CN108172489A - Suitable for the cold cathode X-ray tube cathode grid component and production method of silk screen printing process - Google Patents
Suitable for the cold cathode X-ray tube cathode grid component and production method of silk screen printing process Download PDFInfo
- Publication number
- CN108172489A CN108172489A CN201711433269.9A CN201711433269A CN108172489A CN 108172489 A CN108172489 A CN 108172489A CN 201711433269 A CN201711433269 A CN 201711433269A CN 108172489 A CN108172489 A CN 108172489A
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- Prior art keywords
- cathode
- grid
- pedestal
- substructure
- cold cathode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/045—Electrodes for controlling the current of the cathode ray, e.g. control grids
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
- H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
- H01J9/18—Assembling together the component parts of electrode systems
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Cold Cathode And The Manufacture (AREA)
Abstract
The present invention discloses a kind of cold cathode X-ray tube cathode grid component suitable for silk screen printing process, including grid pedestal, cathode substructure, ceramic gasket, cold cathode, aperture plate and notched grid flange, cathode substructure is fixed on grid pedestal, and is equipped with ceramic gasket therebetween and is insulated；Cold cathode is formed by conductive silver paste and field emmision material silk-screen on cathode substructure；Grid flange is fixed on grid pedestal, and aperture plate point is welded in the groove of grid flange.Invention additionally discloses a kind of production methods of cathode grid component, and by cathode substructure assembling on grid pedestal, grid pedestal and cathode substructure are insulated by ceramic gasket；Successively conductive silver paste and field emmision material are transferred on cathode substructure using stencil at room temperature, cold cathode is made；After aperture plate point is welded in the groove of grid flange, grid flange and grid pedestal are screwed.Such technical solution can be used directly silk screen printing process and prepare cathode emission material, while ensure assembly precision.
Description
Technical field
The invention belongs to cold cathode electron source domain, more particularly to a kind of cold cathode X that can be adapted for silk screen printing process is penetrated
Spool cathode grid component and preparation method thereof.
Background technology
X ray is by the electron bombardment after accelerating to metal surface, and the kinetic energy of electrical losses is inspired in the form of photon
Come and generate.Since X ray has very strong penetration performance, widely should have in fields such as medical treatment, industrial flaw detection, safety checks
With.X ray is usually generated by X-ray tube, and different according to the principle for generating electronics, X-ray tube is broadly divided into Coolidge tube
With two kinds of cold cathode X-ray tube.Coolidge tube is to obtain electricity by way of heating cathode tungsten filament and making electron-hit emitting
Son, and cold cathode X-ray tube is then by field-emission principles, applies highfield on cathode emission material surface to reduce material
Barrier height and width, escape electronics to form transmitting using tunnel-effect.Relative to hot cathode, cold cathode X-ray tube tool
There is small, high resolution, can quickly start and the advantages that relative power consumption is relatively low, it has also become the hot spot of research.
Cold cathode X-ray tube is mainly made of three cathode, grid and anode parts.Cathode is usually selected as electron source
Good with electric conductivity, Turn-on voltage is low, has the material of good emitting performance, such as carbon nanotube (CNTs), nano oxidized
Zinc etc..Grid is usually reticular structure, and anode is then usually prepared with the metal material of the high transformation efficiency such as tungsten.On grid
After applying voltage, higher electric field can be formed in cathode surface, is passed through at the mesh of grid after cathode electronics transmitting, in height
Anode voltage up to ten thousand volts accelerates in lower bombardment to anode target so as to inspire X ray.
From the operation principle of cold cathode X-ray tube it is found that the high electric-field intensity between cathode grid is to improve electron emission capability
Key.In order to reduce the manufacture difficulty of gate voltage control circuit, grid voltage is generally hundreds of between thousands of volts.Cause
This, will obtain sufficiently high cathode grid electric field, need to control the distance between cathode grid in submillimeter magnitude, generally 0.3
~0.5mm, this proposes very high required precision to assembling.Meanwhile electron beam spot size realizes Microfocus X-ray X ray in order to control
Imaging, other than using focusing electrode, emission of cathode diameter general control is in 1mm hereinafter, therefore frequently with silk-screen printing uniform thickness
Prepared by membrane process, this preparation method can also improve the uniformity of emission of cathode.In traditional architectures, cathode is usually located at grid
Below pole, cloudy grid spacing depends on the difference in height of grid base upper surface and cathode.It is thus impossible to first assembling cathode substructure makes again
Cathode is prepared with thick-film technique, and the silk-screen cathode material on the cathode substructure of grade diameter, this is not only to fixed and contraposition
Great difficulty is brought, damage cathode material is also easy in assembling process, can not more crucially pass through subsequent cathode
Susceptor surface handles to ensure cathode grid spacing.Therefore, the present invention proposes a kind of cathode grid structure, can pass through first pre-assembled
Cathode substrate and grid pedestal ensure that cathode substrate is concordant with grid base upper surface by being machined mode, then can be with
Cathode is prepared on cathode substrate surface using ripe silk screen printing process.Cathode grid spacing then can be by grid flange undersurface
The depth of groove opened controls.
