CN103400739B - Pointed cone array cold cathode X-ray tube with large emission area field emission composite material - Google Patents
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- CN103400739B CN103400739B CN201310340892.5A CN201310340892A CN103400739B CN 103400739 B CN103400739 B CN 103400739B CN 201310340892 A CN201310340892 A CN 201310340892A CN 103400739 B CN103400739 B CN 103400739B
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- 239000002131 composite material Substances 0.000 title claims description 20
- 239000000758 substrate Substances 0.000 claims abstract description 16
- 238000000605 extraction Methods 0.000 claims description 16
- 239000000463 material Substances 0.000 claims description 15
- 230000004888 barrier function Effects 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 5
- 239000004020 conductor Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
- 238000003384 imaging method Methods 0.000 abstract description 9
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- 230000005855 radiation Effects 0.000 description 6
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- 238000005265 energy consumption Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 4
- 230000008020 evaporation Effects 0.000 description 4
- 238000010438 heat treatment Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000010406 cathode material Substances 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000010849 ion bombardment Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000000137 annealing Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 1
- 229910052779 Neodymium Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
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- 230000008094 contradictory effect Effects 0.000 description 1
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- 238000010586 diagram Methods 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 1
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Abstract
The cathode component comprises a plurality of continuously spliced pointed cone array cold cathode sheets, each pointed cone array cold cathode comprises a substrate, an inner grid sheet and a plurality of sub-cathodes distributed on the substrate and arranged in an array shape, the inner grid sheet is positioned above the sub-cathodes, and inner grid holes corresponding to the positions of the sub-pointed cone array cold cathodes one by one are formed in the center of the inner grid sheet; an insulating layer is arranged between the substrate and the inner grid pole piece; the cathode component also comprises an electric connection pressing structure for fixing a plurality of pointed cone array cold cathode sheets and leading out electrodes. The invention overcomes the problem of poor consistency of the pointed cone array at the center point and the edge of the array when a single large-area cathode pointed cone array is prepared at one time, and simultaneously meets the requirement of an X-ray tube on emission current when large X-ray dose is output so as to obtain high-quality X-ray imaging.
Description
Technical field
The invention belongs to physical electronic field, relate to a kind of pointed cone array cold cathode X-ray tube with big emission area Flied emission composite.
Background technology
At the various X-ray equipments that medical treatment, medical diagnosis, industrial detection, safe practice etc. relate to, need high performance X-ray tube.One of core devices as X-ray imaging device, X-ray tube is in addition to should possessing the feature such as good imaging quality, stable and reliable in work, length in service life, and along with development in science and technology, for miniaturization, the demand of the high-quality X-ray tube of low energy consumption is more and more prominent.
Existing X-ray tube is primarily present problems with:
1, traditional CT bulb uses the rotating anode target of composite, and the big structure of volume is complicated；Cost is high.2, the single-screw tungsten cathode that the many employings of existing X-ray tube are traditional, work function high (4.52eV), the moon
Pole operating temperature is high, energy efficiency is low, ineffective radiation dosage is big, it is uneven to launch.
If 3 in order to improve cathode emission current density, need to improve negative electrode operating temperature, make the evaporation rate of cathode material increase.Cathode material evaporation can make tungsten filament attenuate, and the tungsten cathode after attenuating can cause again cathode temperature to raise, evaporation aggravation ..., form vicious cycle, cathode life shortens.
4, the tungsten cathode material of evaporation is deposited on shell, forms continuous conduction thin film, destroys the dielectric strength of X-ray tube, make pipe scrap；
5, after the tungsten material evaporated is deposited on shell, blocks the X-ray intensity of output window, reduce image quality.
Being experimentally confirmed, the electron beam quality of Flied emission is fine, and the utilization rate launching electronics is the highest, can reduce invalid radiation dose, and running parameter is: 73KV-58 microampere, just can be with imaging at the least X-ray dosage.
