CN108172642A - A kind of monocrystalline mixes gallium double-side solar cell and preparation method thereof - Google Patents
A kind of monocrystalline mixes gallium double-side solar cell and preparation method thereof Download PDFInfo
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- CN108172642A CN108172642A CN201810085604.9A CN201810085604A CN108172642A CN 108172642 A CN108172642 A CN 108172642A CN 201810085604 A CN201810085604 A CN 201810085604A CN 108172642 A CN108172642 A CN 108172642A
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 title claims abstract description 70
- 229910052733 gallium Inorganic materials 0.000 title claims abstract description 70
- 238000002360 preparation method Methods 0.000 title claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 64
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 64
- 239000010703 silicon Substances 0.000 claims abstract description 64
- 238000000034 method Methods 0.000 claims abstract description 28
- 238000002161 passivation Methods 0.000 claims abstract description 22
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 239000000203 mixture Substances 0.000 claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 11
- 238000009413 insulation Methods 0.000 claims abstract description 9
- 238000001465 metallisation Methods 0.000 claims abstract description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 37
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 34
- 229910052782 aluminium Inorganic materials 0.000 claims description 32
- 239000004411 aluminium Substances 0.000 claims description 31
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 25
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 25
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 18
- 229910052796 boron Inorganic materials 0.000 claims description 18
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 16
- 230000015572 biosynthetic process Effects 0.000 claims description 11
- 229910000632 Alusil Inorganic materials 0.000 claims description 9
- 229910045601 alloy Inorganic materials 0.000 claims description 9
- 239000000956 alloy Substances 0.000 claims description 9
- 239000006117 anti-reflective coating Substances 0.000 claims description 9
- 239000002002 slurry Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 claims description 8
- 239000000377 silicon dioxide Substances 0.000 claims description 8
- 238000003475 lamination Methods 0.000 claims description 6
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 6
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims description 5
- 230000036961 partial effect Effects 0.000 claims description 4
- 230000035515 penetration Effects 0.000 claims description 4
- 239000004020 conductor Substances 0.000 abstract description 11
- 239000013078 crystal Substances 0.000 abstract description 5
- 239000004065 semiconductor Substances 0.000 abstract description 4
- 230000005684 electric field Effects 0.000 abstract 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 9
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 9
- 125000004429 atom Chemical group 0.000 description 9
- 238000002156 mixing Methods 0.000 description 9
- 229910052709 silver Inorganic materials 0.000 description 9
- 239000004332 silver Substances 0.000 description 9
- 239000004615 ingredient Substances 0.000 description 8
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 7
- 238000000576 coating method Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 238000007639 printing Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- XGCTUKUCGUNZDN-UHFFFAOYSA-N [B].O=O Chemical compound [B].O=O XGCTUKUCGUNZDN-UHFFFAOYSA-N 0.000 description 4
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 4
- 238000005554 pickling Methods 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000002253 acid Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910017604 nitric acid Inorganic materials 0.000 description 3
- 238000005245 sintering Methods 0.000 description 3
- 241000931526 Acer campestre Species 0.000 description 2
- 229910019213 POCl3 Inorganic materials 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 239000012670 alkaline solution Substances 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000011267 electrode slurry Substances 0.000 description 1
- 230000002401 inhibitory effect Effects 0.000 description 1
- 230000005764 inhibitory process Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004513 sizing Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 125000003698 tetramethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0684—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells double emitter cells, e.g. bifacial solar cells
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/02002—Arrangements for conducting electric current to or from the device in operations
- H01L31/02005—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier
- H01L31/02008—Arrangements for conducting electric current to or from the device in operations for device characterised by at least one potential jump barrier or surface barrier for solar cells or solar cell modules
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- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
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- H01L31/02—Details
- H01L31/0216—Coatings
- H01L31/02161—Coatings for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/02167—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/02168—Coatings for devices characterised by at least one potential jump barrier or surface barrier for solar cells the coatings being antireflective or having enhancing optical properties for the solar cells
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- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/028—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table
- H01L31/0288—Inorganic materials including, apart from doping material or other impurities, only elements of Group IV of the Periodic Table characterised by the doping material
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- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
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Abstract
The invention discloses a kind of monocrystalline to mix gallium double-side solar cell and preparation method thereof, including：Doped with the single-crystal semiconductor substrate of gallium element, and front surface emitter on it and back side local back electric field, it is placed in front surface antireflection film/passivating film of emitter surface and is placed in the backside passivation film of substrate back surface, the front electrode of the conductive material composition of front surface antireflection film/passivation film surface is placed in, is placed in the backplate of the conductive material composition of passivating back film surface.Preparation method, including：Surface-texturing is completed on the silicon chip for mix gallium, prepared by emitter, insulation processing, front surface passivated reflection reducing penetrates film and back surface passivation film preparation, and backside passivation film local opens film and metallization processes.