Invention content
The purpose of the present invention is to provide a kind of cold cathode X-ray tube cathode grid component and system suitable for silk screen printing process
Make method, silk screen printing process can be used directly and prepare cathode emission material, while ensure assembly precision.
In order to achieve the above objectives, solution of the invention is：
A kind of cold cathode X-ray tube cathode grid component suitable for silk screen printing process, including grid pedestal, cathode substructure, pottery
Porcelain gasket, cold cathode, aperture plate and notched grid flange, wherein, cathode substructure is fixed on grid pedestal, and the two it
Between be equipped with ceramic gasket insulate；Cold cathode is formed by conductive silver paste and field emmision material silk-screen on cathode substructure；Grid method
Orchid is fixed on grid pedestal, and aperture plate point is welded in the groove of grid flange.
Above-mentioned grid pedestal, cathode substructure and grid flange are the homogenous metal part suitable for vacuum, the aperture plate by
Stainless steel or molybdenum are processed into.
Above-mentioned cold cathode thickness is 10~30 microns, and diameter is less than 1 millimeter.
Above-mentioned aperture plate thickness is 50 microns.
The depth of groove of above-mentioned grid flange is 0.3~0.5 millimeter.
A kind of production method of cold cathode X-ray tube cathode grid component suitable for silk screen printing process, includes the following steps：
Step 1, by cathode substructure assembling on grid pedestal, grid pedestal and cathode substructure are insulated by ceramic gasket；
Step 2, successively conductive silver paste and field emmision material are transferred on cathode substructure using stencil at room temperature and made
Into cold cathode；
Step 3, after aperture plate point is welded in the groove of grid flange, grid flange and grid pedestal are consolidated by screw
It is fixed.
In above-mentioned steps 1, cathode substructure is assemblied in by screw on grid pedestal, and potsherd is used between screw and grid pedestal
Insulation.
In above-mentioned steps 1, it is desirable that cathode substructure and grid susceptor surface are highly consistent.
The detailed content of above-mentioned steps 2 is：By on conductive silver paste silk-screen to cathode substructure, through 250 DEG C in atmospheric environment
Baking forms silver-colored transition zone after 1 hour after, then silk-screen has the Flied emission slurry of certain geometrical shape on transition zone, and big
250 DEG C of bakings are sintered 0.5~1 hour for 1 hour and 400 DEG C in compression ring border, and field emission cold-cathode is made.
In above-mentioned steps 2, field emmision material uses one or more in carbon nanotube, nano zine oxide and carbon fiber
Mixture.
After using the above scheme, the present invention has following remarkable advantage：
(1) cutting of the invention inside grid flange, can ensure the groove depth in 0.3~0.5mm by machining accuracy
Between.Since cathode and grid spacing are determined by depth of groove, higher cloudy grid launching site is obtained in submillimeter magnitude
By force；
(2) cathode surface and grid susceptor surface are highly consistent, and first cathode substrate can be assembled, and add by machinery
After the mode of work adjusts reduction error, then the system of CNTs is directly carried out using thick-film techniques such as silk-screen printings on cathode substrate surface
It is standby, first prepare the error brought when cathode reassembles and the damage to cathode emission material so as to solve；
(3) thick-film techniques such as silk-screen printing prepare the cathode emission material of small size, not only contribute to improve transmitting uniformly
Property, being also beneficial to, which reduces electron beam spot size, is expected to realize Microfocus X-ray x-ray imaging.
Description of the drawings
Fig. 1 is the cathode grid component structure diagram of the present invention；
Wherein, 1 it is aperture plate flange, 2 be aperture plate, 3 be cold cathode, 4 be cathode substructure, 5 be ceramic gasket, 6 is grid bottom
Seat；
Fig. 2 is the vertical view of grid flange；
Fig. 3 is the vertical view of aperture plate.
Specific embodiment
Below with reference to attached drawing, technical scheme of the present invention and advantageous effect are described in detail.