Recently as the progress of nano material technology, occur in that the application of CNT, but, based on CNT(CNT) negative electrode mini X-ray pipe exist output X-ray dosage the least, it is impossible to obtain high-quality imaging；Density and the high homogeneity of CNT are poor, and emission uniformity is poor, easily strikes sparks；Poor reliability, life-span are short.
In test, direct-current emission total current can't reach 1mA, just occurs that when reaching 1mA sparking is burnt.
To obtain bigger X-ray dosage, need negative electrode to have bigger emission and total emission area, but owing to technique limits, the cathode array of preparation larger area, concordance it is difficult to ensure that.
Summary of the invention
The little area cathode of field emission tube for overcoming prior art can not meet heavy dose of X-ray needs, the technological deficiency of large area cathode concordance difference, the invention discloses a kind of pointed cone array cold cathode X-ray tube with big emission area Flied emission composite.
The pointed cone array cold cathode X-ray tube with big emission area Flied emission composite of the present invention, including cathode assembly；Described cathode assembly includes the pointed cone array cold cathode sheet that multi-disc is spliced continuously, described pointed cone array cold cathode sheet includes substrate, inner grid sheet and is distributed in substrate many sub-negative electrodes of the arrangement in array configuration, described inner grid sheet is positioned at above sub-negative electrode, and inner grid sheet central authorities have cathode site with pointed cone inner grid hole one to one；Insulating barrier is also had between described substrate and inner grid sheet；Described cathode assembly also includes fixing multiple pointed cone array cold cathode sheets and has the electrical connection compressing structure of extraction electrode.
The pointed cone array cold cathode X-ray tube with big emission area Flied emission composite of the present invention, when overcoming owing to disposably preparing monolithic bulk negative electrode pointed cone array, the problem that array center's point is poor with the pointed cone array consistency of edge, meet X-ray tube when big X-ray dosage exports, for the requirement of emission current simultaneously；High-quality X-ray imaging can be obtained.
Concrete, described electrical connection compressing structure includes negative electrode horse and the inner grid tabletting that negative electrode tabletting, conductor material make, and described pointed cone array cold cathode sheet is positioned at negative electrode horse；Described inner grid tabletting is pressed on above the marginal portion of inner grid sheet, and described negative electrode tabletting is pressed on above insulating barrier edge；Described inner grid tabletting electrically connects with inner grid extraction electrode, and described negative electrode horse electrically connects with negative electrode extraction electrode.
Using said structure, negative electrode need not heating, and emission is big, launches uniform, stable, and reliability is high；Considerably reduce ineffective radiation dosage；Make device be more easy to miniaturization, save again energy consumption.
Further, described inner grid tabletting and negative electrode tabletting quantity are two panels, lay respectively at the both sides of pointed cone array cold cathode sheet.
Further, there is insulation distance, described insulation distance a length of 1-4 millimeter between described inner grid sheet and negative electrode tabletting.
Preferably, described cathode assembly also includes outer grid and outer grid lead hole, and described outer grid is positioned at above inner grid sheet, and described outer grid has electron exit hole, and described outer grid electrically connects with outer grid lead hole.
Leading to certain negative voltage to outer grid by outer grid lead hole, the surface of emission of the electronics that makes to be excited is restrained, and electronics increases from the probability of electron exit hole outgoing, and the electron amount arriving anode increases.
Further, the electron exit hole cross-sectional area of described outer grid is with being gradually increased the most from low to high.
Further, the distance of the described sub-negative electrode of outer gate distance is 0.2 ~ 0.4mm.
Preferably, described sub-negative electrode is cone-shaped, and the cone tip portion of described sub-negative electrode is emission of cathode layer, and remainder is negative electrode transition zone, and described negative electrode buffer layer material is molybdenum, and described base material is silicon.
Further, described emission of cathode layer is binary hexaboride or polynary hexaboride.
Using binary hexaboride or polynary hexaboride as cathode emission material, have relatively low work function and good chemical stability, emission is big, and resistance to ion bom bardment improves stability in use and the life-span of homogeneous tube.
