CN109161867A

CN109161867A - Detachable vacuum interacted system

Info

Publication number: CN109161867A
Application number: CN201811186364.8A
Authority: CN
Inventors: 张汇; 汪逸凡; 施至刚
Original assignee: University of Science and Technology of China USTC
Current assignee: University of Science and Technology of China USTC
Priority date: 2018-10-11
Filing date: 2018-10-11
Publication date: 2019-01-08
Anticipated expiration: 2038-10-11
Also published as: CN109161867B

Abstract

The invention discloses a kind of detachable vacuum interacted systems, comprising: main interconnecting piping；The fixed device of main interconnection, is set on main interconnecting piping；Multiple moveable Split type devices, include: mobile high vacuum growth apparatus, mobile non-high vacuum growth apparatus, mobile vacuum measuring device, vacuum constant temperature sample transfering small vehicle and mobile vacuum pump truck system, wherein, Split type device can be connected and be dismantled on main interconnecting piping, connection can be combined between the fixed device of main interconnection and separated, while multiple Split type devices can be used alone or any combination connects and composes integrated cavity use two-by-two；And integrated thermostatic platform, constant temperature transmitting in situ for sample.The interacted system is flexible and convenient to use, and the occupied area of each Split type device is small, smaller to the interior space and the demand of load-bearing, while the design of separate type makes full use of various pump housing resources, and high degree reduces the cost of vacuum interconnect device.

Description

Detachable vacuum interacted system

Technical field

The disclosure belongs to vacuum interconnection instrument field, is related to a kind of detachable vacuum interacted system.

Background technique

In recent years as the raising of the growing technology of sample and measuring technology, more and more growths and test characterization rely on In vacuum environment, especially high vacuum environment.The growth for being currently used in high vacuum and measuring device are mainly include the following types: (1) Molecular beam epitaxy (MBE, Molecular Beam Epitaxy) and various evaporation equipments；(2) magnetron sputtering apparatus；(3) laser Assistant depositing equipment；(4) chemical vapor deposition；(5) atomic layer deposition etc.；(6) based on the equipment of Surface Characterization, comprising: scanning Tunnel microscope, atomic force microscope, x-ray photoelectron spectroscopy etc.；(7) micro-nano and Cryo Equipment.In these growths and measurement Instrument and equipment in, molecular beam epitaxial device is particularly important.High-vacuum equipment including molecular beam epitaxial device is following Development mainly has following notable feature: (1) joint of growth apparatus and measuring device: to the interface of sample hetero-junctions Sample being capable of delivered in situ between the requirement of high-flatness and high cleanliness and each measuring device, it is desirable to mutual using vacuum The method of connection, to obtain optimal growth conditions and top quality film；(2) standardization, automation and intelligence: interconnect device One larger problem of bring is that equipment is more, and many equipment are not buying in same producer, and standard is not very unified； Complicated operation can bring biggish burden to operator simultaneously, and increase training and maintenance cost.Therefore it standardizes, automatically Change and intelligent as the following interconnect device problem to be solved；(3) Foldable portable and simplification: lighting is also the following instrument The main developing direction of device, it is also more complex due to interconnecting instrument and equipment at this stage, therefore it is required that can be appropriate on original machine Simplify to obtain the experimental program of optimization, it is especially more in the system of interconnection and equipment, and laboratory or factory room face Under long-pending limited case, following instrument will tend to flexibly utilization and lighting；(4) use and combined flexibility and Networking: the InterWorking Equipment overwhelming majority needs to use under vacuum conditions.It is connected with each other between instrument, and makes sample delivered in situ Between each cavity, so as to avoid potential material cross-contamination issue, can additionally it make full use of between growth apparatus Advantage create more structures, such as hetero-junctions, layered material etc..Especially popular in recent years quantum material is heterogeneous Knot.The notable difference as existing for its configuration and growth pattern, there is an urgent need to the vacuum facilities of this interconnection to complete material The growth and characterization of material.

In existing vacuum InterWorking Equipment, there are the following problems: one, vacuum interconnect device takes up a large area, for cooperation Interconnection between realization device uses, it is therefore desirable to support between one compared with the laboratory of large span or workshop；Two, big interconnect device It is inflexible: the device of sample especially to be transmitted with linear transfer trolley, the one-way movement of trolley can high degree reduction biography The efficiency of defeated sample in this way can be dramatically especially when two need the equipment that interconnects to be placed on apart from remote position It reduces and passes sample efficiency, simultaneous transmission burden also will increase the danger of trolley derailing, and whole sample transfer pipeline is caused to stop working.

Summary of the invention

(1) technical problems to be solved

Present disclose provides a kind of detachable vacuum interacted systems, are asked with the technology at least partly solving set forth above Topic.

(2) technical solution

According to one aspect of the disclosure, a kind of detachable vacuum interacted system is provided, comprising: main interconnecting piping； The fixed device of main interconnection, is set on main interconnecting piping；Multiple moveable Split type devices, which includes: mobile High vacuum growth apparatus, mobile non-high vacuum growth apparatus, mobile vacuum measuring device, the transmitting of vacuum constant temperature sample are small Vehicle and mobile vacuum pump truck system, wherein Split type device can be connected and be dismantled on main interconnecting piping, can be with main interconnection Connection and separation are combined between fixed device, while multiple Split type devices can be used alone or any combination connects structure two-by-two Integralization cavity uses；And integrated thermostatic platform, between the Split type device of multiple interconnections or Split type device with The main sample interconnected between fixed device is in situ, constant temperature transmits.

In some embodiments of the present disclosure, the vacuum range of mobile high vacuum growth apparatus is between 1 × 10^-6Mbar~ 1×10^-10Between mbar；Mobile high vacuum growth apparatus includes: mobile device；Mini growth chamber, be located at mobile device it On；Warm table and molecular beam source, sputtering source or pulsed laser deposition target, are set in mini growth chamber, and it is raw to provide material Long temperature and material source；Bindiny mechanism is connected with mini growth chamber, includes the quick connector of ISO, fast pump mouth and fast Fast apparatus for baking, wherein fast pump mouth connects the mobile vacuum pump truck system, utilizes mobile vacuum pump truck system System extracts the vacuum of bindiny mechanism and mini growth chamber, and flash baking device carries out vacuum drawn to bindiny mechanism and toasts； Sampler is connected with mini growth chamber, coaxial with bindiny mechanism, for fixing device or other Split type devices from main interconnection Sample is taken out to mobile high vacuum growth apparatus；And compound ion pump, it is located on mobile device, with mini growth chamber It is connected, realizes that the high vacuum of mini growth chamber maintains.

In some embodiments of the present disclosure, the vacuum range of mobile non-high vacuum growth apparatus is between 1 × 10^-2mbar Between~1bar；Mobile non-high vacuum growth apparatus includes: mobile device；Grower is located on mobile device；Air pressure Balance cylinder is set to grower and other Split type devices or the main side for interconnecting fixed device and being connected, for reducing connected Vacuum difference between two devices, the air pressure balance room include sample storage device, vacuum pumping opening and means of deflation, Vacuum drawn and maintenance device realize vacuum drawn and maintenance to air pressure balance room by vacuum pumping opening；Bindiny mechanism, if It is placed in air pressure balance room and other Split type devices or the main side for interconnecting fixed device and being connected, comprising: the quick connector of KF25, ISO flange-interface, CF flange-interface and fast pump mouth device；And sampler, it is coaxial with bindiny mechanism, for mutual from master Join fixed device or other Split type devices take out sample to mobile non-high vacuum growth apparatus.

In some embodiments of the present disclosure, mobile vacuum measuring device includes: mobile device；Measuring device is located at On mobile device；Damper includes: welding bellows and shock-absorption air bag；Bindiny mechanism, be set to measuring device with it is to be measured The connecting side of equipment, including the quick connector of CF35 and fast pump mouth device；And sampler, it is coaxial with bindiny mechanism, Positioned at the mobile vacuum measuring device and the connecting side of equipment to be measured or opposite side.

