CN103400739A - Pointed cone array cold cathode X light tube with large-emitting-area field emission composite materials - Google Patents
Pointed cone array cold cathode X light tube with large-emitting-area field emission composite materials Download PDFInfo
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- CN103400739A CN103400739A CN2013103408925A CN201310340892A CN103400739A CN 103400739 A CN103400739 A CN 103400739A CN 2013103408925 A CN2013103408925 A CN 2013103408925A CN 201310340892 A CN201310340892 A CN 201310340892A CN 103400739 A CN103400739 A CN 103400739A
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- 239000000758 substrate Substances 0.000 claims description 13
- 230000004888 barrier function Effects 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 230000007704 transition Effects 0.000 claims description 5
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- 229910052710 silicon Inorganic materials 0.000 claims description 4
- 239000010703 silicon Substances 0.000 claims description 4
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
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Abstract
The invention relates to a pointed cone array cold cathode X light tube with large-emitting-area field emission composite materials. A cathode component comprises a plurality of pointed cone array cold cathode sheets in continuous splicing joint, a pointed cone array cold cathode comprises a base, an inner grid electrode sheet and a plurality of sub cathodes, the sub cathodes are distributed on the base and are in array-shaped arrangement, the inner grid electrode sheet is positioned above the sub cathodes, the center of the inner grid electrode sheet is provided with inner grid electrode holes in one-to-one correspondence to the positions of the sub pointed cone array cold cathodes, an insulating layer is also arranged between the base and the inner grid electrode sheet, and the cathode component also comprises an electric connection compressing structure which is used for fixing the pointed cone array cold cathode sheets and leading out the electrodes. The pointed cone array cold cathode X light tube has the advantages that the problem of poor consistency of pointed cone arrays at array center point and edge parts during the one-step preparation of single-sheet large-area cathode pointed cone arrays is solved, meanwhile, the requirement of the X light tube on the emitting current during great X dosage output is met, and high-quality X light imaging is obtained.
Description
Technical field
The invention belongs to the physical electronic field, relate to a kind of pointed cone array cold cathode X-ray tube with large emission area field emission composite material.
Background technology
Various X-ray equipments medical treatment, medical diagnosis, industrial detection, safe practice etc. relate to, need high performance X-ray tube.As one of core devices of X-ray imaging device, X-ray tube is except possessing the characteristics such as good imaging quality, working stability are reliable, long service life, and along with development in science and technology, for miniaturization, the demand of the high-quality X-ray tube of low energy consumption is more and more outstanding.
Mainly there is following problem in existing X-ray tube:
1, the traditional CT bulb adopts the rotating anode target of composite material, volume macrostructure complexity; Cost is high.2, existing X-ray tube traditional single-screw tungsten cathode, work function high (4.52eV), the moon of adopting more
Utmost point working temperature is high, energy efficiency is low, invalid radiation dose large, emission is inhomogeneous.
If 3 the raising cathode emission current density, need to improve the negative electrode working temperature, the evaporation rate of cathode material is increased.The cathode material evaporation can make tungsten filament attenuate, and the tungsten cathode after attenuating can cause again cathode temperature to raise, the evaporation aggravation ..., forming vicious circle, cathode life shortens.
4, the tungsten cathode material of evaporation is deposited on shell, forms the continuous conduction film, has destroyed the dielectric strength of X-ray tube, and pipe is scrapped;
5, the tungsten deposition of material that evaporates after on shell, has stopped the X-ray intensity of output window, has reduced image quality.
Prove by experiment, the electron beam quality of an emission is fine, and the utilance of electron emission is very high, can reduce invalid radiation dose, and running parameter is: the 73KV-58 microampere, and just can imaging at very little X-ray dosage.
Along with the progress of nano material technology, the application of carbon nano-tube has appearred in recent years, still, based on the CNT(carbon nano-tube) negative electrode mini X-ray pipe exists the X-ray dosage of output too little, can not obtain the high-quality imaging; Density and the high homogeneity of CNT are poor, and emission uniformity is poor, easily sparking; Poor reliability, life-span are short.