As shown in Figure 1 to Figure 3, the present invention provides a kind of cold cathode X-ray tube cathode grid component suitable for silk screen printing process,
It is assemblied including grid pedestal 6, cathode substructure 4, ceramic gasket 5, cold cathode 3, aperture plate 2 and notched grid flange 1,
Wherein, grid pedestal 6, cathode substructure 4 and grid flange 1 be stainless steel etc. be suitable for vacuum homogenous metal part, aperture plate 2 by
Stainless steel or molybdenum are processed into.
Wherein, 3 thickness of cold cathode is 10~30 microns, and diameter is less than 1 millimeter.
Wherein, 2 thickness of aperture plate is 50 microns.
Wherein, the depth of groove of the grid flange 1 is 0.3~0.5 millimeter.
The present invention also provides a kind of production method of above-mentioned cathode grid component, manufacturing process is：
First, grid flange, grid pedestal, aperture plate and cathode substructure accessory are processed respectively using stainless steel, uses ceramics
Prepare ceramic gasket.Cathode substructure is assembled by screw on grid pedestal, grid pedestal and cathode substructure pass through ceramic blanket
Piece insulate, and is insulated between screw and grid pedestal with potsherd.The cathode substrate assembled and grid pedestal are machined
Ensure that surface both is highly consistent.
At room temperature, by conductive silver paste silk-screen to cathode substructure, in atmospheric environment after 250 DEG C of bakings 1 hour shape
Into after silver-colored transition zone, then on transition zone silk-screen carbon nano tube paste, diameter be less than 1mm.250 DEG C of bakings in atmospheric environment
It bakes 1 hour, 400 DEG C after being sintered 0.5~1 hour, forms the cold cathode emission layer that thickness is 20 microns.
Open the circular groove of a depth 0.35mm in the inside of grid flange, and by the round aperture plate spot welding of thickness 0.05mm
It is fixed in groove.Grid flange and grid pedestal are fixed by screw, obtain the cathode grid emitting module that assembling is completed,
The distance between middle cathode grid subtracts aperture plate thickness, i.e. 0.3mm for the depth of groove.
The present invention operation principle be：In cathode grid component, insulated between cathode and grid pedestal by ceramic gasket, it is cloudy
Pole and grid spacing are determined by depth of groove.The cathode grid component and anode target that assemble are encapsulated together and inside vacuumizes,
X-ray tube is made.During work, apply voltage on grid pedestal, minus earth, grid pedestal, grid flange and aperture plate are mutual
It contacts and forms equipotential, under forceful electric power field action of the cold-cathode material between cathode grid, effusion becomes freely electron emission from surface
Electronics through aperture plate mesh and is being accelerated as high energy electron outside plus under the action of anode high voltage, and bombardment makes it to anode target material
Inspire X ray.
Summary, cathode grid component of the invention are adjusted by regulating and controlling the depth of groove of grid flange between grid cathode
Away from can obtain that high field is strong at the lower voltage, be conducive to improve the tube current of X-ray tube；By first assembling cathode substructure
It controls its apparent height consistent again with grid pedestal, meets the cold cathode silk screen printing process requirement of small area, solve cold cathode
Process difficulties prepared by Microfocus X-ray X-ray tube.The cold cathode cathode grid component can be widely applied to X ray fast imaging or micro- coke
Point imaging field.The present invention not only can ensure the higher dress of submillimeter the moon grid spacing by controlling the depth of groove of grid flange
With accuracy requirement, moreover it is possible to it is compatible with the existing silk screen printing process for preparing cold cathode, electron beam spot size can be reduced and improve hair
Radio stream, to meet the imaging demand of cold cathode X-ray tube.
Above example is merely illustrative of the invention's technical idea, it is impossible to protection scope of the present invention is limited with this, it is every
According to technological thought proposed by the present invention, any change done on the basis of technical solution each falls within the scope of the present invention
Within.
Claims (10)
1. a kind of cold cathode X-ray tube cathode grid component suitable for silk screen printing process, it is characterised in that：Including grid pedestal, the moon
Pole pedestal, ceramic gasket, cold cathode, aperture plate and notched grid flange, wherein, cathode substructure is fixed on grid pedestal
On, and be equipped with ceramic gasket therebetween and insulate；Cold cathode by conductive silver paste and field emmision material silk-screen on cathode substructure and
It is formed；Grid flange is fixed on grid pedestal, and aperture plate point is welded in the groove of grid flange.
2. it is suitable for the cold cathode X-ray tube cathode grid component of silk screen printing process as described in claim 1, it is characterised in that：Institute
It is the homogenous metal part suitable for vacuum to state grid pedestal, cathode substructure and grid flange, and the aperture plate is by stainless steel or molybdenum
It is processed into.
