CN108045959A - Biography sample interconnect device between different vacuum degree chambers - Google Patents
Biography sample interconnect device between different vacuum degree chambers Download PDFInfo
- Publication number
- CN108045959A CN108045959A CN201711236807.5A CN201711236807A CN108045959A CN 108045959 A CN108045959 A CN 108045959A CN 201711236807 A CN201711236807 A CN 201711236807A CN 108045959 A CN108045959 A CN 108045959A
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- chamber
- sample
- interface
- vacuum degree
- transmission rod
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
- B65G51/01—Hydraulic transport of articles
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Fluid Mechanics (AREA)
- Mechanical Engineering (AREA)
- Sampling And Sample Adjustment (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides the biography sample interconnect device between a kind of different vacuum degree chambers, it includes the first chamber and second chamber that pressure is respectively less than standard atmospheric pressure, pressure in first chamber is less than the pressure in second chamber, second chamber is circumferentially equipped with first interface successively, second interface, 3rd interface and the 4th interface, second chamber is connected by first interface with first chamber, slide valve is equipped between first chamber and second chamber, 4th interface is connected by the fast gate valve of energy pressure release with glove box, second interface sealing is equipped with the first sample transmission rod that can be slided between glove box and second chamber, 3rd sealing joint is equipped with the second sample transmission rod that can be slided between first chamber and second chamber.The present invention can realize the transmission that sample is carried out in the chamber of different vacuum degrees, ensure different vacuum degree cavity environments, securely and reliably.
Description
Technical field
The present invention relates to technical field of vacuum, are specifically a kind of biography sample interconnect device, more particularly a kind of different vacuum
Spend the biography sample interconnect device between chamber.
Background technology
At present, the transmission of the sample in different vacuum systems is mainly by the biography of high vacuum system to ultra-high vacuum system
It passs, is directly transferred by magnetic-coupled straight line sample transmission rod 100 (as shown in Figure 1), that is, pass through magnetic-coupled straight line
Sample is directly transmitted to from high vacuum system in ultra-high vacuum system by sample transmission rod 100, and height is cannot keep in transmit process
The environment of vacuum system and ultra-high vacuum system, moreover, for toxic and have the sample of radiation, it is difficult to which it is true to be directly delivered to superelevation
In empty set system, and in its transmittance process, sample is exposed in air, and easily air is polluted, and human body is caused
Injury.
In view of the above-mentioned problems of the prior art, the present inventor combines the design and use of related manufacturing field for many years
Experience provides the biography sample interconnect device between a kind of different vacuum degree chambers, to overcome drawbacks described above.
The content of the invention
The object of the present invention is to provide the biography sample interconnect devices between a kind of different vacuum degree chambers, can realize different true
The transmission of sample is carried out in the chamber of reciprocal of duty cycle, ensures different vacuum degree cavity environments, securely and reliably.
Following technical proposal can be used to realize in the above-mentioned purpose of the present invention：
The present invention provides the biography sample interconnect device between a kind of different vacuum degree chambers, and normal atmosphere is respectively less than including pressure
The first chamber and second chamber of pressure, the pressure in the first chamber are less than the pressure in the second chamber, and described second
Chamber is circumferentially equipped with first interface, second interface, the 3rd interface and the 4th interface successively, and the second chamber passes through described the
One interface is connected with the first chamber, slide valve is equipped between the first chamber and the second chamber, the described 4th connects
Mouth is connected by the fast gate valve of energy pressure release with glove box, and the second interface sealing, which is equipped with, can slide on the glove box and institute
State the first sample transmission rod between second chamber, the 3rd sealing joint, which is equipped with, can slide on the first chamber and described the
The second sample transmission rod between two chambers.
In a preferred embodiment, first sample transmission rod includes the operating side being located at outside the second chamber and is located at
End is held in the second chamber, second sample transmission rod also includes the operating side being located at outside the second chamber and positioned at institute
The end that holds in second chamber is stated, hold end and the holding for second sample transmission rod of first sample transmission rod hold the fixed support of energy
Disk.
In a preferred embodiment, the pallet is rounded, and the pallet is circumferentially equally spaced to be equipped with multiple grooves,
Each groove interior energy dismounting plugs the sample carrier for holding sample.
