CN108130525A - A kind of trimethyl aluminium metering and conveying device - Google Patents
A kind of trimethyl aluminium metering and conveying device Download PDFInfo
- Publication number
- CN108130525A CN108130525A CN201810075901.5A CN201810075901A CN108130525A CN 108130525 A CN108130525 A CN 108130525A CN 201810075901 A CN201810075901 A CN 201810075901A CN 108130525 A CN108130525 A CN 108130525A
- Authority
- CN
- China
- Prior art keywords
- tma
- pipeline
- feed supplement
- evaporators
- pneumatic operated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 title claims abstract description 13
- 239000006052 feed supplement Substances 0.000 claims abstract description 28
- 238000007599 discharging Methods 0.000 claims abstract description 26
- 238000007664 blowing Methods 0.000 claims abstract description 23
- 239000007788 liquid Substances 0.000 claims abstract description 17
- 230000008020 evaporation Effects 0.000 abstract description 2
- 238000001704 evaporation Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract description 2
- 239000007789 gas Substances 0.000 description 5
- 239000012530 fluid Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000001802 infusion Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000002265 prevention Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
- C23C16/20—Deposition of aluminium only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
Abstract
The invention discloses a kind of trimethyl aluminium metering and conveying device, including：Bearing sensor, the TMA evaporators being placed in bearing sensor connect the discharging pipeline of TMA evaporators and the blowing pipe of feed supplement pipeline and connection discharging pipeline；TMA evaporators have temperature sensor and liquid level sensor；The pipeline that discharges has mass flowmenter, and mass flowmenter is provided with bypass pneumatic operated valve and connection outlet end is provided with discharging pneumatic operated valve two；The port of export of blowing pipe is provided with air blowing pneumatic operated valve；Feed supplement pipeline is provided with feed supplement pneumatic operated valve, and feed supplement pipeline is connected to manual material-feeding port by manual feed supplement valve, while in parallel is connected to automatic feeding mouth by automatic feeding valve.The invention makes TMA evaporations pressure inside the tank constant by the control of accurate temperature, then by the control to TMA steams accurately to control the amount of TMA, control accuracy is high, and process relative ease, pipeline is not easy to plug, is easily serviced.
Description
Technical field
The present invention relates to a kind of metering conveyor, more particularly to a kind of trimethyl aluminium metering conveying is in device.
Background technology
Trimethyl aluminium (Trimethyl Aluminum, abbreviation TMA, molecular formula C3H9Al) it is at normal temperatures and pressures nothing
Color transparency liquid, reactivity is extremely strong, in air can spontaneous combustion and moment with regard to that can catch fire；Alcohol type, acids with active hydrogen
Intense reaction；React fierce with water, even if in cold water can generate explosive decomposition reaction, and generate methane, sometimes can also
It is under fire.
It needs to use TMA, thus the delivery safety of TMA when photovoltaic industry carries out surface alumina oxide plated film to silicon cell
Property is particularly important, and traditional mode of movement of the prior art is as follows：
1st, it is used as using inert gas, such as nitrogen and argon gas and carries gas, by way of mixing or bubbling, by being mixed to TMA
The amount that gas dosing calculates TMA indirectly again is closed, the drawback is that：Ratio regular meeting compression power, the temperature of TMA with carrying gas mixing etc.
The influence of factor, it is practical by TMA amounts cannot accurately measure, control accuracy is low；
2nd, it is controlled using TMA fluid floies, then is gasified and mixed, the drawback is that：Control process is complicated, and pipeline easily blocks up
Plug, it is inconvenient to safeguard.
Invention content
In order to solve the above technical problems, the present invention provides a kind of trimethyl aluminium metering and conveying device, including：
Bearing sensor, the TMA evaporators being placed in the bearing sensor connect the discharging pipelines of the TMA evaporators
And the blowing pipe of feed supplement pipeline and connection discharging pipeline；
The TMA evaporators have temperature sensor and liquid level sensor；
The discharging pipeline has mass flowmenter, and the mass flowmenter is provided with bypass pneumatic operated valve and the setting of connection outlet end
There is discharging pneumatic operated valve two；
The port of export of the blowing pipe is provided with air blowing pneumatic operated valve；
The feed supplement pipeline is provided with feed supplement pneumatic operated valve, and the feed supplement pipeline is connected to manual feed supplement by manual feed supplement valve
Mouthful, while in parallel automatic feeding mouth is connected to by automatic feeding valve.
Wherein, the port of export of the blowing pipe is connected to the discharge nozzle road of the mass flowmenter arrival end.