Description
Technical field
The present invention relates to technical field of solar batteries, more particularly to a kind of monocrystalline mixes gallium double-side solar cell and its preparation
Method.
Background technology
At present, gradually exhausting with fossil energy, for solar cell as new energy substitution scheme, use is more and more wider
It is general.Solar cell is the device that the luminous energy of the sun is converted to electric energy.Solar cell generates carrier using photogenic voltage principle,
Then carrier is drawn using electrode, so as to be conducive to efficiently use electric energy.
The p-type solar cell substrate used at present, generally doped with the silicon chip of boron element.But it uses doped with boron member
As the solar cell of substrate, certain attenuation can occur the monocrystalline silicon of element under solar irradiation for battery efficiency together.This attenuation
Referred to as light decay (LID).The efficiency attenuation of double-side solar cell made of boron-doping monocrystalline silicon piece in photovoltaic industry at present 3~
Between 10%.It is replaced in position boron atom and monocrystalline silicon in essential reason and doping substrate that the photo attenuation of this battery generates
The oxygen atom of gap state can form boron oxygen complex in the case where light injects.And boron oxygen complex is deep energy level complex centre,
The service life of minority carrier can be reduced in this way, so as to reduce the diffusion length of minority carrier, the efficiency of solar cell is caused to drop
It is low.
Invention content
In view of the above problems, the present invention provides a kind of monocrystalline to mix gallium double-side solar cell and preparation method thereof, can solve
The certainly above problem is reduced due to photo attenuation caused by boron oxygen complex.
The present invention technical solution be：
A kind of monocrystalline mixes gallium double-side solar cell, is included successively by front to the back side：Front electrode, front surface antireflection film/
Passivating film, emitter, monocrystalline mix gallium silicon base, back side antireflective coating/passivating film and backplate.
The doping concentration that the monocrystalline mixes gallium element in gallium silicon base is 1 × 1013~1 × 1017A atom/cube li
Rice.
The monocrystalline mixes gallium silicon base also doped with boron element, and the doping concentration of boron element is 1 × 1013~1 × 1017
A atom/cubic centimetre.
The front electrode includes the thin grid line in front, and the thin grid line in front passes through partial penetration front surface antireflection film/passivation
Film is opened the formation of diaphragm area and emitter by the part on front surface antireflection film/passivating film and is in direct contact.
The front electrode further includes positive connection electrode, the thin grid line in front it is orthogonal with positive connection electrode and
Intersection is connected.
The backplate includes the thin grid line in the back side；The thin grid line in the back side mixes gallium silicon base rear-face contact with monocrystalline.
The thin grid line in the back side is the electrode containing aluminium, and the thin grid line in the back side and monocrystalline form doping member between mixing gallium silicon base
Element is the hole doping layer of aluminium, and the thickness of hole doping layer is 1~15um.
Also doped with boron in the hole doping layer, boron element doping concentration is 5 × 1016~1 × 1021A atom/vertical
Square centimetre.