In a preferred embodiment, the second interface of the second chamber and the 3rd interface are respectively equipped with sealing flange,
The slidable sealing of first sample transmission rod is arranged in the sealing flange at the second interface, and second sample transmission rod can slide
Sealing be arranged in the sealing flange of the 3rd interface.
In a preferred embodiment, it is connected between the first chamber and the second chamber by metal bellows,
The slide valve is arranged between the metal bellows and the first interface.
In a preferred embodiment, the fast gate valve has seal receptacle and sealed interface, and the sealed interface is located at institute
The one side of seal receptacle is stated, the sealed interface is connected with the 4th sealing joint, and the seal receptacle is sealed with the glove box
It is connected, the opposite side of the seal receptacle is equipped with Ji Quan and the shutter being arranged on Ji Quan that can be opened and closed, the Ji Quan and the shutter
In the glove box.
In a preferred embodiment, one end of the Ji Quan is equipped with the bayonet lock that can be rotated, and one end of the shutter is equipped with
Card slot, the bayonet lock can be arranged in the card slot.
In a preferred embodiment, it is slidable on the bayonet lock to be equipped with pressure release seat, the pressure release seat and the bayonet lock
Outer end between be equipped with spring, in a state that the bayonet lock is arranged in the card slot, the pressure release seat is in the spring
The side wall of the card slot is connected under effect.
In a preferred embodiment, the glove box is equipped with observation window.
In a preferred embodiment, the first chamber is ultrahigh vacuum chamber, and interior pressure is 10-8Mbar~10- 12mbar；The second chamber is high-vacuum chamber, and interior pressure is 10-3Mbar~10-8mbar。
The characteristics of biography sample interconnect device between difference vacuum degree chamber of the invention and advantage are：
The present invention is by the way that the first chamber of ultrahigh vacuum is connected with the second chamber of high vacuum by slide valve, by Gao Zhen
Empty second chamber by can the fast gate valve of pressure release be connected with glove box, and the second interface and the of the second chamber in high vacuum
Three interfaces set the first sample transmission rod and the second sample transmission rod respectively, with by the first sample transmission rod by the sample in glove box through fast gate valve
It is transferred in the second chamber of high vacuum, and passes through the second sample transmission rod and the sample in the second chamber of high vacuum is transferred to superelevation
It in the first chamber of vacuum, realizes and sample is transferred in ultra-high vacuum system, ensure high vacuum and ultrahigh vacuum cavity environment,
Sample is avoided to be polluted exposed to air, is not only suitable for common sample 9 between the chamber of large-scale different vacuum degrees
It transfers, is also applied for the highly difficult transmission of sample that is toxic, having radiation, simple operation is at low cost.
Description of the drawings
To describe the technical solutions in the embodiments of the present invention more clearly, make required in being described below to embodiment
Attached drawing is briefly described, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, for
For those of ordinary skill in the art, without creative efforts, other are can also be obtained according to these attached drawings
Attached drawing.
Fig. 1 is the structure diagram of vacuum transfer apparatus of the prior art；
Fig. 2 is the structure diagram of the biography sample interconnect device between the different vacuum degree chambers of the present invention；
Fig. 3 is the main structure diagram of the biography sample interconnect device between the different vacuum degree chambers of the present invention；
Fig. 4 is the dimensional structure diagram of the biography sample interconnect device between the different vacuum degree chambers of the present invention；
Fig. 5 is the structure diagram of the fast gate valve of the biography sample interconnect device between the different vacuum degree chambers of the present invention；
Fig. 6 is the structure diagram of the pallet of the biography sample interconnect device between the different vacuum degree chambers of the present invention.
Drawing reference numeral explanation：
The prior art
100 magnetic-coupled straight line sample transmission rods.
The present invention
1 first chamber, 2 first sample transmission rods, 3 second sample transmission rods, 4 second chambers, 5 fast gate valves, 51 seal receptacles, 52 sealings connect
Mouthful, 53 Ji Quan, 54 shutters, 55 bayonet locks, 56 card slots, 57 springs, 6 glove boxes, 7 slide valves, 8 pallets, 81 sample carriers, 82 shrapnels, 9
Sample.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment belongs to the scope of protection of the invention.