3. it is suitable for the cold cathode X-ray tube cathode grid component of silk screen printing process as described in claim 1, it is characterised in that：Institute
It is 10~30 microns to state cold cathode thickness, and diameter is less than 1 millimeter.
4. it is suitable for the cold cathode X-ray tube cathode grid component of silk screen printing process as described in claim 1, it is characterised in that：Institute
It is 50 microns to state aperture plate thickness.
5. it is suitable for the cold cathode X-ray tube cathode grid component of silk screen printing process as described in claim 1, it is characterised in that：Institute
The depth of groove for stating grid flange is 0.3~0.5 millimeter.
6. the production method of a kind of cold cathode X-ray tube cathode grid component suitable for silk screen printing process, it is characterised in that including such as
Lower step：
Step 1, by cathode substructure assembling on grid pedestal, grid pedestal and cathode substructure are insulated by ceramic gasket；
Step 2, successively conductive silver paste and field emmision material be transferred on cathode substructure using stencil at room temperature be made it is cold
Cathode；
Step 3, after aperture plate point is welded in the groove of grid flange, grid flange and grid pedestal are screwed.
It is 7. special as claimed in claim 6 suitable for the production method of the cold cathode X-ray tube cathode grid component of silk screen printing process
Sign is：In the step 1, cathode substructure is assemblied in by screw on grid pedestal, and potsherd is used between screw and grid pedestal
Insulation.
It is 8. special as claimed in claim 6 suitable for the production method of the cold cathode X-ray tube cathode grid component of silk screen printing process
Sign is：In the step 1, it is desirable that cathode substructure and grid susceptor surface are highly consistent.
It is 9. special as claimed in claim 6 suitable for the production method of the cold cathode X-ray tube cathode grid component of silk screen printing process
Sign is that the detailed content of the step 2 is：By on conductive silver paste silk-screen to cathode substructure, dried in atmospheric environment through 250 DEG C
After silver-colored transition zone is formed after 1 hour roasting, then silk-screen has the Flied emission slurry of certain geometrical shape on transition zone, and in air
250 DEG C of bakings are sintered 0.5~1 hour for 1 hour and 400 DEG C in environment, and field emission cold-cathode is made.
10. it is suitable for the production method of the cold cathode X-ray tube cathode grid component of silk screen printing process as claimed in claim 6,
It is characterized in that：In the step 2, field emmision material uses one or more in carbon nanotube, nano zine oxide and carbon fiber
Mixture.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711433269.9A CN108172489A (en) | 2017-12-26 | 2017-12-26 | Suitable for the cold cathode X-ray tube cathode grid component and production method of silk screen printing process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711433269.9A CN108172489A (en) | 2017-12-26 | 2017-12-26 | Suitable for the cold cathode X-ray tube cathode grid component and production method of silk screen printing process |
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| Publication Number | Publication Date |
|---|---|
| CN108172489A true CN108172489A (en) | 2018-06-15 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711433269.9A Pending CN108172489A (en) | 2017-12-26 | 2017-12-26 | Suitable for the cold cathode X-ray tube cathode grid component and production method of silk screen printing process |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203644725U (en) * | 2013-07-24 | 2014-06-11 | 南京康众光电科技有限公司 | Grid control cold cathode X ray tube |
| CN104810225A (en) * | 2015-05-26 | 2015-07-29 | 电子科技大学 | Cold cathode electron source array with external grid and electron gun comprising same |
| CN205542692U (en) * | 2015-12-29 | 2016-08-31 | 无锡吉仓纳米材料科技有限公司 | Focus type tripolar structure encapsulates X ray bulb entirely based on carbon nanotube cold cathode |
-
2017
- 2017-12-26 CN CN201711433269.9A patent/CN108172489A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203644725U (en) * | 2013-07-24 | 2014-06-11 | 南京康众光电科技有限公司 | Grid control cold cathode X ray tube |
| CN104810225A (en) * | 2015-05-26 | 2015-07-29 | 电子科技大学 | Cold cathode electron source array with external grid and electron gun comprising same |
| CN205542692U (en) * | 2015-12-29 | 2016-08-31 | 无锡吉仓纳米材料科技有限公司 | Focus type tripolar structure encapsulates X ray bulb entirely based on carbon nanotube cold cathode |
Non-Patent Citations (1)
| Title |
|---|
| 昌盛成: "场致发射X射线管中栅极结构的设计与仿真", 《2016真空电子学分会第二十届学术年会论文集（下）》 * |
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Application publication date: 20180615 |