CN108131493B - A kind of microfluid reversal valve chip and its manufacturing method - Google Patents
A kind of microfluid reversal valve chip and its manufacturing method Download PDFInfo
- Publication number
- CN108131493B CN108131493B CN201711417170.XA CN201711417170A CN108131493B CN 108131493 B CN108131493 B CN 108131493B CN 201711417170 A CN201711417170 A CN 201711417170A CN 108131493 B CN108131493 B CN 108131493B
- Authority
- CN
- China
- Prior art keywords
- substrate
- electrode
- electrodes
- microfluid
- reversal valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K99/0001—Microvalves
- F16K99/0034—Operating means specially adapted for microvalves
- F16K99/0036—Operating means specially adapted for microvalves operated by temperature variations
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K99/00—Subject matter not provided for in other groups of this subclass
- F16K2099/0073—Fabrication methods specifically adapted for microvalves
- F16K2099/0074—Fabrication methods specifically adapted for microvalves using photolithography, e.g. etching
Abstract
The invention discloses a kind of microfluid reversal valve chips, including microchannel layers, substrate, substrate and interdigitated electrodes；The microchannel layers are located at the upper layer of entire chip, and substrate is located at the centre of entire chip, and substrate is located at the lower layer of entire chip, and three is connected with each other；The substrate is opened there are two temperature control groove, and one is higher than the liquid of room temperature for storing, another is used to store the liquid lower than room temperature；Interdigitated electrodes sputtering is deposited on substrate, and interdigitated electrodes are by several electrodes to constituting, and electrode is to being distributed on substrate；Each electrode is constituted to by the identical electrode of two sizes, and two electrodes each lead into the exchange potential that phase difference is 180 degree at work, is parallel to each other on fluid flow direction between two electrodes and there are overlapping regions；One in internal two electrodes of electrode is located at right above the first temperature control groove, another is located at right above the second temperature control groove；The distance between internal two electrodes of electrode be less than adjacent two electrode to the distance between.
Description
Technical field
The present invention relates to microfluid commutation valve technology, specifically a kind of microfluid reversal valve chip and its manufacturing method.
Background technique
Microflow control technique has huge development potentiality and broad application prospect in modern scientific research field.This is a kind of
The multi-subject knowledges such as machinery, biology, chemistry, medicine are organically combined, realize to the research of fluid in minute yardstick field and
The cutting edge technology of manipulation.Compared to traditional detection, microflow control technique by a complicated large-scale experiment room be integrated into one piece it is small
Chip on, have many advantages, such as micromation, integrated, dosage is few, speed is fast, played pole in biological field, medical domain etc.
Its important role.
During being manipulated to microfluid, it is sometimes desirable to carry out the positive and negative alternate cycles switched to fluid and flow
Reach certain function, therefore how to realize that fluid reversing is an important research contents.At present using it is more be traditional machine
Tool formula reversal valve, can be divided into according to the structure type of valve: ball-valve type reversal valve, spool-type valves, rotary valve reversal valve and cone
Valve type reversal valve；It can be divided into according to the maneuverability pattern of valve: hand reversal valve, hydrodynamic reversal valve, electromagnetic type reversal valve, pneumatic
Formula reversal valve etc.；It can be divided into according to the port number of the operating position number of valve and control: bi-bit bi-pass reversal valve, two-position three way commutation
Valve, two-position four way change valve, three position four-way directional control valve, 3 position-5 way valve etc..These mechanical switching valves pass through different
Principle and structure realize two or more liquid forms, meet duty requirements.
But on the micro scale, channel size is very small, and generally only several hundred microns, mechanical valve volume is relatively large,
It is unfavorable for the effective integration of chip.In addition, the valve with moving parts is easier the pollution by particulate matter to influence subsequent
Experiment.Therefore, it is particularly important to find a kind of method for being suitable for microfluid commutation.
Summary of the invention
In view of the deficiencies of the prior art, the technical issues of present invention intends to solve is to provide a kind of microfluid reversal valve chip
And its manufacturing method.