Wherein, the discharge nozzle road between the arrival end of the port of export of the blowing pipe and the discharging pipeline is set
It is equipped with discharging pneumatic operated valve one.
Wherein, the port of export of the feed supplement pipeline is located at the bottom end of the TMA evaporators, the arrival end of the discharging pipeline
Positioned at the top of the TMA evaporators.
Through the above technical solutions, the invention has the advantages that：
(1) make TMA evaporations pressure inside the tank constant by the control of accurate temperature, then accurate by being realized to the control of TMA steams
The amount of TMA is controlled, control accuracy is high, within reachable ± 1%；
(2) by bearing sensor real time and on line monitoring TMA weight, 10 grams of precision can carry out certainly in real time according to production requirement
Dynamic fluid infusion；
(3) TMA system temperatures, precision ± 1 DEG C are monitored in real time by temperature sensor；
(4) liquid replenishing function：Have an automatic liquid supply and manual liquid replenishing function, it, every time can be according to setting under system auto state
Weight carries out carry out automatic liquid supply；
(5) automatic blowing function：System can carry out automatic blowing to control device and pipeline, improve device service life and dimension
Protect the period；
(6) TMA evaporators and bearing sensor have explosion prevention function；
(7) warning function:
1. TMA liquid level warnings（Low, normal, high, superelevation）；
2. temperature alarming：Bound temperature；
3. smog alarm；
4. the alarms such as fluid infusion exception.
Description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described.
Fig. 1 is a kind of trimethyl aluminium metering and conveying device structure diagram disclosed in the embodiment of the present invention.
Digital representation in figure：
11. 13. temperature sensor of bearing sensor 12.TMA evaporators
The discharging of pipeline 22. pneumatic operated valve one 14. liquid level sensor 21. discharges
23. bypass 24. mass flowmenter 25. of pneumatic operated valve discharging pneumatic operated valve two
31. 32. air blowing pneumatic operated valve of blowing pipe, 41. feed supplement pipeline
42. 43. manual 44. manual feed supplement valve of material-feeding port of feed supplement pneumatic operated valve
45. automatic feeding valve
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes.
With reference to figure 1, trimethyl aluminium metering and conveying device provided by the invention, including：Bearing sensor 11, is placed on load-bearing
TMA evaporators 12 on sensor 11, the discharging pipeline 21 and feed supplement pipeline 41 of connection TMA evaporators 12 and connection discharging
The blowing pipe 31 of pipeline 21, the port of export of feed supplement pipeline 41 are located at the bottom end of TMA evaporators 12, the arrival end for the pipeline 21 that discharges
Positioned at the top of TMA evaporators 12, the port of export via controller part of discharging pipeline 21 is connected to solar battery sheet coating process
Chamber；TMA evaporators 12 have temperature sensor 13 and liquid level sensor 14；The pipeline 21 that discharges has mass flowmenter 24, quality
Flowmeter 24 is provided with bypass pneumatic operated valve 23 and connection outlet end is provided with discharging pneumatic operated valve 2 25；The port of export of blowing pipe 31
It is provided with air blowing pneumatic operated valve 32；Feed supplement pipeline 41 is provided with feed supplement pneumatic operated valve 42, and feed supplement pipeline 41 passes through manual feed supplement valve 44
It is connected to manual material-feeding port 43, while in parallel automatic feeding mouth is connected to by automatic feeding valve 45.
Wherein, the port of export of blowing pipe 31 is connected on the discharging pipeline 21 of 24 arrival end of mass flowmenter, gas blow pipe
Discharging pneumatic operated valve 1 is provided on discharging pipeline 21 between the arrival end of the port of export on road 31 and the pipeline 21 that discharges.
The present invention makes pressure in TMA evaporators 12 constant, then pass through the control to TMA steams by the control of accurate temperature
Realize the amount of accurate control TMA, control accuracy is high, within reachable ± 1%；Pass through 11 real time and on line monitoring TMA of bearing sensor weights
Amount, 10 grams of precision can carry out automatic liquid supply in real time according to production requirement；TMA systems are monitored in real time by temperature sensor 13
Temperature, precision ± 1 DEG C；Have an automatic liquid supply and manual liquid replenishing function, it, every time can be according to the weight of setting under system auto state
Amount carries out carry out automatic liquid supply；Has automatic blowing function, system can carry out automatic blowing to control device and pipeline, improve
Device service life and maintenance period；TMA evaporators 12 and bearing sensor 11 have explosion prevention function；Has warning function：①
Realize that TMA weight is alarmed by the detection function of bearing sensor 11（It is low, normal, high）；2. pass through the report of liquid level sensor 14
Alert detection function realizes TMA liquid level warnings（Low, normal, high, superelevation）；3. temperature bound is realized by temperature sensor 13
Detection alarm；4. and it can realize the alarms such as smog alarm, fluid infusion exception.