Use the pointed cone array cold cathode X-ray tube with big emission area Flied emission composite of the present invention, first prepare monolithic little area cathode pointed cone array, the mode using multi-disc precision to splice again prepares large area pointed cone array cathode, when overcoming owing to disposably preparing monolithic bulk negative electrode pointed cone array, the problem that array center's point is poor with the pointed cone array consistency of edge, meet X-ray tube when big X-ray dosage exports simultaneously, for the requirement of emission current, to obtain high-quality X-ray imaging.
Accompanying drawing explanation
Fig. 1 is a kind of detailed description of the invention structural representation of a kind of pointed cone array cold cathode X-ray tube with big emission area Flied emission composite of the present invention；
Fig. 2 illustrates a kind of detailed description of the invention structural representation of cathode assembly of the present invention；
Fig. 3 illustrates a kind of detailed description of the invention vertical section schematic diagram of cathode assembly of the present invention；
In figure, reference is entitled: the outer grid 4-cathode assembly 5-inner grid extraction electrode 6-pedestal 7-negative electrode extraction electrode 8-insulating ceramics 9-trip bolt 10-stem stem 11-shell 12-anode tap screw 13-pointed cone array cold cathode sheet 14-negative electrode horse 15-inner grid tabletting 16-negative electrode tabletting 17-emission of cathode layer 18-negative electrode transition zone 19-inner grid sheet 20-substrate 21-insulating barrier 31-electron exit hole of 1-anode component 2-tungsten target 3-.
Detailed description of the invention
Below in conjunction with the accompanying drawings, the detailed description of the invention of the present invention is described in further detail.
The pointed cone array cold cathode X-ray tube with big emission area Flied emission composite of the present invention, including cathode assembly；Described cathode assembly includes the pointed cone array cold cathode sheet that multi-disc is spliced continuously, described pointed cone array cold cathode sheet includes substrate, inner grid sheet and is distributed in substrate many sub-negative electrodes of the arrangement in array configuration, described inner grid sheet is positioned at above sub-negative electrode, and inner grid sheet central authorities have cathode site with pointed cone inner grid hole one to one；Insulating barrier is also had between described substrate and inner grid sheet；Described cathode assembly also includes fixing multiple pointed cone array cold cathode sheets and has the electrical connection compressing structure of extraction electrode.
A detailed description of the invention such as Fig. 2 to cathode assembly shown by 3, cathode assembly is spliced continuously by the pointed cone array cold cathode sheet of 4 rectangular shapes, pointed cone array cold cathode sheet by substrate, be distributed in suprabasil many sub-negative electrodes and be positioned at the inner grid sheet above sub-negative electrode and form, multiple inner grid hole, every corresponding inner grid hole of sub-negative electrode is had on inner grid sheet.Using the pointed cone array cold cathode sheet of said structure as electron emitter, negative electrode need not heating, and emission is big, launches uniform, stable, and reliability is high；Considerably reduce ineffective radiation dosage；Make device be more easy to miniaturization, save again energy consumption.
During use, inner grid applies highfield to negative electrode, and sub-negative electrode discharges electronics under highfield power effect, and electronics is escaped by the inner grid hole on inner grid sheet, and is accelerated by highfield.
Pointed cone array cold cathode sheet is after splicing, by certain way, multi-disc pointed cone array cold cathode sheet is fixed in cathode assembly, and the inner grid and sub-negative electrode to pointed cone array cold cathode sheet forms unified electrical connection, such as can be in the way of using directly welding or wire connection.
Time prepared by negative electrode, first prepare the pointed cone array cold cathode sheet of the little area of monolithic, the mode using multi-disc precision to splice again prepares large area cathode, when overcoming owing to disposably preparing monolithic bulk cathode array, the problem that the sub-negative electrode of array center's point is poor with the sub-negative electrode concordance of edge, meet X-ray tube when big X-ray dosage exports, for the requirement of emission current, to obtain high-quality X-ray imaging simultaneously.