As shown in Figures 2 to 5, the present invention provides the biography sample interconnect device between a kind of different vacuum degree chambers, including pressure
It is strong to be respectively less than in the first chamber 1 and second chamber 4 namely first chamber 1 and second chamber 4 of standard atmospheric pressure (about 0.1Mpa)
Portion is negative pressure, and the pressure in the first chamber 1 is less than the pressure in the second chamber 4, and the second chamber 4 is circumferentially
Successively be equipped with first interface, second interface, the 3rd interface and the 4th interface, the second chamber 4 by the first interface with
The first chamber 1 is connected, and slide valve 7 is equipped between the first chamber 1 and the second chamber 4, and the 4th interface leads to
The fast gate valve 5 for crossing energy pressure release is connected with glove box 6, and the second interface sealing, which is equipped with, can slide on the glove box 6 and institute
The first sample transmission rod 2 between second chamber 4 is stated, the 3rd sealing joint, which is equipped with, can slide on the first chamber 1 and institute
State the second sample transmission rod 3 between second chamber 4.
Specifically, the first chamber 1 is ultrahigh vacuum chamber, interior pressure is 10-8Mbar~10-12Mbar (millibar),
The second chamber 4 is high-vacuum chamber, and interior pressure is 10-3Mbar~10-8Mbar, meanwhile, as shown in Figures 2 to 4, the
The first interface of two chambers 4 is opposite with the 3rd interface of second chamber 4, makes 1 and second sample transmission rod 3 of first chamber opposite, is convenient for
Second sample transmission rod 3 slides, and the second interface of second chamber 4 is opposite with the 4th interface of second chamber 4, make the first sample transmission rod 2 with
Glove box 6 is opposite namely the first sample transmission rod 2 is vertically arranged with the second sample transmission rod 3, is slided convenient for the first sample transmission rod 2 and from second
Sample transmission rod 3 samples, in addition, glove box 6 is avoided that sample 9 that is toxic, having radiation brings harm exposed to air, is also avoided that
Sample 9 is contaminated due to external environment, and the glove box 6 is equipped with observation window, so that operator passes through observation window
Clearly check situation in glove box 6, person easy to operation operates sample 9.
Further, first sample transmission rod 2 includes the operating side being located at outside the second chamber 4 and positioned at described second
End is held in chamber 4, and second sample transmission rod 3 also includes the operating side being located at outside the second chamber 4 and positioned at described the
End is held in two chambers 4, hold end and the holding for second sample transmission rod 3 of first sample transmission rod 2 hold the fixed support of energy
Disk 8, pallet 8 is for containing support sample 9, and making operator, realization pushes or pull on the first sample transmission rod 2 and second by control operation end
The movement of sample transmission rod 3, so that the first sample transmission rod 2 can obtain the pallet 8 for holding sample 9 out of glove box 6, and can be obtained
The pallet 8 for holding sample 9 is passed on the second sample transmission rod 3, to be transferred to by the second sample transmission rod 3 in first chamber 1, during which,
By controlling slide valve 7 and fast gate valve 5, ensure the pressure environment in first chamber 1 and second chamber 4, wherein, the first sample transmission rod
2 and second sample transmission rod 3 can be fixed with the bottom surface of pallet 8, such as the end that holds of the first sample transmission rod 2 and the second sample transmission rod 3 is set
Magnet, the bottom surface of pallet 8 are also provided with magnet, to realize that pallet 8 is fixedly arranged on the first sample transmission rod 2 and/or second and passes by magnetic attraction
Sample bar 3, certainly, also can be fixed by other means, is not limited herein.
Further, as shown in fig. 6, the pallet 8 is rounded, the pallet 8 is circumferentially equally spaced equipped with multiple
Groove, each groove interior energy dismounting plugs the sample carrier 81 for holding sample 9, specifically, two-by-two between adjacent groove
Equipped with shrapnel 82, pallet 8 is fixed in the middle part of shrapnel 82 by multiple screws, and the both sides of shrapnel 82 are erected on the top of groove,
To set fixation to the sample carrier 81 being inserted in groove pressure, the middle part of sample carrier 81 is equipped with the holding tank for accommodating sample 9.
