CN108050389A - A kind of continuous air feeding device and method - Google Patents

A kind of continuous air feeding device and method Download PDF

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Publication number
CN108050389A
CN108050389A CN201711319818.XA CN201711319818A CN108050389A CN 108050389 A CN108050389 A CN 108050389A CN 201711319818 A CN201711319818 A CN 201711319818A CN 108050389 A CN108050389 A CN 108050389A
Authority
CN
China
Prior art keywords
gas
source
pressure
feeding
feeding pneumatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201711319818.XA
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Chinese (zh)
Inventor
李梦越
于锋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHANGHAI ZHENGFAN SEMICONDUCTOR EQUIPMENT CO Ltd
SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd
Jiangsu Ever Sail Semiconductor Equipment Co Ltd
Original Assignee
SHANGHAI ZHENGFAN SEMICONDUCTOR EQUIPMENT CO Ltd
SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd
Jiangsu Ever Sail Semiconductor Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHANGHAI ZHENGFAN SEMICONDUCTOR EQUIPMENT CO Ltd, SHANGHAI ZHENGFAN TECHNOLOGY Co Ltd, Jiangsu Ever Sail Semiconductor Equipment Co Ltd filed Critical SHANGHAI ZHENGFAN SEMICONDUCTOR EQUIPMENT CO Ltd
Priority to CN201711319818.XA priority Critical patent/CN108050389A/en
Publication of CN108050389A publication Critical patent/CN108050389A/en
Pending legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D1/00Pipe-line systems
    • F17D1/02Pipe-line systems for gases or vapours
    • F17D1/04Pipe-line systems for gases or vapours for distribution of gas
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17DPIPE-LINE SYSTEMS; PIPE-LINES
    • F17D3/00Arrangements for supervising or controlling working operations
    • F17D3/01Arrangements for supervising or controlling working operations for controlling, signalling, or supervising the conveyance of a product

Abstract

The present invention relates to continuous supply technology fields, more particularly to a kind of continuous air feeding device and method, including the first feeding pneumatic and the second feeding pneumatic, the first source of the gas end valve door, the first pressure regulator valve and first outlet pressure-detecting device are disposed with from inlet end to outlet side, the second source of the gas end valve door, the second pressure regulator valve and second outlet pressure-detecting device are disposed with from inlet end to outlet side in the second feeding pneumatic in first feeding pneumatic;The inlet end of first feeding pneumatic is connected with the first source of the gas, and the inlet end of the second feeding pneumatic is connected with the second source of the gas, and the outlet side of the outlet side of the first feeding pneumatic and the second feeding pneumatic is connected with gas end.The present invention is height different value by setting the outlet pressure of the first pressure regulator valve and the outlet pressure of the second pressure regulator valve, it fully relies on Design of Mechanical Structure and realizes that the automatic switchover of supply source of the gas and gapless are replaced, so as to achieve the purpose that continuously to supply, gas circuit is simple, it is easy to operate, cost reduction.