In test, direct current emission total current can't reach 1mA, when reaching 1mA, just occurs striking sparks and burns.
If obtain larger X-ray dosage, need negative electrode to have larger emission and total emission area, but, due to process technology limit, prepare the larger area cathode array, consistency is difficult to guarantee.
Summary of the invention
For cloudy the amassing of field emission tube small size that overcomes prior art can not meet heavy dose of X-ray needs, the poor technological deficiency of large area cathode consistency, the invention discloses a kind of pointed cone array cold cathode X-ray tube with large emission area field emission composite material.
Pointed cone array cold cathode X-ray tube with large emission area field emission composite material of the present invention, comprise cathode assembly; Described cathode assembly comprises the multi-disc pointed cone array cold cathode sheet of splicing continuously, described pointed cone array cold cathode sheet comprises substrate, inner grid sheet and is distributed in substrate a plurality of sub-negative electrode that is the arrangement of array shape, described inner grid sheet is positioned at sub-negative electrode top, and inner grid sheet central authorities have and inner grid hole one to one, the sub-negative electrode of pointed cone position; Between described substrate and inner grid sheet, also has insulating barrier; Described cathode assembly also comprises fixing a plurality of pointed cone array cold cathode sheets and has the electrical connection compressing structure of extraction electrode.
Pointed cone array cold cathode X-ray tube with large emission area field emission composite material of the present invention, while having overcome due to one time to produce monolithic large area cathode pointed cone array, the problem that array center's point is poor with the pointed cone array consistency of edge, met simultaneously X-ray tube when large X-ray dosage output, for the requirement of emission current; Can obtain high-quality X-ray imaging.
Concrete, described electrical connection compressing structure comprises negative electrode horse and the inner grid compressing tablet that negative electrode compressing tablet, conductor material are made, described pointed cone array cold cathode sheet is positioned at the negative electrode horse; Described inner grid compressing tablet is pressed on the top, marginal portion of inner grid sheet, and described negative electrode compressing tablet is pressed on top, insulating barrier edge; Described inner grid compressing tablet is electrically connected to the inner grid extraction electrode, and described negative electrode horse is electrically connected to the negative electrode extraction electrode.
Adopt said structure, negative electrode does not need heating, and emission is large, and emission is even, stable, and reliability is high; Decrease invalid radiation dose; Make the easier miniaturization of device, saved again energy consumption.
Further, described inner grid compressing tablet and negative electrode compressing tablet quantity are two, lay respectively at the both sides of pointed cone array cold cathode sheet.
Further, between described inner grid sheet and negative electrode compressing tablet, have insulation distance, described insulation distance length is the 1-4 millimeter.
Preferably, described cathode assembly also comprises outer grid and outer grid lead hole, and described outer grid is positioned at inner grid sheet top, on described outer grid, has the electronics perforation hole, and described outer grid is electrically connected to outer grid lead hole.
By outer grid lead hole, give outer grid logical certain negative voltage, the surface of emission of the electronics that makes to be excited is restrained, and electronics increases from the probability of electronics perforation hole outgoing, and the electron amount that arrives anode increases.
Further, the electronics perforation hole cross-sectional area of described outer grid is with increasing gradually highly from low to high.
Further, the distance of the sub-negative electrode of described outer gate distance is 0.2 ~ 0.4mm.
Preferably, described sub-negative electrode is cone-shaped, and the cone tip portion of described sub-negative electrode is the cathode emission layer, and remainder is the negative electrode transition zone, and described negative electrode buffer layer material is molybdenum, and described base material is silicon.
Further, described cathode emission layer is binary hexaboride or polynary hexaboride.
Adopt binary hexaboride or polynary hexaboride as cathode emission material, have lower work function and good chemical stability, emission is large, anti-Ions Bombardment, stability in use and the life-span of having improved homogeneous tube.