The present invention solves the problems, such as that the technical solution of the chip technology is to provide a kind of microfluid reversal valve chip, special
Sign is that the chip includes microchannel layers, substrate, substrate and interdigitated electrodes；The microchannel layers are located at the upper of entire chip
Layer, substrate are located at the centre of entire chip, and substrate is located at the lower layer of entire chip, and three is connected with each other；
The substrate is opened there are two temperature control groove, and one is higher than the liquid of room temperature for storing, another is low for storing
In the liquid of room temperature；Interdigitated electrodes sputtering is deposited on substrate, interdigitated electrodes by several electrodes to constituting, electrode
To being distributed on substrate；Each electrode is constituted to by the identical electrode of two sizes, and two electrodes are each led at work
Phase difference is the exchange potential of 180 degree, is parallel to each other on fluid flow direction between two electrodes and there are overlapping regions；Electricity
One in extremely internal two electrodes is located at right above the first temperature control groove, another is located at right above the second temperature control groove；Electricity
The distance between extremely internal two electrodes be less than adjacent two electrode to the distance between.
The technical solution that the present invention solves the method technical problem is to provide a kind of manufacture of microfluid reversal valve chip
Method, it is characterised in that the following steps are included:
1) substrate surface sputtering or deposit size it is identical and be in periodic distribution interdigitated electrodes, it is two neighboring
Electrode each leads into the exchange potential that phase difference is 180 degree at work；
2) microchannel layers are produced into microfluidic channel by soft light carving technology, then microchannel layers and substrate is bonded；
3) two temperature control grooves are processed in substrate using micro-machined method, one for storing the liquid higher than room temperature
Body, another is used to store the liquid lower than room temperature；Substrate is bonded with microchannel layers and substrate again, obtains the miniflow
Body reversal valve chip.
Compared with prior art, the beneficial effects of the invention are that:
(1) it is each led by two temperature control grooves of substrate higher than room temperature and lower than the liquid of room temperature, to change two sides
The temperature of electrode, to make internal fluid generate larger temperature gradient, using AC Electric Heater effect come Fluid Motion Driven By Moving；And it is logical
The temperature of replacement temperature control ditch tank liquid is crossed, electrothermal forces direction changes direction with the alternating of hot and cold liquid, fluid can be realized
Commutation.
(2) chip manufacturing with it is easy to operate, only by alternately be passed through higher than room temperature be lower than room temperature liquid can be real
Now commutate, it is simpler than tradition machinery formula structure of reversing valve, conducive to the integrated of micro-fluidic chip.And without moving parts, to pollutant
It is insensitive.
Detailed description of the invention
Fig. 1 is microfluid reversal valve chip of the present invention and its a kind of three-dimensional perspective of the chip of embodiment of manufacturing method；
Fig. 2 is the main view sectional view of microfluid reversal valve chip of the present invention and its a kind of embodiment of manufacturing method；
Fig. 3 is the substrate schematic top plan view and fork of microfluid reversal valve chip of the present invention and its a kind of embodiment of manufacturing method
Finger electrodes distribution schematic diagram；
Fig. 4 is the substrate schematic top plan view of microfluid reversal valve chip of the present invention and its a kind of embodiment of manufacturing method；(figure
In: 1, microchannel layers；2, substrate；3, substrate；31, the first temperature control groove；32, the second temperature control groove；4, interdigitated electrodes)
Specific embodiment
Specific embodiments of the present invention are given below.Specific embodiment is only used for that present invention be described in more detail, unlimited
The protection scope of the claim of this application processed.