Description

A kind of continuous air feeding device and method
Technical field
The present invention relates to continuous supply technology field more particularly to a kind of continuous air feeding device and methods.
Background technology
In current industrial production, many industries need gas as the raw material of industry.Particularly develop at present rapidly Semiconductor, solar energy, light emitting diode and plane display line industry are given birth to, it is necessary to the gases such as substantial amounts of hydrogen, nitrogen with meeting technique The needs of production.These common gases are supplied usually using steel cylinder, when gas using it is frequent when, need often more renew steel cylinder, to carry For sufficient source of the gas.The process of routine replacement steel cylinder is to close empty steel cylinder side valve door, after more renewing steel cylinder, then by new steel cylinder Side valve door is opened, and this substitute mode can force supply to interrupt, and follow-up equipment, production technology is caused not to have source of the gas, is influenced normal Production;Another way is to use to have valve of the switching for airway dysfunction, but often cost is higher for such valve, and is needed mating Electric-control system, it is complicated for operation, it is unfavorable for promoting the use of.
The content of the invention
It is an object of the invention to provide a kind of continuous air feeding device and method, to ensure continuous supply, avoid stopping the supple of gas or steam pair Loss caused by production.
For this purpose, the present invention uses following technical scheme:
A kind of continuous air feeding device, including the first feeding pneumatic and the second feeding pneumatic, in first feeding pneumatic certainly Inlet end to outlet side is disposed with the first source of the gas end valve door, the first pressure regulator valve and first outlet pressure-detecting device, described In second feeding pneumatic the second source of the gas end valve door, the second pressure regulator valve and second outlet pressure are disposed with from inlet end to outlet side Force checking device;The inlet end of first feeding pneumatic is connected with the first source of the gas, the inlet end of second feeding pneumatic with Second source of the gas connects, and the outlet side of the outlet side of first feeding pneumatic and second feeding pneumatic with gas end with being connected It is logical.
Preferably, first feeding pneumatic further includes the first bleed pressure detection device, first bleed pressure Detection device is between first source of the gas and the first source of the gas end valve door;Second feeding pneumatic further includes the second gas Source pressure-detecting device, the second bleed pressure detection device be located at second source of the gas and the second source of the gas end valve door it Between.
Preferably, first feeding pneumatic further includes the first air-supplying valve, first air-supplying valve is located at described Between first outlet pressure-detecting device and the end with gas;Second feeding pneumatic further includes the second air-supplying valve, described Second air-supplying valve is located between the second outlet pressure-detecting device and the end with gas.
Preferably, first source of the gas is gas cylinder with second source of the gas.
Preferably, the first bleed pressure detection device, first outlet pressure-detecting device, the second bleed pressure are examined It is pressure gauge to survey device and second outlet pressure-detecting device.
A kind of continuous air supply method applied to above-mentioned continuous air feeding device includes the following steps:
S1:The outlet pressure of the first pressure regulator valve is set as a, the outlet pressure of the second pressure regulator valve is b, and a is more than b;
S2:Open the first source of the gas end valve door and the second source of the gas end valve door;
S3:When the exit pressure levels of the first feeding pneumatic are less than or equal to the exit pressure levels of the second feeding pneumatic, close The first source of the gas end valve door.
Preferably, include step S20 between step S1 and step S2:Open the first air-supplying valve and the second steam supply valve Door.
Preferably, include step S4 after step s 3:The outlet pressure of second pressure regulator valve is adjusted to a, it will The outlet pressure of first pressure regulator valve is adjusted to b.
Preferably, include step S5 after step s4:Replace the first source of the gas.
Preferably, step S1 described in iterative cycles to the step S5.
Continuous air feeding device provided by the invention and method, advantageous effect compared with the prior art:
1) continuous air feeding device gas circuit of the invention is simple, can fully rely on Design of Mechanical Structure and accomplish the automatic of gas Switching and gapless are replaced, and improve the operability in actual application, cost reduction, and reliability improves;
2) present invention is by setting the outlet pressure of the first pressure regulator valve and the outlet pressure of the second pressure regulator valve different for height Value realizes the automatic switchover of supply source of the gas, easy to operate so as to achieve the purpose that continuously to supply, easy to spread.
Description of the drawings
Fig. 1 is the principle schematic of continuous air feeding device provided by the invention.
In figure:
The first feeding pneumatics of 1-;11- the first source of the gas end valve doors;The first pressure regulator valves of 12-;13- first outlets pressure detecting fills It puts;The first sources of the gas of 14-;15- the first bleed pressure detection devices;The first air-supplying valves of 16-;
The second feeding pneumatics of 2-;21- the second source of the gas end valve doors;The second pressure regulator valves of 22-;23- second outlets pressure detecting fills It puts;The second sources of the gas of 24-;25- the second bleed pressure detection devices;The second air-supplying valves of 26-;