Adopt the pointed cone array cold cathode X-ray tube with large emission area field emission composite material of the present invention, first prepare monolithic small size negative electrode pointed cone array, adopt again the mode of the accurate splicing of multi-disc to prepare large tracts of land pointed cone array cathode, while having overcome due to one time to produce monolithic large area cathode pointed cone array, the problem that array center's point is poor with the pointed cone array consistency of edge, met simultaneously X-ray tube when large X-ray dosage output, for the requirement of emission current, to obtain high-quality X-ray imaging.
The accompanying drawing explanation
Fig. 1 is a kind of a kind of embodiment structural representation with pointed cone array cold cathode X-ray tube of large emission area field emission composite material of the present invention;
Fig. 2 illustrates a kind of embodiment structural representation of cathode assembly of the present invention;
Fig. 3 illustrates a kind of embodiment vertical section schematic diagram of cathode assembly of the present invention;
In figure, the Reference numeral name is called: the outer grid 4-cathode assembly 5-inner grid extraction electrode 6-pedestal 7-negative electrode extraction electrode 8-insulating ceramics 9-trip bolt 10-stem stem 11-shell 12-anode tap screw 13-pointed cone array cold cathode sheet 14-negative electrode horse 15-inner grid compressing tablet 16-negative electrode compressing tablet 17-cathode emission layer 18-negative electrode transition zone 19-inner grid sheet 20-substrate 21-insulating barrier 31-electronics perforation hole of 1-anode component 2-tungsten target 3-.
Embodiment
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described in further detail.
Pointed cone array cold cathode X-ray tube with large emission area field emission composite material of the present invention, comprise cathode assembly; Described cathode assembly comprises the multi-disc pointed cone array cold cathode sheet of splicing continuously, described pointed cone array cold cathode sheet comprises substrate, inner grid sheet and is distributed in substrate a plurality of sub-negative electrode that is the arrangement of array shape, described inner grid sheet is positioned at sub-negative electrode top, and inner grid sheet central authorities have and inner grid hole one to one, the sub-negative electrode of pointed cone position; Between described substrate and inner grid sheet, also has insulating barrier; Described cathode assembly also comprises fixing a plurality of pointed cone array cold cathode sheets and has the electrical connection compressing structure of extraction electrode.
An embodiment as the shown cathode assembly of Fig. 2 to 3, cathode assembly is spliced continuously by the pointed cone array cold cathode sheet of 4 rectangular shapes, pointed cone array cold cathode sheet is comprised of substrate, the inner grid sheet that is distributed in suprabasil a plurality of sub-negative electrode and is positioned at sub-negative electrode top, on the inner grid sheet, have a plurality of inner grids hole, every corresponding inner grid hole of sub-negative electrode.Adopt the pointed cone array cold cathode sheet of said structure as electron emitter, negative electrode does not need heating, and emission is large, and emission is even, stable, and reliability is high; Decrease invalid radiation dose; Make the easier miniaturization of device, saved again energy consumption.
During use, the inner grid target applies highfield, and sub-negative electrode discharges electronics under the effect of highfield power, and electronics is overflowed by the inner grid hole on the inner grid sheet, and is accelerated by highfield.
Pointed cone array cold cathode sheet is after splicing, by certain way, multi-disc pointed cone array cold cathode sheet is fixed in cathode assembly, and inner grid and the sub-negative electrode of pointed cone array cold cathode sheet formed to unified electrical connection, the mode that for example can adopt direct welding or wire to connect.
When prepared by negative electrode, the pointed cone array cold cathode sheet that first prepares the monolithic small size, adopt again the mode of the accurate splicing of multi-disc to prepare large area cathode, while having overcome due to one time to produce monolithic large area cathode array, the poor problem of sub-negative electrode consistency of the sub-negative electrode of array center's point and edge, met simultaneously X-ray tube when large X-ray dosage output, for the requirement of emission current, to obtain high-quality X-ray imaging.
