CN108133901A - A kind of novel device of the preparation with anti-PID effects cell piece - Google Patents
A kind of novel device of the preparation with anti-PID effects cell piece Download PDFInfo
- Publication number
- CN108133901A CN108133901A CN201611088717.1A CN201611088717A CN108133901A CN 108133901 A CN108133901 A CN 108133901A CN 201611088717 A CN201611088717 A CN 201611088717A CN 108133901 A CN108133901 A CN 108133901A
- Authority
- CN
- China
- Prior art keywords
- deflector
- preparation
- plate
- cell piece
- pid effects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002360 preparation method Methods 0.000 title claims abstract description 21
- 230000000694 effects Effects 0.000 title claims abstract description 20
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 14
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 14
- 239000010703 silicon Substances 0.000 claims abstract description 14
- 238000007789 sealing Methods 0.000 claims abstract description 8
- 239000007921 spray Substances 0.000 claims abstract description 8
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000001301 oxygen Substances 0.000 description 4
- 229910052760 oxygen Inorganic materials 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 230000008676 import Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 230000010148 water-pollination Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Electromagnetism (AREA)
- Nozzles (AREA)
Abstract
The present invention provides a kind of novel device of the preparation with anti-PID effects cell piece, including adjustably adjusting plate（1）, device sealing plate（2）, deflector（3）, spray backboard（4）And fixing bracket（5）；The deflector and shower plate are installed in sealing plate successively from top to bottom；N row deflector holes are set on the deflector, and wherein N is identical with the piece number of feeding silicon chip each on solar battery sheet Preparation equipment, and the often setting of row deflector hole is symmetric, and the size of deflector hole is gradually reduced from both sides to center；Set several rows identical on the shower plate or hole of different shapes；The width of the deflector（h1）It is shower plate width（h2）1/3rd；The telescopically adjustable plate（1）Adjust the distance for preparing device and board with anti-PID effects cell piece.The beneficial effects of the invention are as follows saving gas dosages, improve the uniformity that gas is contacted with silicon chip.
Description
Technical field
The invention belongs to the manufacturing fields of crystal silicon solar batteries piece, particularly relate to a kind of novel preparation with anti-
The device of PID effect cell pieces.
Background technology
In the preparation process of crystal silicon solar batteries piece, with the skill constantly proposed the problem of discovery in application process
Art requirement, anti-PID have become one of important parameter that photovoltaic industry is considered.Therefore, research and development, the optimization of anti-PID technologies
One of emphasis direction studied Deng the preparation manufacturer as crystal silicon solar batteries piece.Existing ozone deflector uses PVC materials
Material imports ozone using two imports and is directly sprayed on silicon chip surface, and wherein flow of oxygen is 30-40L/min.Using above-mentioned
Lack of homogeneity, the flow of oxygen of the anti-PID effects of crystal silicon solar batteries piece prepared by ozone spraying plate are big and production cost is high.
Invention content
The object of the present invention is to provide a kind of novel device of the preparation with anti-PID effects cell piece, reach raising gas
The uniformity of body, the purpose for reducing ozone usage and production cost.
To achieve these goals, the technical solution adopted by the present invention is as described below：A kind of novel preparation has anti-PID
The device of effect cell piece, including adjustably adjusting plate（1）, device sealing plate（2）, deflector（3）, spray backboard（4）With it is solid
Fixed rack（5）；The deflector and shower plate are installed in sealing plate successively from top to bottom；N is set on the deflector
Row deflector hole, wherein N are identical with the piece number of feeding silicon chip each on solar battery sheet Preparation equipment, the often setting of row deflector hole
It is symmetric, and the size of deflector hole is gradually reduced from both sides to center；Set several rows identical on the shower plate
Or hole of different shapes；The width of the deflector（h1）It is shower plate width（h2）1/3rd；Described stretches
Contracting adjustable plate（1）Adjust the distance for preparing device and board with anti-PID effects cell piece.
The beneficial effects of the invention are as follows saving gas dosages, improve the uniformity that gas is contacted with silicon chip.
Description of the drawings
A kind of Fig. 1 novel apparatus structure front views of the preparation with anti-PID effects cell piece provided by the invention
In figure：1 represents to adjustably adjust plate, and 2 represent device sealing plate, and 3 represent deflector, and 4 represent spray backboard, and 5 represent solid
Fixed rack, h represent the distance between deflector and shower plate, and a represents the distance between shower plate and silicon chip
A kind of Fig. 2 novel apparatus structure vertical views of the preparation with anti-PID effects cell piece provided by the invention
In figure：1 represents to adjustably adjust plate, and 2 represent air inlet, h1Represent the width of deflector, h2Represent the width of shower plate
Deflector structure figure in a kind of Fig. 3 novel apparatus structures of the preparation with anti-PID effects cell piece provided by the invention
In figure：d1,d2,dnIt represents successively on deflector from the diameter of the deflector hole at both sides to center
Shower plate structure chart in a kind of Fig. 4 novel apparatus structures of the preparation with anti-PID effects cell piece provided by the invention
In figure：d0Represent the diameter of spray apertures.