The present invention provides a kind of microfluid reversal valve chip (abbreviation chips, referring to Fig. 1-4), it is characterised in that the chip
Including microchannel layers 1, substrate 2, substrate 3 and interdigitated electrodes 4；The microchannel layers 1 are located at the upper layer of entire chip, substrate 2
Positioned at the centre of entire chip, substrate 3 is located at the lower layer of entire chip, and three passes through bonding technology compositing chip shape；It is described
Microchannel layers 1 and substrate 3 are made of polymer materials such as PDMS or PMMA, preferably PDMS material；The substrate 2 uses glass
The polymer sheet layers such as piece, silicon wafer or PMMA, preferably silicon wafer；
The substrate 3 is opened there are two temperature control groove, specifically the first temperature control groove 31 and the second temperature control groove 32, a use
In storage be higher than room temperature liquid, another be used for store be lower than room temperature liquid microchannel layers 1 can be made by temperature gradient
Interior internal fluid electrothermal forces direction changes, to realize fluid reversing；The liquid of the preferred excellent thermal conductivity of liquid, such as
Thermally conductive silicone oil, water.
The interdigitated electrodes 4 sputtering or the upper surface for being deposited on substrate 2, interdigitated electrodes 4 by several electrodes to constituting,
Electrode is in being periodically distributed on substrate 2；Each electrode is constituted to by the identical electrode of two sizes, and two electrodes exist
The exchange potential that phase difference is 180 degree is each led into when work, be parallel to each other between two electrodes on fluid flow direction and
There are overlapping regions；A first temperature control groove 31 of correspondence in internal two electrodes of electrode is located at right above it；Two electrodes
In another correspond to second temperature control groove 32, be located at its right above；The distance between internal two electrodes of electrode are less than adjacent
Two electrodes to the distance between；
Adjacent two electrode to the distance between for several microns arrive thousands of microns.
The length of each electrode is less than the width of the temperature control groove of corresponding substrate 3 in interdigitated electrodes 4.
The width of each electrode is between 3 μm -300 μm in the interdigitated electrodes 4；
Invention also provides a kind of manufacturing method of microfluid reversal valve chip (abbreviation methods), it is characterised in that packet
Include following steps:
1) substrate 2 surface sputtering or deposit size it is identical and be in periodic distribution interdigitated electrodes 4, adjacent two
A electrode each leads into the exchange potential that phase difference is 180 degree at work；
2) microchannel layers 1 are produced into microfluidic channel by soft light carving technology, recycles plasma bonder or hot pressing key
Microchannel layers 1 and substrate 2 are bonded by conjunction machine；
3) two temperature control grooves are processed in substrate 3 using micro-machined method, one for storing higher than room temperature
Liquid (can be heated) with resistance wire or other heating equipments, another be used to store lower than room temperature liquid (can use cooling piece or
Other refrigeration equipments freeze)；Recycle plasma bonder or thermocompression bonding machine by substrate 3 and microchannel layers 1 and substrate 2
It is bonded, obtains the microfluid reversal valve chip.
The working principle and workflow of microfluid reversal valve chip of the present invention are:
Working principle: the chip is based on AC Electric Heater principle, i.e., in electric field heterogeneous, internal fluid can be generated centainly
Temperature gradient, cause the physical properties such as conductivity and the dielectric constant of fluid to change, generate conductivity gradient and dielectric
Gradient, to generate the flowing of electric heating power drive fluid.When using width dimensions equal electrode, it is passed through equal in magnitude, direction
After opposite alternating current, electrode can nearby generate swirl flow.In order to generate directional flow, to adjacent electrode carry out heating and
Cooling, thus the temperature gradient inside larger fluid, to realize flowing, when electrode alternately heats and cools down, Ji Keshi
Existing fluid reversing, has the function that reversal valve.
Workflow: when work starts, syringe is connected by appropriate fluid (electrolyte solution, the conductance of solution with Micropump
Rate is 0.1-3S/m) it is passed through in the microchannel of microchannel layers 1.Alternating current will be passed through in interdigitated electrodes 4, and (peak value is in 1-20V, frequency
Rate is about in 100kHz-2MHz), two neighboring electrode each leads into the exchange potential that phase difference is 180 degree, while in two temperature
The liquid lower than room temperature and the liquid higher than room temperature are each led into control groove, i.e., produces larger temperature ladder in internal fluid
Degree, this temperature gradient causes the dielectric constant of fluid and conductivity to generate certain gradient, to generate electric heating power drive stream
Body generates directional motion.Such as when the first temperature control groove 31 is passed through the liquid higher than room temperature, the second temperature control groove 32 is passed through low
In the liquid of room temperature, the temperature that an electrode centering is located at the electrode right above the first temperature control groove 31, which is higher than, is located at the second temperature control
The temperature of electrode right above groove 32, in conjunction with Fig. 3 and Fig. 4, the fluid in microchannel layers 1 flows from right to left in figs. 3 and 4
It is dynamic.Otherwise similarly.