The present invention provides a kind of electrical connection compressing structure preferably pointed cone array cold cathode sheet fixed and electrically connected.Described electrical connection compressing structure includes negative electrode horse and the inner grid tabletting that negative electrode tabletting, conductor material make, and described pointed cone array cold cathode sheet is positioned at negative electrode horse；Described inner grid tabletting is pressed on above the marginal portion of inner grid sheet, and described negative electrode tabletting is pressed on above insulating barrier edge；Described inner grid tabletting electrically connects with inner grid extraction electrode, and described negative electrode horse electrically connects with negative electrode extraction electrode.
As shown in Figure 1, the inner grid sheet of four pointed cone array cold cathode sheets is compressed by inner grid tabletting, negative electrode tabletting is pressed at pointed cone array cold cathode sheet insulating barrier marginal position, the pointed cone array cold cathode sheet that multi-disc is spliced continuously is fixed in negative electrode horse, inner grid is by inner grid tabletting and inner grid extraction electrode UNICOM, and negative electrode horse and negative electrode extraction electrode electrically connect as one.Negative electrode tabletting and inner grid tabletting can use symmetrical two panels to be arranged in parallel, and fixed effect is more preferable.It is high that above-mentioned electrical connection compressing structure compresses firmness to the pointed cone array cold cathode sheet of splicing form, the electrical connection formed is reliable, the inner grid tabletting that conductor material is made is big with every inner grid sheet fitting area, it is provided that bigger current driving ability drives inner grid to reach high pressure.
Owing to inner grid voltage is higher, certain insulation distance should be set between inner grid sheet and negative electrode tabletting, it is to avoid puncture short.Insulation distance is generally located on 1-4 millimeter, can guarantee that insulation safety, avoids again device size excessive simultaneously.
Sub-negative electrode in pointed cone array cold cathode sheet uses sharp conical shape, and pointed cone height can take 0.75-1 μm, and cone tip portion is emission of cathode layer, and remainder is negative electrode transition zone.Silicon can be used as base material, and the material of negative electrode transition zone can select molybdenum, and after high-temperature processing technology, silicon base is combinable with molybdenum the most firm, and molybdenum is the highest with the degree of being firmly combined with of boride simultaneously.
The emission of cathode layer of sub-negative electrode preferably employs binary hexaboride or polynary hexaboride material, and binary hexaboride is form such as MB6Compound, M is rare earth element, such as six boronation caesiums, neodymium hexaboride, lanthanum hexaboride etc.；Polynary hexaboride is form such as M1-xNxB6Hexaboride, wherein M, N represent different rare earth elements；Thus improve pointed cone stability under highfield effect, simultaneously as binary hexaboride or polynary hexaboride material have relatively low work function and good chemical stability, emission is big, resistance to ion bom bardment, improves stability in use and the life-span of homogeneous tube.
When cathode electronics is excited, electron exit direction has certain randomness, launches face width, causes only part electronics to attracted to anode.Arrive the probability of anode for increasing cathode electronics, in another embodiment of the present invention, cathode assembly is also provided with outer grid and the outer grid lead hole electrically connected with outer grid, described outer grid has electron exit hole.
During use, leading to certain negative voltage to outer grid by outer grid lead hole, the surface of emission of the electronics that makes to be excited is restrained, and electronics increases from the probability of electron exit hole outgoing, and the electron amount arriving anode increases.
Above-mentioned outer grid can use the electron exit hole shape of V-arrangement, electron exit hole cross-sectional area is with being gradually increased the most from low to high, less near the part aperture of negative electrode, relatively big near the part aperture of anode, can reach preferably to retrain electron motion direction and point to the effect of anode.
Flied emission X-ray tube use time due to inner grid voltage higher, in order to obtain highfield, the distance of inner grid and sub-negative electrode is extremely near, because the distance of grid and sub-negative electrode in addition is approximately equal to and inner grid distance, for avoiding puncturing between inner grid and outer grid, distance can not be the shortest, and decline apart from the oversize restraining forces to emission of cathode electronics, inventor is through overtesting, in the range of preferably this distance being arranged on 2-4 millimeter, electrical breakdown both will not occur, again can be stronger to electron confinement power.