Specific embodiment
Technical scheme of the present invention is described in further detail below in conjunction with the accompanying drawings.
In the present embodiment, a kind of novel device of the preparation with anti-PID effects cell piece, including adjustably adjusting plate
（1）, device sealing plate（2）, deflector（3）, spray backboard（4）And fixing bracket（5）；The width h of shower plate2For 30cm, lead
The width h of flowing plate1For 10cm；The distance between deflector and shower plate h are 1cm；Deflector is identical with the thickness of shower plate,
For 1.5cm；Plate is adjustably adjusted by adjusting（1）It is 3mm to make the distance a of shower plate and silicon chip in device；It is used on shower plate
The spray apertures design structure of circular hole, spray bore dia d0For 1mm；On deflector from the diameter of the deflector hole at both sides to center according to
Secondary is d1, d2,d3, d4,d5, d6It is followed successively by 3.5mm, 3.0mm, 2.5mm, 2.0mm, 1.5mm, 1.0mm.Oxygen is occurred by ozone
After ozone is made in device, pass through ozone inlet（2）Into panel chamber, due to the smaller surrounding water conservancy diversion bore dia of middle part deflector hole
Greatly, so as to which control centre's flow velocity uniformly flows to both sides, then be sprayed on silicon chip surface by shower plate.By using above-mentioned preparation
Device with anti-PID effects cell piece is tested, and the silicon chip after experiment is carried out hydrophily test, will test in 20 seconds
20mm is diffused into water diameter, flow of oxygen drops to 6-8L/min by 30-40L/min.Therefore, gas has been significantly increased
Uniformity and reduction ozone usage, improve product quality and reduce production cost.
It should be noted last that above example is merely to illustrate technical scheme of the present invention and unrestricted, although ginseng
The present invention is described in detail according to preferred embodiment, it will be understood by those of ordinary skill in the art that, it can be to the present invention
Technical solution be modified or replaced equivalently, without departing from the spirit and scope of technical solution of the present invention, should all cover
In scope of the presently claimed invention.
Claims (4)
1. a kind of novel device of the preparation with anti-PID effects cell piece, including adjustably adjusting plate（1）, device sealing plate
（2）, deflector（3）, spray backboard（4）And fixing bracket（5）, it is characterised in that：The deflector and shower plate from up to
Under be installed in sealing plate successively, the telescopically adjustable plate（1）It adjusts and prepares device and board with anti-PID effects
Distance.
2. a kind of novel device of the preparation with anti-PID effects cell piece according to claim 1, feature
It is：N row deflector holes, wherein N and feeding silicon chip each on solar battery sheet Preparation equipment are set on the deflector
The piece number is identical, and the often setting of row deflector hole is symmetric, and the size of deflector hole is gradually reduced from both sides to center.
3. a kind of novel device of the preparation with anti-PID effects cell piece according to claim 1, feature
It is：Set several rows identical on the shower plate or hole of different shapes.
4. a kind of novel device of the preparation with anti-PID effects cell piece according to claim 1, feature
It is：The width of the deflector（h1）It is shower plate width（h2）1/3rd.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611088717.1A CN108133901A (en) | 2016-12-01 | 2016-12-01 | A kind of novel device of the preparation with anti-PID effects cell piece |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611088717.1A CN108133901A (en) | 2016-12-01 | 2016-12-01 | A kind of novel device of the preparation with anti-PID effects cell piece |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108133901A true CN108133901A (en) | 2018-06-08 |
Family
ID=62387543
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611088717.1A Pending CN108133901A (en) | 2016-12-01 | 2016-12-01 | A kind of novel device of the preparation with anti-PID effects cell piece |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108133901A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109285921A (en) * | 2018-12-03 | 2019-01-29 | 乐山新天源太阳能科技有限公司 | Gas mixing homogenizer for the anti-PID equipment of solar battery |
-
2016
- 2016-12-01 CN CN201611088717.1A patent/CN108133901A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109285921A (en) * | 2018-12-03 | 2019-01-29 | 乐山新天源太阳能科技有限公司 | Gas mixing homogenizer for the anti-PID equipment of solar battery |
| CN109285921B (en) * | 2018-12-03 | 2024-01-26 | 乐山新天源太阳能科技有限公司 | Gas mixing and homogenizing device for PID (potential induced degradation) resistant equipment of solar cell |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20180608 |