In some embodiments of the present disclosure, detachable vacuum interacted system, further includes: portable sample post vacuum Room is used for sample to be sent it to external or carrying over long distances, which includes: support frame；With vacuum The integrated cavity of valve is located on support frame；Main form is located on cavity, can be observed entirely by the Main form All components are inside cavity to be used for safety inspection；And external ionic pump or adsorption pump, for maintaining the vacuum of cavity.

In some embodiments of the present disclosure, vacuum constant temperature sample transfering small vehicle, further includes: support room is changed, to contain not With the sample transfer between two devices of specimen holder.

In some embodiments of the present disclosure, vacuum constant temperature sample transfering small vehicle, comprising: the mobile device of long range is short The mobile device of distance is equipped with spring vibration damper and aerated rubber tyre on the running part of the mobile device of middle and long distance； Separator is set to the front end of vacuum constant temperature sample transfering small vehicle, can not integrally enter in vacuum constant temperature sample transfering small vehicle When the environment of sample to be passed, which is separated and carried the sample into from vacuum constant temperature sample transfering small vehicle；Sample chamber is passed, On separator, independent use can be taken apart from long range or short-range mobile device with separator；Temperature Degree control and temperature maintenance device, are located at and pass in sample chamber, sample, including warm table and low temperature platform are placed thereon, for maintaining The specific temperature of sample during transmission, while the warm table and low temperature platform can be used for constructing integrated thermostatic platform, it should Thermostatic platform can transmit between different cavitys, to realize the constant temperature transmission of the sample between different cavitys；Different cavitys Including mobile high vacuum growth apparatus, mobile non-high vacuum growth apparatus and mobile vacuum measuring device；Sample transferring device, It is connected with sample chamber is passed, for sample in the main transmission interconnected between fixed device or other Split type devices and biography sample chamber；Sample Product transmit locking mechanism, for locking sample to prevent sample from sliding when transmission；Vacuum pump group, comprising: Sublimation pump and ionic pump, vacuum pump group are connected with sample chamber is passed, for maintaining the vacuum in biography sample chamber between 10- Between 6mbar~10-10mbar；Wherein, the vacuum pump group of the vacuum constant temperature sample transfering small vehicle can also be mobile high Vacuum growth apparatus mobile vacuum measuring device, changes support room, the ultrahigh vacuum ring that the offer of portable sample post vacuum chamber needs Border；And all around aligning guide and lifting aligning guide, it is set to and passes between sample chamber and separator, realize and pass sample chamber The alignment of room and Sample Room.

In some embodiments of the present disclosure, mobile vacuum pump truck system sets for realizing the growth of mobile high vacuum Standby, mobile non-high vacuum growth apparatus, vacuum constant temperature sample transfering small vehicle, changes support room or just at mobile vacuum measuring device Take mailing vacuum chamber obtaining from atmosphere to vacuum state, comprising: mobile device；Mechanical pump, molecular pump, ionization silicon, are located at and move On dynamic device and bindiny mechanism, it is set to the side that mobile vacuum pump truck system is connected with equipment to be vacuumized.

In some embodiments of the present disclosure, mobile high vacuum growth apparatus, is moved mobile non-high vacuum growth apparatus It is set in mobile device in dynamic formula vacuum measurement equipment, vacuum constant temperature sample transfering small vehicle and mobile vacuum pump truck system There is lifting device, the motor pattern of the mobile device mainly includes mechanical and automation formula both of which, described mechanical Mobile device utilizes the manual operation and movement for carrying out lifting device；The mobile device of automation formula be one according to projected route into The lifting device of automatic control trolley and automation that row tracks mobile.

In some embodiments of the present disclosure, mobile high vacuum growth apparatus includes one of following equipment or several Kind: mobile MBE molecular beam epitaxial device, mobile magnetron sputtering apparatus and mobile pulse laser deposition equipment；With/ Or mobile non-high vacuum growth apparatus includes one or more of following equipment or system: mobile chemical vapor deposition is set Standby, separate type glove box, mobile sample transport system and separate type sample dissociate system；And/or mobile vacuum measurement Equipment includes one or more of following system: room temperature scanning-tunnelling or atomic force microscopy system；Portable spectral measurement system System；Sample transfer platform in fixed measuring system；And/or the fixed device of main interconnection includes: that one or more is fixed Vacuum growth or test device, butterfly sample transfer and distributor and linear transfer and distributor.

(3) beneficial effect

It can be seen from the above technical proposal that the detachable vacuum interacted system that the disclosure provides, has beneficial below Effect:

(1) multiple moveable Split type devices in the detachable vacuum interacted system can connect on main interconnecting piping And dismantle, connection can be combined between the fixed device of main interconnection and separates, while multiple Split type devices can be used alone or Any combination connects and composes integrated cavity and uses two-by-two, can be needed according to experiment and site space distribution situation is raw to material The equipment of long, test and sample transmitting is targetedly adjusted, flexibly and easily, and the occupied area of each Split type device It is small, it is smaller to the interior space and the demand of load-bearing, there is preferable safety；

(2) Split type device includes: mobile high vacuum growth apparatus, mobile non-high vacuum growth apparatus, movable type are true Empty measuring device, vacuum constant temperature sample transfering small vehicle and mobile vacuum pump truck system；It is grown using mobile high vacuum Equipment realizes preparation of the material under different growing methods from mobile non-high vacuum growth apparatus；The transmitting of vacuum constant temperature sample is small Vehicle is for transmitting sample between different vacuum InterWorking Equipments or system, and different from general vacuum tank, main feature exists In can with long-distance transportation, have the function of automate traveling；Integrated thermostatic platform on trolley can be between multiple chambers The constant transmitting sample of temperature is kept, the ionic pump of the vacuum pump group on trolley is also used as the super of other cavitys auxiliary High-vacuum pump uses；

(3) mechanical pump in mobile vacuum pump truck system, molecular pump can be realized shared between other Split type devices, real Now vacuum acquirement of each Split type device from atmosphere to vacuum state, since mobile high vacuum growth apparatus and mobile vacuum are surveyed It is lower to the dependence of molecular pump and mechanical pump to measure equipment, therefore above-mentioned fission can be met using a mobile vacuum pump truck The primary vacuum of device, high degree reduce the cost of a whole set of interacted system；

(4) integrated thermostatic platform is used to be connected in two Split type devices or Split type device with the fixed device of main interconnection Sample original position, constant temperature transmitting are carried out in two devices being connected afterwards, sample does not need after the completion of growing within one device Cooling or heating can be directly delivered in another equipment, can reduce the growth time of heterojunction material, and may be implemented to add Hot in-place growth；

(5) vacuum constant temperature sample transfering small vehicle, which is internally provided with, changes support room, real when transmitting sample between different devices The compatibility of specimen holder, realizes the interconnection between different manufacturers instrument and equipment and compatible result between existing distinct device, enhances true The networking and convenience of empty interacted system；

(6) the detachable vacuum interacted system further includes portable sample post vacuum chamber, the portable sample post vacuum Room is connected to when in use in Split type device or the fixed device of main interconnection, is taken out the sample of experiment and is carried sample and sends it to External or long-distance transportation, it is small in size, facilitate FCL transport, save transportation cost, and the setting of Main form facilitates and pacified Total inspection, it can be achieved that sample transported across country；

(7) the detachable vacuum interacted system occupied area is small, and does not need the transmission line of long range large scale range Setting, considerably reduces manufacturing cost.

Detailed description of the invention

Fig. 1 is the structural schematic diagram of the detachable vacuum interacted system according to shown in one embodiment of the disclosure.

Fig. 2 uses schematic diagram for the detachable vacuum interacted system according to shown in one embodiment of the disclosure, wherein (a) figure is the state before separation combination；(b) figure is the state after separation combination.

Fig. 3 is the interconnection situation between two mobile high vacuum growth apparatus according to shown in one embodiment of the disclosure.

Fig. 4 is the structural schematic diagram of the movable type high vacuum growth apparatus according to shown in one embodiment of the disclosure, wherein (a) figure is top view, and (b) figure is left view.