The invention provides a kind of electrical connection compressing structure of preferably pointed cone array cold cathode sheet being fixed and being electrically connected to.Described electrical connection compressing structure comprises negative electrode horse and the inner grid compressing tablet that negative electrode compressing tablet, conductor material are made, and described pointed cone array cold cathode sheet is positioned at the negative electrode horse; Described inner grid compressing tablet is pressed on the top, marginal portion of inner grid sheet, and described negative electrode compressing tablet is pressed on top, insulating barrier edge; Described inner grid compressing tablet is electrically connected to the inner grid extraction electrode, and described negative electrode horse is electrically connected to the negative electrode extraction electrode.
As shown in Figure 1, the inner grid sheet of four pointed cone array cold cathode sheets is compressed by the inner grid compressing tablet, the negative electrode compressing tablet is pressed in pointed cone array cold cathode sheet insulating barrier marginal position place, the multi-disc pointed cone array cold cathode sheet of splicing continuously is fixed in the negative electrode horse, inner grid is by inner grid compressing tablet and inner grid extraction electrode UNICOM, and negative electrode horse and negative electrode extraction electrode electrically connect as one.Negative electrode compressing tablet and inner grid compressing tablet can adopt symmetrical two to be arranged in parallel, and fixed effect is better.Above-mentioned electrical connection compressing structure is high to the pointed cone array cold cathode sheet compression firmness of splicing form, the electrical connection that forms is reliable, the inner grid compressing tablet that conductor material is made and every piece of inner grid sheet fitting area are large, can provide larger current driving ability to drive inner grid and reach high pressure.
Because inner grid voltage is higher, between inner grid sheet and negative electrode compressing tablet, certain insulation distance should be set, avoid puncture short.The insulation distance operated by rotary motion, at the 1-4 millimeter, can guarantee insulation safety, avoids again device size excessive simultaneously.
Sub-negative electrode in pointed cone array cold cathode sheet adopts the pointed cone shape, and the pointed cone height can be got 0.75-1 m, and cone tip portion is the cathode emission layer, and remainder is the negative electrode transition zone.Can adopt silicon as base material, the material of negative electrode transition zone can be selected molybdenum, and after high-temperature processing technology, silicon base and molybdenum are combinable very firm, and molybdenum and boride is also very high in conjunction with firmness simultaneously.
The cathode emission layer of sub-negative electrode preferably adopts binary hexaboride or polynary hexaboride material, and the binary hexaboride is form such as MB
6Compound, M is rare earth element, as six boronation caesiums, neodymium hexaboride, lanthanum hexaboride etc.; Polynary hexaboride is form such as M
1-xN
xB
6Hexaboride, wherein M, N represent different rare earth elements; Thereby improve the stability of pointed cone under the highfield effect, simultaneously, because binary hexaboride or polynary hexaboride material have lower work function and good chemical stability, emission is large, anti-Ions Bombardment, stability in use and the life-span of having improved homogeneous tube.
When cathode electronics was excited, the electronics exit direction had certain randomness, and the emission face width, cause only having portions of electronics to attracted to anode.For increasing cathode electronics, arrive the probability of anode, in another embodiment of the present invention, the outer grid lead hole that also is provided with outer grid and is electrically connected to outer grid in cathode assembly, have the electronics perforation hole on described outer grid.
During use, by outer grid lead hole, give outer grid logical certain negative voltage, the surface of emission of the electronics that makes to be excited is restrained, and electronics increases from the probability of electronics perforation hole outgoing, and the electron amount that arrives anode increases.
Above-mentioned outer grid can adopt the electronics perforation hole shape of V-arrangement, electronics perforation hole cross-sectional area is with increasing gradually highly from low to high, part aperture near negative electrode is less, and is larger near the part aperture of anode, can reach the effect that better constraint electron motion direction is pointed to anode.
