CN108051400B - A scanning laser interference type fiber optic acoustic wave phase-locked detection system and method - Google Patents

A scanning laser interference type fiber optic acoustic wave phase-locked detection system and method Download PDF

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CN108051400B
CN108051400B CN201711233282.XA CN201711233282A CN108051400B CN 108051400 B CN108051400 B CN 108051400B CN 201711233282 A CN201711233282 A CN 201711233282A CN 108051400 B CN108051400 B CN 108051400B
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陈珂
于清旭
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Abstract

本发明提供了一种扫描激光干涉型光纤声波锁相探测系统及方法,属于微量气体检测技术领域。该系统包括光声激发光源、光调制器、光声池、光纤传声器、宽带扫描激光光源、光纤环形器、高速波长查询模块、锁相环、方波信号发生器、数字信号处理器和计算机。本发明对宽带扫描激光光源和高速波长查询模块进行同步波长扫描控制和同步光谱采样控制,将基于光纤扫描激光干涉仪的法布里‑珀罗腔长高速同步解调技术与锁相放大技术结合,实现对微弱光声信号的高灵敏与高稳定探测。本发明能够大幅度提高光声光谱微量气体检测的精度和极限灵敏度,为光声光谱微量气体检测提供了一种极具竞争力的技术方案。

Figure 201711233282

The invention provides a scanning laser interference type optical fiber acoustic wave phase locking detection system and method, belonging to the technical field of trace gas detection. The system includes a photoacoustic excitation light source, a light modulator, a photoacoustic cell, an optical fiber microphone, a broadband scanning laser light source, an optical fiber circulator, a high-speed wavelength query module, a phase-locked loop, a square wave signal generator, a digital signal processor and a computer. The invention performs synchronous wavelength scanning control and synchronous spectral sampling control for the broadband scanning laser light source and the high-speed wavelength query module, and combines the Fabry-Perot cavity length high-speed synchronous demodulation technology based on the fiber scanning laser interferometer with the phase-lock amplification technology , to achieve high sensitivity and high stability detection of weak photoacoustic signals. The invention can greatly improve the precision and limit sensitivity of the photoacoustic spectrum trace gas detection, and provides a highly competitive technical solution for the photoacoustic spectrum trace gas detection.

Figure 201711233282

Description

一种扫描激光干涉型光纤声波锁相探测系统及方法A scanning laser interference type fiber optic acoustic wave phase-locked detection system and method

技术领域technical field

本发明属于微量气体检测技术领域,涉及一种扫描激光干涉型光纤声波锁相探测系统及方法。The invention belongs to the technical field of trace gas detection, and relates to a scanning laser interference type optical fiber acoustic wave phase-locked detection system and method.

背景技术Background technique

光声光谱微量气体检测技术以其具有的高灵敏度、小采样体积等显著优势,已在环境污染气体监测、变压器油中溶解气分析和煤矿易燃易爆气体监测等领域中展现出广阔的应用前景。Due to its significant advantages such as high sensitivity and small sampling volume, photoacoustic spectroscopy trace gas detection technology has been widely used in the fields of environmental pollution gas monitoring, analysis of dissolved gas in transformer oil, and monitoring of flammable and explosive gases in coal mines. prospect.

