by Tongfu Microelectronics Co Ltd filed Critical Tongfu Microelectronics Co Ltd
Priority to CN201711499149.9A priority Critical patent/CN108198794A/en
Publication of CN108198794A publication Critical patent/CN108198794A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3114Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/81Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)

Abstract

This application discloses a kind of chip packing-bodies and preparation method thereof, are related to chip encapsulation technology field.The method includes:Chip and substrate are provided, the first weld part is provided on chip, the second weld part is provided on substrate, wherein, pre-set fluxing agent on the first weld part or the second weld part;By flip-chip on substrate, wherein, the first weld part carries out solder interconnections with being connected on the second weld part, forms chip packing-body by the above-mentioned means, the application can improve packaging technology efficiency, improve equipment capacity, reduce packaging cost.

Description

A kind of chip packing-body and preparation method thereof
Technical field
This application involves chip encapsulation technology field, more particularly to a kind of chip packing-body and preparation method thereof.
Background technology
With the increase of integrated circuit integrated level, the encapsulation technology of chip is also more and more diversified, because of flip-chip skill Art has the interconnection length shortened in encapsulation, and then can better adapt to highly integrated growth requirement, extensively should at present For chip package field.Referring to Fig. 1, Fig. 1 is the cross-sectional view of package substrate in the prior art, in flip-chip In technique, as shown in Figure 1a, the substrate 11 of early application has planted tin ball 111 in advance in welding disking area, after pasting chip 10 by Reflux makes tin ball 111 weld together after being melted with the metal salient point 101 on chip 10.As shown in Figure 1 b, base common at present Plate 12 is all exposed in the pad 121 of 10 pasting area of chip, by the metal salient point 101 on pad 121 and chip 10 into Row reflow soldering.
Present inventor is had found in current flip chip mounting process, chip attachment arrives in long-term R&D process It before on substrate, is required for the metal salient point on chip dipping scaling powder, the metal of scaling powder is moistened with using camera identification Salient point is mounted after being identified by substrate surface.But this technique there is also some problems, such as dip metal after scaling powder Salient point identification alarm is more, influences equipment capacity;In order to control the amount of scaling powder, customized corresponding jig is needed;Scaling powder exists Service life on board needs management and control etc., it is therefore desirable to develop new flip chip mounting process to solve the problems, such as these.
Invention content
The application can be had ready conditions and be carried mainly solving the technical problems that provide a kind of chip packing-body and preparation method thereof High packaging technology efficiency improves equipment capacity, reduces packaging cost.
In order to solve the above technical problems, the technical solution that the application uses is:A kind of potted element, the envelope are provided Element surface setting weld part is filled, the weld part includes fusible scaling powder.
Wherein, the potted element is package substrate, and scaling powder top surface is less than surface where package substrate.
Wherein, enclosure wall is equipped with around weld part, enclosure wall top surface is higher than scaling powder top surface, and scaling powder top surface is less than package substrate The structure on place surface.
Wherein, weld part includes the pad between scaling powder and package substrate, and weld part is not provided with pad protection Layer.
Wherein, the thickness of scaling powder layer is 0.2~0.4 μm.
In order to solve the above technical problems, another technical solution that the application uses is:A kind of system of potted element is provided Preparation Method, the method includes providing matrix;Weld part is set, and weld part includes fusible scaling powder in matrix surface.
Wherein, potted element is package substrate, and weld part includes pad, and weld part, and weld part are set in matrix surface Include including fusible scaling powder:Substrate carrier is provided;Overlay film, exposure, development, etching making formation weldering are carried out on support plate Disk;Pad is surface-treated, to form fusible scaling powder layer on pad, and scaling powder layer top surface is less than package substrate Place surface.
Wherein, pad is surface-treated, is included with forming fusible scaling powder layer on pad:Pass through the side of printing Solid weld-aiding cream brush is formed scaling powder layer by formula in corresponding substrate pads.
Wherein, around weld part be equipped with enclosure wall, on support plate carry out overlay film, exposure, development, etching make formed pad it After further include:Enclosure wall is set around pad, and enclosure wall top surface, higher than scaling powder layer top surface, scaling powder layer top surface is less than encapsulation base The structure on surface where plate.
The material of enclosure wall is resin material, enclosure wall is set to include around pad:By overlay film, exposure, development, plated film, Or the mode of printing around pad to form enclosure wall.