Further, as shown in Figure 3 and Figure 4, the second interface of the second chamber 4 and the 3rd interface are respectively equipped with sealing
Flange, the slidable sealing of the first sample transmission rod 2 are arranged in the sealing flange at the second interface, second sample transmission rod
3 slidable sealings are arranged in the sealing flange of the 3rd interface, wherein, sealing flange is CF (Conflat Flang)
Flange is simultaneously sealed by copper washer, is a kind of metal static seal, can be born high-temperature baking.
Further, as shown in Figure 3 and Figure 4, wavy metal is passed through between the first chamber 1 and the second chamber 4
Pipe is connected, and the slide valve 7 is arranged between the metal bellows and the first interface, and metal bellows can eliminate stress,
Allow installation error.
Further, as shown in figure 5, the fast gate valve 5 has seal receptacle 51 and sealed interface 52, the sealed interface 52
Positioned at the one side of the seal receptacle 51, the sealed interface 52 is connected with the 4th sealing joint, the seal receptacle 51 and institute
It states the sealing of glove box 6 to be connected, the opposite side of the seal receptacle 51 is equipped with base circle 53 and the shutter being arranged on base circle 53 that can be opened and closed
54, the base circle 53 and the shutter 54 are located in the glove box 6, and person easy to operation directly opens shutter in glove box 6
54 or close shutter 54, it is easy to operate.
Further, as shown in figure 5, one end of the base circle 53 is equipped with the bayonet lock 55 that can be rotated, the shutter 54
One end is equipped with card slot 56, and the bayonet lock 55 can be arranged in the card slot 56, specifically, radially outward projection is convex for one end of base circle 53
Block, the connection bayonet lock 55 rotated by a bolt or other rod-shaped physical efficiencys on convex block, shutter 54 set convex block in same base circle 53
Also one convex block of radially outward projection at position corresponding radially opens up card slot on the convex block of shutter 54 from its outer wall
56, the bayonet lock 55 of rotation is enable to be caught in card slot 56 or abjection card slot 56, to realize the closing of shutter 54 and opening.
Preferably, slidable on the bayonet lock 55 be equipped with pressure release seat, the outer end of the pressure release seat and the bayonet lock 55
Between be equipped with spring 57, in a state that the bayonet lock 55 is arranged in the card slot 56, the pressure release seat is in the spring 57
The side wall of the card slot 56 is connected under effect, specifically, the outer diameter of the outer end of bayonet lock 55 is more than the diameter of bayonet lock 55, with card
If one end of spring 57, pressure release seat is the disk being sheathed on bayonet lock 55 of clearance fit, and the outer diameter of disk, which is respectively greater than, to be blocked
The height and width of slot 56, when so that the bayonet lock 55 is arranged in card slot 56, pressure release seat can be attached under the effect of the elastic force of spring 57
The side wall of card slot 56 realizes tight seal, moreover, the elastic force of spring 57 is equal to the difference of standard atmospheric pressure and high vacuum, in sample
In 9 transmittance process of product, high vacuum caused by due to the connection of the second chamber 4 of the first chamber 1 and high vacuum of ultrahigh vacuum
When pressure reduces, external atmosphere pressure can act on spring 57 and to 4 pressure release of second chamber by fast gate valve 5, until second chamber 4
Recover high vacuum environment.
Biography sample interconnect device between difference vacuum degree chamber of the invention at work, first by seal-packed common sample
9 or toxic, the sample 9 for having radiation is sent to by gripping head in glove box 6, and the packaging of sample 9 is torn in glove box 6, and is divided
It is put into after being cut into suitable shapes and sizes on sample carrier 81, opens fast gate valve 5, the first sample transmission rod 2 of operation enters through fast gate valve 5
Glove box 6 plugs the sample carrier 81 for being contained with the sample 9 handled well onto the pallet 8 of the first sample transmission rod 2, and sample is passed by first
Bar 2 is retracted into the second chamber 4 of high vacuum, closes fast gate valve 5, then pallet 8 is handed off on the second sample transmission rod 3, opens lock
Sample 9 is transmitted in the first chamber 1 of ultrahigh vacuum by plate valve 7 by the second sample transmission rod 3, and the second sample transmission rod 3 of retracting is closed
Slide valve 7, certainly, present invention may also apply to transfer sample between two equal vacuum chambers.