Fig. 5 is the structural schematic diagram of the non-high vacuum growth apparatus of the movable type according to shown in one embodiment of the disclosure, wherein (a) figure is top view, and (b) figure is left view.

Fig. 6 is the structural schematic diagram of the mobile vacuum measuring device according to shown in one embodiment of the disclosure, wherein (a) Figure is top view, and (b) figure is left view.

Fig. 7 is the structural schematic diagram of the vacuum constant temperature sample transfering small vehicle according to shown in one embodiment of the disclosure, wherein (a) figure is top view, and (b) figure is left view.

Fig. 8 is the physical structure diagram of the vacuum constant temperature sample transfering small vehicle according to shown in one embodiment of the disclosure.

Fig. 9 is the structure of support room to be changed according to shown in one embodiment of the disclosure and using schematic diagram, wherein (a) figure is true Sample is transferred to STM equipment changing support interior by empty constant temperature sample transfering small vehicle；(b) figure is that vacuum constant temperature sample transfering small vehicle will Sample is transferred to XPS equipment.

Figure 10 is the schematic perspective view that support specimen holder is changed according to shown in one embodiment of the disclosure.

Figure 11 is that support specimen holder, locking dress are changed in the vacuum constant temperature sample transfering small vehicle according to shown in one embodiment of the disclosure It sets, the position view of the Conduction At Low Temperature device of thermostatic platform etc..

[symbol description]

The main interconnecting piping of 1-；The fixed device of the main interconnection of 2-；

3- movable type high vacuum growth apparatus；The mobile non-high vacuum growth apparatus of 4-；

5- mobile vacuum measuring device；6- vacuum constant temperature sample transfering small vehicle；

7- mobile vacuum pump truck system；The portable sample post vacuum chamber of 8-；

3a- first movement formula high vacuum growth apparatus；

The mobile high vacuum growth apparatus of 3b- second；

The mini growth chamber of 31-；32- warm table；

33- molecular beam source；The quick connector of 34-ISO；

35- fast pump mouth；36- mobile device；

37- compound ion pump；38- sampler；

41- mobile device；42- grower；

43- air pressure balance room；44- vacuum drawn and maintenance device；

45- bindiny mechanism；46- sampler；

51- mobile device；52- measuring device；

53- damper；54- bindiny mechanism；

55- sampler；

61- passes sample chamber；62- sample transferring device；

63- sample transfer locking mechanism；64- vacuum pump group；

The control of 65- temperature and temperature control equipment；

66- all around aligning guide；67- goes up and down aligning guide；

68- long range/short-range mobile device；

69- separator；

610- changes support room；611- changes support room air extractor；

501- scanning tunneling microscope STM；502-X X-ray photoelectron spectroscopy X XPS；

521-XPS passes model machine structure；The air extractor of 522-XPS biography model machine structure；

523-XPS sample carrier；513-STM specimen holder；

9- changes support specimen holder；The Conduction At Low Temperature device of 95- thermostatic platform.

Specific embodiment

Present disclose provides a kind of detachable vacuum interacted system, which includes: main mutual Union road, main interconnect device, multiple moveable Split type devices and integrated thermostatic platform, multiple moveable seperated dresses Setting can connect and be dismantled on main interconnecting piping, can be combined connection between the fixed device of main interconnection and separate, while is more A Split type device can be used alone or any combination connects and composes integrated cavity use two-by-two, can be needed according to experiment and existing The equipment that field space distribution situation transmits Material growth, test and sample is targetedly adjusted, flexibly and easily, and it is each The occupied area of a Split type device is small, smaller to the interior space and the demand of load-bearing, has preferable safety；And realize original Position sample transmitting, sample long-distance transportation at a certain temperature and transported across country；Also achieve sample between distinct device The compatibility of frame enhances ultravacuum interconnection instrument to make to reach interconnection and compatible result between different manufacturers instrument and equipment Networking and convenience；The transmission line setting for not needing long range large scale range, considerably reduces manufacturing cost.

For the purposes, technical schemes and advantages of the disclosure are more clearly understood, below in conjunction with specific embodiment, and reference The disclosure is further described in attached drawing.

In first exemplary embodiment of the disclosure, a kind of detachable vacuum interacted system is provided.

Shown in referring to Fig.1, the detachable vacuum interacted system of the disclosure, comprising: main interconnecting piping 1；Main interconnection is fixed Device 2 is set on main interconnecting piping 1；Multiple moveable Split type devices, which includes: mobile high vacuum is raw Long equipment 3, mobile non-high vacuum growth apparatus 4, mobile vacuum measuring device 5, vacuum constant temperature sample transfering small vehicle 6, with And mobile vacuum pump truck system 7, wherein the Split type device can be connected and be dismantled on main interconnecting piping, can be solid with main interconnection Determine to be combined connection and separation between device, while multiple Split type devices can be used alone or any combination connects and composes two-by-two Integrated cavity uses；And integrated thermostatic platform, between the Split type device for being interconnected at two or Split type device and master Interconnect the sample original position between fixed device, constant temperature transmits.

Further, detachable vacuum interacted system further include: portable sample post vacuum chamber 8 is used for sample External or carrying over long distances is sent it to use.

Wherein, independent vacuum is all had in each Split type device to maintain system, pass from baking processing system and sample Defeated system.

With reference to the accompanying drawing, it is situated between in detail to vacuum interacted system detachable in the present embodiment and its various pieces It continues.

In the present embodiment, the fixed device 2 of main interconnection includes but is not limited to: one or more fixed vacuum growth is surveyed Trial assembly sets, butterfly sample transfer and distributor and linear transfer and distributor etc..

In the present embodiment, mobile high vacuum growth apparatus 3 is including but not limited to one or more of following equipment: moving Dynamic formula molecular beam epitaxial device, mobile magnetron sputtering apparatus and mobile pulse laser deposition equipment etc..

In the present embodiment, mobile non-high vacuum growth apparatus 4 is including but not limited to one of following equipment or system It is or several: mobile chemical vapor depsotition equipment, separate type glove box, mobile sample transport system and separate type sample Dissociation system etc..

In the present embodiment, mobile vacuum measuring device 5 is including but not limited to one or more of following system: room temperature Scanning-tunnelling or atomic force microscopy system；Portable spectral measurement system；Sample transfer platform in fixed measuring system etc..

In the disclosure, multiple moveable Split type devices can be connected and be dismantled on main interconnecting piping, can be solid with main interconnection Determine to be combined connection and separation between device, while multiple Split type devices can be used alone or any combination connects and composes two-by-two Integrated cavity uses, and illustrates a kind of service condition in Fig. 1: mobile high vacuum growth apparatus 3 connects with main interconnecting piping 1 It connects, realizes and the main combination interconnected between fixed device 2 is connected and used, certain movable type high vacuum growth apparatus 3 can be from Exclusive use is disassembled on main interconnecting piping 1；Mobile non-high vacuum growth apparatus 4 connect with main interconnecting piping 1, realization and The main combination interconnected between fixed device 2, which connects, to be used, and the non-high vacuum growth apparatus 4 of certain movable type can be from the mutual union of master Exclusive use is disassembled on road 1；Mobile vacuum measuring device 5 is connect with main interconnecting piping 1, is realized and the fixed dress of main interconnection The combination connection set between 2 uses, and certain mobile vacuum measuring device 5 can disassemble list from main interconnecting piping 1 Solely use；Two mobile 3 combinations of high vacuum growth apparatus connect and compose integrated cavity and use；The transmitting of vacuum constant temperature sample is small Vehicle 6 is connect with mobile vacuum growth apparatus 3, is carried out sample and is transmitted at a distance or closely；Mobile vacuum pump truck system 7 with Mobile high vacuum growth apparatus 3 connects；Portable sample post vacuum chamber 8 is connect with main interconnecting piping 1, and sample is sent it to foreign countries Or it carries use over long distances.

Split type device separates the case where combining front and back referring to shown in Fig. 2 with main interconnecting piping, and (a) and (b) is respectively in Fig. 2 The case where mobile device separation combination front and back.As it can be seen that multiple moveable Split type devices can be connected and be torn open on main interconnecting piping It unloads, connection can be combined between the fixed device of main interconnection and separates, while multiple Split type devices can be used alone or two-by-two Any combination connects and composes integrated cavity and uses.