In order to solve the above technical problems, another technical solution that the application uses is:A kind of chip packing-body is provided Preparation method, the method includes:Chip and substrate are provided, the first weld part is provided on chip, second is provided on substrate Weld part, wherein, pre-set fluxing agent on the first weld part or the second weld part;By flip-chip on substrate, wherein, First weld part carries out solder interconnections with being connected on the second weld part, forms chip packing-body.
Wherein, the first weld part is metal salient point, and the second weld part is pad, by flip-chip in specifically being wrapped on substrate It includes:Substrate is loaded into, and substrate is identified;Absorption chip, and the metal salient point on chip is identified;By flip-chip In completion attachment on substrate, wherein, metal salient point is connected with pad.
Wherein, fluxing agent layer is pre-set on the second weld part, wherein, in the preparation process of substrate, by Two weld parts carry out surface treatment and form scaling powder layer.
Wherein, it forms scaling powder layer by carrying out surface treatment to the second weld part and includes:It will be solid by way of printing Body weld-aiding cream brush forms the scaling powder layer on second weld part.
Wherein, enclosure wall is equipped with around second weld part, the enclosure wall top surface is higher than the scaling powder layer top surface, described Scaling powder layer top surface is less than the structure on surface where the package substrate.
Wherein, it is described by flip-chip on the substrate, and carry out solder interconnections and include:By way of reflow soldering Solder interconnections are carried out to the chip and substrate.
Wherein, in solder reflow process, scaling powder layer fusing and the first weld part described in catalysed promoted with it is described Fusion weld between second weld part.
Wherein, it is described by flip-chip on the substrate, and carry out solder interconnections and include:During welding is formed Pressure is applied to the chip, to press the chip and substrate.
Wherein, it is described by flip-chip on the substrate, and after solder interconnections include:It is filled out using capillary bottom Fill the gap potting resin glue of technology or molded underfill technology between chip and substrate.
In order to solve the above technical problems, another technical solution that the application uses is:A kind of chip packing-body, institute are provided Chip packing-body is stated to be made by the preparation method of said chip packaging body.
The advantageous effect of the application is:The situation of the prior art is different from, the application provides a kind of system of chip packing-body Preparation Method is previously provided with fusible scaling powder on the weld part of potted element used in the preparation method, using the encapsulation first When part carries out chip package, packaging technology can be shortened, packaging technology efficiency is improved, improve equipment capacity, reduce packaging cost.
Description of the drawings
Fig. 1 a are a kind of cross-sectional views of package substrate in the prior art;
Fig. 1 b are a kind of cross-sectional views of package substrate in the prior art
Fig. 2 is the cross-sectional view of the application potted element first embodiment;
Fig. 3 is the cross-sectional view of the application potted element second embodiment;
Fig. 4 is the flow diagram of the preparation method first embodiment of the application potted element;
Fig. 5 is the process flow diagram of the preparation method second embodiment of the application potted element;
Fig. 6 is the flow diagram of the preparation method first embodiment of the application chip packing-body;
Fig. 7 is the chip attachment flow diagram of the preparation method second embodiment of the application chip packing-body;
Fig. 8 is the process flow diagram of the preparation method second embodiment of the application chip packing-body;
Fig. 9 is the structure diagram of the application chip packing-body first embodiment.
Specific embodiment
Purpose, technical solution and effect to make the application is clearer, clear and definite, and develop simultaneously embodiment pair referring to the drawings The application is further described.
The application provides a kind of potted element, which may at least apply in chip package process, the encapsulation Element surface is provided with weld part, and weld part includes fusible scaling powder.By advance on the weld part of the potted element Fusible scaling powder is set, when the potted element is used to carry out chip package, packaging technology can be shortened, improve packaging technology Efficiency improves equipment capacity, reduces packaging cost.The potted element can be chip, package substrate etc..In an embodiment In, when potted element is chip, the weld part on chip is metal salient point, and scaling powder can be arranged on the top of metal salient point End or the front end of cladding metal salient point.When potted element is package substrate, weld part can be the soldered ball or naked on advance plant The pad of dew, scaling powder coat soldered ball or are covered in above pad.
Optionally, referring to Fig. 2, Fig. 2 is the cross-sectional view of the application potted element first embodiment.At this In embodiment, potted element is package substrate 20, and weld part is exposed pad 201, and scaling powder is covered in the upper of pad 201 It is rectangular that and 202 top surface of scaling powder layer be less than surface where package substrate into scaling powder layer 202, the thickness of scaling powder layer for 0.2~ 0.4μm。