When emission X-ray tube uses because inner grid voltage is higher, in order to obtain highfield, the distance of inner grid and sub-negative electrode is extremely near, and therefore the distance of outer grid and sub-negative electrode is approximately equal to and the inner grid distance, for avoiding puncturing between inner grid and outer grid, distance can not be too short, and the restraining force of the oversize target electron emission of distance descends, and the inventor, through overtesting, preferably is arranged on this distance in 2-4 millimeter scope, neither electrical breakdown can occur, again can be stronger to electron confinement power.
Take the pointed cone array sizes as 1mm * and the 4mm field emission cold-cathode is as example, the specific embodiment of the present invention is described in further detail.
At first prepare 4 pointed cone array cold cathode sheets with 1mm * 1mm field emission cold-cathode array, the inner grid of cathode sheets marginal position is etched away, expose insulating barrier, make the inner grid sheet not cover whole insulating barriers or substrate.4 pointed cone array cold cathode sheet precisions are stitched together, by the negative electrode compressing tablet, be pressed in the insulating barrier position of cathode sheets and be fixed in the negative electrode horse, the inner grid sheet of 4 pointed cone array cold cathode sheets is passed through to inner grid compressing tablet and inner grid extraction electrode UNICOM, negative electrode horse and negative electrode extraction electrode are welded as a whole, the common cathode assembly that forms, negative electrode extraction electrode and insulating ceramics are fixed together, with trip bolt just insulating ceramics be fixed on pedestal 6, again outer grid is welded on pedestal, form cathode assembly, weld together cathode assembly and stem stem standby.Tungsten target 2 is welded on to anodic formation anode component 1 standby, the anode component top has anode tap screw 12, be used to drawing anode tap.By the special glass process equipment, glass processing is become to the structure of shell 11.By the X-ray tube glass sealing method of routine, by anode component and shell upper end sealing by fusing together, stress relieving by annealing is standby; Again by stem stem and shell lower end sealing by fusing together, stress relieving by annealing.Finally by the X-ray tube of routine, make flow process and complete element manufacturing.
Adopt the X-ray tube with large emission area field emission composite material cold cathode of the present invention, have following superiority:
1. adopt the X-ray tube with large emission area field emission composite material cold cathode of the present invention, first prepare monolithic small size negative electrode pointed cone array, adopt again the mode of the accurate splicing of multi-disc to prepare large tracts of land pointed cone array cathode, while having overcome due to one time to produce monolithic large area cathode pointed cone array, the problem that array center's point is poor with the pointed cone array consistency of edge, met simultaneously X-ray tube when large X-ray dosage output, for the requirement of emission current, to obtain high-quality X-ray imaging.
2. adopt inner grid sheet and cathode sheets combination as electron emitter, negative electrode does not need heating, and emission is large, and emission is even, stable, and reliability is high; Decrease invalid radiation dose; Make the easier miniaturization of device, saved again energy consumption.
3. increase outer grid constraint electron motion direction, make the electron emission convergence, after electron beam is focused, reaching anodic formation needs large speckle, has reduced the scattering of electronics, has reduced the dosage of invalid X-ray.
4. adopt binary hexaboride or polynary hexaboride as cathode emission material, have lower work function and good chemical stability, emission is large, anti-Ions Bombardment, stability in use and the life-span of having improved homogeneous tube.
5. unique electro-optic structure, obtain even, highdensity X-ray light spot and high definition CT image; Special negative electrode heating means, energy conversion efficiency is high, and emission is large, and emission is even, stable, and reliability is high; Decrease invalid radiation dose.
previously described is each preferred embodiment of the present invention, preferred implementation in each preferred embodiment is if not obviously contradictory or take a certain preferred implementation as prerequisite, each preferred implementation stack combinations is arbitrarily used, design parameter in described embodiment and embodiment is only the invention proof procedure for clear statement inventor, not in order to limit scope of patent protection of the present invention, scope of patent protection of the present invention still is as the criterion with its claims, the equivalent structure that every utilization specification of the present invention and accompanying drawing content are done changes, in like manner all should be included in protection scope of the present invention.