When two temperature control grooves are alternately passed through the temperature difference biggish liquid, the temperature gradient direction in flow field occurs alternately to become
It changes, that is, realizes the commutation of fluid.
The present invention does not address place and is suitable for the prior art.
Claims (6)
1. a kind of microfluid reversal valve chip, it is characterised in that the chip includes microchannel layers, substrate, substrate and interdigitated electricity
Pole；The microchannel layers are located at the upper layer of entire chip, and substrate is located at the centre of entire chip, and substrate is located under entire chip
Layer, three are connected with each other；
The substrate is opened there are two temperature control groove, and one is higher than the liquid of room temperature for storing, another is lower than room for storing
The liquid of temperature；The interdigitated electrodes sputtering is deposited on substrate, and interdigitated electrodes are by several electrodes to constituting, and electrode is to equal
It is distributed on substrate；Each electrode is constituted to by two electrodes, and two electrode sizes are identical；Internal two electrodes of electrode are working
When each lead into the exchange potential that phase difference is 180 degree, it is mutually flat on fluid flow direction between internal two electrodes of electrode
It goes and there are overlapping regions；One in internal two electrodes of electrode is located at right above the first temperature control groove, another is located at the
Right above two temperature control grooves；The distance between internal two electrodes of electrode be less than adjacent two electrode to the distance between.
2. microfluid reversal valve chip according to claim 1, it is characterised in that the microchannel layers and substrate use
PDMS or PMMA material is made.
3. microfluid reversal valve chip according to claim 1, it is characterised in that the substrate using sheet glass, silicon wafer or
Person's PMMA lamella.
4. microfluid reversal valve chip according to claim 1, it is characterised in that the length of each electrode in interdigitated electrodes
Degree is less than the width of the temperature control groove of corresponding substrate.
5. microfluid reversal valve chip according to claim 1, it is characterised in that adjacent two electrode to the distance between be
Several microns are arrived thousands of microns.
6. a kind of manufacturing method of microfluid reversal valve chip, it is characterised in that the following steps are included:
1) substrate surface sputtering or deposit size it is identical and be in periodic distribution interdigitated electrodes, two neighboring electrode
The exchange potential that phase difference is 180 degree is each led at work；
2) microchannel layers are produced into microfluidic channel by soft light carving technology, then microchannel layers and substrate is bonded；
3) two temperature control grooves are processed in substrate using micro-machined method, one is higher than the liquid of room temperature for storing,
Another is used to store the liquid lower than room temperature；Substrate is bonded with microchannel layers and substrate again, obtains the microfluid
Reversal valve chip.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711417170.XA CN108131493B (en) | 2017-12-25 | 2017-12-25 | A kind of microfluid reversal valve chip and its manufacturing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711417170.XA CN108131493B (en) | 2017-12-25 | 2017-12-25 | A kind of microfluid reversal valve chip and its manufacturing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108131493A CN108131493A (en) | 2018-06-08 |
| CN108131493B true CN108131493B (en) | 2019-10-15 |
Family
ID=62392725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711417170.XA Active CN108131493B (en) | 2017-12-25 | 2017-12-25 | A kind of microfluid reversal valve chip and its manufacturing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108131493B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110159822B (en) * | 2019-04-22 | 2020-05-29 | 东南大学 | Reversing valve for controlling on-off of microfluidic pipeline and reversing method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201106693Y (en) * | 2007-10-01 | 2008-08-27 | 李高承 | Reversal valve core |