Optionally, referring to Fig. 3, Fig. 3 is the cross-sectional view of the application potted element second embodiment.At this In embodiment, potted element is package substrate 30, and weld part is exposed pad 301, and scaling powder is covered in the top of pad Form scaling powder layer 302.Enclosure wall 303 is equipped with around pad 301,303 top surface of enclosure wall is higher than 302 top surface of scaling powder layer, scaling powder 302 top surface of layer are less than the structure on surface where package substrate.By setting enclosure wall, can enclose multiple empty with certain receiving Between groove, and scaling powder layer is in bottom portion of groove, becomes liquid when in reflow soldering, scaling powder can melt, this groove The scaling powder of buffering liquid can be accommodated, is unlikely to spill on peripheral substrate, can prevent scaling powder fusing from overflowing and pollute And waste;On the other hand, by setting enclosure wall, pad can be located in multiple grids, when carrying out chip package attachment, Pad is found by grid location, placement accuracy and efficiency can be improved.
To prepare above-mentioned potted element, the application also provides a kind of preparation method of potted element.Referring to Fig. 4, Fig. 4 is The flow diagram of the preparation method first embodiment of the application potted element.As shown in figure 5, in this embodiment, envelope The preparation method of dress element includes the following steps:
S401:Matrix is provided.
Specifically, corresponding matrix is provided according to the type of potted element.
S402:Weld part is set, and weld part includes fusible scaling powder in matrix surface.
Specifically, according to the type of potted element and corresponding manufacture craft, adaptability sets weld part and scaling powder.
Optionally, Fig. 2, Fig. 3 and Fig. 5 are please referred to, Fig. 5 is the second embodiment party of preparation method of the application potted element The process flow diagram of formula.In this embodiment, potted element is package substrate, and weld part is exposed pad, helps weldering The top that agent is covered in pad forms scaling powder layer.As shown in figure 5, the preparation method of package substrate includes:
Substrate carrier is provided, support plate is generally selected DTF support plates, made by techniques such as overlay film, exposure, development, etchings Substrate 501 is obtained after base plate line and pad connecting pole;On substrate 501 after copper plate 502, one layer is covered in layers of copper 502 Negative photoresist film 503;And it in one piece of MASK 504 of covering on negative photoresist film 503 and is exposed;Layers of copper is carried out after development Etching removes extra negative photoresist film 503 and obtains pad 505 again;It, can be according to final institute after etching obtains pad 505 Type of substrate is needed, adapts to selection subsequent technique.
In one embodiment, for above-mentioned package substrate 20 is made, subsequent technique is:In the place in addition to pad 505 Coat soldermask layer;Pad 505 is surface-treated, is formed solid weld-aiding cream brush on pad 505 by way of printing Scaling powder layer 202, scaling powder, 202 thickness is 0.2~0.4 μm.The preparation process of the substrate is prepared relative to existing substrate Technique, the process that OSP (having machine aided to weld protective film) is coated in process of surface treatment will have machine aided weldering protection materials to be replaced with water The weld-aiding cream of dissolubility, obtained coating are scaling powder layer 202;Therefore, the substrate that prepared by this method, there is no protections on pad Layer.By changing existing protective layer into scaling powder layer, can either play the role of protecting pad, additionally it is possible to be subsequent Welder Skill saves process, meanwhile, it will not also increase the preparation section of substrate, improve total production efficiency.
In one embodiment, for above-mentioned package substrate 30 is made, after etching obtains pad 505, it is also necessary to prepare enclosure wall 506, the material of wherein enclosure wall 506 is close with substrate material, can select suitable organic material.It can be by way of printing Organic material brush is formed into enclosure wall 506 around pad 505;It can also be made by way of overlay film, exposure, development, plated film It is standby to form enclosure wall 506.Scaling powder layer 302 is prepared followed by processes such as coating soldermask layer, surface treatments, specific process please join Foregoing description is read, details are not described herein, makes 303 top surface of gained enclosure wall higher than 302 top surface of scaling powder layer, 302 top surface of scaling powder layer Less than the structure on 30 place surface of package substrate.
When carrying out chip package using above-mentioned potted element, packaging technology can be shortened, packaging technology efficiency is improved, carry High equipment capacity reduces packaging cost.On this basis, the application also provides a kind of preparation method of chip packing-body, please join Fig. 6 is read, Fig. 6 is the flow diagram of the preparation method first embodiment of the application chip packing-body, as shown in fig. 6, at this In embodiment, the preparation method of potted element includes the following steps:
S601:Chip and substrate are provided, the first weld part is provided on chip, the second weld part is provided on substrate, In pre-set fluxing agent on the first weld part or the second weld part.
Specifically, the chip and substrate can be above-mentioned potted elements, and concrete structure and preparation method please refer to above-mentioned The description of related potted element embodiment, details are not described herein.The chip and substrate can be by customizing by chip, substrate manufacturer It provides or chip package manufacturer voluntarily prepares according to above-mentioned preparation method.