One layer of alusil alloy layer is further included between the thin grid line of the hole doping layer and the back side, alusil alloy layer thickness is
1~5um.
The backplate further includes back side connection electrode, and back side connection electrode and the thin grid line direction in the back side are orthogonal
And it is connected in intersection.
Front surface antireflection film/the passivating film is silica, silicon nitride, silicon oxynitride, aluminium oxide and carborundum films
In one or more laminations form；Backside passivation film is silica, silicon nitride, silicon oxynitride, aluminium oxide and carborundum films
In one or more laminations form；Back side antireflective coating is silica, silicon nitride, silicon oxynitride, aluminium oxide and silicon carbide are thin
One or more laminations in film are formed.
A kind of monocrystalline mixes the preparation method of gallium double-side solar cell, includes the following steps：
1) it mixes monocrystalline gallium silicon base and carries out surface-texturing and cleaning；
2) gallium silicon base front is mixed in monocrystalline to carry out preparing emitter；
3) it mixes monocrystalline gallium silicon base and carries out edge insulation processing；
4) system that the gallium silicon base positive back side respectively carry out front surface antireflection film/passivating film and backside passivation film is mixed monocrystalline
It is standby；
5) local is overleaf carried out on passivating film and opens film；
6) monocrystalline is mixed gallium silicon base front, the back side carry out electrocondution slurry be graphically coated with；
7) it carries out metallization heat treatment process and prepares front electrode and backplate respectively.
Relative to the prior art, the present invention has following technique effect：
The present invention includes the single-crystal semiconductor substrate doped with gallium element and emitter and back surface on it
, it is placed in the passivation of emitter surface and antireflective deielectric-coating and is placed in the passivation dielectric film of substrate back surface, be placed in deielectric-coating
The front electrode and backplate of the conductive material composition on surface, are placed in the positive conductive material of solar cell by high temperature sintering
Partial penetration medium membrane material or by the part on deielectric-coating open diaphragm area and emitter formation be in direct contact, be placed in too
The backplate of positive cell backside opens diaphragm area by the part on deielectric-coating and semiconductor formation is in direct contact.Using mixing gallium
Base material of the monocrystalline silicon as solar cell is prepared for monocrystalline and mixes gallium double-side solar cell, and doping substrate can be reduced by mixing gallium
In instead of the oxygen atom of position boron atom and monocrystalline silicon mid gap state light inject in the case of can form boron oxygen complex, in this way
The service life of minority carrier can be increased, so as to increase the diffusion length of minority carrier, lead to the efficiency of solar cell to increase, and
And ensure the long-term reliability of battery.The battery structure can reduce or inhibit the light decay of single crystal silicon solar cell substantially, can incite somebody to action
The light decay of monocrystalline silicon double-side solar cell is controlled within 3%.The better quality of this substrate, so as to effectively improve solar cell
Efficiency.
Further, there can also be a certain amount of boron element in silicon base, can also there is certain suppression to light decay in the case
Effect processed, but inhibition can be slightly worse than the silicon chip for only mixing gallium.
One layer of doping component that the aluminium electrode and monocrystalline being further formed mix between gallium silicon base is the silicon substrate of aluminium
Hole doping layer.The silicon substrate hole doping layer and silicon base of this layer of aluminium form the potential difference of p+/p, so as to improve entire battery
Open-circuit voltage, the recombination rate near the electrode is also reduced, so as to improve transfer efficiency.
Boron can be also further doped in the hole doping layer, boron element doping concentration is 5 × 1016~1 × 1021
A atom/cubic centimetre.The doping concentration of boron is generally greater than aluminium doping hole concentration, and therefore, the potential difference of p+/p increases, further
Improve open-circuit voltage.
It may also include one layer of alusil alloy layer between the hole doping layer and aluminium electrode, alusil alloy layer thickness is 1
~5um.The presence of this alusil alloy layer can cause the conductive electrode of aluminum and the semiconductor base of p-type to be formed and preferably connect
Touch performance.
