CN108120381A - For the differential type SPR phase detection device of nano level metal measured film thickness - Google Patents
For the differential type SPR phase detection device of nano level metal measured film thickness Download PDFInfo
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- CN108120381A CN108120381A CN201611065300.3A CN201611065300A CN108120381A CN 108120381 A CN108120381 A CN 108120381A CN 201611065300 A CN201611065300 A CN 201611065300A CN 108120381 A CN108120381 A CN 108120381A
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- prism
- film thickness
- speculum
- nano level
- differential type
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
Abstract
The invention discloses a kind of differential type SPR phase detection devices for nano level metal measured film thickness, including laser light source, polarizer, Amici prism, speculum, interference structure and the imaging arrangement being sequentially located in same optical axis, between speculum and interference structure inclined-plane is set to be coated with sensing metal film prism；Incident light is reflected through light path I and light path II into interference structure.Metallic film forms banding film-forming region along the sensing prism hypotenuse/facet surfaces length direction, and with the scarf in no metal pattern region into film thickness step, and two light beams on film thickness step are from symmetry direction or in the same direction while incident.The beneficial effects of the invention are as follows：Common mode interference is eliminated, improves the non-linear of whole system, so as to improve the measurement accuracy of film thickness and sensitivity, and the thickness of film can be monitored in real time；Non-contact measurement will not scratch measurement sample；Whole measurement structure is simple, easy to operate, applied widely.
Description
Technical field
The present invention relates to a kind of film thickness detection fields, the more particularly to differential type for nano level metal measured film thickness
SPR phase detection device.
Background technology
Metallic film material becomes the base of microelectronic component due to its remarkable electric property, optical property and mechanical property
Plinth material.However, the property of metallic film is heavily dependent on its thickness because the various parameters of film nearly all with thickness
It spends related.At present, there is mechanical sonde method, scanning probe microscopy, ellipse both at home and abroad for the device of thickness of metal film measurement
Inclined method, Surface Plasmon Resonance etc..Mechanical sonde method is contact type measurement, easily scratches sample, film is damaged；
Scanning probe microscopy and ellipsometer are non-cpntact measurement, and measurement accuracy is higher and sensitivity is all higher, but instrument cost is held high
It is expensive, it is unfavorable for promoting the use of on a large scale.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of high certainty of measurement, high sensitivity, real non-destructive measurement, knot
The simple nano level metal apparatus for measuring thickness of thin film of structure.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention is：One kind is thick for nano level metal film
The differential type SPR phase detection device of measurement is spent, including：Set laser light source on the table, polarizer, Amici prism,
Speculum, interference structure and imaging arrangement, wherein laser light source, polarizer, Amici prism and speculum are sequentially located at same light
On axis, the sensing prism of excitation SPR effects, the inclined-plane plating of the sensing prism are provided between the speculum and interference structure
There is metallic film；Incident light through speculum, sensing prism the metallic film excite SPR effects after formed light path I reflect into
The interference structure；Incident light is through Amici prism, light reflection mechanism, sensing prism after the metallic film excites SPR effects
Light reflection mechanism formation light path II is returned again to reflect into the interference structure.
The speculum is in 45 degree of angles with optical axis.
The light reflection mechanism is including being placed perpendicular to below the Amici prism and sensing prism positioned at described and do
Relate to the equilateral triangle or splayed prism, loop reflection mirror between structure.
The interference structure includes speculum, speculum, polarization splitting prism and polarization splitting prism, polarization splitting prism
Distance to speculum and speculum is equal, and the distance of polarization splitting prism to speculum and speculum is equal.
The metallic film forms banding film-forming region along the sensing prism hypotenuse/facet surfaces length direction, and with no metal pattern
The scarf in region is into film thickness step.
Two light beams on the film thickness step are from symmetry direction or in the same direction while incident.
The measurement accuracy of the film thickness is less than 1nm.
Displacement platform is provided with below the sensing prism, the displacement platform, which includes X translation stages, the Y that combination is built, puts down
Moving stage, Z translation stages, turntable, controller and joystick.
