CN108107610B - Large aperture acousto-optic tunable filter - Google Patents
Large aperture acousto-optic tunable filter Download PDFInfo
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- CN108107610B CN108107610B CN201711449207.7A CN201711449207A CN108107610B CN 108107610 B CN108107610 B CN 108107610B CN 201711449207 A CN201711449207 A CN 201711449207A CN 108107610 B CN108107610 B CN 108107610B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/11—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/05—Function characteristic wavelength dependent
- G02F2203/055—Function characteristic wavelength dependent wavelength filtering
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- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
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Abstract
The invention discloses a large-aperture acousto-optic tunable filter, which comprises an acousto-optic medium, an energy converter and a welding layer, wherein the energy converter is connected with the acousto-optic medium in a bonding way through the welding layer, the welding layer comprises five layers, and a priming layer I, a transition layer I, a bonding layer, a transition layer II and a priming layer II are sequentially arranged from the acousto-optic medium to the energy converter; plating a surface electrode on the transducer; the base coat layer I and the base coat layer II are both titanium thin film layers; the transition layer I and the transition layer II are both copper thin film layers; the bonding layer is a tin-silver-indium alloy layer. During manufacturing, two evaporation sources are respectively arranged on two sides of the transducer and the acousto-optic medium, and bonding layer materials are evaporated on the transducer and the acousto-optic medium simultaneously so as to obtain a large-area bonding layer film with uniform thickness, and the bonding layer film covers the transducer and the copper film layer of the acousto-optic medium simultaneously. The invention solves the problems that the optical aperture of the acousto-optic tunable filter is difficult to be enlarged, the welding quality is not good enough and can not bear larger driving electric power, and the like.
Description
Technical Field
The invention relates to an acousto-optic device, in particular to an acousto-optic tunable filter with a larger optical aperture.
Background
The hyperspectral imaging technology based on the acousto-optic tunable filter is one of the most effective technical means of international military reconnaissance at present, organically combines the imaging technology and the spectral measurement technology, can quickly find the target which cannot be identified by the conventional means by distinguishing the subtle difference of the reflection spectral characteristics of the target and the background, has important significance in the aspects of anti-stealth/camouflage, battlefield detailed investigation, target searching, accurate identification and the like, and can be widely applied to hyperspectral and hyperspectral imaging alarm reconnaissance systems such as airplane missile early warning, battlefield reconnaissance, mine detection, offshore detection, anti-submarine reconnaissance, ammunition damage effect evaluation and the like.
The acousto-optic tunable filter is a key component in an acousto-optic hyperspectral imaging system, the larger the optical aperture of the acousto-optic tunable filter is, the stronger the light collecting capacity of the hyperspectral imaging system is, the higher the sensitivity of the spectral imaging alarm reconnaissance system is, and the farther the reconnaissance distance is, but the optical aperture of the acousto-optic tunable filter is not too large at present, the optical aperture of a mature product is only 10mm, the maximum optical aperture reported in the literature is 15mm, and the requirement (the optical aperture is more than 20mm) of the whole system has a larger difference.
The reason why the optical aperture is difficult to be large is that as the optical aperture increases, the uniformity of diffraction efficiency (one of the main technical indexes of the acousto-optic tunable filter) begins to decrease, thereby affecting the imaging quality. The main reasons for the decrease in diffraction efficiency uniformity are: in the process of manufacturing the acousto-optic tunable filter, an evaporation source is arranged on only one side of the transducer and the acousto-optic medium, so that the bonding layer film on the transducer and the acousto-optic medium close to the evaporation source is thicker, the bonding layer film on the transducer and the acousto-optic medium far away from the evaporation source is thinner, and the uneven film thickness causes uneven diffraction efficiency.
On the other hand, with the increase of the optical aperture of the acousto-optic tunable filter, to keep the diffraction efficiency from decreasing, the driving electric power must be increased synchronously, and the capability of the lithium niobate transducer to bear higher electric power is required to be improved. The transducer is a key part for converting a driving electric signal into ultrasonic waves in the acousto-optic tunable filter and is welded on an acousto-optic medium tellurium oxide through a welding layer. The welding layer has two main structures at present: (1) a chromium film (bottom coating layer), tin or indium or alloy containing tin, silver and indium (bonding layer) and the chromium film (bottom coating layer) are arranged in sequence from the acousto-optic medium to the transducer; (2) the chromium film (bottom layer), the gold film (transition layer), the alloy containing tin or indium or tin-silver-indium (bonding layer), the gold film (transition layer) and the chromium film (bottom layer) are arranged from the acousto-optic medium to the transducer in sequence. The two structures are both provided with a chromium film as a base, and the adhesion between the chromium film and a base material tellurium oxide is not firm enough: when the transducer is shoveled by a blade, the transducer can fall off in a large area, and almost no residual welding layer material exists on the welding surface of the tellurium oxide, namely, the chromium film can fall off from the tellurium oxide along with other welding materials. Along with the increase of the driving electric power, the stronger the vibration of the transducer converted into ultrasonic waves, the more and more desoldering areas can appear on the welding layer after long-time work, and further the performance of the device is reduced and even the device is burnt out, so the welding layer is required to be improved, the welding quality of the transducer is improved, the capability of the transducer for bearing higher electric power is improved, and the requirement of the large-aperture acousto-optic tunable filter is met.
Disclosure of Invention
In view of the above-mentioned shortcomings in the prior art, the present invention is directed to provide an acousto-optic tunable filter with a large aperture, so as to solve the problems that the acousto-optic tunable filter is difficult to make the aperture large, the welding quality is not good enough, and the acousto-optic tunable filter cannot bear large driving electric power.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
the large-aperture acousto-optic tunable filter comprises an acousto-optic medium, an energy converter and a welding layer, wherein the energy converter is in bonding connection with the acousto-optic medium through the welding layer, the welding layer comprises five layers, and a priming layer I, a transition layer I, a bonding layer, a transition layer II and a priming layer II are sequentially arranged from the acousto-optic medium to the energy converter; plating a surface electrode on the transducer; the base coat layer I and the base coat layer II are both titanium thin film layers; the transition layer I and the transition layer II are both copper thin film layers; the bonding layer is a tin-silver-indium alloy layer.
The thickness of the two titanium thin film layers forming the base coat layer I and the base coat layer II is 10 nm-15 nm, the thickness of the two copper thin film layers forming the transition layer I and the transition layer II is 200 nm-250 nm, and the thickness of the bonding layer is 1000 nm-1500 nm.
When the transducer is bonded with the acousto-optic medium, two evaporation sources are respectively arranged on two sides of the transducer and the acousto-optic medium, firstly, a titanium target is moved between the transducer and the acousto-optic medium, titanium is simultaneously sputtered from the upper part and the lower part of the titanium target, and a titanium film layer is simultaneously formed on the welding surface of the transducer and the acousto-optic medium; moving the copper target between the transducer and the acousto-optic medium, sputtering copper from the copper target up and down simultaneously, forming a copper film layer on the welding surface of the transducer and the acousto-optic medium simultaneously, and covering the copper film layer on the titanium film layer; and finally, evaporating the bonding layer material for the transducer and the acousto-optic medium at the same time to obtain a large-area bonding layer film with uniform thickness, wherein the bonding layer film covers the transducer and the copper film layer of the acousto-optic medium at the same time.
Specifically, the bonding is carried out in a vacuum environment, and a titanium target and a copper target are placed in a vacuum chamber in advance; reaching a vacuum degree of 1 × 10-3When Pa, starting to sputter a titanium target and a copper target in sequence; after the titanium thin film layer and the copper thin film layer are formed, the two evaporation sources are opened simultaneously, the evaporated tin-silver-indium alloy film material is deposited on the transducer and the copper thin film layer of the acousto-optic medium simultaneously, and after a bonding layer with the required thickness is formed, pressure is applied to the acousto-optic medium to bond the transducer and the acousto-optic medium together.
The purity of the titanium target and the copper target is not lower than 99.9%.
Compared with the prior art, the invention has the following beneficial effects:
1. the invention adopts a double-evaporation source bonding technology, solves the problem of the thickness uniformity of a bonding layer between a large-size transducer and an acousto-optic medium, further solves the problem of the diffraction efficiency uniformity of the large-aperture acousto-optic tunable filter, and is beneficial to realizing large aperture.
2. The design of a new welding layer (a titanium film (bottoming layer), a copper film layer (transition layer), a tin-silver-indium alloy layer (bonding layer), a copper film layer (transition layer) and a titanium film layer (bottoming layer) from an acousto-optic medium to the transducer in sequence) is adopted, so that the firmness of the transducer in welding on the acousto-optic medium tellurium oxide is greatly improved, the transducer can bear higher driving electric power, and the reliability of the large-aperture acousto-optic tunable filter is further improved.
Drawings
FIG. 1 is a schematic diagram of the main structure of the large-aperture acousto-optic tunable filter of the present invention.
Fig. 2 is a front view of a dual evaporation source bonding process of the present invention.
Wherein, 1-vacuum chamber; 2- -acousto-optic medium; 3-titanium target; 4-evaporation source I; 5-a transducer; 6-evaporation source II; 7-copper target; 8-a watch electrode; 9-titanium film I; 10-copper film I; 11 — a bonding layer; 12- -copper film II; 13-titanium film II.
Detailed Description
The above structural modifications of the present invention will be described in detail below with reference to the accompanying drawings and the detailed description.
Referring to fig. 1, it can be seen from the figure that the large-aperture acousto-optic tunable filter of the present invention mainly comprises an acousto-optic medium 2, a transducer 5, a surface electrode 8, a titanium thin film i 9, a copper thin film i 10, a bonding layer 11, a copper thin film ii 12, a titanium thin film ii 13, and the like.
A welding layer is arranged between the acousto-optic medium 2 and the transducer 5, the welding layer is composed of a titanium film I9 (priming layer), a copper film I10 (transition layer), a bonding layer 11 (tin-silver-indium alloy layer), a copper film II 12 (transition layer) and a titanium film II 13 (priming layer), the thicknesses of the titanium film I9 and the titanium film II 13 are 10 nm-15 nm, the thicknesses of the copper film I10 and the copper film II 12 are 200 nm-250 nm, and the thickness of the bonding layer 11 is 1000 nm-1500 nm.
The transducer material is an X-cut lithium niobate crystal.
The bonding layer material is an alloy containing tin, silver and indium.
The acousto-optic medium is a tellurium oxide crystal.
In operation, a radio frequency signal (RF) is transmitted to the watch electrode 8. The transducer 5 absorbs radio frequency signals to generate ultrasonic waves which are transmitted into the acousto-optic medium 2, a refractive index grating is formed in the acousto-optic medium 2, incident light and the refractive index grating generate acousto-optic interaction to generate diffraction light, and an acousto-optic diffraction effect is achieved. The wavelength of the diffracted light has a one-to-one correspondence with the frequency of the radio frequency signal, i.e., a specific frequency diffracts a specific wavelength of light (monochromatic light is filtered out).
The titanium film is more active than chromium and is easier to bond with oxygen atoms in tellurium oxide and lithium niobate, so that the titanium film is more firmly attached to the tellurium oxide and lithium niobate than the chromium film, and a solid foundation is laid for improving the welding quality of the transducer.
The copper film (transition layer) is added on the titanium film, so that the welding firmness of the transducer is improved, the copper film is tightly combined with the titanium film (the copper film is widely verified in a high-power surface acoustic wave device) and can be tightly combined with a tin-silver-indium alloy layer (a bonding layer), the welding firmness of the transducer on an acousto-optic medium tellurium oxide can be greatly improved, and the requirement of using a large-aperture acousto-optic tunable filter for larger driving electric power is further met.
In the process of manufacturing the acousto-optic tunable filter, a titanium target (the purity is not lower than 99.9 percent) and a copper target (the purity is not lower than 99.9 percent) are arranged in a vacuum chamber, and two evaporation sources are respectively arranged on two sides of a transducer and an acousto-optic medium. Before welding the transducer and the acousto-optic medium together, firstly moving a titanium target between the transducer and the acousto-optic medium, sputtering titanium from the upper part and the lower part of the titanium target simultaneously, and forming a titanium film on the welding surface of the transducer and the acousto-optic medium; moving the copper target between the transducer and the acousto-optic medium, sputtering copper from the copper target up and down simultaneously, and forming a copper film (the copper film covers the titanium film) on the welding surface of the transducer and the acousto-optic medium; and finally, evaporating the bonding layer material for the transducer and the acousto-optic medium at the same time to obtain a large-area bonding layer film with uniform thickness (the bonding layer film covers the copper film).
Referring to fig. 2, the dual evaporation source bonding process technology of the present invention mainly designs one evaporation source on each of two sides of the transducer 5 and the acousto-optic medium 2: an evaporation source I4 and an evaporation source II 6. The vacuum degree of the vacuum chamber 1 reaches 1 x 10-3When Pa is needed, firstly, moving a titanium target 3 between a transducer 5 and an acousto-optic medium 2, sputtering titanium from the upper part and the lower part of the titanium target 3 simultaneously, and forming a titanium film I9 and a titanium film II 13 on the welding surfaces of the transducer 5 and the acousto-optic medium 2 respectively; moving a copper target 7 between the transducer 5 and the acousto-optic medium 2, sputtering copper from the copper target 7 up and down simultaneously, and forming a copper film I10 and a copper film II 12 on the welding surface of the transducer 5 and the acousto-optic medium 2 respectively (the copper film I10 covers on the titanium film I9, and the copper film II 12 covers on the titanium film II 13); and finally, simultaneously opening the evaporation source I4 and the evaporation source II 6, simultaneously depositing the evaporated film material (tin-silver-indium alloy) on the welding surface of the transducer and the acousto-optic medium, thus forming a bonding layer 11 with uniform thickness, and then applying pressure to the acousto-optic medium 2 to bond the transducer 5 and the acousto-optic medium 2 together.
The transducer of the large-aperture acousto-optic tunable filter manufactured by the invention is very firmly welded: when the transducer is shoveled by the blade, the transducer is broken, the phenomenon that the transducer falls off in a large area can not occur, and a plurality of residual welding layer materials are left on the tellurium oxide. Under the same heat dissipation condition, the driving electric power borne by the acousto-optic tunable filter is improved by more than 1 time, and the reliability of the large-aperture acousto-optic tunable filter is greatly improved.
The above examples of the present invention are merely illustrative of the present invention and are not intended to limit the embodiments of the present invention. Variations and modifications in other variations will occur to those skilled in the art upon reading the foregoing description. Not all embodiments are exhaustive. All obvious changes and modifications of the present invention are within the scope of the present invention.
Claims (5)
1. The large-aperture acousto-optic tunable filter comprises an acousto-optic medium, a transducer and a welding layer, wherein the acousto-optic medium is a tellurium oxide crystal; the transducer is in bonding connection with the acousto-optic medium through a welding layer, the welding layer is five layers, and the acousto-optic medium and the transducer are sequentially a base layer I, a transition layer I, a bonding layer, a transition layer II and a base layer II; plating a surface electrode on the transducer; the method is characterized in that: the base coat layer I and the base coat layer II are both titanium thin film layers; the transition layer I and the transition layer II are both copper thin film layers; the bonding layer is a tin-silver-indium alloy layer.
2. The large aperture acousto-optic tunable filter of claim 1, wherein: the thickness of the priming layer I and the priming layer II is 10 nm-15 nm, the thickness of the transition layer I and the transition layer II is 200 nm-250 nm, and the thickness of the bonding layer is 1000 nm-1500 nm.
3. The process for making a large aperture acousto-optic tunable filter as claimed in claim 1, wherein: when the transducer is bonded with the acousto-optic medium, a bonding layer material evaporation source is respectively arranged on two sides of the transducer and the acousto-optic medium, firstly, a titanium target is moved between the transducer and the acousto-optic medium, titanium is simultaneously sputtered from the upper part and the lower part of the titanium target, and a titanium film layer is simultaneously formed on the welding surface of the transducer and the acousto-optic medium; moving the copper target between the transducer and the acousto-optic medium, sputtering copper from the copper target up and down simultaneously, forming a copper film layer on the welding surface of the transducer and the acousto-optic medium simultaneously, and covering the copper film layer on the titanium film layer; and finally, evaporating the bonding layer materials for the transducer and the acousto-optic medium by using the two bonding layer material evaporation sources to obtain a large-area bonding layer film with uniform thickness, wherein the bonding layer film covers the transducer and the copper film layer of the acousto-optic medium at the same time.
4. The process of claim 3 for making a large aperture acousto-optic tunable filter, wherein: bonding is carried out in a vacuum environment, and a titanium target and a copper target are placed in a vacuum chamber in advance; reaching a vacuum degree of 1 × 10-3When Pa, starting to sputter a titanium target and a copper target in sequence; after the titanium thin film layer and the copper thin film layer are formed, the two evaporation sources are opened simultaneously, the evaporated tin-silver-indium alloy film material is deposited on the transducer and the copper thin film layer of the acousto-optic medium simultaneously, and after a bonding layer with the required thickness is formed, pressure is applied to the acousto-optic medium to bond the transducer and the acousto-optic medium together.
5. The process of claim 3 for making a large aperture acousto-optic tunable filter, wherein: the purity of the titanium target and the copper target is not lower than 99.9%.
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| CN110794597B (en) * | 2019-11-15 | 2022-10-18 | 中国电子科技集团公司第二十六研究所 | Acousto-optic device with gold-tin alloy bonding layer structure and preparation method thereof |
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