在光声光谱测量中,气室中的气体分子吸收光能发生无辐射跃迁产生热量变化,引起气体振动产生声波。对于极低浓度微量气体检测,光声信号通常仅有微帕量级。根据光声光谱学的原理,光声测量的灵敏度正比于声波探测器的灵敏度。为提高系统检测极限,文献Wang Q,Wang J,Li L,et al.An all-optical photoacoustic spectrometer fortrace gas detection[J].Sensors and Actuators B:Chemical,2011,153(1):214-218设计了一种基于光纤法布里-珀罗干涉仪的小型化传声器,并将其应用于光声光谱微量乙炔气体测量。声波敏感膜片的内反射面和光纤端面之间的空气间隙构成法布里-珀罗腔,声波作用在膜片表面使腔长产生周期性变化。该方案采用强度解调法,当探测激光的中心波长锁定在Q点且声波强度较小时,法布里-珀罗干涉仪工作在线性区,即输出光强随声波作用发生周期性变化。光探测器将光强度信号转换为电信号后,输入到锁相放大器,提高光声信号检测的信噪比。然而,温度等环境因素会引起腔长的漂移,为保证解调系统始终处于线性工作区,激光波长必须随之动态调整,增加了系统的复杂程度。此外,这种强度解调法普遍存在易受光源功率波动和光路损耗影响而产生的测量误差增大等问题。文献Zhang Y,Shibru H,Cooper K L,et al.Miniature fiber-optic multicavity Fabry–Perotinterferometric biosensor[J].Optics letters,2005,30(9):1021-1023采用基于波长查询仪的扫描激光干涉型解调法对法布里-珀罗腔长进行解调,这种基于光谱测量的相位解调算法不受光源功率波动和光路损耗的影响,可对光纤法布里-珀罗传感器进行高精度和高稳定性测量。然而,目前的波长查询仪不能与锁相放大器进行匹配,无法应用于光声光谱微弱信号探测中。因而,设计一种基于光纤法布里-珀罗传声器的高信噪比、高稳定的光声锁相探测系统在光声光谱微量气体检测中具有重要的应用价值。In the photoacoustic spectroscopy measurement, the gas molecules in the gas chamber absorb light energy and undergo non-radiative transitions to generate heat changes, which cause the gas to vibrate and generate sound waves. For the detection of very low concentrations of trace gases, the photoacoustic signal is usually only in the order of micropascals. According to the principle of photoacoustic spectroscopy, the sensitivity of photoacoustic measurement is proportional to the sensitivity of the acoustic wave detector. In order to improve the detection limit of the system, Wang Q, Wang J, Li L, et al. An all-optical photoacoustic spectrometer for trace gas detection [J]. Sensors and Actuators B: Chemical, 2011, 153(1): 214-218 designed A miniaturized microphone based on a fiber-optic Fabry-Perot interferometer was developed and applied to the measurement of trace acetylene gas by photoacoustic spectroscopy. The air gap between the internal reflection surface of the acoustic wave sensitive diaphragm and the end face of the optical fiber constitutes a Fabry-Perot cavity, and the acoustic wave acts on the surface of the diaphragm to produce periodic changes in the cavity length. The scheme adopts the intensity demodulation method. When the central wavelength of the detection laser is locked at the Q point and the sound wave intensity is small, the Fabry-Perot interferometer works in the linear region, that is, the output light intensity changes periodically with the action of the sound wave. After the photodetector converts the light intensity signal into an electrical signal, it is input to the lock-in amplifier to improve the signal-to-noise ratio of photoacoustic signal detection. However, environmental factors such as temperature will cause the drift of the cavity length. In order to ensure that the demodulation system is always in the linear working region, the laser wavelength must be dynamically adjusted accordingly, which increases the complexity of the system. In addition, this intensity demodulation method generally suffers from the problem of increased measurement error caused by the fluctuation of light source power and optical path loss. Document Zhang Y, Shibru H, Cooper K L, et al. Miniature fiber-optic multicavity Fabry–Perotinterferometric biosensor[J]. Optics letters, 2005, 30(9): 1021-1023 Using a scanning laser interferometric solution based on a wavelength interrogator The modulation method demodulates the Fabry-Perot cavity length. This phase demodulation algorithm based on spectral measurement is not affected by the fluctuation of light source power and optical path loss, and can perform high-precision and optical fiber Fabry-Perot sensor modulation. High stability measurement. However, the current wavelength interrogator cannot be matched with the lock-in amplifier, and cannot be used in the detection of weak signals in photoacoustic spectroscopy. Therefore, designing a photoacoustic phase-locked detection system with high signal-to-noise ratio and high stability based on optical fiber Fabry-Perot microphone has important application value in the detection of trace gases in photoacoustic spectroscopy.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于提出一种用于光声光谱的扫描激光干涉型光纤声波锁相探测系统及方法,旨在解决基于光纤法布里-珀罗传声器的全光学光声光谱仪中存在的光声信号解调稳定性较差和精度较低等问题,进一步提高微量气体探测的检测灵敏度,为光声光谱在微量气体检测中的应用拓展更大的空间。The purpose of the present invention is to propose a scanning laser interference type fiber optic acoustic wave phase-locked detection system and method for photoacoustic spectroscopy, which aims to solve the problem of photoacoustic existing in all-optical photoacoustic spectrometers based on fiber Fabry-Perot microphones. The problems of poor signal demodulation stability and low precision further improve the detection sensitivity of trace gas detection and expand more space for the application of photoacoustic spectroscopy in trace gas detection.

本发明的原理如下:将基于光纤扫描激光干涉仪的法布里-珀罗腔长绝对测量技术与锁相放大技术结合,实现对微弱光声信号的高灵敏、高稳定和大动态范围探测。光声池中待测气体分子被激发产生的声波作用于光纤传声器使法布里-珀罗腔长产生周期性变化,扫描激光干涉产生的光频域谱的频率和相位随之变化,对扫描激光干涉谱的快速腔长解调即可恢复出声波信号。锁相环产生高频触发信号对高速波长查询模块进行同步采样控制,实现法布里-珀罗腔长解调信号的频率与光调制频率完全相同;数字信号处理器将法布里-珀罗腔长测量值与同频率的参考信号进行互相关运算,实现锁相放大功能,提高光声信号检测的信噪比。The principle of the invention is as follows: the absolute measurement technology of the Fabry-Perot cavity length based on the fiber scanning laser interferometer is combined with the lock-in amplification technology to realize high sensitivity, high stability and large dynamic range detection of weak photoacoustic signals. The acoustic wave generated by the excited gas molecules in the photoacoustic cell acts on the optical fiber microphone to periodically change the length of the Fabry-Perot cavity, and the frequency and phase of the optical frequency domain spectrum generated by the scanning laser interference change accordingly. The acoustic signal can be recovered by the fast cavity-length demodulation of the laser interference spectrum. The phase-locked loop generates a high-frequency trigger signal to synchronously sample and control the high-speed wavelength query module, so that the frequency of the Fabry-Perot cavity demodulation signal is exactly the same as the optical modulation frequency; the digital signal processor converts the Fabry-Perot The measured value of the cavity length is cross-correlated with the reference signal of the same frequency to realize the lock-in amplification function and improve the signal-to-noise ratio of photoacoustic signal detection.

本发明的技术方案:Technical scheme of the present invention:

一种扫描激光干涉型光纤声波锁相探测系统,包括光声激发光源1、光调制器2、光声池3、光纤传声器4、宽带扫描激光光源5、光纤环形器6、高速波长查询模块7、锁相环8、方波信号发生器9、数字信号处理器10和计算机11;A scanning laser interference type optical fiber acoustic phase-locked detection system, comprising a photoacoustic excitation light source 1, an optical modulator 2, a photoacoustic cell 3, a fiber microphone 4, a broadband scanning laser light source 5, a fiber circulator 6, and a high-speed wavelength query module 7 , phase-locked loop 8, square wave signal generator 9, digital signal processor 10 and computer 11;

所述的光声激发光源1与光声池3之间设置光调制器2,光声激发光源1发出的激发光经光调制器2调制后入射到光声池3;所述的光纤传声器4安装在光声池3上,用于探测光声池3内气体分子吸收产生的声波信号;所述的光调制器2的输出方波信号传输至锁相环8,所述的锁相环8的输出信号分别输入到方波信号发生器9和数字信号处理器10;所述的数字信号处理器10为锁相环8提供反馈信号;所述的数字信号处理器10控制方波信号发生器9产生的方波信号分别传输至宽带扫描激光光源5和高速波长查询模块7;所述的宽带扫描激光光源5发射的宽带扫描激光经光纤环形器6后入射到光纤传声器4;所述的光纤传声器4的反射光再经光纤环形器6入射到高速波长查询模块7;所述的数字信号处理器10读取高速波长查询模块7的光谱数据后,实现锁相放大功能;所述的计算机11与数字信号处理器10相连,用于设置数字信号处理器10的工作参数并对数字信号处理器10输出的光声信号测量幅值进行采集、处理和显示。A light modulator 2 is arranged between the photoacoustic excitation light source 1 and the photoacoustic cell 3, and the excitation light emitted by the photoacoustic excitation light source 1 is modulated by the light modulator 2 and then enters the photoacoustic cell 3; the optical fiber microphone 4 Installed on the photoacoustic cell 3, it is used to detect the acoustic wave signal generated by gas molecule absorption in the photoacoustic cell 3; the output square wave signal of the optical modulator 2 is transmitted to the phase-locked loop 8, and the phase-locked loop 8 The output signal is input to the square wave signal generator 9 and the digital signal processor 10 respectively; the digital signal processor 10 provides a feedback signal for the phase-locked loop 8; the digital signal processor 10 controls the square wave signal generator 9. The square wave signal generated is transmitted to the broadband scanning laser light source 5 and the high-speed wavelength query module 7 respectively; the broadband scanning laser light emitted by the broadband scanning laser light source 5 is incident on the fiber microphone 4 through the fiber circulator 6; the fiber optic The reflected light of the microphone 4 is then incident on the high-speed wavelength query module 7 through the optical fiber circulator 6; after the digital signal processor 10 reads the spectral data of the high-speed wavelength query module 7, the lock-in amplification function is realized; the computer 11 It is connected with the digital signal processor 10, and is used for setting the working parameters of the digital signal processor 10 and collecting, processing and displaying the measured amplitude of the photoacoustic signal output by the digital signal processor 10.

一种扫描激光干涉型光纤声波锁相探测方法,将基于光纤扫描激光干涉仪的法布里-珀罗腔长高速同步解调技术与锁相放大技术结合,实现对微弱光声信号的高灵敏度与高稳定性探测;A scanning laser interference type fiber acoustic phase-locked detection method, which combines the Fabry-Perot cavity length high-speed synchronous demodulation technology based on the fiber scanning laser interferometer and the lock-in amplification technology to achieve high sensitivity to weak photoacoustic signals and high stability detection;

具体步骤如下:Specific steps are as follows:

首先光调制器2对来自光声激发光源1的激发光进行强度调制后,入射到光声池3中;光声池3中的气体分子吸收光能后发生无辐射跃迁,跃迁产生的热能使气体发生周期性运动并形成声波;然后声波作用于光纤传声器4,使法布里-珀罗腔长随之发生周期性变化;同时,锁相环8对光调制器2输出的方波信号进行相位锁定,产生同频信号与倍频信号,其中同频信号输入到数字信号处理器10作为锁相放大器的参考信号,倍频信号则为方波信号发生器9提供主时钟,数字信号处理器10控制方波信号发生器9产生的TTL触发信号分别对宽带扫描激光光源5和高速波长查询模块7进行同步波长扫描控制和同步光谱采样控制;宽带扫描激光光源5发射的宽带波长扫描激光经光纤环形器6后入射到光纤传声器4;从光纤传声器4反射的干涉光再经光纤环形器6入射到高速波长查询模块7,高速波长查询模块7采集入射光的光谱信号;数字信号处理器10通过高速通信接口读取高速波长查询模块7的光谱数据后,对光谱进行滤波和光谱域-频域变换等预处理后采用快速相位解调法,实现法布里-珀罗腔长的动态测量;进而,数字信号处理器10将法布里-珀罗腔长测量值与同频率的参考信号进行互相关运算,实现锁相放大功能,提高光声信号检测的信噪比;计算机11设置数字信号处理器10的工作参数,最后计算机11对数字信号处理器10输出的光声信号测量值进行采集、处理和显示。First, the light modulator 2 modulates the intensity of the excitation light from the photoacoustic excitation light source 1, and then enters the photoacoustic cell 3; the gas molecules in the photoacoustic cell 3 absorb the light energy and undergo a non-radiative transition, and the thermal energy generated by the transition occurs. The gas moves periodically and forms sound waves; then the sound waves act on the optical fiber microphone 4, so that the length of the Fabry-Perot cavity changes periodically; Phase locking, generating the same frequency signal and frequency multiplication signal, wherein the same frequency signal is input to the digital signal processor 10 as the reference signal of the lock-in amplifier, and the frequency multiplication signal provides the main clock for the square wave signal generator 9, and the digital signal processor 10. Control the TTL trigger signal generated by the square wave signal generator 9 to carry out synchronous wavelength scanning control and synchronous spectrum sampling control to the broadband scanning laser light source 5 and the high-speed wavelength query module 7 respectively; The circulator 6 is incident on the optical fiber microphone 4; the interference light reflected from the optical fiber microphone 4 is then incident on the high-speed wavelength query module 7 through the optical fiber circulator 6, and the high-speed wavelength query module 7 collects the spectral signal of the incident light; the digital signal processor 10 passes through After the high-speed communication interface reads the spectral data of the high-speed wavelength query module 7, the spectrum is preprocessed by filtering and spectral domain-frequency domain transformation, and then the fast phase demodulation method is used to realize the dynamic measurement of the Fabry-Perot cavity length; Furthermore, the digital signal processor 10 performs a cross-correlation operation between the measured value of the Fabry-Perot cavity length and the reference signal of the same frequency, so as to realize the lock-in amplification function and improve the signal-to-noise ratio of the photoacoustic signal detection; the computer 11 sets the digital signal The working parameters of the processor 10, and finally the computer 11 collects, processes and displays the measured value of the photoacoustic signal output by the digital signal processor 10.

所述的光声激发光源1是用于气体检测的窄线宽激光器。The photoacoustic excitation light source 1 is a narrow linewidth laser for gas detection.

所述的光调制器2是光学斩波器。The optical modulator 2 is an optical chopper.

所述的光声池3是非共振光声池或者一阶纵向共振光声池。The photoacoustic cell 3 is a non-resonant photoacoustic cell or a first-order longitudinal resonant photoacoustic cell.

所述的光纤传声器4是基于光纤法布里-珀罗干涉仪结构的膜片式传声器,对低频声波信号具有较高响应度。The optical fiber microphone 4 is a diaphragm microphone based on the structure of the optical fiber Fabry-Perot interferometer, and has high responsivity to low-frequency acoustic signals.

所述的宽带扫描激光光源5是一种扫描激光光源,谱宽大于20nm。The broadband scanning laser light source 5 is a scanning laser light source with a spectral width greater than 20 nm.

所述的高速波长查询模块7是一种具有光波长高精度和快速标定功能的模块,工作于外部触发同步采样模式,采样频率是光调制频率的M/N倍,其中M和N是整数,且M/N大于2。The high-speed wavelength query module 7 is a module with optical wavelength high precision and fast calibration function, works in an external trigger synchronous sampling mode, and the sampling frequency is M/N times the optical modulation frequency, wherein M and N are integers, And M/N is greater than 2.

所述的方波信号发生器9产生占空比为50%的TTL信号,输出频率范围10Hz-200Hz。The square wave signal generator 9 generates a TTL signal with a duty cycle of 50% and an output frequency range of 10Hz-200Hz.

所述的宽带扫描激光光源5的波长扫描范围为1528-1563nm,扫描速度为200Hz。The wavelength scanning range of the broadband scanning laser light source 5 is 1528-1563 nm, and the scanning speed is 200 Hz.

所述的高速波长查询模块7的采样速率为200Hz,光谱测量范围为1528nm-1563nm。The sampling rate of the high-speed wavelength query module 7 is 200 Hz, and the spectral measurement range is 1528 nm-1563 nm.

本发明的有益效果:基于光纤扫描激光干涉仪的法布里-珀罗腔长动态测量技术采用区别于强度解调的相位解调法,可对低频光声信号进行高精度和高稳定性探测。通过对高速光谱采样的同步控制,结合锁相放大技术,能够大幅度提高光声光谱微量气体检测的精度和极限灵敏度。本发明为光声光谱超低浓度微量气体检测提供了一种极具竞争力的技术方案。Beneficial effects of the invention: The Fabry-Perot cavity length dynamic measurement technology based on fiber scanning laser interferometer adopts a phase demodulation method which is different from intensity demodulation, and can detect low-frequency photoacoustic signals with high precision and high stability . Through the synchronous control of high-speed spectral sampling, combined with lock-in amplification technology, the accuracy and limit sensitivity of photoacoustic spectroscopy trace gas detection can be greatly improved. The invention provides a very competitive technical solution for the detection of ultra-low concentration trace gas by photoacoustic spectroscopy.

附图说明Description of drawings

图1是本发明的系统结构示意图。FIG. 1 is a schematic diagram of the system structure of the present invention.

图2是高速波长查询模块同步测量的法布里-珀罗干涉光谱图。Fig. 2 is the Fabry-Perot interference spectrogram measured synchronously by the high-speed wavelength query module.

图3是扫描激光干涉仪同步测量的光声信号。Figure 3 is a photoacoustic signal synchronously measured by a scanning laser interferometer.

图4是信号处理器中锁相放大模块输出的光声信号幅值。Figure 4 is the photoacoustic signal amplitude output by the lock-in amplifier module in the signal processor.

图中:1光声激发光源;2光调制器;3光声池;4光纤传声器;In the figure: 1 photoacoustic excitation light source; 2 optical modulator; 3 photoacoustic cell; 4 optical fiber microphone;

5宽带扫描激光光源;6光纤环形器;7高速波长查询模块;5 broadband scanning laser light source; 6 optical fiber circulator; 7 high-speed wavelength query module;

8锁相环;9方波信号发生器;10数字信号处理器;11计算机。8 phase-locked loops; 9 square wave signal generators; 10 digital signal processors; 11 computers.

具体实施方式Detailed ways

以下结合技术方案和附图详细叙述本发明的具体实施方式。The specific embodiments of the present invention are described in detail below with reference to the technical solutions and the accompanying drawings.

本发明的系统结构示意图如图1所示,主要包括光声激发光源1、光调制器2、光声池3、光纤传声器4、宽带扫描激光光源5、光纤环形器6、高速波长查询模块7、锁相环8、方波信号发生器9、数字信号处理器10和计算机11。The schematic diagram of the system structure of the present invention is shown in FIG. 1, which mainly includes a photoacoustic excitation light source 1, an optical modulator 2, a photoacoustic cell 3, an optical fiber microphone 4, a broadband scanning laser light source 5, an optical fiber circulator 6, and a high-speed wavelength query module 7. , a phase-locked loop 8 , a square wave signal generator 9 , a digital signal processor 10 and a computer 11 .

光声激发光源1经光调制器2进行光强度调制后,入射到光声池3中;光声池3中的气体分子吸收光能后,发生无辐射跃迁产生的热能使气体发生周期性运动并形成声波;声压作用于光纤传声器4的膜片表面,使法布里-珀罗腔长发生周期性变化;锁相环8对光调制器2输出的方波信号进行相位锁定,产生同频信号与倍频信号,其中同频信号输入到数字信号处理器10作为锁相放大器的参考信号,倍频信号则为方波信号发生器9提供主时钟,数字信号处理器10控制方波信号发生器9产生的TTL触发信号分别对宽带扫描激光光源5和高速波长查询模块7进行同步波长扫描控制和同步光谱采样控制;宽带扫描激光光源5发射的宽带扫描激光经光纤环形器6后入射到光纤传声器4;从光纤传声器4反射的干涉光再经光纤环形器6入射到高速波长查询模块7,高速波长查询模块7采集法布里-珀罗干涉光谱;数字信号处理器10通过高速通信接口读取高速波长查询模块7的光谱数据后,对光谱进行滤波和光谱域-频域变换等预处理后采用快速相位解调法,实现法布里-珀罗腔长的动态绝对测量;数字信号处理器10将法布里-珀罗腔长测量值与同频率的参考信号进行互相关运算,实现锁相放大功能,提高光声信号检测的信噪比。计算机11设置数字信号处理器10的工作参数,并采集数字信号处理器10输出的光声信号测量幅值后做进一步的信号处理并显示。After the photoacoustic excitation light source 1 is modulated by the light intensity of the light modulator 2, it is incident into the photoacoustic cell 3; after the gas molecules in the photoacoustic cell 3 absorb the light energy, the thermal energy generated by the non-radiative transition can cause the gas to move periodically. and form sound waves; the sound pressure acts on the diaphragm surface of the optical fiber microphone 4, causing the Fabry-Perot cavity length to change periodically; the phase-locked loop 8 locks the phase of the square wave signal output by the optical modulator 2 to generate the same frequency signal and frequency multiplication signal, wherein the same frequency signal is input to the digital signal processor 10 as the reference signal of the lock-in amplifier, the frequency multiplication signal provides the main clock for the square wave signal generator 9, and the digital signal processor 10 controls the square wave signal The TTL trigger signal generated by the generator 9 performs synchronous wavelength scanning control and synchronous spectral sampling control on the broadband scanning laser light source 5 and the high-speed wavelength query module 7 respectively; The optical fiber microphone 4; the interference light reflected from the optical fiber microphone 4 is incident on the high-speed wavelength query module 7 through the optical fiber circulator 6, and the high-speed wavelength query module 7 collects the Fabry-Perot interference spectrum; the digital signal processor 10 passes the high-speed communication interface After reading the spectral data of the high-speed wavelength query module 7, the spectrum is preprocessed by filtering and spectral domain-frequency domain transformation, and then the fast phase demodulation method is used to realize the dynamic absolute measurement of the Fabry-Perot cavity length; digital signal The processor 10 performs a cross-correlation operation between the measured value of the Fabry-Perot cavity length and the reference signal of the same frequency, so as to realize the lock-in amplification function and improve the signal-to-noise ratio of the photoacoustic signal detection. The computer 11 sets the working parameters of the digital signal processor 10, collects the measured amplitude of the photoacoustic signal output by the digital signal processor 10, and performs further signal processing and display.

其中,光声激发光源1是用于气体检测的窄线宽激光器。光调制器2是光学斩波器。光声池3是非共振光声池或者一阶纵向共振光声池。方波信号发生器9产生占空比为50%的TTL信号,输出频率范围10Hz-200Hz。Among them, the photoacoustic excitation light source 1 is a narrow linewidth laser used for gas detection. The light modulator 2 is an optical chopper. The photoacoustic cell 3 is a non-resonant photoacoustic cell or a first-order longitudinal resonant photoacoustic cell. The square wave signal generator 9 generates a TTL signal with a duty cycle of 50% and an output frequency range of 10Hz-200Hz.

光纤传声器4是基于光纤法布里-珀罗干涉仪结构的膜片式传声器,对低频声波信号具有较高响应度。宽带扫描激光光源5的波长扫描范围为1528-1563nm,最高扫描速度为200Hz。高速波长查询模块7是近红外高速波长查询模块,最高采样速率为200Hz,光谱测量范围为1528nm-1563nm。The optical fiber microphone 4 is a diaphragm microphone based on the optical fiber Fabry-Perot interferometer structure, and has high responsivity to low-frequency acoustic signals. The wavelength scanning range of the broadband scanning laser light source 5 is 1528-1563 nm, and the maximum scanning speed is 200 Hz. The high-speed wavelength query module 7 is a near-infrared high-speed wavelength query module with a maximum sampling rate of 200Hz and a spectral measurement range of 1528nm-1563nm.

图2是高速波长查询模块同步测量的法布里-珀罗干涉光谱图。通过高速相位解调法计算出法布里-珀罗腔的静态长度约600μm。Fig. 2 is the Fabry-Perot interference spectrogram measured synchronously by the high-speed wavelength query module. The static length of the Fabry-Perot cavity is calculated to be about 600μm by the high-speed phase demodulation method.

图3是扫描激光干涉仪同步测量的光声信号。斩波频率设置为20Hz,波长扫描和查询频率设置为160Hz。光声池中低浓度乙炔气体分子吸收强度调制激发光后产生光声信号,声压作用使腔长发生变化,扫描激光干涉仪解调腔长值并做带通滤波处理。Figure 3 is a photoacoustic signal synchronously measured by a scanning laser interferometer. The chopping frequency is set to 20Hz, and the wavelength scan and query frequency is set to 160Hz. The low-concentration acetylene gas molecules in the photoacoustic cell absorb the intensity-modulated excitation light to generate a photoacoustic signal, and the effect of sound pressure changes the cavity length. The scanning laser interferometer demodulates the cavity length value and performs bandpass filtering.

图4是信号处理器中锁相放大模块输出的光声信号幅值。扫描激光干涉仪解调的腔长经锁相放大后,得到高信噪比的光声信号幅值。Figure 4 is the photoacoustic signal amplitude output by the lock-in amplifier module in the signal processor. After the cavity length demodulated by the scanning laser interferometer is phase-locked and amplified, the photoacoustic signal amplitude with high signal-to-noise ratio is obtained.

以上所述仅为本发明的优选实施例,并不用于限制本发明,对于本领域的技术人员来说,本发明可以有各种更改和变化。凡在本发明的精神和原则之内,所作的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and changes. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims (9)

1.一种扫描激光干涉型光纤声波锁相探测系统,其特征在于,包括光声激发光源(1)、光调制器(2)、光声池(3)、光纤传声器(4)、宽带扫描激光光源(5)、光纤环形器(6)、高速波长查询模块(7)、锁相环(8)、方波信号发生器(9)、数字信号处理器(10)和计算机(11);1. A scanning laser interference type optical fiber acoustic phase-locked detection system, characterized in that it comprises a photoacoustic excitation light source (1), an optical modulator (2), a photoacoustic cell (3), an optical fiber microphone (4), a broadband scanning a laser light source (5), an optical fiber circulator (6), a high-speed wavelength query module (7), a phase-locked loop (8), a square wave signal generator (9), a digital signal processor (10) and a computer (11); 所述的光声激发光源(1)与光声池(3)之间设置光调制器(2),光声激发光源(1)发出的激发光经光调制器(2)调制后入射到光声池(3);所述的光纤传声器(4)安装在光声池(3)上,用于探测光声池(3)内气体分子吸收产生的声波信号;所述的光调制器(2)的输出方波信号传输至锁相环(8),所述的锁相环(8)的输出信号分别输入到方波信号发生器(9)和数字信号处理器(10);所述的数字信号处理器(10)为锁相环(8)提供反馈信号;所述的数字信号处理器(10)控制方波信号发生器(9)产生的方波信号分别传输至宽带扫描激光光源(5)和高速波长查询模块(7);所述的宽带扫描激光光源(5)发射的宽带扫描激光经光纤环形器(6)后入射到光纤传声器(4);所述的光纤传声器(4)的反射光再经光纤环形器(6)入射到高速波长查询模块(7);所述的数字信号处理器(10)读取高速波长查询模块(7)的光谱数据后,实现锁相放大功能;所述的计算机(11)与数字信号处理器(10)相连,用于设置数字信号处理器(10)的工作参数并对数字信号处理器(10)输出的光声信号测量幅值进行采集、处理和显示。A light modulator (2) is arranged between the photoacoustic excitation light source (1) and the photoacoustic cell (3), and the excitation light emitted by the photoacoustic excitation light source (1) is modulated by the light modulator (2) and then incident on the light. Acoustic cell (3); the optical fiber microphone (4) is installed on the photoacoustic cell (3), and is used for detecting the acoustic wave signal generated by the absorption of gas molecules in the photoacoustic cell (3); the optical modulator (2) The output square wave signal of ) is transmitted to the phase-locked loop (8), and the output signal of the phase-locked loop (8) is respectively input to the square-wave signal generator (9) and the digital signal processor (10); the The digital signal processor (10) provides a feedback signal for the phase-locked loop (8); the digital signal processor (10) controls the square wave signal generated by the square wave signal generator (9) to be respectively transmitted to the broadband scanning laser light source ( 5) and a high-speed wavelength query module (7); the broadband scanning laser emitted by the broadband scanning laser light source (5) is incident on the fiber microphone (4) after passing through the fiber circulator (6); the fiber microphone (4) The reflected light is then incident on the high-speed wavelength inquiry module (7) through the optical fiber circulator (6); after the digital signal processor (10) reads the spectral data of the high-speed wavelength inquiry module (7), the lock-in amplification function is realized The computer (11) is connected with the digital signal processor (10), for setting the working parameters of the digital signal processor (10) and collecting the measured amplitude of the photoacoustic signal output by the digital signal processor (10) , processing and display. 2.一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,将基于光纤扫描激光干涉仪的法布里-珀罗腔长高速同步解调技术与锁相放大技术结合,实现对微弱光声信号的高灵敏度与高稳定性探测;2. A scanning laser interference type fiber acoustic phase-locked detection method, characterized in that the Fabry-Perot cavity length high-speed synchronous demodulation technology based on the fiber scanning laser interferometer is combined with the lock-in amplification technology to realize the detection of weak signals. High sensitivity and high stability detection of photoacoustic signals; 具体步骤如下:Specific steps are as follows: 首先光调制器(2)对来自光声激发光源(1)的激发光进行强度调制后,入射到光声池(3)中;光声池(3)中的气体分子吸收光能后发生无辐射跃迁,跃迁产生的热能使气体发生周期性运动并形成声波;然后声波作用于光纤传声器(4),使法布里-珀罗腔长随之发生周期性变化;同时,锁相环(8)对光调制器(2)输出的方波信号进行相位锁定,产生同频信号与倍频信号,其中同频信号输入到数字信号处理器(10)作为锁相放大器的参考信号,倍频信号则为方波信号发生器(9)提供主时钟,数字信号处理器(10)控制方波信号发生器(9)产生的TTL触发信号分别对宽带扫描激光光源(5)和高速波长查询模块(7)进行同步波长扫描控制和同步光谱采样控制;宽带扫描激光光源(5)发射的宽带波长扫描激光经光纤环形器(6)后入射到光纤传声器(4);从光纤传声器(4)反射的干涉光再经光纤环形器(6)入射到高速波长查询模块(7),高速波长查询模块(7)采集入射光的光谱信号;数字信号处理器(10)通过高速通信接口读取高速波长查询模块(7)的光谱数据后,对光谱进行滤波和光谱域-频域变换预处理后采用快速相位解调法,实现法布里-珀罗腔长的动态测量;进而,数字信号处理器(10)将法布里-珀罗腔长测量值与同频率的参考信号进行互相关运算,实现锁相放大功能,提高光声信号检测的信噪比;计算机(11)设置数字信号处理器(10)的工作参数,最后计算机(11)对数字信号处理器(10)输出的光声信号测量值进行采集、处理和显示。First, the light modulator (2) modulates the intensity of the excitation light from the photoacoustic excitation light source (1), and then enters the photoacoustic cell (3); the gas molecules in the photoacoustic cell (3) absorb the light energy and generate no Radiation transition, the heat generated by the transition can make the gas move periodically and form sound waves; then the sound waves act on the optical fiber microphone (4), so that the length of the Fabry-Perot cavity changes periodically; at the same time, the phase-locked loop (8 ) phase-locks the square wave signal output by the optical modulator (2) to generate the same frequency signal and the frequency multiplied signal, wherein the same frequency signal is input to the digital signal processor (10) as the reference signal of the lock-in amplifier, the frequency multiplied signal Then the square wave signal generator (9) is provided with a master clock, and the digital signal processor (10) controls the TTL trigger signal generated by the square wave signal generator (9) to respectively scan the broadband scanning laser light source (5) and the high-speed wavelength query module ( 7) Perform synchronous wavelength scanning control and synchronous spectral sampling control; the broadband wavelength scanning laser emitted by the broadband scanning laser light source (5) is incident on the fiber microphone (4) after passing through the fiber circulator (6); The interference light is then incident on the high-speed wavelength query module (7) through the optical fiber circulator (6), and the high-speed wavelength query module (7) collects the spectral signal of the incident light; the digital signal processor (10) reads the high-speed wavelength query through the high-speed communication interface. After the spectral data of module (7), the spectrum is filtered and preprocessed by spectral domain-frequency domain transformation, and then the fast phase demodulation method is used to realize the dynamic measurement of the Fabry-Perot cavity length; furthermore, the digital signal processor ( 10) The cross-correlation operation is performed between the measured value of the Fabry-Perot cavity length and the reference signal of the same frequency to realize the lock-in amplification function and improve the signal-to-noise ratio of photoacoustic signal detection; the computer (11) is equipped with a digital signal processor ( 10), and finally the computer (11) collects, processes and displays the measured value of the photoacoustic signal output by the digital signal processor (10). 3.根据权利要求2所述的一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,所述的光声激发光源(1)是用于气体检测的窄线宽激光器;所述的光调制器(2)是光学斩波器;所述的光声池(3)是非共振光声池或者一阶纵向共振光声池;所述的光纤传声器(4)是基于光纤法布里-珀罗干涉仪结构的膜片式传声器,对低频声波信号具有较高响应度;所述的方波信号发生器(9)产生占空比为50%的TTL信号,输出频率范围10Hz-200Hz。3. A scanning laser interference type fiber acoustic phase-locked detection method according to claim 2, wherein the photoacoustic excitation light source (1) is a narrow linewidth laser for gas detection; the The optical modulator (2) is an optical chopper; the photoacoustic cell (3) is a non-resonant photoacoustic cell or a first-order longitudinal resonant photoacoustic cell; the optical fiber microphone (4) is based on a fiber Fabry- The diaphragm microphone of the Perot interferometer structure has high responsivity to low-frequency sound wave signals; the square wave signal generator (9) generates a TTL signal with a duty cycle of 50% and an output frequency range of 10Hz-200Hz. 4.根据权利要求2或3所述的一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,所述的宽带扫描激光光源(5)是一种扫描激光光源,谱宽大于20nm。4 . The scanning laser interference type optical fiber acoustic phase locking detection method according to claim 2 or 3 , wherein the broadband scanning laser light source ( 5 ) is a scanning laser light source with a spectral width greater than 20 nm. 5 . 5.根据权利要求2或3所述的一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,所述的高速波长查询模块(7)是一种具有光波长高精度和快速标定功能的模块,工作于外部触发同步采样模式,采样频率是光调制频率的M/N倍,其中M和N是整数,且M/N大于2。5. A scanning laser interference type optical fiber acoustic phase-locked detection method according to claim 2 or 3, characterized in that the high-speed wavelength query module (7) is a high-precision optical wavelength and fast calibration function The module works in the external trigger synchronous sampling mode, and the sampling frequency is M/N times the optical modulation frequency, where M and N are integers, and M/N is greater than 2. 6.根据权利要求4所述的一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,所述的高速波长查询模块(7)是一种具有光波长高精度和快速标定功能的模块,工作于外部触发同步采样模式,采样频率是光调制频率的M/N倍,其中M和N是整数,且M/N大于2;所述的高速波长查询模块(7)的采样速率为200Hz,光谱测量范围为1528nm-1563nm。6 . A scanning laser interference type optical fiber acoustic phase-locked detection method according to claim 4 , wherein the high-speed wavelength query module (7) is a module with high-precision optical wavelength and fast calibration functions. 7 . , work in the external trigger synchronous sampling mode, the sampling frequency is M/N times the optical modulation frequency, where M and N are integers, and M/N is greater than 2; the sampling rate of the high-speed wavelength query module (7) is 200Hz , the spectral measurement range is 1528nm-1563nm. 7.根据权利要求2、3或6所述的一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,所述的宽带扫描激光光源(5)的波长扫描范围为1528-1563nm,扫描速度为200Hz。7. A scanning laser interference type optical fiber acoustic phase-locked detection method according to claim 2, 3 or 6, characterized in that, the wavelength scanning range of the broadband scanning laser light source (5) is 1528-1563 nm, and the scanning range is 1528-1563 nm. The speed is 200Hz. 8.根据权利要求4所述的一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,所述的宽带扫描激光光源(5)的波长扫描范围为1528-1563nm,扫描速度为200Hz。8 . The scanning laser interference type fiber acoustic phase locking detection method according to claim 4 , wherein the wavelength scanning range of the broadband scanning laser light source ( 5 ) is 1528-1563 nm, and the scanning speed is 200 Hz. 9 . 9.根据权利要求5所述的一种扫描激光干涉型光纤声波锁相探测方法,其特征在于,所述的宽带扫描激光光源(5)的波长扫描范围为1528-1563nm,扫描速度为200Hz。9 . The scanning laser interference type fiber acoustic phase locking detection method according to claim 5 , wherein the wavelength scanning range of the broadband scanning laser light source ( 5 ) is 1528-1563 nm, and the scanning speed is 200 Hz. 10 .
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