The imaging arrangement includes polarizer, convex lens and camera.
The metallic film need to form the step of horizontal direction on the sensing prism hypotenuse/facet surfaces.
The sensing prism is equilateral right-angle prism, and material is BK7 glass.
The light path I and the light spot of light path II are in the transitional region in the plated film area and non-plated film area of sensing prism.
The output wavelength of the He-Ne laser light sources is 632.8nm.
The metallic film is gold, silver, copper, aluminium, platinum, titanium, nickel, chromium.
The beneficial effects of the invention are as follows：The device carries out the measurement of film thickness, SPR phase method using SPR phase method
For the highest device of measurement accuracy in SPR methods；And by differential measurement, common mode interference is eliminated, improves film thickness
Measurement accuracy；It is measured using differential type, improves the non-linear of whole system, improve the sensitivity of measurement；It is filled using optics
Direct measurement is put, monitors the thickness of film in real time；Non-contact measurement will not scratch measurement sample, avoid film thickness survey
The waste of sample in amount；It is simple in structure, easy to operate：Whole device is built by discrete optical element, is not required to complicated machinery
Structure and electronic structure after light path is debugged, can be directly controlled displacement platform mobile sensor prism by host computer；The scope of application
Extensively.
Description of the drawings
Fig. 1 is the light path schematic diagram of first embodiment of the invention；
Fig. 2 is the light path schematic diagram of second embodiment of the invention；
Fig. 3 is the displacement platform structure diagram of the present invention；
Fig. 4 is the plated film schematic diagram of the present invention；
Fig. 5 is position view of the light spot of the present invention on sensing prism.
In figure
1st, He-Ne lasers 2, polarizer
3rd, Amici prism 4, speculum
5th, prism 6, metallic film are sensed
7th, displacement platform 8, equilateral right-angle prism
9th, speculum 10, speculum
11st, polarization splitting prism 12, speculum
13rd, speculum 14, polarization splitting prism
15th, polarizer 16, convex lens
17th, camera 18, workbench
19th, computer 20, X translation stages
21st, Y translation stages 22, Z translation stages
23rd, turntable 26, prism holder
27th, speculum 28, speculum
29th, the luminous point 30 of light path I, the luminous point of light path II
31st, Z translation stages stent 32, turntable support
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawings and detailed description：
As shown in Figure 1 and Figure 2, the differential type SPR phase for nano level metal measured film thickness of the invention detects dress
It puts, including workbench 18, He-Ne laser light sources 1 is provided on the workbench 18, polarization is provided on the right side of the light source
Piece 2, Amici prism 3 and speculum 4, wherein laser light source 1, polarizer 2, Amici prism 3 and speculum 4 are located at same optical axis
On, for the speculum 4 with optical axis in 45 degree of angles, the front side of the speculum 4 is provided with the sensing prism 5 of excitation SPR effects,
The inclined-plane of the sensing prism 5 is coated with metallic film 6, and metallic film 6 need to form a film on 5 inclined-plane of sensing prism, 6 edge of metallic film
The sensing prism 5 chamfer length direction forms banding film-forming region, and with the scarf in no metal pattern region into film thickness step.
There are two light beams on film thickness step from symmetry direction or in the same direction while incident.
The rear side of the sensing prism 5 is provided with speculum 9, and the left side of the speculum 9 is provided with speculum 10, described
The front side of speculum 10 is provided with equilateral right-angle prism 8, and the left side of the equilateral right-angle prism 8 is provided with polarization splitting prism
11, speculum 13 and 12, the speculum are respectively arranged at the left side of the polarization splitting prism 11 and front side equidistant position
Polarization splitting prism 14, the polarization splitting prism 14 are provided at the left side equidistant position of 13 front side and the speculum 12
Front side is provided with polarizer 15, and 15 front side of polarizer is provided with convex lens 16, and the front side of the convex lens 16 is provided with phase
Machine 17, the camera 17 receive interference fringe image, and the camera 17 connects computer 19, has two on the sensing prism 5
Light beam is incident simultaneously, and the light path I senses prism 5, interference structure and imaging arrangement composition by speculum 4；The light path II by
Equilateral right-angle prism 8 senses prism 5, speculum 9, speculum 10, interference structure and imaging arrangement composition, wherein sensing prism
5, interference structure and imaging arrangement share for two light beams, and the lower section of the sensing prism 5 is provided with displacement platform 7.
As shown in figure 3, the displacement platform 7 include combination build X translation stages 20, Y translation stages 21, Z translation stages 22,
Turntable 23, controller 24 and joystick 25.
The interference structure includes speculum 12, speculum 13, polarization splitting prism 11 and polarization splitting prism 14,
Polarization splitting prism 11 is equal with the distance of speculum 13 to speculum 12, and polarization splitting prism 14 arrives speculum 12 and speculum
13 distance is equal.
The imaging arrangement includes polarizer 15, convex lens 16 and camera 17.
As shown in figure 4, the metallic film 6 need to form the step of horizontal direction on 5 inclined-plane of the sensing prism.Institute
The sensing prism 5 stated is equilateral right-angle prism, and material is BK7 glass.
As shown in figure 5, the light path I and the light spot of light path II are in the plated film area of sensing prism and non-plated film area
Transitional region, the output wavelengths of the He-Ne laser light sources (1) are 632.8nm, the metallic film 6 is gold, silver, copper,
Aluminium, platinum, titanium, nickel, chromium metallic film material.
The operation principle of the differential type SPR phase detection device for nano level metal measured film thickness of the present invention
It is：The light beam that He-Ne laser light sources 1 are sent is divided into two-way light after polarizer 2 into Amici prism 3.Light path I is by reflection
Mirror 4 is incident on excitation SPR effects on metallic film 6, then the interference that is reflected by sensing prism 5 is tied into sensing prism 5
Structure；Light path II enters sensing prism 5 by equilateral right-angle prism 8 (Fig. 1) or one speculum 27 (Fig. 2) of splayed, similary incident
On metallic film 6 excite SPR effects, by sense prism 5, speculum 9, speculum 10, equilateral right-angle prism 8 (Fig. 1) or
Another speculum 28 (Fig. 2) of splayed enters interference structure.Perpendicular to 3 lower section of Amici prism and positioned at the sensing prism
Equilateral triangle or splayed prism, loop reflection mirror 9,10 between 5 and interference structure form light reflection mechanism.I He of light path
Light path II is divided by polarization splitting prism 11 for S-polarization light and P polarization light, wherein, reflection is S-polarization light, and transmission is P polarization
Light.Two-way S-polarization light is reflexed to by speculum 12 in polarization splitting prism 14, and two-way P polarization light is reflected by speculum 13
To polarization splitting prism 14, the convergence in polarization splitting prism 14 of two-way S-polarization light and two-way P polarization light generates interference item
Line.It is appropriate to adjust 15 polarizing axis of polarizer, make interference fringe high-visible.Finally by the interference fringe image planoconvex lens of generation
After 16 amplifications, it is sent into camera 17 and is imaged, interference fringe is gathered out via computer 19.
Since light path I and light path II are to be incident to sensing prism coated surface the other way around, at this moment, rotated along any direction
Turntable, you can realize that angle of light increases all the way, the differential measurement that another way angle of light reduces.The two width interference collected
Striped is that can obtain the thickness information of metallic film by subsequent algorithm process.
The present invention is suitable for the differential type measurement for completing thickness of metal film in real time, and the present invention is in addition to above-mentioned embodiment, also
Have an other embodiment, every technical solution formed using equivalent substitution or equivalent transformation, all fall within the present invention claims guarantor
Protect scope.
Claims (14)
1. a kind of differential type SPR phase detection device for nano level metal measured film thickness, including：It is arranged on workbench
(18) laser light source (1), polarizer (2), Amici prism (3), speculum (4), interference structure and imaging arrangement on, wherein swashing
Radiant (1), polarizer (2), Amici prism (3) and speculum (4) are sequentially located in same optical axis, which is characterized in that described
Speculum (4) is provided with the sensing prism (5) of excitation SPR effects, the inclined-plane plating of the sensing prism (5) between interference structure
There is metallic film (6)；Incident light is formed through speculum (4), sensing prism (5) after the metallic film (6) excites SPR effects
Light path I is reflected into the interference structure；Incident light is through Amici prism (3), light reflection mechanism, sensing prism (5) in the metal
Light reflection mechanism formation light path II is returned again to after film (6) excitation SPR effects to reflect into the interference structure.
2. a kind of differential type SPR phase for nano level metal measured film thickness according to claim 1 detects dress
It puts, it is characterized in that：The speculum (4) is in 45 degree of angles with optical axis.
3. a kind of differential type SPR phase for nano level metal measured film thickness according to claim 1 detects dress
It puts, it is characterized in that：The light reflection mechanism includes being placed perpendicular to below the Amici prism (3) and positioned at the sensing rib
Equilateral triangle or splayed prism, loop reflection mirror (9,10) of the mirror (5) between interference structure.
4. a kind of differential type SPR phase for nano level metal measured film thickness according to claim 1 detects dress
It puts, it is characterized in that：The interference structure includes speculum (12), speculum (13), polarization splitting prism (11) and polarization point
The distance of light prism (14), polarization splitting prism (11) to speculum (12) and speculum (13) is equal, polarization splitting prism
(14) it is equal to the distance of speculum (12) and speculum (13).
5. the differential type SPR phase detection device according to claim 1 for nano level metal measured film thickness,
It is characterized in：The metallic film (6) forms banding film-forming region along described sensing prism (5) chamfer length direction, and with nothing
The scarf in metal pattern region is into film thickness step.
6. a kind of differential type SPR phase for nano level metal measured film thickness according to claim 5 detects dress
It puts, it is characterized in that：Two light beams on the film thickness step are from symmetry direction or in the same direction while incident.
7. a kind of differential type SPR phase for nano level metal measured film thickness according to claim 1 detects dress
It puts, it is characterized in that：The measurement accuracy of the film thickness is less than 1nm.
8. a kind of differential type SPR phase for nano level metal measured film thickness according to claim 1 detects dress
It puts, it is characterized in that：Displacement platform (7) is provided with below the sensing prism (5), the displacement platform (7) includes combination and builds
X translation stages (20), Y translation stages (21), Z translation stages (22), turntable (23), controller (24) and joystick (25).
9. the differential type SPR phase detection device according to claim 1 for nano level metal measured film thickness,
It is characterized in that, the imaging arrangement includes polarizer (15), convex lens (16) and camera (17).
10. the differential type SPR phase detection device according to claim 1 for nano level metal measured film thickness,
It is characterized in that, the metallic film (6) need to form the step of horizontal direction on described sensing prism (5) inclined-plane.
11. the differential type SPR phase detection device according to claim 1 for nano level metal measured film thickness,
It is characterized in that, the sensing prism (5) is equilateral right-angle prism, material is BK7 glass.
12. the differential type SPR phase detection device according to claim 1 for nano level metal measured film thickness,
It is characterized in that, the transition of the light path I and the light spot of light path II in the plated film area of sensing prism (5) and non-plated film area
Region.
13. the differential type SPR phase detection device for nano level metal measured film thickness according to belonging to claim 1,
It is characterized in that, the output wavelength of the He-Ne laser light sources (1) is 632.8nm.
14. the differential type SPR phase detection device for nano level metal measured film thickness according to belonging to claim 1,
It is characterized in that, the metallic film (6) is gold, silver, copper, aluminium, platinum, titanium, nickel, chromium metallic film.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611065300.3A CN108120381B (en) | 2016-11-28 | 2016-11-28 | Differential SPR phase detection device for measuring thickness of nano-scale metal film |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611065300.3A CN108120381B (en) | 2016-11-28 | 2016-11-28 | Differential SPR phase detection device for measuring thickness of nano-scale metal film |
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| CN108120381A true CN108120381A (en) | 2018-06-05 |
| CN108120381B CN108120381B (en) | 2021-05-21 |
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