The preparation method step that the present invention mixes algan single crystal solar cell includes：Surface Texture is completed on the silicon chip for mix gallium
Change, prepared by emitter, insulation processing, front surface passivated reflection reducing penetrates film and back surface passivation film preparation, and backside passivation film local is opened
Film and metallization processes.The preparation method of this double-side solar cell, technological process is relatively simple, and the control point of technique is easy
Control, and can substantially save the cost of sizing agent used；This solar cell overleaf has preferably passivation and contact, so as to
Improve battery efficiency.
Description of the drawings
Fig. 1 is the battery schematic diagram of an example in the embodiment of the solar cell of the present invention.
Fig. 2 is the positive electrode schematic diagram in the embodiment 1 of the solar cell of the present invention.
Fig. 3 is the electrode schematic diagram of the reverse side in the embodiment 1 of the solar cell of the present invention.
Wherein, 1 mixes gallium silicon base for monocrystalline, and 2 be emitter, and 3 be front surface antireflection film/passivating film, and 4 be back side antireflective
Film/passivating film, 5 be backplate, and 6 be front electrode, and 7 be the thin grid line in the back side, and 8 be positive connection electrode, and 9 be the thin grid in front
Line, 10 be back side connection electrode.
Specific embodiment
The present invention will be described for citing specific embodiment below.It should be pointed out that following embodiment is served only for this
Invention is described further, and does not represent protection scope of the present invention, other people promptings according to the present invention are made nonessential
Modification and adjustment, still fall within protection scope of the present invention.
As shown in Figure 1, a kind of monocrystalline mixes gallium double-side solar cell, including：Gallium silicon base is mixed doped with the monocrystalline of gallium element
1 and emitter 2 on it, the passivated reflection reducing for being placed in 2 surface of emitter penetrate film 3, be placed in passivated reflection reducing and penetrate 3 surface of film
The front electrode 6 of conductive material composition, is placed in backside of substrate passivating film 4, is placed in back side antireflective coating 5 in backside passivation film 4, carries on the back
Back side conductive electrode 5 on the antireflective coating of face；Above-mentioned front side conductive material partially or fully penetrates passivated reflection reducing and penetrates film 3 and transmitting
Pole 2 forms and is in direct contact；Back side conductive material overleaf open diaphragm area and monocrystalline and mix the formation of gallium silicon base 1 and connect by 4 local of passivating film
Touch, and it is non-open diaphragm area do not mixed with monocrystalline then gallium silicon base 1 formation contact.It mixes algan single crystal and mixes gallium element in gallium silicon base 1 and mix
Miscellaneous a concentration of 1 × 1013~1 × 1017A atom/cubic centimetre.
Preferably, mixing algan single crystal and mixing gallium silicon base 1 can also further contain boron, wherein a concentration of the 1 of boron element doping ×
1013~1 × 1017A atom/cubic centimetre.
Wherein, monocrystalline mixes front surface antireflection film/passivating film of 1 front surface of gallium silicon base, is folded by one or more layers film
Add composition, wherein the ingredient of film include one of silicon nitride, silica, silicon oxynitride or two or all include.Back surface
Front surface antireflection film/passivating film is made of the superposition of one or more layers film；Wherein the ingredient of film include aluminium oxide, silicon nitride,
Silica, the one or more or whole of silicon oxynitride include.
As shown in Fig. 2, front electrode 6 includes several containing the silver element thin grid lines 9 in parallel front, front side conductive material
Material by metallize heat treatment process partial penetration medium membrane material and emitter formation be in direct contact, formed front electrode；Just
Face electrode can not extend vertically through and the positive connection electrode 8 of thin grid line 9, may also comprise and extends vertically through and connect the thin grid in front
The positive connection electrode 8 of line 9.