S602:By flip-chip on substrate, wherein the first weld part and the second weld part are connected, and welded Interconnection forms chip packing-body.
Specifically, the first weld part on chip can be metal salient point, and the second weld part on substrate can be pad. In one embodiment, substrate can be the special substrate for adapting to certain chip, and pad is consistent with the quantity of metal salient point, And it is correspondingly arranged;In other embodiments, substrate can also be for the universal type basal plate in chip package preparation process, And on substrate multiple chips can be assembled simultaneously (these chips can be set in side-by-side fashion, can also be set in a stacked fashion Put), to carry out fast packing to multiple chips simultaneously.Therefore the number of pads on substrate can be more than the metal salient point on chip Quantity, as long as can ensure that the metal salient point on chip has the corresponding matching connection of pad.
In this embodiment, because being previously provided with fusible scaling powder on the weld part of chip or substrate, therefore, It in subsequent packaging technology, will no longer be required to dip scaling powder immediately, shorten packaging technology, improve packaging technology efficiency.Specifically Ground, please refers to Fig. 7 and Fig. 8, and Fig. 7 is the chip attachment stream of the preparation method second embodiment of the application chip packing-body Journey schematic diagram, Fig. 8 is the process flow diagram of the preparation method second embodiment of the application chip packing-body, in the implementation In mode, chip and the detailed process that substrate mounts are included:
S701:Substrate 81 is loaded into, and substrate 81 is identified.
Wherein, fluxing agent layer 812 is pre-set on the pad 811 of substrate 81, so, it, can be direct after substrate is loaded into Identification does not need to re-coating scaling powder.
S702:Absorption chip 82, and the metal salient point 821 on chip 82 is identified.
It wherein, can be direct after absorption chip because having pre-set fluxing agent 812 on corresponding substrate 81 Metal salient point 821 is identified, and no longer needs to dip scaling powder immediately, shortens attachment process, while also improves identification effect Rate.
S703:By 82 upside-down mounting of chip in completion attachment on substrate 81, wherein, metal salient point 821 connects with the cooperation of pad 811 It connects.
Then, the chip mounted and substrate are subjected to reflow soldering, during being heated at reflux, scaling powder layer 812 Weld-aiding cream is melted by high temperature from Solid State Transformation into liquid so that the tin cap portion on 821 top of metal salient point on chip 82 is complete Full infiltration is in weld-aiding cream, fusion weld between pad 811 on catalytic metal salient point 821 and substrate 81, then is transformed into from liquid Gaseous state vapors away.Finally, product enters the 821 top tin cap curing of cooling zone metal salient point, is welded on pad 811 on substrate 81 Together.
Optionally, on substrate 81, enclosure wall 813 is also set up between pad 811,813 top surface of enclosure wall is pushed up higher than scaling powder layer 812 Face, 812 top surface of scaling powder layer is less than the structure on surface where package substrate.By setting enclosure wall, pad can be located in more In a grid, when carrying out chip package attachment, pad is found by grid location, placement accuracy and efficiency can be improved;Separately On the one hand, by setting enclosure wall, multiple grooves with certain accommodation space can be enclosed, and scaling powder layer is in groove-bottom Portion becomes liquid when in reflow soldering, scaling powder can melt, this groove can accommodate the scaling powder of buffering liquid, be unlikely to It spills on peripheral substrate, can prevent scaling powder fusing from overflowing and pollute and waste.
It is alternatively possible to apply pressure to chip 82 during welding is formed, to press chip 82 and substrate 81, carry The stability of height welding.
Optionally, after the completion of welding, using capillary underfill technology or molded underfill technology to chip and base Gap potting resin glue between plate, underfill be a kind of low-viscosity, low-temperature setting Capillary Flow bottom under filler (Underfill), flowing velocity is fast, and long working life overhauls excellent performance.It can be with dispersed chip surface by using underfill The stress that bears and then the reliability for improving entire product.
Chip packing-body can be efficiently prepared using above-mentioned preparation method, referring to Fig. 9, Fig. 9 is the application chip envelope Fill the structure diagram of body first embodiment.The application also provides a kind of chip packing-body 90, which is making It is made during standby using above-mentioned preparation method, specific preparation process please refers to the description of the above embodiment, herein no longer It repeats.
Above scheme, the application provide a kind of potted element, are previously provided on the weld part of the potted element fusible Scaling powder when the potted element is used to carry out chip package, can shorten packaging technology, improve packaging technology efficiency, improve Equipment capacity reduces packaging cost.
The foregoing is merely presently filed embodiments, not thereby limit the scope of the claims of the application, every to utilize this It is relevant to be directly or indirectly used in other for the equivalent structure or equivalent flow shift that application specification and accompanying drawing content are made Technical field similarly includes in the scope of patent protection of the application.

Claims (10)

1. a kind of preparation method of chip packing-body, which is characterized in that the method includes:
Chip and substrate are provided, the first weld part is provided on the chip, the second weld part is provided on the substrate, wherein Fusible scaling powder is previously provided on first weld part or second weld part;
By the flip-chip on the substrate, wherein first weld part is connected with second weld part, and Solder interconnections are carried out, form chip packing-body.
2. the preparation method of chip packing-body according to claim 1, which is characterized in that first weld part is metal Salient point, second weld part is pad, described to specifically include flip-chip on the substrate:
The substrate is loaded into, and the substrate is identified;
The chip is drawn, and the metal salient point on the chip is identified;
By the flip-chip in completion attachment on the substrate, wherein, the metal salient point is connected with the pad.
3. the preparation method of chip packing-body according to claim 1, which is characterized in that on second weld part in advance Fluxing agent layer is set, wherein, in the preparation process of the substrate, by carrying out surface treatment shape to second weld part Into the scaling powder layer.
4. the preparation method of chip packing-body according to claim 3, which is characterized in that described by being welded to described second Socket part carries out surface treatment and forms the scaling powder layer and include:
Solid weld-aiding cream brush is formed into the scaling powder layer on second weld part by way of printing.
5. the preparation method of chip packing-body according to claim 1, which is characterized in that set around second weld part There is enclosure wall, the enclosure wall top surface is higher than the scaling powder layer top surface, and the scaling powder layer top surface is less than where the package substrate The structure on surface.
6. the preparation method of chip packing-body according to claim 1, which is characterized in that it is described by flip-chip in described On substrate, and carry out solder interconnections and include:
Solder interconnections are carried out to the chip and substrate by way of reflow soldering.
7. the preparation method of chip packing-body according to claim 6, which is characterized in that
In solder reflow process, the scaling powder layer melts simultaneously the first weld part described in catalysed promoted and second weld part Between fusion weld.
8. the preparation method of chip packing-body according to claim 6, which is characterized in that it is described by flip-chip in described On substrate, and carry out solder interconnections and include:
Pressure is applied to the chip during welding is formed, to press the chip and substrate.
9. the preparation method of chip packing-body according to claim 1, which is characterized in that it is described by flip-chip in described On substrate, and after solder interconnections include:
Utilize the gap potting resin glue of capillary underfill technology or molded underfill technology between chip and substrate.
10. a kind of chip packing-body, which is characterized in that the chip packing-body passes through such as claim 1~9 any one of them The preparation method of chip packing-body is made.
CN201711499149.9A 2017-12-29 2017-12-29 A kind of chip packing-body and preparation method thereof Pending CN108198794A (en)