Fig. 3 illustrates the interconnection situation between two mobile high vacuum growth apparatus, the portion of the rightmost side in corresponding diagram 1 Point, i.e., two mobile 3 combinations of high vacuum growth apparatus connect and compose the situation that integrated cavity uses, first movement Shi Gaozhen The movable type high vacuum growth apparatus 3b of empty growth apparatus 3a and second combination connects and composes integrated cavity, integrated thermostatic platform It can be used for carrying out between the integration cavity sample original position, constant temperature transmitting, not illustrating integrated thermostatic platform in figure.

The integrated thermostatic platform of the disclosure can be used together with vacuum constant temperature sample transfering small vehicle 6, can also be independent Use is taken out, which is used between the Split type device of multiple interconnections or Split type device is fixed with main interconnection and filled The transmitting of sample original position, steady temperature between setting.Sample is not needed to cool down after the completion of growing within one device or be heated up just It can be directly delivered in another equipment, the growth time of heterojunction material can be reduced, and heating growth in situ may be implemented.

Integrated thermostatic platform can carry out sample original position between different cavitys, constant temperature transmits, different in the present embodiment Cavity include mobile high vacuum growth apparatus, mobile non-high vacuum growth apparatus and mobile vacuum measuring device.

The vacuum range of mobile high vacuum growth apparatus 3 is between 1 × 10^-6Mbar~1 × 10^-10Between mbar.This implementation In example, using mobile molecular beam epitaxy (MBE) equipment as an example of mobile high vacuum growth apparatus 3, other movements The material source of formula high vacuum growth apparatus replace accordingly.

Referring to shown in (a) in Fig. 4, (b) figure, the mobile high vacuum growth apparatus 3 of the disclosure includes: mobile device 36； Mini growth chamber 31 is located on mobile device 36；Warm table 32 and molecular beam source 33, sputtering source or pulse laser deposit (PLD) target (material source for respectively corresponding material source and the pulse laser deposition for magnetron sputtering), is set to mini growth chamber In room 31, the temperature and material source of Material growth are provided；Bindiny mechanism is connected with the side of mini growth chamber 31, includes ISO Quick connector 34, fast pump mouth 35 and flash baking device, wherein fast pump mouth 35 connects the mobile vacuum pump Vehicle system 8 is extracted the vacuum of bindiny mechanism and mini growth chamber 31 using the mobile vacuum pump truck system 8, quickly dried Roasting device carries out vacuum drawn to bindiny mechanism and toasts；Sampler 38 is connected with the other side of mini growth chamber 31, with Bindiny mechanism is coaxial, sets for taking out sample to mobile high vacuum growth from the fixed device 2 of main interconnection or other Split type devices Standby 3；And compound ion pump 37, it is located on mobile device 36, is connected with mini growth chamber 31, realizes mini growth chamber The high vacuum of room 31 maintains.

In the present embodiment, the mini growth chamber 31 of mobile MBE equipment is small in size, using flexible, and can independently into Row extraction, sample introduction and baking, the general cavity design mode for using three evaporation sources.

In the present embodiment, warm table 32 and molecular beam source 33 are set in mini growth chamber 31, and it is raw to provide material epitaxy Long temperature and molecular beam source, using the warm table and molecular beam source furnace of normal molecular beam epitaxy.Due to molecular beam source and heating The relatives of Taiwan compatriots living on the Mainland need great care damping in precision apparatus in moving process, can using the spring shock absorption in automobile to avoid Unnecessary damage.Further include conventional sample and filament fixture etc. in mini growth chamber 31, does not repeat here.

In the present embodiment, referring to shown in (b) in Fig. 4, bindiny mechanism is connected with the left side of mini growth chamber 31, includes The quick connector 34 of ISO, fast pump mouth 35 and flash baking device.Bindiny mechanism forms transfer chamber, can be used for two fans Connection between your growth chamber, wherein the cavity connection between mobile MBE equipment can use universal connection type, I.e. by extracting the vacuum of transfer chamber, slide valve is then turned on the transmission of the interconnection of realization device and sample.Transfer chamber It is connect with the MBE chamber on both sides by slide valve, transfer chamber carries out pumping control by the valve that connection molecule pumps, and connector uses CF flange or ISO flange for quickly passing sample to use.

Flash baking device be in order to realize equipment interconnection connection after can be rapidly achieved pass sample need vacuum degree and set It sets, in the present embodiment, flash baking device can be iodine-tungsten lamp.Equipped with mini sublimation pump, true at the quick connector 34 of ISO The measurement and maintenance of the realization vacuum such as iodine-tungsten lamp of empty ionization gauge and quick baking.

Mobile device 36, for realizing the movement of separate type ultrahigh vacuum equipment 3.Mobile device 36 is equipped with lifting dress It sets, lifting device can realize the adjustment up and down of mini growth chamber position in separate type ultrahigh vacuum equipment 3, convenient for filling with other It sets or equipment realizes docking, the motor pattern of the mobile device 36 mainly includes mechanical and automation formula both of which, mechanical The mobile device of formula utilizes the manual operation and movement for carrying out lifting device；The mobile device of automation formula is one according to predetermined road Line carries out the lifting device for the automatic control trolley and automation for tracking mobile.It, mechanically mainly can by one in the present embodiment Mobile hoistable platform composition, cost is relatively low, needs manually to carry out moving operation, mechanical mobile device is by (b) in Fig. 4 Lifting device 37 illustrated.Automation formula, which can be used, is added tracking mark trolley for platform, and realization is transmitted in same floor, Also the transmission in automobile progress garden can be used, and visual identifying system can be added to increase the practicability of system.

Compound ion pump 37, is located on mobile device 36, is connected with mini growth chamber 31, realizes mini growth chamber The high vacuum of room 31 maintains.

In the present embodiment, referring to shown in (b) in Fig. 4, sampler 38 is connected with the right side of mini growth chamber 31, with company Connection mechanism is coaxial, for taking out sample to mobile high vacuum growth apparatus from the fixed device 2 of main interconnection or other Split type devices 3.It include independent sampling/Sample Room and detachable sample transmission rod, independent sampling/Sample Room and mini life in sampler 38 The composable connection of long chamber 31 is detached from, and in other embodiments, independent sampling/Sample Room passes through the quick connector 34 of ISO It is connected with mini growth chamber, the sampling/Sample Room and bindiny mechanism collectively form transfer chamber, and can need group with other again The instrument and equipment of dress is attached, and realizes the transmission of sample, using flexible；Detachable sample transmission rod carries out the transmitting of sample.It is more Independent sampling/Sample Room can be shared between platform movable type high vacuum growth apparatus, high degree reduces interacted system Cost.

The application method of mobile MBE equipment is introduced with a specific example below.

Firstly, being evaporated the selection and installation of material according to experiment demand at this stage, utilized after the completion comprising machinery The mobile vacuum pump truck system of pump and molecular pump carries out vacuum drawn to the mini growth chamber of mobile MBE equipment and dries It is roasting；The indoor chamber vacuum of the mini growth chamber of MBE is maintained using sublimation pump and ionic pump after baking, closes mini growth chamber After slide valve between room and Sample Room, mini growth chamber can be detached between Sample Room, and movable type MBE equipment exists Vacuum is maintained using mobile power source, charger baby, vehicle power supply etc. during traveling.Mobile MBE equipment prepare sample and The processes such as annealing are identical as traditional MBE equipment operation, do not do specific narration herein.

Sample can be transmitted mutually between mobile MBE equipment, and transfer chamber is formed by bindiny mechanism or pass through company Connection mechanism and independent sampling/Sample Room collectively form transfer chamber, thus realize the connection between two mini growth chambers, And carry out the transmitting of sample；Mobile MBE equipment can also be connect to transmit sample with the fixed device 2 of main interconnection.