With pointed cone array sizes as 1mm × 4mm field emission cold-cathode as a example by, the detailed description of the invention of the present invention is described in further detail.
First prepare 4 pointed cone array cold cathode sheets with 1mm × 1mm field emission cold-cathode array, the inner grid of cathode sheets marginal position is etched away, exposes insulating barrier, make inner grid sheet be not covered with whole insulating barrier or substrate.4 pointed cone array cold cathode sheet precisions are stitched together, it is pressed in the insulating barrier position of cathode sheets by negative electrode tabletting and is fixed in negative electrode horse, by the inner grid sheet of 4 pointed cone array cold cathode sheets by inner grid tabletting and inner grid extraction electrode UNICOM, negative electrode horse is welded as a whole with negative electrode extraction electrode, collectively constitute cathode assembly, negative electrode extraction electrode is fixed together with insulating ceramics, with trip bolt, insulating ceramics is fixed on pedestal 6, again by outer gate solder on pedestal, form cathode assembly, cathode assembly and stem stem are welded together standby.Tungsten target 2 being welded on anode formation anode component 1 standby, anode component top has anode tap screw 12, is used for drawing anode tap.By special glass process equipment, glass processing is become the structure of shell 11.By conventional X-ray tube glass sealing method, by anode component together with the sealing by fusing of shell upper end, stress relieving by annealing is standby；Again by stem stem together with the sealing by fusing of shell lower end, stress relieving by annealing.Element manufacturing is completed finally by conventional X-ray tube Making programme.
Use the X-ray tube with big emission area Flied emission composite cold cathode of the present invention, there is following superiority:
1. use the X-ray tube with big emission area Flied emission composite cold cathode of the present invention, first prepare monolithic little area cathode pointed cone array, the mode using multi-disc precision to splice again prepares large area pointed cone array cathode, when overcoming owing to disposably preparing monolithic bulk negative electrode pointed cone array, the problem that array center's point is poor with the pointed cone array consistency of edge, meet X-ray tube when big X-ray dosage exports, for the requirement of emission current, to obtain high-quality X-ray imaging simultaneously.
2. using inner grid sheet and cathode sheets combination as electron emitter, negative electrode need not heating, and emission is big, launches uniformly, stablizes, and reliability is high；Considerably reduce ineffective radiation dosage；Make device be more easy to miniaturization, save again energy consumption.
3. increasing outer grid constraint electron motion direction, make transmitting electronics restrain, electron beam reaches anode and forms the speckle needing size after being focused, reduce the scattering of electronics, decrease the dosage of invalid X-ray.
4. using binary hexaboride or polynary hexaboride as cathode emission material, have relatively low work function and good chemical stability, emission is big, and resistance to ion bom bardment improves stability in use and the life-span of homogeneous tube.
5. the electro-optic structure of uniqueness, it is thus achieved that X-ray light spot uniform, highdensity and fine definition CT image；Special negative electrode heating means, energy conversion efficiency is high, and emission is big, launches uniformly, stablizes, and reliability is high；Considerably reduce ineffective radiation dosage.
Previously described each preferred embodiment for the present invention, preferred implementation in each preferred embodiment is if not the most contradictory or premised on a certain preferred implementation, each preferred implementation can arbitrarily stack combinations use, design parameter in described embodiment and embodiment is merely to clearly state the invention proof procedure of inventor, and it is not used to limit the scope of patent protection of the present invention, the scope of patent protection of the present invention is still as the criterion with its claims, the equivalent structure change that the description of every utilization present invention and accompanying drawing content are made, in like manner should be included in protection scope of the present invention.