3- gas ends.
Specific embodiment
The technical solution further illustrated the present invention below in conjunction with the accompanying drawings with embodiment.It is understood that this place The specific embodiment of description is used only for explaining the present invention rather than limitation of the invention.It also should be noted that in order to Convenient for description, part related to the present invention is illustrated only in attached drawing and not all.
The present invention provides a kind of continuous air feeding device, as shown in Figure 1, including the first feeding pneumatic 1 and the second supply gas Road 2 is disposed with the first bleed pressure detection device 15, the first source of the gas in first feeding pneumatic 1 from inlet end to outlet side End valve door 11, the first pressure regulator valve 12,13 and first air-supplying valve 16 of first outlet pressure-detecting device, in the second feeding pneumatic 2 The second bleed pressure detection device 25, the second source of the gas end valve door 21, the second pressure regulator valve are disposed with from inlet end to outlet side 22nd, 23 and second air-supplying valve 26 of second outlet pressure-detecting device.The inlet end of first feeding pneumatic 1 connects with the first source of the gas 14 Logical, the inlet end of the second feeding pneumatic 2 is connected with the second source of the gas, the outlet side of the first feeding pneumatic 1 and the second feeding pneumatic 2 Outlet side is connected with gas end 3.
Wherein, by setting the outlet pressure of the first pressure regulator valve 12 and the outlet pressure of the second pressure regulator valve 22 different for height Value realizes the automatic switchover of supply source of the gas, easy to operate so as to achieve the purpose that continuously to supply, easy to spread.
In the present embodiment, the first source of the gas 14 and the second source of the gas 24 are gas cylinder.First bleed pressure detection device 15, first go out Mouth pressure-detecting device 13, the second bleed pressure detection device 25 and second outlet pressure-detecting device 23 are pressure gauge.
The present embodiment additionally provides a kind of continuous air supply method applied to above-mentioned continuous air feeding device, and this method includes Following steps:
S1:The outlet pressure of the first pressure regulator valve 12 is set as a, the outlet pressure of the second pressure regulator valve 22 is b, and a is more than b;
S2:Open the first source of the gas end valve door 11 and the second source of the gas end valve door 21;
S3:When the exit pressure levels of the first feeding pneumatic 1 are less than or equal to the exit pressure levels of the second feeding pneumatic 2, close Close the first source of the gas end valve door 11.
Further, step S20 is included between step S1 and step S2:The first air-supplying valve 16 and second is opened to supply Air valve 26.
It is understood that upon step s 2, since the outlet pressure a of the first pressure regulator valve 12 is more than the second pressure regulator valve 22 Outlet pressure b, therefore the first feeding pneumatic 1 is supplied at this time.After first feeding pneumatic 1 supply a period of time, the first gas Pressure-detecting device 15/ first outlet pressure-detecting device 13 in source shows that pressure value continuously decreases, when going out for the first feeding pneumatic 1 When mouth pressure value is less than or equal to the exit pressure levels of the second feeding pneumatic 2, the first feeding pneumatic 1 stops supply, the second supply gas Road 2 starts to supply, and closes the first source of the gas end valve door 11 at this time.So far, the automatic of the first source of the gas 14 and the second source of the gas 24 is realized Switching, realizes the purpose continuously supplied.
Further, step S4 is further included after step S3:The outlet pressure of second pressure regulator valve 22 is adjusted to a, it will The outlet pressure of first pressure regulator valve 12 is adjusted to b;And step S5:Replace the first source of the gas 14.
It is understood that after the completion of the first source of the gas 14 is replaced, the first source of the gas end valve door 11 is opened, at this time due to step S4 The middle outlet pressure by the second pressure regulator valve 22 is adjusted to a, more than the outlet pressure b of the first pressure regulator valve 12, therefore is still at this time the Two feeding pneumatics 2 are supplied.After second feeding pneumatic 2 supply a period of time, the second bleed pressure detection device 25/ second goes out Mouth pressure-detecting device 23 shows that pressure value continuously decreases, and is supplied when the exit pressure levels of the second feeding pneumatic 2 are less than or equal to first During the exit pressure levels of gas gas circuit 1, the second feeding pneumatic 2 stops supply, and the first feeding pneumatic 1 starts to supply, can close at this time Second source of the gas end valve door 21, and adjust the first pressure regulator valve 12 outlet pressure to a, the outlet pressure of the second pressure regulator valve 22 to b, and Replace the second source of the gas
During actually supplying, iterative cycles above step ensures that supply process is not interrupted, so as to ensure normal production Order.
Obviously, the above embodiment of the present invention is just for the sake of clearly illustrating example of the present invention, and it is pair to be not The restriction of embodiments of the present invention.For those of ordinary skill in the art, may be used also on the basis of the above description To make other variations or changes in different ways.There is no necessity and possibility to exhaust all the enbodiments.It is all this All any modification, equivalent and improvement made within the spirit and principle of invention etc., should be included in the claims in the present invention Protection domain within.