The mobile high vacuum growth apparatus of the disclosure has the advantages that

1, the cavity for needing to carry out increment study can be connected rapidly, avoid the transmission being not necessarily to increase transportation cost And cost of human resources, the transport pressure of transmission line is greatly reduced, to reduce instrument damage；

2, after being attached baking, vacuum may be better than the base vacuum of transmission line for the part separated, can be to avoid Sample is in a wherein cavity growth rear surface because of the pollution caused by long distance transmission；

3, direct-connected design can guarantee that sample transfer is maintained at high temperature or low temperature environment, be may not need in this way by sample It is down to room temperature, therefore reduces possible specimen breakdown, realizes the experiment under same growth temperature, and traditional linear of this respect Transmitting device is difficult to realize；

4, can any combination need cavity, considerably increase the flexibility for preparing sample.

The vacuum range of mobile non-high vacuum growth apparatus 4 is between 1 × 10^-2Between mbar~1bar.In the present embodiment, Using mobile chemical vapor deposition (CVD) equipment as the example of mobile non-high vacuum growth apparatus 4.

Referring to shown in (a) in Fig. 5, (b) figure, the non-high vacuum growth apparatus 4 of movable type of the disclosure includes: mobile device 41；Grower 42 is located on mobile device 41；Air pressure balance room 43, be set to grower and other Split type devices or It is main to interconnect the connected side of fixed device, for reducing the vacuum difference between two connected devices, air pressure balance room packet Include: sample storage device, vacuum pumping opening and means of deflation, vacuum drawn and maintenance device 44 are by vacuum pumping opening to the gas Balance cylinder is pressed to realize vacuum drawn and maintenance；Bindiny mechanism 45 is set to air pressure balance room and other Split type devices or main interconnection The connected side of fixed device, comprising: the quick connector of KF25, ISO flange-interface, CF flange-interface and fast pump mouth dress It sets；And sampler 46, it is coaxial with bindiny mechanism, for from the fixed device of main interconnection or other Split type devices taking-up sample to Mobile non-high vacuum growth apparatus.

Since the air pressure inside of mobile high vacuum growth apparatus or sample transfer bogie is that high vacuum even superelevation is true Sky, and the air pressure inside of mobile non-high vacuum growth apparatus is low vacuum, then mobile high vacuum growth apparatus or sample The transfer bogie pressure difference between the two with mobile non-high vacuum growth apparatus is larger, therefore when carrying out interconnection use It needs to reduce the very poor of vacuum, includes air pressure balance room in the interconnect device of use, and be equipped with a sample in air pressure balance room Storage device, vacuum pumping opening and means of deflation.In poor vacuum area, sample is reached to the sample storage of air pressure balance room Device is then shut off valve.Using vacuum drawn and maintain the pump housing of device that the vacuum of air pressure balance room is evacuated to high vacuum.Again The valve for opening high vacuum end carries out sample transfer.Air pressure balance room is most important to act on the balance for being to maintain air pressure, to prevent The region at ultrahigh vacuum end is placed in atmosphere.In air pressure balance room, include: differential extraction mouth, dedicated CVD and superelevation are true Dally exchange device.

Mobile device in mobile non-high vacuum growth apparatus 4 is equipped with lifting device, and lifting device can realize movement The adjustment up and down of grower position in the non-high vacuum growth apparatus of formula, convenient for being docked with other devices or equipment realization, the shifting The motor pattern of dynamic device mainly includes mechanical and automation formula both of which, and mechanical mobile device is carried out using manual The operation and movement of lifting device；The mobile device of automation formula carries out the mobile automatic control that tracks according to projected route for one The lifting device of trolley and automation.In the present embodiment, mechanically mainly it is made of the hoistable platform of a packaged type, cost It is lower, it needs manually to carry out moving operation.Automation formula, which can be used, is added tracking mark trolley for platform, realizes in same floor Transmitting also can be used the transmission in automobile progress garden, and visual identifying system can be added to increase the practicability of system.

Fig. 6 is the structural schematic diagram of the mobile vacuum measuring device according to shown in one embodiment of the disclosure, wherein (a) Figure is top view, and in order to protrude some structures of signal, other structures are omitted；(b) figure is left view.

In the present embodiment, mobile vacuum measuring device 5 includes: mobile device 51；Measuring device 52 is located at mobile device On；Damper 53 includes: welding bellows and shock-absorption air bag；Bindiny mechanism 54, is set to measuring device and device under test Connecting side, including the quick connector of CF35 and fast pump mouth device；And sampler 55, position coaxial with bindiny mechanism In the mobile vacuum measuring device and the connecting side of equipment to be measured or opposite side.

Mobile device in mobile vacuum measuring device 5 is equipped with lifting device, and lifting device can be realized mobile true The adjustment up and down of empty 5 position of measuring device is easy to implement and docks with other devices or equipment, the motor pattern of the mobile device Main includes mechanical and automation formula both of which, mechanical mobile device using carry out manually the operation of lifting device with Movement；The mobile device of automation formula is a liter that the automatic control trolley and automation that track mobile are carried out according to projected route Falling unit.In the present embodiment, be mechanically mainly made of the hoistable platform of a packaged type, cost is relatively low, need manually into Row moving operation.Automation formula, which can be used, is added tracking mark trolley for platform, and realization is transmitted in same floor, also be can be used Automobile carries out the transmission in garden, and visual identifying system can be added to increase the practicability of system.

Shown, the vacuum constant temperature sample transfering small vehicle 6 of the disclosure, comprising: the movement of long range referring to (a), (b) in Fig. 7 Device or short-range mobile device 68 are equipped with spring vibration damper and inflation on the running part of the mobile device of middle and long distance Rubber tyre；Separator 69 is set to the front end of vacuum constant temperature sample transfering small vehicle 6, in vacuum constant temperature sample transfering small vehicle 6 When can not integrally enter the environment of sample to be passed, which is separated from vacuum constant temperature sample transfering small vehicle 6 and carries sample Product enter；Pass sample chamber 61, be located at separator 69 on, can with separator 69 from over long distances or short-range mobile device Independent use is taken apart on 68；Temperature control and temperature maintenance device 65, are located at and pass in sample chamber 61, place sample thereon, Including warm table and low temperature platform, for maintaining the specific temperature of sample during transmission；Warm table and low temperature platform can simultaneously With for constructing integrated thermostatic platform, which can transmit between different cavitys, to realize in different cavitys Between sample transfer under same temperature；Temperature maintenance device, including liquid nitrogen, for maintaining the specific temperature of biography sample chamber；It passes Sampling device 62 is connected with sample chamber 61 is passed, and in the fixed device of main interconnection or other Split type devices and passes sample chamber 61 for sample Between transmission；Sample transfer locking mechanism 63, for locking sample to prevent sample from sliding when transmission；Vacuum Pump group 64 is maintained, is connected with sample chamber 61 is passed, for maintaining the ultra-high vacuum for passing sample chamber to require: 10^-6Mbar~10^- ¹⁰mbar；Vacuum measurement and maintenance device realize the vacuum maintenance and measurement for passing sample chamber；All around aligning guide 66 and liter Aligning guide 67 is dropped, is set to and passes between sample chamber 61 and separator 69, realizes the alignment for passing sample chamber 61 and Sample Room.

Vacuum constant temperature sample transfering small vehicle 6 and general vacuum biography sample box in the disclosure is different, main special Point is to there is automation traveling, integrated thermostatic platform can be such that sample keeps over long distances or short distance transportation It transports, while thermostatic platform can also be used between different cavitys at a certain temperature.In the present embodiment, different cavitys Including mobile high vacuum growth apparatus, mobile non-high vacuum growth apparatus and mobile vacuum measuring device.In addition, should be somebody's turn to do Vacuum constant temperature sample transfering small vehicle is also used as individual ionic pump pump truck and uses, and provides for other mobile vacuum equipment auxiliary Ultrahigh vacuum is helped to extract.

The characteristics of vacuum constant temperature sample transfering small vehicle 6 in the present embodiment are described in detail below.