Claims (8)
1. there is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite, including cathode assembly；It is characterized in that,
Described cathode assembly includes pointed cone array cold cathode sheet (13) that multi-disc is spliced continuously, described pointed cone array cold cathode sheet includes substrate (20), inner grid sheet (19) and is distributed in substrate many sub-negative electrodes of the arrangement in array configuration, described inner grid sheet is positioned at above sub-negative electrode, and inner grid sheet central authorities have cathode site with pointed cone inner grid hole one to one；Insulating barrier (21) is also had between described substrate and inner grid sheet；
Described cathode assembly also includes fixing multiple pointed cone array cold cathode sheets and has the electrical connection compressing structure of extraction electrode；
Described electrical connection compressing structure includes negative electrode horse (14) and the inner grid tabletting (15) that negative electrode tabletting (16), conductor material make, and described pointed cone array cold cathode sheet (13) is positioned at negative electrode horse (14)；
Described inner grid tabletting (15) is pressed on above the marginal portion of inner grid sheet (19), and described negative electrode tabletting is pressed on above insulating barrier (21) edge；
Described inner grid tabletting (15) electrically connects with inner grid extraction electrode (5), and described negative electrode horse (14) electrically connects with negative electrode extraction electrode (7).
There is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite the most as claimed in claim 1, it is characterised in that described inner grid tabletting and negative electrode tabletting quantity are two panels, lay respectively at the both sides of pointed cone array cold cathode sheet.
There is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite the most as claimed in claim 1, it is characterised in that there is between described inner grid sheet and negative electrode tabletting insulation distance, described insulation distance a length of 1-4 millimeter.
There is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite the most as claimed in claim 1, it is characterized in that, described cathode assembly also includes outer grid (3) and outer grid lead hole, described outer grid is positioned at inner grid sheet (19) top, having electron exit hole (31) on described outer grid, described outer grid electrically connects with outer grid lead hole.
There is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite the most as claimed in claim 4, it is characterised in that electron exit hole (31) cross-sectional area of described outer grid is with being gradually increased the most from low to high.
There is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite the most as claimed in claim 4, it is characterised in that the described outer grid (3) distance away from ion cathode is 0.2 ~ 0.4mm.
There is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite the most as claimed in claim 1, it is characterized in that, described sub-negative electrode is cone-shaped, the cone tip portion of described sub-negative electrode is emission of cathode layer (17), remainder is negative electrode transition zone (18), described negative electrode buffer layer material is molybdenum, and described substrate (20) material is silicon.
There is the pointed cone array cold cathode X-ray tube of big emission area Flied emission composite the most as claimed in claim 7, it is characterised in that described emission of cathode layer (17) is binary hexaboride or polynary hexaboride.
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| CN105374654B (en) * | 2014-08-25 | 2018-11-06 | 同方威视技术股份有限公司 | Electron source, x-ray source, the equipment for having used the x-ray source |
| CN109350097B (en) * | 2018-12-17 | 2021-11-05 | 深圳先进技术研究院 | X-ray source array, X-ray tomography system and method |
| JP6792676B1 (en) | 2019-07-24 | 2020-11-25 | 浜松ホトニクス株式会社 | X-ray tube |
| CN110993470B (en) * | 2019-12-23 | 2022-09-23 | 西北核技术研究院 | Large-area spliced high-current diode anode target |
| CN112103154B (en) * | 2020-09-22 | 2023-11-14 | 成都创元电子有限公司 | Indirect heating lanthanum hexaboride cathode |
| CN114284122A (en) * | 2021-06-30 | 2022-04-05 | 科罗诺司医疗器械(上海)有限公司 | Novel cathode structure for X-ray tube |
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| JP2003288834A (en) * | 2002-03-27 | 2003-10-10 | National Institute Of Advanced Industrial & Technology | Field emission cold cathode |
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| CN1121638A (en) * | 1994-10-28 | 1996-05-01 | 株式会社岛津制作所 | Anode for an X-ray tube, a method of manufacturing the anode, and a fixed anode X-ray tube |
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