Claims (9)
1. have the pointed cone array cold cathode X-ray tube of large emission area field emission composite material, comprise cathode assembly; It is characterized in that,
Described cathode assembly comprises the multi-disc pointed cone array cold cathode sheet (13) of splicing continuously, described pointed cone array cold cathode sheet comprises substrate (20), inner grid sheet (19) and is distributed in substrate a plurality of sub-negative electrode that is the arrangement of array shape, described inner grid sheet is positioned at sub-negative electrode top, and inner grid sheet central authorities have and inner grid hole one to one, the sub-negative electrode of pointed cone position; Between described substrate and inner grid sheet, also has insulating barrier (21);
Described cathode assembly also comprises fixing a plurality of pointed cone array cold cathode sheets and has the electrical connection compressing structure of extraction electrode.
2. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 1, it is characterized in that, described electrical connection compressing structure comprises negative electrode horse (14) and the inner grid compressing tablet (15) that negative electrode compressing tablet (16), conductor material are made, and described pointed cone array cold cathode sheet (13) is positioned at negative electrode horse (14);
Described inner grid compressing tablet (15) is pressed on the top, marginal portion of inner grid sheet (19), and described negative electrode compressing tablet is pressed on top, insulating barrier (21) edge;
Described inner grid compressing tablet (15) is electrically connected to inner grid extraction electrode (5), and described negative electrode horse (14) is electrically connected to negative electrode extraction electrode (7).
3. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 2, is characterized in that, described inner grid compressing tablet and negative electrode compressing tablet quantity are two, lay respectively at the both sides of pointed cone array cold cathode sheet.
4. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 2, is characterized in that having insulation distance between described inner grid sheet and negative electrode compressing tablet, and described insulation distance length is the 1-4 millimeter.
5. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 1, it is characterized in that, described cathode assembly also comprises outer grid (3) and outer grid lead hole, described outer grid is positioned at inner grid sheet (19) top, on described outer grid, have electronics perforation hole (31), described outer grid is electrically connected to outer grid lead hole.
6. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 5, is characterized in that, electronics perforation hole (31) cross-sectional area of described outer grid is with increasing gradually highly from low to high.
7. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 5, is characterized in that, the distance of the sub-negative electrode of described outer grid (3) distance is 0.2 ~ 0.4mm.
8. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 1, it is characterized in that, described sub-negative electrode is cone-shaped, the cone tip portion of described sub-negative electrode is cathode emission layer (17), remainder is negative electrode transition zone (18), described negative electrode buffer layer material is molybdenum, and described substrate (20) material is silicon.
9. the pointed cone array cold cathode X-ray tube with large emission area field emission composite material as claimed in claim 8, is characterized in that, described cathode emission layer (17) is binary hexaboride or polynary hexaboride.
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105374654A (en) * | 2014-08-25 | 2016-03-02 | 同方威视技术股份有限公司 | Electron source, X ray source and device using X ray source |
| CN110993470A (en) * | 2019-12-23 | 2020-04-10 | 西北核技术研究院 | Large-area spliced high-current diode anode target |
| WO2020124691A1 (en) * | 2018-12-17 | 2020-06-25 | 深圳先进技术研究院 | X-ray source array, and x-ray tomography system and method |
| CN112103154A (en) * | 2020-09-22 | 2020-12-18 | 成都创元电子有限公司 | Indirect-heating lanthanum hexaboride cathode |
| CN114284122A (en) * | 2021-06-30 | 2022-04-05 | 科罗诺司医疗器械(上海)有限公司 | Novel cathode structure for X-ray tube |
| US11875965B2 (en) | 2019-07-24 | 2024-01-16 | Hamamatsu Photonics K.K. | X-ray tube |
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