Referring to shown in Fig. 7 and Fig. 8, in the present embodiment, comprising being located at mobile device 68 in vacuum constant temperature sample transfering small vehicle 6 On main body vehicle and separator 69, main body vehicle can be used for sample over long distances or short-distance transmission, and have automation row Into function, compared to existing vacuum pass sample box for, with long range specific temperature transport advantage, it is especially same Transmission between a laboratory from different places, due to the long-term vacuum pump group 64 for maintaining vacuum and temperature control Transmission of the sample under high/low temperature can be maintained with temperature maintenance device 65, therefore, 6 energy of vacuum constant temperature sample transfering small vehicle Enough guarantee that sample carries out the transmission of long range, specific temperature.Here vacuum pump group 64 is with ionic pump as an example, reference In Fig. 7 shown in (b), ionic pump is placed in main body vehicle.Meanwhile the vacuum constant temperature sample transfering small vehicle 6 can also pass through separation Device realizes sample transmission in the room compared with small area, since 69 occupied area of separator is small, will pass sample chamber 61 and is set to On separator 69, when vacuum constant temperature sample transfering small vehicle 6 can not integrally enter the environment of sample to be passed, sample chamber 61 will be passed As separator 69 is separated from main body vehicle, sample transmit process is convenient.

The electricity consumption of vacuum constant temperature sample transfering small vehicle 6 mainly utilizes uninterruptible power supply (UPS) to supply, and transmits sample over long distances Product need to be powered the ionic pump in vacuum pump group 64.

There are the two kinds of temperature controls of warm table and low temperature platform and temperature maintenance device in the inside of vacuum constant temperature sample transfering small vehicle 6 65, and monitored equipped with thermocouple.In the present embodiment, warm table is constructed using tungsten wire, and low temperature platform is made of liquid helium constant warm tube.

Vacuum measurement and maintenance device realize the vacuum maintenance and measurement for passing sample chamber；In the present embodiment, using movable type Vacuum pump truck system 7 realizes the vacuum measurement and maintenance to sample chamber 61 is passed in vacuum constant temperature sample transfering small vehicle 6.

For the requirement for adapting to different Sample Rooms, vacuum constant temperature sample transfering small vehicle 6 has Auxiliary support, has and goes up and down function The simultaneously left back aligning guide 66 in front and back of connection cavity and lifting aligning guide 67 can, can be all around precisely aligned, using front and back Left and right aligning guide 66 and lifting aligning guide 67 realize the alignment for passing sample chamber 61 and Sample Room.In the present embodiment, sample is passed Chamber 61 is located at the head end of vacuum constant temperature sample transfering small vehicle 6, and can move up and down, and is all around finely adjusted, to be applicable in It is transmitted in the alignment of cavity and sample.

The mobile device of long range or short-range mobile device 68, for vacuum constant temperature sample transfering small vehicle 6 length away from From or short distance transportation.The mobile device of long range is located at the bottom of vacuum constant temperature sample transfering small vehicle 6, is furnished with damping With rubber wheel etc., suitable for the transmission between different experiments room.Short-range mobile device is set to 69 bottom of separator, packet Containing four castors, can flexibly be moved in the laboratory of relatively narrower.

Mobile device 68 is equipped with lifting device, and lifting device can realize that vacuum constant temperature sample transfering small vehicle 6 uploads sample chamber The adjustment up and down of room position is convenient for the docking of sample transmission, and the motor pattern of the mobile device 68 mainly includes mechanical With automation formula both of which, mechanical mobile device utilizes the manual operation and movement for carrying out lifting device；Automation formula Mobile device be the automatic control trolley and automation for track mobile according to projected route lifting device.This implementation It in example, is mechanically mainly made of the hoistable platform of a packaged type, is all around aligned below the hoistable platform comprising one Mechanism 66 and lifting aligning guide 67, cost is relatively low, needs manually to carry out moving operation.Automation formula can be used, and platform is added Tracking mark trolley, realization are transmitted in same floor, the transmission in automobile progress garden also can be used, and vision can be added Identifying system is to increase the practicability of system.

The vacuum constant temperature sample transfering small vehicle 6 further includes changing support room 610, for connecting two dresses comprising different specimen holders It sets.Change support room be mainly used between different instrument and equipments, this change support room be based on the specimen holder between different instrument and equipments not It is manufactured with targeted property, for the chamber for switching sample frame, realizes the compatibility of specimen holder between different instrument and equipments, To realize interconnection and compatible result between different manufacturers instrument and equipment, the networking and just of ultravacuum interconnection instrument is enhanced Victory.

Shown referring to (a), (b) in Fig. 9, in the present embodiment, vacuum constant temperature sample transfering small vehicle 6 realizes sample in scanning tunnel Transmitting between road microscope STM 501 and x-ray photoelectron spectroscopy XPS 502 the two equipment, referring to Fig.1 shown in 0, due to Scanning tunneling microscope STM 501 has plug-type STM specimen holder 513, and x-ray photoelectron spectroscopy XPS 502 has circle The XPS sample carrier 523 of shape, the two size mismatch, and therefore, need to convert support in changing support room 610 and realize two specimen holder phases Sample changeover between mutually, the stereochemical structure for changing support specimen holder are as shown in Figure 10.(a), (b) are shown in Fig. 9, change support room 610 junction between vacuum constant temperature sample transfering small vehicle 6 and sample stage is changed and is provided with grabber in support room 610 and faces When storage platform, changing support room 610 in, STM specimen holder 513 is placed in XPS in the way of being inserted into or stacking by grabber On sample carrier 523, it is then put in interim storage platform, realizes sample from scanning tunneling microscope STM 501 to vacuum constant temperature The transmitting of sample transfering small vehicle 6, in sample transmittance process, using the fixed sample of sample transfer locking mechanism 63,1 institute referring to Fig.1 Show, and using temperature control and 65 real-time monitoring of temperature maintenance device and controls temperature of the sample in transmission process, this reality It applies in example, the low temperature of sample is kept using Conduction At Low Temperature device, the Conduction At Low Temperature device 95 of thermostatic platform is illustrated in Figure 11.So The sample in sample transfer bogie 6 is sent in x-ray photoelectron spectroscopy XPS 502 afterwards.Entirely the transmission process of sample is It is carried out in predetermined vacuum, (a), (b) are further illustrated and changed support room air extractor 611 in Fig. 9, XPS passes model machine structure 521 and XPS Pass the air extractor 522 of model machine structure.

Mobile vacuum pump truck system 7 sets for realizing mobile high vacuum growth apparatus, mobile non-high vacuum growth Standby, mobile vacuum measuring device, vacuum constant temperature sample transfering small vehicle change support room, portable mailing vacuum chamber from atmosphere to vacuum The acquisition of state, in the present embodiment, mobile vacuum pump truck system, comprising: mobile device；Mechanical pump, molecular pump, ionization silicon, On mobile device and bindiny mechanism, it is set to what mobile vacuum pump truck system was connected with equipment to be vacuumized Side.

The mobile device of mobile vacuum pump truck system is equipped with lifting device, and lifting device can realize that mobile vacuum pumps The adjustment up and down of vehicle system position, to realize the docking with vacuum pumping opening, the motor pattern of the mobile device mainly includes machine Tool formula and automation formula both of which, mechanical mobile device utilize the manual operation and movement for carrying out lifting device；Automatically The mobile device of change formula is a lifting device that the automatic control trolley and automation that track mobile are carried out according to projected route.

Mobile vacuum pump truck system 7 can be used for mobile high vacuum growth apparatus 3, mobile non-high vacuum growth apparatus 4, the vacuum measurement and maintenance of mobile vacuum measuring device 5 and vacuum constant temperature sample transfering small vehicle 6, mobility and adjustable The characteristics of height, which allows to realize between above-mentioned multiple equipment, shares, and is effectively saved cost.

In a preferred embodiment, detachable vacuum interacted system, further includes: portable sample post vacuum chamber is used for Sample is sent it to external or carrying over long distances to use, for vacuum constant temperature sample transfering small vehicle, portable mobile room is applicable in In farther Distance Transmission, such as the not sample transfer between the same area or country.Due in transportational process to liquid and The limitation of power supply and other items.Therefore the maintenance of ionic pump can not be carried out, therefore the vacuum degree of the portable sample post vacuum chamber is only 10 can be maintained^-5Mbar~10^-6The range of mbar.