| CN102896007A (en) * | 2012-10-09 | 2013-01-30 | 华中科技大学 | Microfluidic control element and preparation method thereof |
| US9461243B2 (en) * | 2013-01-05 | 2016-10-04 | Yimin Guo | STT-MRAM and method of manufacturing the same |
| CN205663974U (en) * | 2016-05-16 | 2016-10-26 | 江苏微全芯生物科技有限公司 | Temperature control valve core subassembly, temperature -sensing valve, miniflow way control chip and control system |
| US9593698B2 (en) * | 2001-04-06 | 2017-03-14 | Fluidigm Corporation | Microfabricated fluidic circuit elements and applications |
-
2017
- 2017-12-25 CN CN201711417170.XA patent/CN108131493B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9593698B2 (en) * | 2001-04-06 | 2017-03-14 | Fluidigm Corporation | Microfabricated fluidic circuit elements and applications |
| CN201106693Y (en) * | 2007-10-01 | 2008-08-27 | 李高承 | Reversal valve core |
| CN102896007A (en) * | 2012-10-09 | 2013-01-30 | 华中科技大学 | Microfluidic control element and preparation method thereof |
| US9461243B2 (en) * | 2013-01-05 | 2016-10-04 | Yimin Guo | STT-MRAM and method of manufacturing the same |
| CN205663974U (en) * | 2016-05-16 | 2016-10-26 | 江苏微全芯生物科技有限公司 | Temperature control valve core subassembly, temperature -sensing valve, miniflow way control chip and control system |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108131493A (en) | 2018-06-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Hossan et al. | Electric field driven pumping in microfluidic device | |
| Beech et al. | Tipping the balance of deterministic lateral displacement devices using dielectrophoresis | |
| US9011663B2 (en) | Electrowetting-based valving and pumping systems | |
| CN106593831B (en) | A kind of contactless electromagnetism Micropump device | |
| CN107442188B (en) | A kind of all-transparent micro-fluidic chip of built in transparent electrode and preparation method thereof | |
| CN105457692B (en) | Microfluidic separation device and method | |
| CN203090949U (en) | Multistage drive electric osmosis micro-pump device | |
| CN106215984B (en) | Micro-fluidic chip based on dielectrophoresis effect | |
| Hong et al. | Numerical simulation of AC electrothermal micropump using a fully coupled model | |
| CN204746344U (en) | Electric osmose micropump device | |
| CN108131493B (en) | A kind of microfluid reversal valve chip and its manufacturing method | |
| Jia et al. | Continuous-flow focusing of microparticles using induced-charge electroosmosis in a microfluidic device with 3D AgPDMS electrodes | |
| Wu et al. | Numerical simulation of a novel microfluidic electroosmotic micromixer with Cantor fractal structure | |
| CN108355726B (en) | Interdigital type speed-increasing micropump chip based on alternating current thermal effect driving | |
| Liu et al. | On traveling-wave field-effect flow control for simultaneous induced-charge electroosmotic pumping and mixing in microfluidics: Physical perspectives and theoretical analysis | |
| CN205691537U (en) | A kind of for solution driving and the micro-fluidic chip mixed | |
| CN101059526B (en) | Method for driving fluid movement in micropassage using electric heat flow | |
| CN208494260U (en) | Surface microlayer model based on dielectrophoresis allots structure | |
| Kazemi et al. | Electrohydrodynamic micropumps with asymmetric electrode geometries for microscale electronics cooling | |
| CN209451370U (en) | A kind of AC Electric Heater micro mixing device of inclined field heating | |
| CN107790203A (en) | Microlayer model Drive And Its Driving Method based on electric FREQUENCY CONTROL | |
| CN102627256B (en) | Micro-nano integrated processing technology based three-dimensional anti-drag micro-channel structure and preparation method thereof | |
| CN106587286A (en) | Seawater purifying device based on microfluidic channel system and manufacturing method thereof | |
| Cao et al. | Applications of electrohydrodynamics and Joule heating effects in microfluidic chips: A review | |
| Forouzanfar et al. | The effect of microchannel width on mixing efficiency of microfluidic electroosmotic mixer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |