CN108103442A - A kind of OLED linear evaporations source structure - Google Patents
A kind of OLED linear evaporations source structure Download PDFInfo
- Publication number
- CN108103442A CN108103442A CN201711477031.6A CN201711477031A CN108103442A CN 108103442 A CN108103442 A CN 108103442A CN 201711477031 A CN201711477031 A CN 201711477031A CN 108103442 A CN108103442 A CN 108103442A
- Authority
- CN
- China
- Prior art keywords
- nozzle
- inner cavity
- crucible
- linear
- source structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000008020 evaporation Effects 0.000 title claims abstract description 35
- 238000001704 evaporation Methods 0.000 title claims abstract description 35
- 238000007789 sealing Methods 0.000 claims abstract description 16
- 238000010276 construction Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 abstract description 9
- 239000011368 organic material Substances 0.000 abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 7
- 238000010025 steaming Methods 0.000 abstract description 5
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000007921 spray Substances 0.000 description 6
- 229920001621 AMOLED Polymers 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000004821 distillation Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000002207 thermal evaporation Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/12—Organic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
The present invention relates to a kind of OLED linear evaporations source structures, are related to evaporated device technical field.The OLED linear evaporations source structure includes crucible, and the crucible is equipped with crucible gas outlet；Body, the lower center position of the body are equipped with body air inlet；And it is placed in the top of body and linear evenly arranged multiple nozzles；The body is respectively equipped with sealing plate in the both sides on nozzle arrangement direction, and the sealing plate fastening on the body, and can realize the sealing of the inner cavity to the body.The OLED linear evaporations source structure of the present invention passes through the vapor deposition gas that heating crucible generates, after being entered by the body air inlet in chamber body, can balancedly it enter in each body through-holes, steaming is ejected on substrate with crossing gas uniformity via each nozzle again, the thickness evenness and yield of organic material plated film can be improved.
Description
Technical field
The present invention relates to evaporated device technical fields, and in particular to a kind of OLED linear evaporations source structure.
Background technology
In recent years, OLED (Organic Light-Emitting Diode) as a kind of new flat panel display by
It gradually receives more and more attention, constantly meets the pursuit that people show higher quality product.At present, in large scale AMOLED
, it is necessary to which the substances such as organic material are placed in steaming in (Active-matrix Organic Light-Emitting Diode) production
(or distillation) is evaporated in the evaporation source of coating apparatus, the gaseous state organic material of formation is ejected into evaporation by the nozzle of evaporation source
It after room temperature substrate above source, condenses in glass baseplate surface, so as to complete vapor deposition operation.Existing evaporated device is mostly using linear
Evaporation source, since the heat of different position and temperature have differences in crucible heating and transmittance process so that evaporation source is different
The hot kinetic energy of the organic gas molecule of position is inconsistent, so that the nozzle of different position sprays the evaporation rate of organic molecule not
Together, the thickness evenness for causing plated film is poor.
Existing line style evaporation source is as shown in Figure 1, including for holding and heat the crucible 1 of organic material and strip
The linear evaporation source body 2 of shape, the top of the crucible 1 connect the lower center position of the body 2, the top of the body 2
Portion is provided with several nozzles 3.When normally vapor deposition operation, the crucible 1 is heated by heater (not shown in figure 1), in crucible 1
Evaporation material entered by thermal evaporation (or distillation) into gas in the chamber of body 2, spray to substrate using nozzle 3 (in Fig. 1 not
Show) and it is condensed into film.For existing linear evaporation source, since body 2 is elongated, the steam in crucible 1 is entering
After the chamber of body 2, the middle position concentration in the chamber adjacent to crucible 1 is larger, and away from crucible 1 two side position concentration compared with
It is small, then the steam pressure by ectocentral nozzle on the body 2, which is compared, leans on the nozzle of proximal edge big.That is, described
The pressure imbalance of the chamber inner vapor of body 2 so that it is inconsistent from the hot kinetic energy of the ejection gas of different position nozzle 3, so as to make
Even to the uneven film thickness on substrate into being deposited, especially when making large scale AMOLED, the defect is more obvious.
The content of the invention
Present invention aim to solve the above problem of the prior art, a kind of OLED linear evaporation sources knot is provided
Structure.
In order to solve the above-mentioned technical problem, technical scheme is specific as follows：
A kind of OLED linear evaporations source structure, including：
Crucible, the crucible are equipped with crucible gas outlet；
Body, symmetrical sector crosssection shape centered on the inner cavity of the body；The lower center position of the body is set
There is body air inlet, for being connected with crucible gas outlet；
The top of the body is provided with horizontal linear uniformly arrangement, the identical multiple nozzles of vertical height；
The body is respectively equipped with sealing plate in the both sides on nozzle arrangement direction, and the sealing plate is fastened on described
On body, and it can realize the sealing of the inner cavity to the body.
In the above-mentioned technical solutions, the inner cavity is from top to bottom equipped with successively：Cambered surface, left and right two inner cavities bottom side on inner cavity
Inclined-plane and body air inlet.
In the above-mentioned technical solutions, the angle of the angle on left and right two inner cavity bottom sides inclined-plane is 90 °~150 °.
In the above-mentioned technical solutions, multiple body through-holes are provided on the body, are set respectively on each nozzle
There are one through nozzle holes；
The upper end of each body through-holes is connected with a through nozzle hole, the lower end of each body through-holes
It is connected by cambered surface on inner cavity with the inner cavity of the body.
In the above-mentioned technical solutions, the diameter of the body through-holes is bigger than the diameter of the through nozzle hole.
In the above-mentioned technical solutions, cambered surface is thin-wall construction on the inner cavity of the body, and is set on the inner cavity in cambered surface
It is equipped with multiple body through-holes；A through nozzle hole is respectively arranged on each nozzle；Each body through-holes pass through a spray
Mouth inlet channel is connected with a nozzle.
In the above-mentioned technical solutions, the diameter of the nozzle inlet channel is bigger than the diameter of the through nozzle hole.
Compared with prior art, the invention has the advantages that：
OLED linear evaporations source structure provided by the invention, the vapor deposition gas that heated crucible generates pass through body air inlet
Into in the inner cavity of body, then by body through-holes after, at nozzle spray.Since each body being on inner cavity in cambered surface leads to
Hole is consistent with the distance of body air inlet, the steaming entered via body air inlet in chamber body cross gas can uniform balance into
Enter in each body through-holes, so that each nozzle is ejected into the vapor deposition gas uniformity on substrate, therefore the OLED of the present invention
Linear evaporation source structure can improve the thickness evenness and yield of organic material plated film.
Description of the drawings
The present invention is described in further detail with reference to the accompanying drawings and detailed description.
Attached drawing is for providing a further understanding of the present invention, and a part for constitution instruction, with following tool
Body embodiment is together for explaining the present invention, but be not construed as limiting the invention.In the accompanying drawings：
Fig. 1 is the cross section structure schematic diagram of existing OLED linear evaporations source structure；
Fig. 2 is the cross section structure schematic diagram of the OLED linear evaporation source structures of the embodiment of the present invention 1；
Fig. 3 is the side structure schematic view of the OLED linear evaporation source structures of the embodiment of the present invention 1；
Fig. 4 is the cross section structure schematic diagram of the OLED linear evaporation source structures of the embodiment of the present invention 2；
Fig. 5 is the side structure schematic view of the OLED linear evaporation source structures of the embodiment of the present invention 2.
Wherein, reference numeral is：1- crucibles；2- bodies；3- nozzles；10- crucibles；101- crucibles gas outlet；20- bodies；
201- inner cavities bottom side inclined-plane；Cambered surface on 202- inner cavities；203- body through-holes；30- nozzles；301- through nozzle holes；302- nozzles into
Gas passage；40- sealing plates.
Specific embodiment
The specific embodiment of the present invention is described in detail below in conjunction with attached drawing.It should be appreciated that this place is retouched
The specific embodiment stated is merely to illustrate and explain the present invention, and is not intended to limit the invention.
Embodiment 1：
As shown in Figures 2 and 3, the present embodiment provides a kind of OLED linear evaporations source structure, including crucible 10, sealing plate 40,
Body 20 and multiple nozzles 30；The crucible 10 is equipped with crucible gas outlet 101；The lower center position of the body 20 is equipped with
Body air inlet；Multiple nozzles 30 are placed in the top of the body 20 and horizontal linear uniformly arrangement, vertical height phase
Together；The symmetrical two sides for being placed in the body 20 of the sealing plate 40, and be fastened on by screw on the body 20, it realizes
The sealing of the inner cavity of body 20.
Symmetrical sector crosssection shape centered on the inner cavity of the body 20, the inner cavity is by cambered surface on inner cavity 202, inner cavity
Bottom side inclined-plane 201 and body air inlet composition, the angle of the opening angle on left and right two inner cavity bottom sides inclined-plane 201 is 90 °
~150 °.
Body through-holes 203 are provided on the body 20, through nozzle hole 301 is provided on the nozzle 30；The body
The upper end of through hole 203 is connected with the through nozzle hole 301, the lower ends of the body through-holes 203 by cambered surface on inner cavity 202 with
The inner cavity of the body 20 is connected；The body through-holes 203 are in the gradual setting of " intermediate short, two length of sides ".
The generated vapor deposition gas when the evaporation material in the heating crucible 10, via the crucible gas outlet 101
Enter with body air inlet in the inner cavity of the body 20；Again by the body through-holes 203 after, at the nozzle 30 spray
Go out.It is consistent with the distance of the body air inlet due to being on the inner cavity each body through-holes 203 in cambered surface 202, via
The body air inlet enters the steaming in chamber body and enters in each body through-holes 203 with crossing gas meeting uniform balance, using
After the compression of the body through-holes 203, into nozzle passage 301 so that each nozzle 30 is ejected into the vapor deposition gas on substrate
Body uniformity, so as to improve the thickness evenness of organic material plated film and yield.
Embodiment 2：
As shown in Figure 4 and Figure 5, the present embodiment provides another OLED linear evaporations source structure, including crucible 10, sealing plate
40th, body 20 and multiple nozzles 30；The crucible 10 is equipped with crucible gas outlet 101；The lower center position of the body 20
Equipped with body air inlet；Multiple nozzles 30 are placed in the top of the body 20 and linear uniformly arrangement；The sealing plate 40
The symmetrical two sides for being placed in the body 20, and be fastened on by screw on the body 20, realize the inner cavity of body 20
Sealing.
Symmetrical sector crosssection shape centered on the inner cavity of the body 20, the inner cavity is by cambered surface on inner cavity 202, inner cavity
Bottom side inclined-plane 201 and body air inlet composition, the angle of the opening angle on left and right two inner cavity bottom sides inclined-plane 201 is 90 °
~150 °.
Cambered surface 202 is thin-wall construction on the inner cavity of the body 20, and is provided with body in cambered surface 202 on the inner cavity and leads to
Hole 203；On the nozzle 30 in addition to through nozzle hole 301 is provided with, be additionally provided with nozzle inlet channel 302, and the nozzle into
Gas passage 302 is placed between the through nozzle hole 301 and the body through-holes 203；The diameter ratio of the nozzle inlet channel 302
The diameter of the through nozzle hole 301 is big；The nozzle inlet channel 302 is in the gradual setting of " intermediate short, two length of sides ".
The vapor deposition gas of the generation of crucible 10 is heated via described in the crucible gas outlet 101 and the entrance of body air inlet
In the inner cavity of body 20, due to each body through-holes 203 for being on the inner cavity in cambered surface 202 and the body air inlet away from
From consistent, gas is crossed in the steaming entered via the body air inlet in chamber body to enter each body through-holes uniform balance
It in 203, enters back into the nozzle inlet channel 302, and after the compression of the nozzle inlet channel 302, enters
The nozzle passage 301 sprays so that each nozzle 30 is ejected into the vapor deposition gas uniform one on substrate at the nozzle 30
It causes, so as to improve the thickness evenness of organic material plated film and yield.
Embodiments of the present invention are only expressed above, and description is more specific and detailed, but can not therefore understand
For the limitation to patent of invention scope.It should be pointed out that for those of ordinary skill in the art, this hair is not being departed from
On the premise of bright design, several changes and improvement can also be made, these belong to protection scope of the present invention.Therefore, this hair
The protection domain of bright patent should be determined by the appended claims.
Claims (7)
1. a kind of OLED linear evaporations source structure, which is characterized in that including：
Crucible (10), the crucible (10) are equipped with crucible gas outlet (101)；
Body (20), symmetrical sector crosssection shape centered on the inner cavity of the body (20)；In the bottom of the body (20)
Position is entreated to be equipped with body air inlet, for being connected with crucible gas outlet (101)；
The top of the body (20) is provided with horizontal linear uniformly arrangement, the identical multiple nozzles (30) of vertical height；
The body (20) is respectively equipped with sealing plate (40), the sealing plate (40) in the both sides in nozzle (30) orientation
It is fastened on the body (20), and can realize the sealing of the inner cavity to the body (20).
2. a kind of OLED linear evaporations source structure according to claim 1, which is characterized in that the inner cavity from top to bottom according to
It is secondary to be equipped with：Cambered surface (202), left and right two inner cavities bottom side inclined-plane (201) and body air inlet on inner cavity.
A kind of 3. OLED linear evaporations source structure according to claim 2, which is characterized in that the two interior bottom of chamber in left and right
The angle of the angle in skew back face (201) is 90 °~150 °.
4. a kind of OLED linear evaporations source structure according to Claims 2 or 3, which is characterized in that on the body (20)
Multiple body through-holes (203) are provided with, a through nozzle hole (301) is respectively arranged on each nozzle (30)；
The upper end of each body through-holes (203) is connected with a through nozzle hole (301), each body through-holes
(203) lower end is connected by cambered surface on inner cavity (202) with the inner cavity of the body (20).
A kind of 5. OLED linear evaporations source structure according to claim 4, which is characterized in that the body through-holes (203)
Diameter it is bigger than the diameter of the through nozzle hole (301).
6. a kind of OLED linear evaporations source structure according to Claims 2 or 3, which is characterized in that the body (20)
Cambered surface (202) is thin-wall construction on inner cavity, and is provided with multiple body through-holes (203) on the inner cavity in cambered surface (202)；Each
A through nozzle hole (301) is respectively arranged on the nozzle (30)；Each body through-holes (203) are led to by a nozzle air inlet
Road (302) is connected with a nozzle (30).
A kind of 7. OLED linear evaporations source structure according to claim 6, which is characterized in that the nozzle inlet channel
(302) diameter is bigger than the diameter of the through nozzle hole (301).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711477031.6A CN108103442A (en) | 2017-12-29 | 2017-12-29 | A kind of OLED linear evaporations source structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711477031.6A CN108103442A (en) | 2017-12-29 | 2017-12-29 | A kind of OLED linear evaporations source structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108103442A true CN108103442A (en) | 2018-06-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711477031.6A Pending CN108103442A (en) | 2017-12-29 | 2017-12-29 | A kind of OLED linear evaporations source structure |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108842134A (en) * | 2018-08-29 | 2018-11-20 | 郑州华晶新能源科技有限公司 | A kind of oil shielding volatilization device |
| CN112553577A (en) * | 2019-09-26 | 2021-03-26 | 宝山钢铁股份有限公司 | Vacuum coating device for improving vacuum coating yield |
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| CN105177507A (en) * | 2015-09-08 | 2015-12-23 | 京东方科技集团股份有限公司 | Evaporation crucible and evaporation equipment |
| CN207699657U (en) * | 2017-12-29 | 2018-08-07 | 上海升翕光电科技有限公司 | A kind of OLED linear evaporations source structure |
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2017
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102456852A (en) * | 2010-10-22 | 2012-05-16 | 三星移动显示器株式会社 | Organic layer deposition apparatus, and method of manufacturing organic light-emitting display apparatus using the same |
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