The present invention, will by the way that the first chamber 1 of ultrahigh vacuum is connected with the second chamber 4 of high vacuum by slide valve 7
The second chamber 4 of high vacuum is connected by the fast gate valve 5 of energy pressure release with glove box 6, and second of the second chamber 4 in high vacuum
Interface and the 3rd interface set the first sample transmission rod 2 and the second sample transmission rod 3 respectively, with will be in glove box 6 by the first sample transmission rod 2
Sample 9 is transferred to through fast gate valve 5 in the second chamber 4 of high vacuum, and passes through the second sample transmission rod 3 by the second chamber 4 of high vacuum
Interior sample 9 is transferred in the first chamber 1 of ultrahigh vacuum, realizes and sample 9 is transferred in ultra-high vacuum system, ensures Gao Zhen
Empty and ultrahigh vacuum cavity environment avoids sample 9 from being polluted exposed to air, is not only suitable for common sample 9 in large size
Transmission between the chamber of different vacuum degrees, is also applied for the highly difficult transmission of sample 9 that is toxic, having radiation, simple operation,
It is at low cost.
The above is only presently preferred embodiments of the present invention, and limitation in any form is not done to the present invention, though
So the present invention is disclosed above with preferred embodiment, however is not limited to the present invention, has in any technical field
Usual skill, in the range of technical solution of the present invention is not departed from, when the technology contents using the disclosure above make it is a little
The equivalent embodiment of equivalent variations is changed or is modified to, as long as being the content without departing from technical solution of the present invention, according to the present invention
Any simple modification, equivalent change and modification for being made to above example of technical spirit, still fall within the technology of the present invention side
In the range of case.
Claims (10)
- A kind of 1. biography sample interconnect device between difference vacuum degree chamber, which is characterized in that the biography between the difference vacuum degree chamber Sample interconnect device includes pressure and is respectively less than the first chamber and second chamber of standard atmospheric pressure, and the pressure in the first chamber is small Pressure in the second chamber, the second chamber circumferentially successively be equipped with first interface, second interface, the 3rd interface and 4th interface, the second chamber are connected by the first interface with the first chamber, the first chamber and described the Slide valve is equipped between two chambers, the 4th interface is connected by the fast gate valve of energy pressure release with glove box, the second interface Sealing is equipped with the first sample transmission rod that can be slided between the glove box and the second chamber, and the 3rd sealing joint is worn Equipped with the second sample transmission rod that can be slided between the first chamber and the second chamber.
- 2. the biography sample interconnect device between difference vacuum degree chamber according to claim 1, which is characterized in that described first passes Sample bar includes the operating side being located at outside the second chamber and holds end, second sample transmission rod in the second chamber Also include the operating side being located at outside the second chamber and hold end in the second chamber, first sample transmission rod The end that holds for holding end and second sample transmission rod can fixed pallet.
- 3. the biography sample interconnect device between difference vacuum degree chamber according to claim 2, which is characterized in that the pallet is in Circle, the pallet is circumferentially equally spaced to be equipped with multiple grooves, and each plugging for groove interior energy dismounting holds sample Sample carrier.
- 4. the biography sample interconnect device between difference vacuum degree chamber according to claim 1, which is characterized in that second chamber The second interface of room and the 3rd interface are respectively equipped with sealing flange, and the slidable sealing of the first sample transmission rod is arranged in described the The sealing flange of two interfaces, second sample transmission rod is slidable to seal the sealing flange for being arranged in the 3rd interface.
- 5. the biography sample interconnect device between difference vacuum degree chamber according to claim 1, which is characterized in that first chamber It is connected between room and the second chamber by metal bellows, the slide valve is arranged on the metal bellows and described first Between interface.
- 6. the biography sample interconnect device between difference vacuum degree chamber according to claim 1, which is characterized in that the fast gate valve With seal receptacle and sealed interface, the sealed interface is located at the one side of the seal receptacle, the sealed interface and the described 4th Sealing joint is connected, and the seal receptacle is connected with glove box sealing, and the opposite side of the seal receptacle is equipped with Ji Quan and can open The shutter being arranged on Ji Quan closed, the Ji Quan and the shutter are located in the glove box.