The characteristics of according to transport, which includes: support frame；With the integrated chamber of vacuum valve Body is located on support frame；Main form is located on cavity, can be observed by the Main form all inside entire cavity Component is to be used for safety inspection；And external ionic pump or adsorption pump, for maintaining the vacuum of cavity.

Sample requires to be evacuated by angle valve in the case where reinstalling cavity or long-term unused situation, and when installation should reinstall true Empty constant temperature sample transfering small vehicle carries out the pick-and-place of sample using vacuum constant temperature sample transfering small vehicle.

There is the characteristics of the following aspects in portable mobile room: first, it can be seen by watch window into inside, transmitted in this way Easily unnecessary deflation is avoided to check quickly through safety check in the process；Second, an only valve and a cavity form, chamber A specimen holder is had in body, this design can be greatly reduced weight, reduce the cost transported back and forth, at the same accessory at This is lower, and the loss in transportational process can avoid unnecessary loss as far as possible.

It illustrates, the vacuum pump group of vacuum constant temperature sample transfering small vehicle can also be mobile high vacuum growth Equipment mobile vacuum measuring device, changes support room, the ultra-high vacuum environment that the offer of portable sample post vacuum chamber needs.

Illustrate that the detachable vacuum interacted system can need to carry out according to specific experiments below with a specific example It is adjusted flexibly and arranges.

In one example, the fixed device of main interconnection includes following main chamber: a STM chamber, a MBE chamber, and one LEED chamber and an interconnection transfer chamber and sample preparation chamber, Split type device include: mobile MBE equipment, include two mini lifes Long chamber；And vacuum constant temperature sample transfering small vehicle.Wherein, mobile MBE equipment is altogether there are two small-sized interconnection chamber, and first Three kinds of materials can be deposited in mini growth chamber simultaneously, maintain vacuum by ionic pump, vacuum degree can be to 5 × 10^-10mbar；Second fan Your growth chamber maintains vacuum by molecular pump, and vacuum degree can reach 5 × 10^-7Mbar can evaporate two kinds of materials simultaneously.It is mobile MBE equipment can be attached with adjustable height according to needs and main interconnection vacuum pipe, or realize the connection with main chamber. There is common integrated thermostatic platform to transmit sample between two mini growth chambers, protected by integrated thermostatic platform The growth of card material is in identical temperature, is conducive to the growth of hybrid heterojunction or alloy material.

The transmitting of sample uses CF flange, can fully ensure that the purity of sample is not contaminated in this way.In one example, The vacuum degree of biography sample chamber in vacuum constant temperature sample transfering small vehicle is about 7 × 10^-10Mar, the temperature of sample can be down to the left side 100K The right side, the temperature of heating can maintain 200 DEG C of range, and low temperature can maintain 100K or so.CVD tubular type furnace apparatus passes through metal Connector connects air pressure balance room valve, and connect with the valve of interconnect device.The vacuum of air pressure balance room is generally located on 7 × 10^-8Mbar~1 × 10^-1Between mbar, it is observed by cold cathode ga(u)ge in situ.It can also be mutual between CVD equipment Connect the growth to realize heterojunction material.

The detachable vacuum interacted system of the disclosure has the advantages that compared with existing ultravacuum interconnect device

1) use is very flexible: since distance can be attached by the design of direct-connected cavity between sample, Commonly used in project sample to prepare chamber connection shorter, and experimental can need to carry out permutation and combination appropriate, thus Realize efficient growth.Furthermore cavity can be dispersed according to the actual needs after project terminates, in next project into The installation combination of row again.

2) occupied area is minimum: due to being combined with each other to form interacted system using Split type device, to guarantee seperated dress Setting can combine and separate between each cavity, and the volume requirement of cavity is relatively small so that in movement, while the also random device such as controller It moves away from together.

3) processing and test in downstream are taken into account, realize micro-nano integration: detachable vacuum interacted system is in addition to that can connect It delivers a child outside long equipment, may be also connected on the vacuum line of test and the pipeline line of other nanoprocessings, since instrument is adopted With nearby principle, therefore increase substantially the service efficiency of original interacted system.

4) it is simple to manufacture, at low cost, compatibility is strong:, can be significantly since cavity is smaller and does not need transmission line device Reduce manufacturing cost；Additionally due to the biography sample design of the disclosure can be compatible with other sample frame plates, therefore can be different Interconnection is realized between producer's instrument.

5) with strong points from the angle of specific experiment: small due to being transmitted for specific implementation to vacuum constant temperature sample Vehicle is assembled, therefore experiment is with strong points, while can adjust the distribution of instrument at random according to the realistic development of experiment.

In conclusion present disclose provides a kind of detachable vacuum interacted system, the detachable vacuum interacted system Including multiple interconnections, moveable Split type device, connection, separable Split type device land occupation face can be combined between multiple Split type devices Product is small, and the demand in space and load-bearing is reduced, has preferable safety；Connection between Split type device is flexible, Neng Gougen It factually tests and needs to carry out targetedly recombination connection and the distribution of adjustment instrument, it is easy to use；Since cavity is smaller and is not required to Transmission line device is wanted, manufacturing cost can be greatly lowered；Sample transfer bogie, which is internally provided with, changes support room, makes sample in difference The compatibility that specimen holder between distinct device is realized when transmitting between equipment, realizes the interconnection and simultaneous between different manufacturers instrument and equipment Hold effect, enhances the networking and convenience of ultravacuum interconnection instrument；The detachable vacuum interacted system can be according to existing Vacuum instrument or transmission line be transformed, other than the equipment that can connect growth, may be also connected to the vacuum tube of test On the pipeline line of road and other nanoprocessings, the processing and test in downstream are taken into account, realizes micro-nano integration, since instrument is using just Approximately principle, therefore the service efficiency of original interacted system is increased substantially, it effectively prevents the wasting of resources, improve instrument use Rate.Further, which further includes portable sample post vacuum chamber, and the portable sample post is true Empty room is connected to when in use in Split type device or the fixed device of main interconnection, is taken out the sample of experiment and is carried sample and posts Abroad or long-distance transportation, small in size, facilitate FCL transport, saves transportation cost, and the setting of Main form facilitates progress Safety inspection, it can be achieved that sample transported across country；The detachable vacuum interacted system further includes integrated thermostatic platform, this one The thermostatic platform of body is used to after two Split type devices or Split type device are connected with main interconnection fixation device be connected Original position, the constant temperature transmitting of sample are carried out in two devices, sample is not needed to cool down or be heated up after the completion of growing within one device It can be directly delivered in another equipment, the growth time of heterojunction material can be reduced, and heating growth in situ may be implemented； In addition, can share independent sampling/Sample Room between more mobile high vacuum growth apparatus, multiple Split type devices can be total to It enjoys mobile vacuum pump truck system and realizes that vacuum maintains and measurement, high degree reduce the cost of interacted system.

It should be noted that the shape and size of each component do not reflect actual size and ratio in figure, and only illustrate this public affairs The content of embodiment is opened, in some drawings, illustrates certain structures in order to clear, prominent, some other structures is omitted. In addition, in the claims, any reference symbol between parentheses should not be configured to limitations on claims.Also need It is noted that the direction term mentioned in embodiment, such as "upper", "lower", "front", "rear", "left", "right" etc., are only ginsengs The direction of attached drawing is examined, not is used to limit the protection scope of the disclosure.Through attached drawing, identical element is by same or similar attached Icon is remembered to indicate.When may cause understanding of this disclosure and cause to obscure, conventional structure or construction will be omitted.

The word of ordinal number such as " first ", " second ", " third " etc. used in specification and claim, with modification Corresponding element, itself is not meant to that the element has any ordinal number, does not also represent the suitable of a certain element and another element Sequence in sequence or manufacturing method, the use of those ordinal numbers are only used to enable an element and another tool with certain name Clear differentiation can be made by having the element of identical name.