The foregoing description of the disclosed embodiments enables professional and technical personnel in the field to realize or use the present invention.
A variety of modifications of above-described embodiment will be apparent for those skilled in the art, it is as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, it is of the invention
The embodiments shown herein is not intended to be limited to, and is to fit to and the principles and novel features disclosed herein phase one
The most wide range caused.
Claims (4)
1. a kind of trimethyl aluminium metering and conveying device, which is characterized in that including：
Bearing sensor, the TMA evaporators being placed in the bearing sensor connect the discharging pipelines of the TMA evaporators
And the blowing pipe of feed supplement pipeline and connection discharging pipeline；
The TMA evaporators have temperature sensor and liquid level sensor；
The discharging pipeline has mass flowmenter, and the mass flowmenter is provided with bypass pneumatic operated valve and the setting of connection outlet end
There is discharging pneumatic operated valve two；
The port of export of the blowing pipe is provided with air blowing pneumatic operated valve；
The feed supplement pipeline is provided with feed supplement pneumatic operated valve, and the feed supplement pipeline is connected to manual feed supplement by manual feed supplement valve
Mouthful, while in parallel automatic feeding mouth is connected to by automatic feeding valve.
2. a kind of trimethyl aluminium metering and conveying device according to claim 1, which is characterized in that the blowing pipe goes out
Mouth end is connected to the discharge nozzle road of the mass flowmenter arrival end.
3. a kind of trimethyl aluminium metering and conveying device according to claim 2, which is characterized in that the blowing pipe goes out
Discharge nozzle road between the arrival end of mouth end and the discharging pipeline is provided with discharging pneumatic operated valve one.
4. a kind of trimethyl aluminium metering and conveying device according to claim 1, which is characterized in that the feed supplement pipeline goes out
Mouth end is located at the bottom end of the TMA evaporators, and the arrival end of the discharging pipeline is located at the top of the TMA evaporators.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810075901.5A CN108130525B (en) | 2018-01-26 | 2018-01-26 | Trimethyl aluminum metering and conveying device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810075901.5A CN108130525B (en) | 2018-01-26 | 2018-01-26 | Trimethyl aluminum metering and conveying device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108130525A true CN108130525A (en) | 2018-06-08 |
| CN108130525B CN108130525B (en) | 2024-04-16 |
Family
ID=62400873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810075901.5A Active CN108130525B (en) | 2018-01-26 | 2018-01-26 | Trimethyl aluminum metering and conveying device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108130525B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110158057A (en) * | 2019-06-05 | 2019-08-23 | 承德石油高等专科学校 | A kind of pecvd process chamber bye-pass device and its air-channel system at place |
| CN111153590A (en) * | 2019-12-31 | 2020-05-15 | 江苏通鼎光棒有限公司 | Germanium tetrachloride tympanic bulla device of high accuracy |
| CN114686854A (en) * | 2022-03-31 | 2022-07-01 | 晶澳太阳能有限公司 | Source supply system and source supply method for tubular coating equipment |
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| CN207760427U (en) * | 2018-01-26 | 2018-08-24 | 常州比太黑硅科技有限公司 | A kind of trimethyl aluminium metering and conveying device |
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| TW200402480A (en) * | 2002-04-09 | 2004-02-16 | Wafermasters Inc | Source gas delivery |
| US20100285206A1 (en) * | 2009-03-27 | 2010-11-11 | Rohm And Haas Electronic Materials Llc | Method and apparatus |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110158057A (en) * | 2019-06-05 | 2019-08-23 | 承德石油高等专科学校 | A kind of pecvd process chamber bye-pass device and its air-channel system at place |
| CN111153590A (en) * | 2019-12-31 | 2020-05-15 | 江苏通鼎光棒有限公司 | Germanium tetrachloride tympanic bulla device of high accuracy |
| CN111153590B (en) * | 2019-12-31 | 2022-03-25 | 江苏通鼎光棒有限公司 | Germanium tetrachloride tympanic bulla device of high accuracy |
| CN114686854A (en) * | 2022-03-31 | 2022-07-01 | 晶澳太阳能有限公司 | Source supply system and source supply method for tubular coating equipment |
| CN114686854B (en) * | 2022-03-31 | 2023-09-01 | 晶澳太阳能有限公司 | Source supply system and source supply method for tubular film plating equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108130525B (en) | 2024-04-16 |
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