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Publication number Priority date Publication date Assignee Title
CN109712912A (en) * 2018-12-06 2019-05-03 通富微电子股份有限公司 A kind of flip-chip device and method
CN109727877A (en) * 2018-12-20 2019-05-07 通富微电子股份有限公司 A kind of method for packaging semiconductor and semiconductor packing device
CN114045137A (en) * 2022-01-12 2022-02-15 武汉市三选科技有限公司 Panel driving circuit bottom filling adhesive, preparation method thereof and chip packaging structure

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US20040169275A1 (en) * 2003-02-27 2004-09-02 Motorola, Inc. Area-array device assembly with pre-applied underfill layers on printed wiring board
CN202169445U (en) * 2011-07-15 2012-03-21 广州先艺电子科技有限公司 Preformed soldering lug pre-coated with soldering flux coating
KR20120095662A (en) * 2011-02-21 2012-08-29 엘지이노텍 주식회사 The printed circuit board and the method for manufacturing the same
CN107346742A (en) * 2016-05-05 2017-11-14 中芯国际集成电路制造(天津)有限公司 The preparation method of wafer bumps

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040169275A1 (en) * 2003-02-27 2004-09-02 Motorola, Inc. Area-array device assembly with pre-applied underfill layers on printed wiring board
KR20120095662A (en) * 2011-02-21 2012-08-29 엘지이노텍 주식회사 The printed circuit board and the method for manufacturing the same
CN202169445U (en) * 2011-07-15 2012-03-21 广州先艺电子科技有限公司 Preformed soldering lug pre-coated with soldering flux coating
CN107346742A (en) * 2016-05-05 2017-11-14 中芯国际集成电路制造(天津)有限公司 The preparation method of wafer bumps

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109712912A (en) * 2018-12-06 2019-05-03 通富微电子股份有限公司 A kind of flip-chip device and method
CN109727877A (en) * 2018-12-20 2019-05-07 通富微电子股份有限公司 A kind of method for packaging semiconductor and semiconductor packing device
CN114045137A (en) * 2022-01-12 2022-02-15 武汉市三选科技有限公司 Panel driving circuit bottom filling adhesive, preparation method thereof and chip packaging structure

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