Claims (10)

1. a kind of continuous air feeding device, including the first feeding pneumatic (1) and the second feeding pneumatic (2), first feeding pneumatic (1) the first source of the gas end valve door (11), the first pressure regulator valve (12) and first outlet pressure are disposed with from inlet end to outlet side in Force checking device (13) is disposed with the second source of the gas end valve door in second feeding pneumatic (2) from inlet end to outlet side (21), the second pressure regulator valve (22) and second outlet pressure-detecting device (23);The inlet end of first feeding pneumatic (1) and One source of the gas (14) connects, and the inlet end of second feeding pneumatic (2) is connected with the second source of the gas (24), first feeding pneumatic (1) outlet side and the outlet side of second feeding pneumatic (2) is connected with gas end (3).
2. continuous air feeding device according to claim 1, which is characterized in that first feeding pneumatic (1) further includes One bleed pressure detection device (15), the first bleed pressure detection device (15) be located at first source of the gas (14) with it is described Between first source of the gas end valve door (11);Second feeding pneumatic (2) further includes the second bleed pressure detection device (25), described Second bleed pressure detection device (25) is between second source of the gas (24) and the second source of the gas end valve door (21).
3. continuous air feeding device according to claim 1, which is characterized in that first feeding pneumatic (1) further includes One air-supplying valve (16), first air-supplying valve (16) are located at the first outlet pressure-detecting device (13) and use gas with described Between end (3);Second feeding pneumatic (2) further includes the second air-supplying valve (26), and second air-supplying valve (26) is located at Between the second outlet pressure-detecting device (23) and use gas end (3).
4. continuous air feeding device according to claim 1, which is characterized in that first source of the gas (14) and second gas Source (24) is gas cylinder.
5. continuous air feeding device according to claim 2, which is characterized in that the first bleed pressure detection device (15), first outlet pressure-detecting device (13), the second bleed pressure detection device (25) and second outlet pressure-detecting device (23) it is pressure gauge.
6. a kind of continuous air supply method applied to claim 1-5 any one of them continuous air feeding devices, which is characterized in that Include the following steps:
S1:The outlet pressure of the first pressure regulator valve (12) is set as a, the outlet pressure of the second pressure regulator valve (22) is b, and a is more than b;
S2:Open the first source of the gas end valve door (11) and the second source of the gas end valve door (21);
S3:When the exit pressure levels of the first feeding pneumatic (1) are less than or equal to the exit pressure levels of the second feeding pneumatic (2), close Close the first source of the gas end valve door (11).
7. continuous air supply method according to claim 6, which is characterized in that include step between step S1 and step S2 S20:Open the first air-supplying valve (16) and the second air-supplying valve (26).
8. continuous air supply method according to claim 6, which is characterized in that after step s 3 including step S4:By institute The outlet pressure for stating the second pressure regulator valve (22) is adjusted to a, and the outlet pressure of first pressure regulator valve (12) is adjusted to b.
9. continuous air supply method according to claim 8, which is characterized in that after step s4 including step S5:It replaces First source of the gas (14).
10. continuous air supply method according to claim 9, which is characterized in that step S1 described in iterative cycles to the step Rapid S5.
CN201711319818.XA 2017-12-12 2017-12-12 A kind of continuous air feeding device and method Pending CN108050389A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711319818.XA CN108050389A (en) 2017-12-12 2017-12-12 A kind of continuous air feeding device and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711319818.XA CN108050389A (en) 2017-12-12 2017-12-12 A kind of continuous air feeding device and method