Local Kai Mo areas on the back side, front surface antireflection film/passivating film, front surface antireflection film/passivating film are removed, institute's shape
Into open film local figure, can be straight line, line segment, latticed form or one or more of mixed form therein.
As shown in figure 3, backplate 5 is graphical local area distribution, including several that main conductive ingredient is aluminium element
Diaphragm area is opened in parallel thin grid line 7, the part for being covered in and connecting on the deielectric-coating of the back side；Aluminium conductive material locally open diaphragm area with
Silicon base formed rear-face contact, and it is non-open diaphragm area then not with silicon base formation be in direct contact.The parallel thin grid of backplate 5
Connecting line 10 can be further provided between line 7, connecting line can directly be in direct contact with silicon base formation, can not also be formed
It is in direct contact.Backside passivation film local opens the figure of diaphragm area, can be straight line, line segment, latticed form or therein
One or more of mixed forms.
Rear-face contact consists of the following parts：Main conductive ingredient is the conductive electrode of aluminium, silicon base and is placed in aluminium and leads
One layer of main doping component between electrode and silicon base is the silicon substrate hole doping layer of aluminium, and hole doping layer hole doping is dense
Spend is 5 × 1016~1 × 1021A atom/cubic centimetre；The thickness of the hole doping layer is 1~15um.Hole doping layer and
Between aluminium electrode, it can further comprise one layer of alusil alloy layer, thickness is 1~5um.
Rear-face contact also may not include hole doping layer or alusil alloy layer.
Backplate 7 further include several perpendicular to and connect the back side connection electrodes 10 of all thin grid lines.
Back side connection electrode 10 all can be extended vertically through and be connected all for the conductive electrode of silver by main conductive ingredient
The thin grid line 7 in the back side.Back side connection electrode 10 also all can be extended vertically through and be connected for the conductive electrode of aluminium by main conductive ingredient
Connect the thin grid line 7 in all back side.
Back side connection electrode 10 also can be by main conductive ingredient silver conductive electrode and main conductive ingredient be leading for aluminium
Electric electrode combination composition；The silver-colored conductive electrode in the connection electrode of each back side is discontinuously distributed overleaf connection electrode
Region, and be directly connected to be formed with the aluminium electrode part in this back side connection electrode and complete penetrate through and connect all thin
The connection electrode of grid line；Each region of the aluminium electrode in this back side connection electrode can be directly connected to each other, also can not be directly
It connects in succession.
The type of attachment of silver-colored portion's electrode zone and aluminium electrode region on the connection electrode region of each back side can be：Silver
Electrode zone and aluminium electrode region alternately connect；Aluminium electrode region surrounds silver electrode region；Silver electrode area is run through in aluminium electrode region
Domain；Aluminium electrode region is listed in silver electrode region etc..
A kind of preparation method of solar cell of the present invention, includes the following steps：
1) surface-texturing and cleaning are carried out to mixing gallium silicon base；
2) emitter preparation is carried out；
3) edge insulation processing is carried out；Insulating treatment method is wet etching method, and the wet etching method includes making
With containing HNO3, HF mixed acid solution carry out chemical attack or use include potassium hydroxide, sodium hydroxide, tetramethyl hydrogen-oxygen
Change the chemical corrosion method that the alkaline solutions such as ammonium carry out.
4) it carries out positive passivated reflection reducing and penetrates film preparation and passivating back film preparation；
5) local is overleaf carried out on passivating film and opens film；The local of passivating film opens film process, can be starched using chemical attack
Material forms local contact pattern, it is possible to use laser opens film method and forms local contact pattern.
6) the electrode slurry bed of material of conductive compositions is included in just back-patterned formation；
7) metallization heat treatment process is carried out.
In addition, in preparation process, annealing process also can further include.Further, local opens film method and includes changing
Learn etch, laser opens embrane method or mask collaboration chemical corrosion method.Include a step or several printing process in coating process,
And one or several drying courses, wherein the electrocondution slurry of a few steps can be identical, it can not also be identical.