- 7. the biography sample interconnect device between difference vacuum degree chamber according to claim 6, which is characterized in that the Ji Quan's One end is equipped with the bayonet lock that can be rotated, and one end of the shutter is equipped with card slot, and the bayonet lock can be arranged in the card slot.
- 8. the biography sample interconnect device between difference vacuum degree chamber according to claim 7, which is characterized in that on the bayonet lock It is slidable to be equipped with pressure release seat, spring is equipped between the pressure release seat and the outer end of the bayonet lock, is arranged in the bayonet lock In the state of the card slot, the pressure release seat is connected to the side wall of the card slot under the action of the spring.
- 9. the biography sample interconnect device between difference vacuum degree chamber according to claim 1, which is characterized in that the glove box It is equipped with observation window.
- 10. the biography sample interconnect device between difference vacuum degree chamber according to claim 1, which is characterized in that described first Chamber is ultrahigh vacuum chamber, and interior pressure is 10-8Mbar~10-12mbar；The second chamber is high-vacuum chamber, in Pressure is 10-3Mbar~10-8mbar。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711236807.5A CN108045959B (en) | 2017-11-30 | 2017-11-30 | Sample transmission interconnection device between chambers with different vacuum degrees |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711236807.5A CN108045959B (en) | 2017-11-30 | 2017-11-30 | Sample transmission interconnection device between chambers with different vacuum degrees |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108045959A true CN108045959A (en) | 2018-05-18 |
| CN108045959B CN108045959B (en) | 2020-02-04 |
Family
ID=62121755
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711236807.5A Active CN108045959B (en) | 2017-11-30 | 2017-11-30 | Sample transmission interconnection device between chambers with different vacuum degrees |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108045959B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161867A (en) * | 2018-10-11 | 2019-01-08 | 中国科学技术大学 | Detachable vacuum interacted system |
| CN112179932A (en) * | 2020-09-18 | 2021-01-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Quasi-in-situ normal pressure reaction combination system and imaging method thereof |
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| CN2837831Y (en) * | 2005-11-11 | 2006-11-15 | 中国科学院物理研究所 | Ultra-high vacuum in-situ growth, characterization and test system |
| JP2006321632A (en) * | 2005-05-20 | 2006-11-30 | Iwaki Co Ltd | Conveying device with cleaning function |
| CN101146964A (en) * | 2005-03-23 | 2008-03-19 | 空中客车德国有限公司 | Arrangement for noise reduction in vacuum systems |
| CN203849265U (en) * | 2014-04-28 | 2014-09-24 | 中国科学院物理研究所 | Ultrahigh vacuum sample transfer equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6068428A (en) * | 1996-11-12 | 2000-05-30 | The Curators Of The University Of Missouri | Capsule train separation system for fluid capsule pipeline transporation |
| CN101146964A (en) * | 2005-03-23 | 2008-03-19 | 空中客车德国有限公司 | Arrangement for noise reduction in vacuum systems |
| JP2006321632A (en) * | 2005-05-20 | 2006-11-30 | Iwaki Co Ltd | Conveying device with cleaning function |
| CN2837831Y (en) * | 2005-11-11 | 2006-11-15 | 中国科学院物理研究所 | Ultra-high vacuum in-situ growth, characterization and test system |
| CN203849265U (en) * | 2014-04-28 | 2014-09-24 | 中国科学院物理研究所 | Ultrahigh vacuum sample transfer equipment |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109161867A (en) * | 2018-10-11 | 2019-01-08 | 中国科学技术大学 | Detachable vacuum interacted system |
| CN109161867B (en) * | 2018-10-11 | 2023-08-08 | 中国科学技术大学 | Separable vacuum interconnection system |
| CN112179932A (en) * | 2020-09-18 | 2021-01-05 | 中国科学院苏州纳米技术与纳米仿生研究所 | Quasi-in-situ normal pressure reaction combination system and imaging method thereof |
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| CN108045959B (en) | 2020-02-04 |
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