Publications (1)

Publication Number Publication Date
CN108050389A true CN108050389A (en) 2018-05-18

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110819960A (en) * 2019-12-19 2020-02-21 苏州凯利昂光电科技有限公司 Continuous gas supply device for sputtering coating
CN110925598A (en) * 2019-12-11 2020-03-27 广州广钢气体能源股份有限公司 Switching system and switching method for electronic gas valve
CN111207303A (en) * 2018-11-21 2020-05-29 苏州工业园区可伦坡系统集成科技有限公司 Device for preventing nitrogen gas inner leakage

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CN205372079U (en) * 2015-12-10 2016-07-06 济南华信自动化工程有限公司 Gaseous automatic switch -over cabinet of ration formula
CN206286730U (en) * 2016-12-16 2017-06-30 上海精典电子有限公司 A kind of uninterrupted blowing of stainless steel pipes welding supplies system
CN207599347U (en) * 2017-12-12 2018-07-10 江苏正帆半导体设备有限公司 A kind of continuous air feeding device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201382263Y (en) * 2009-04-01 2010-01-13 吴晓春 Automatic gas path converter
CN201439864U (en) * 2009-06-16 2010-04-21 武汉钢铁(集团)公司 Double source air supply system
CN201524879U (en) * 2009-06-16 2010-07-14 武汉钢铁(集团)公司 Automatic double source gas supply system
CN202040537U (en) * 2011-03-24 2011-11-16 上海盛韬半导体科技有限公司 Full automatic special gas conveying cabinet
CN102853263A (en) * 2012-08-31 2013-01-02 成都爱德工程有限公司 Special gas cabinet control system and method for detecting steel cylinder exchange in special gas cabinet
CN203771031U (en) * 2014-03-24 2014-08-13 北京航天发射技术研究所 Backup-redundancy pressure reduction gas supply loop
CN204042448U (en) * 2014-08-07 2014-12-24 奇瑞汽车股份有限公司 A kind of CO 2gas central gas supply COMM communication
CN104344215A (en) * 2014-10-31 2015-02-11 湖南新新线缆有限公司 Control device and method for supply of shielding gas for annealing tank
CN205372079U (en) * 2015-12-10 2016-07-06 济南华信自动化工程有限公司 Gaseous automatic switch -over cabinet of ration formula
CN206286730U (en) * 2016-12-16 2017-06-30 上海精典电子有限公司 A kind of uninterrupted blowing of stainless steel pipes welding supplies system
CN207599347U (en) * 2017-12-12 2018-07-10 江苏正帆半导体设备有限公司 A kind of continuous air feeding device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111207303A (en) * 2018-11-21 2020-05-29 苏州工业园区可伦坡系统集成科技有限公司 Device for preventing nitrogen gas inner leakage
CN110925598A (en) * 2019-12-11 2020-03-27 广州广钢气体能源股份有限公司 Switching system and switching method for electronic gas valve
CN110925598B (en) * 2019-12-11 2020-10-09 广州广钢气体能源股份有限公司 Switching system and switching method for electronic gas valve
CN110819960A (en) * 2019-12-19 2020-02-21 苏州凯利昂光电科技有限公司 Continuous gas supply device for sputtering coating

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