Embodiment 1
The first step carries out surface-texturing to gallium doped monocrystaline silicon piece；This mixes gallium silicon chip opposite side distance for 156.75mm, a diameter of
220mm, not boracic in silicon chip, a concentration of 9 × 10 containing gallium16A atom/cubic centimetre.It is clear in slot type that gallium silicon chip is mixed to this monocrystalline
The texturing on surface is completed in washing machine using NaOH solution, pyramid structure is formed on surface.Wherein 80 DEG C of solution temperature continues
Time 10min.And pass through HF pickling, washing, drying and etc., remove surface metal ion.
Second step carries out emitter preparation.The preparation of pn-junction is completed in tubular type heating diffusion furnace tube, uses N2Carry POCl3
Source.Spread 850 DEG C of peak temperature, 110 minutes diffusion times.
Third walks, and carries out insulation processing.Insulation processing is completed in Chained cleaning machine, the mixing using HF acid and nitric acid is molten
Liquid, the removal back side can cause the N-shaped doped region of electric leakage around the N-shaped doped region formed and edge is expanded.In addition in this processing step
In also include HF pickling and remove positive phosphorosilicate glass.
4th step carries out front passivated reflection reducing and penetrates the preparation of film and the preparation of backside passivation film.It is enhanced using tubular type
Plasma gas-phase deposit carries out the deposition of silicon nitride, and double-layer silicon nitride is as passivation and antireflective coating.Wherein underlying silicon nitride is thick
Spend 20nm, refractive index 2.20, upper silicon nitride thickness 40nm, refractive index 1.95.Backside passivation film is aoxidized using atomic layer deposition
Aluminium and aluminium oxide upper strata are covered with silicon nitride.Wherein aluminium oxide thickness be 10nm, silicon nitride thickness 70nm, silicon nitride folding
It is 2.2 to penetrate rate.
5th step carries out local using laser to the back side and opens film, and using optical maser wavelength 532nm, hot spot is 90um diameters
Circle, dense arrangement are in line linear, and line spacing is 1.6mm, and entire back surface is distributed in parallel linear.
6th step coats conductive material as required in the front and back of battery.
We are graphically coated with using screen printing mode progress electrocondution slurry in the present embodiment.Positive use penetrates nitridation
The silver paste of silicon is as thin grid line slurry, thin grid line radical 100 (9 in such as Fig. 2), the direction of the thin grid in front and the 5th step laser
The rectilinear direction of fluting is consistent；Connection electrode uses the non-electrocondution slurry for burning type silicon nitride, 4 (such as Fig. 2 of connection electrode radical
In 8), connection electrode is orthogonal with thin grid line direction and is connected in intersection.
Aluminium paste is first printed in the back side using method for printing screen, is distributed in the position of the 5th step laser opening covered with linear
Aluminium paste (7 in such as Fig. 3), aluminium paste lines line width 150mm, the position of laser opening is completely covered in aluminium paste lines；Then it is carrying on the back
Face forms the silver-colored connection electrode (10 in such as Fig. 3) with positive connection electrode same shape and radical using method for printing screen.
7th step carries out metallization heat treatment process.In the process, using chain-type sintering furnace, it is sintered peak temperature 850
DEG C, this temperature is to survey the temperature of silicon chip surface.
Embodiment 2
The first step carries out surface-texturing to gallium doped monocrystaline silicon piece；This mixes gallium silicon chip opposite side distance for 156.75mm, a diameter of
210mm, not boracic in silicon chip, a concentration of 1 × 10 containing gallium15A atom/cubic centimetre.It is clear in slot type that gallium silicon chip is mixed to this monocrystalline
The texturing on surface is completed in washing machine using NaOH solution, pyramid structure is formed on surface.Wherein 80 DEG C of solution temperature continues
Time 10min.And pass through HF pickling, washing, drying and etc., remove surface metal ion.
Second step carries out emitter preparation.The preparation of pn-junction is completed in tubular type heating diffusion furnace tube, uses N2Carry POCl3
Source.Spread 850 DEG C of peak temperature, 90 minutes diffusion times.
Third walks, and carries out insulation processing.Insulation processing is completed in Chained cleaning machine, the mixing using HF acid and nitric acid is molten
Liquid, the removal back side can cause the N-shaped doped region of electric leakage around the N-shaped doped region formed and edge is expanded.In addition in this processing step
In also include HF pickling and remove positive phosphorosilicate glass.
4th step carries out front passivated reflection reducing and penetrates the preparation of film and the preparation of backside passivation film.It is enhanced using tubular type
Plasma gas-phase deposit carries out the deposition of silicon nitride, and double-layer silicon nitride is as passivation and antireflective coating.Wherein underlying silicon nitride is thick
Spend 20nm, refractive index 2.20, upper silicon nitride thickness 40nm, refractive index 1.95.Backside passivation film is aoxidized using atomic layer deposition
Aluminium and aluminium oxide upper strata are covered with silicon nitride.Wherein aluminium oxide thickness be 10nm, silicon nitride thickness 70nm, silicon nitride folding
It is 2.2 to penetrate rate.
5th step carries out local using laser to the back side and opens film, and using optical maser wavelength 1064nm, hot spot is 90um diameters
Circle, dense arrangement are in line linear, and line spacing is 1.6mm, and entire back surface is distributed in parallel linear.
6th step coats conductive material as required in the front and back of battery.We use silk screen in the present embodiment
Mode of printing carries out electrocondution slurry and is graphically coated with.Front uses the silver paste for penetrating silicon nitride as thin grid line slurry, thin grid line
Radical 100 (9 in such as Fig. 2), the direction of the thin grid in front are consistent with the rectilinear direction of the 5th step lbg；Connection electrode makes
With the non-electrocondution slurry for burning type silicon nitride, connection electrode radical 4 (8 in such as Fig. 2), connection electrode and thin grid line direction are mutual
It is perpendicular and be connected in intersection.
Aluminium paste is first printed in the back side using method for printing screen, is distributed in the position of the 5th step laser opening covered with linear
Aluminium paste (7 in such as Fig. 3), aluminium paste lines line width 150mm, the position of laser opening is completely covered in aluminium paste lines；Then it is carrying on the back
Face forms the silver-colored connection electrode (10 in such as Fig. 3) with positive connection electrode same shape and radical using method for printing screen.
7th step carries out metallization heat treatment process.In the process, using chain-type sintering furnace, it is sintered peak temperature 850
DEG C, this temperature is to survey the temperature of silicon chip surface.
Using gallium doped monocrystaline silicon piece prepared by the present invention as silicon substrate, being prepared into solar cell has preferable effect
Rate and relatively low light decay ratio.Light decay test result of the following table for the battery of above-mentioned two embodiment.Light decay test is surveyed
Strip part：Light intensity 1suns, 65 DEG C of environment temperature, the time is for 24 hours.
Table 1
Data show that the light decay of battery is controlled 3% hereinafter, preferably inhibiting light using the battery of the present invention in table 1
It declines.
Protection scope of the present invention is not limited to the above embodiments, for those of ordinary skill in the art, if
If the various changes and deformations that carried out to the present invention belong in the range of the claims in the present invention and equivalent technologies, the meaning of the present invention
Including figure is also changed and is deformed comprising these.
Claims (12)
1. a kind of monocrystalline mixes gallium double-side solar cell, which is characterized in that is included successively by front to the back side：Front electrode (6), just
Face antireflective coating/passivating film (3), emitter (2), monocrystalline mix gallium silicon base (1), back side antireflective coating/passivating film (4) and the back side
Electrode (5).
2. a kind of monocrystalline according to claim 1 mixes gallium double-side solar cell, which is characterized in that the monocrystalline mixes gallium silicon
The doping concentration of gallium element is 1 × 10 in substrate (1)13~1 × 1017A atom/cubic centimetre.
3. a kind of monocrystalline according to claim 1 mixes gallium double-side solar cell, which is characterized in that the monocrystalline mixes gallium silicon
For substrate (1) also doped with boron element, the doping concentration of boron element is 1 × 1013~1 × 1017A atom/cubic centimetre.
4. a kind of monocrystalline according to claim 1 mixes gallium double-side solar cell, which is characterized in that it is characterized in that, described
Front electrode include the thin grid line (9) in front, the thin grid line (9) in front by partial penetration front surface antireflection film/passivating film (3) or
Diaphragm area is opened by the part on front surface antireflection film/passivating film (3) to be in direct contact with emitter (2) formation.
5. a kind of monocrystalline according to claim 4 mixes gallium double-side solar cell, which is characterized in that the front electrode
(6) positive connection electrode (8) is further included, the thin grid line (9) in front is orthogonal with positive connection electrode (8) and is connected in intersection
It connects.
6. a kind of monocrystalline according to claim 1 mixes gallium double-side solar cell, which is characterized in that the backplate
(5) including the thin grid line in the back side (7)；The thin grid line in the back side (7) mixes gallium silicon base (1) rear-face contact with monocrystalline.
7. a kind of monocrystalline according to claim 6 mixes gallium double-side solar cell, which is characterized in that the thin grid line in the back side
(7) it is the electrode containing aluminium, formation doped chemical is mixed for the hole of aluminium between the thin grid line in the back side (7) and monocrystalline mix gallium silicon base (1)
Diamicton, the thickness of hole doping layer is 1~15um.
8. a kind of monocrystalline according to claim 7 mixes gallium double-side solar cell, which is characterized in that the hole doping layer
In also doped with boron, boron element doping concentration is 5 × 1016~1 × 1021A atom/cubic centimetre.
9. a kind of monocrystalline according to claim 7 mixes gallium double-side solar cell, which is characterized in that the hole doping layer
One layer of alusil alloy layer is further included between the thin grid line in the back side (7), alusil alloy layer thickness is 1~5um.
10. a kind of monocrystalline according to claim 6 to 9 any one mixes gallium double-side solar cell, which is characterized in that described
Backplate (5) further include back side connection electrode (10), back side connection electrode (10) is hung down mutually with the back side thin grid line (7) direction
Direct join is connected in intersection.
11. a kind of monocrystalline according to claim 1 mixes gallium double-side solar cell, which is characterized in that the positive anti-reflection
Film/passivating film (3) is penetrated as one or more lamination structures in silica, silicon nitride, silicon oxynitride, aluminium oxide and carborundum films
Into；Backside passivation film (4) is one or more laminations in silica, silicon nitride, silicon oxynitride, aluminium oxide and carborundum films
It forms；Back side antireflective coating (5) is one or more in silica, silicon nitride, silicon oxynitride, aluminium oxide and carborundum films
Lamination is formed.
12. the monocrystalline described in a kind of claim 1 to 11 any one mixes the preparation method of gallium double-side solar cell, feature exists
In including the following steps：
1) it mixes monocrystalline gallium silicon base (1) and carries out surface-texturing and cleaning；
2) gallium silicon base (1) front is mixed in monocrystalline to carry out preparing emitter (2)；
3) it mixes monocrystalline gallium silicon base (1) and carries out edge insulation processing；
4) it mixes monocrystalline the positive back side of gallium silicon base (1) and carries out front surface antireflection film/passivating film (3) and backside passivation film (4) respectively
Preparation；
5) local is overleaf carried out on passivating film (4) and opens film；
6) monocrystalline is mixed gallium silicon base (1) front, the back side carry out electrocondution slurry be graphically coated with；
7) it carries out metallization heat treatment process and prepares front electrode (6) and backplate respectively.
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