Furthermore word "comprising" or " comprising " do not exclude the presence of element or step not listed in the claims.Positioned at member Word "a" or "an" before part does not exclude the presence of multiple such elements.

Particular embodiments described above has carried out further in detail the purpose of the disclosure, technical scheme and beneficial effects Describe in detail it is bright, it is all it should be understood that be not limited to the disclosure the foregoing is merely the specific embodiment of the disclosure Within the spirit and principle of the disclosure, any modification, equivalent substitution, improvement and etc. done should be included in the guarantor of the disclosure Within the scope of shield.

Claims

1. a kind of detachable vacuum interacted system, comprising:

Main interconnecting piping；

The fixed device of main interconnection, is set on main interconnecting piping；

Multiple moveable Split type devices, the Split type device includes: mobile high vacuum growth apparatus, mobile non-high vacuum Growth apparatus, mobile vacuum measuring device, vacuum constant temperature sample transfering small vehicle and mobile vacuum pump truck system, wherein The Split type device can be connected and be dismantled on main interconnecting piping, can be combined between the fixed device of main interconnection and be connect and divide From, while multiple Split type devices can be used alone or any combination connects and composes integrated cavity use two-by-two；And

Integrated thermostatic platform, between the Split type device of multiple interconnections or between Split type device and the fixed device of main interconnection Sample is in situ, constant temperature transmitting.

2. detachable vacuum interacted system according to claim 1, wherein

The vacuum range of the movable type high vacuum growth apparatus is between 1 × 10^-6Mbar~1 × 10^-10Between mbar；

It is described movable type high vacuum growth apparatus include:

Mobile device；

Mini growth chamber is located on mobile device；

Warm table and molecular beam source, sputtering source or pulsed laser deposition target, are set in mini growth chamber, and it is raw to provide material Long temperature and material source；

Bindiny mechanism is connected with mini growth chamber, include the quick connector of ISO, fast pump mouth and flash baking device, In, fast pump mouth connects the mobile vacuum pump truck system, extracts connection machine using the mobile vacuum pump truck system The vacuum of structure and mini growth chamber, flash baking device carry out vacuum drawn to bindiny mechanism and toast；

Sampler is connected with mini growth chamber, coaxial with bindiny mechanism, for fixing device or other fissions from main interconnection Device takes out sample to mobile high vacuum growth apparatus；And

Compound ion pump, is located on mobile device, is connected with mini growth chamber, realizes the high vacuum of mini growth chamber It maintains.

3. detachable vacuum interacted system according to claim 1, wherein

The vacuum range of the non-high vacuum growth apparatus of movable type is between 1 × 10^-2Between mbar~1bar；

The non-high vacuum growth apparatus of movable type includes:

Mobile device；

Grower is located on mobile device；

Air pressure balance room is set to grower and other Split type devices or the main side for interconnecting fixed device and being connected, for dropping Vacuum difference between low two connected devices, which includes sample storage device, vacuum pumping opening, Yi Jifang Device of air；Vacuum drawn and maintenance device realize vacuum drawn and maintenance to air pressure balance room by vacuum pumping opening；

Bindiny mechanism is set to air pressure balance room and other Split type devices or the main side for interconnecting fixed device and being connected, comprising: The quick connector of KF25, ISO flange-interface, CF flange-interface and fast pump mouth device；And

Sampler, it is coaxial with bindiny mechanism, for taking out sample to movement from the fixed device of main interconnection or other Split type devices The non-high vacuum growth apparatus of formula.

4. detachable vacuum interacted system according to claim 1, wherein the mobile vacuum measuring device packet It includes:

Mobile device；

Measuring device is located on mobile device；

Damper includes: welding bellows and shock-absorption air bag；

Bindiny mechanism is set to the connecting side of measuring device Yu equipment to be measured, including the quick connector of CF35 and fast pump Mouth device；And

Sampler, it is coaxial with bindiny mechanism, positioned at the connecting side or phase of the mobile vacuum measuring device and equipment to be measured Anti- side.

5. detachable vacuum interacted system according to claim 1, further includes: portable sample post vacuum chamber is used for Sample is sent it to external or carrying over long distances to use, which includes:

Support frame；

With the integrated cavity of vacuum valve, it is located on support frame；

Main form is located on cavity, and component all inside entire cavity can be observed to be used for safety by the Main form It checks；And

External ionic pump or adsorption pump, for maintaining the vacuum of cavity.

6. detachable vacuum interacted system according to claim 1, wherein the vacuum constant temperature sample transfering small vehicle, Further include: support room is changed, to contain the sample transfer between two devices of different specimen holders.

7. according to claim 1, detachable vacuum interacted system described in any one of 5 or 6, wherein the vacuum constant temperature Sample transfering small vehicle, comprising:

The mobile device of long range or short-range mobile device are equipped with spring on the running part of the mobile device of middle and long distance Damping device and aerated rubber tyre；

Separator is set to the front end of vacuum constant temperature sample transfering small vehicle, vacuum constant temperature sample transfering small vehicle can not be whole Into sample to be passed environment when, which is separated and is carried the sample into from vacuum constant temperature sample transfering small vehicle；

Sample chamber is passed, is located on separator, can be removed from long range or short-range mobile device with separator Independently to use；

Temperature control and temperature maintenance device, are located at and pass in sample chamber, place sample, including warm table and low temperature platform thereon, use In the specific temperature of maintenance sample during transmission, while the warm table and low temperature platform can be used for constructing integrated constant temperature Platform, the thermostatic platform can transmit between different cavitys, to realize the constant temperature transmission of the sample between different cavitys；It is described not Same cavity includes mobile high vacuum growth apparatus, mobile non-high vacuum growth apparatus and mobile vacuum measuring device；

Sample transferring device is connected with sample chamber is passed, and in the fixed device of main interconnection or other Split type devices and passes sample chamber for sample Between transmission；

Sample transfer locking mechanism, for locking sample to prevent sample from sliding when transmission；

Vacuum pump group, comprising: sublimation pump and ionic pump, vacuum pump group are connected with sample chamber is passed, and pass sample for maintaining Vacuum in chamber between: 10^-6Mbar~10^-10Between mbar；

Wherein, the vacuum pump group of the vacuum constant temperature sample transfering small vehicle can also be mobile high vacuum growth apparatus, shifting Dynamic formula vacuum measurement equipment changes support room, the ultra-high vacuum environment that the offer of portable sample post vacuum chamber needs；And

All around aligning guide and lifting aligning guide, are set to and pass between sample chamber and separator, realize and pass sample chamber With the alignment of Sample Room.

8. according to claim 1, detachable vacuum interacted system described in any one of 5 or 6, wherein described mobile true Empty pump truck system, for realizing mobile high vacuum growth apparatus, mobile non-high vacuum growth apparatus, mobile vacuum measurement Equipment, vacuum constant temperature sample transfering small vehicle change support room, portable mailing vacuum chamber obtaining from atmosphere to vacuum state, comprising:

Mobile device；

Mechanical pump, molecular pump, ionization silicon, are located on mobile device, and

Bindiny mechanism is set to the side that mobile vacuum pump truck system is connected with equipment to be vacuumized.

9. the detachable vacuum interacted system according to any one of claim 2,3,4,7 or 8, wherein the movement Formula high vacuum growth apparatus, mobile non-high vacuum growth apparatus, mobile vacuum measuring device, the transmitting of vacuum constant temperature sample are small Mobile device in vehicle and mobile vacuum pump truck system is equipped with lifting device, and the motor pattern of the mobile device is main Including mechanical and automation formula both of which, the mechanical mobile device using carry out manually the operation of lifting device with Movement；The mobile device of automation formula is a liter that the automatic control trolley and automation that track mobile are carried out according to projected route Falling unit.

10. detachable vacuum interacted system according to any one of claim 1 to 6, wherein

The movable type high vacuum growth apparatus includes one or more of following equipment: mobile MBE molecular beam epitaxy is set Standby, mobile magnetron sputtering apparatus and mobile pulse laser deposition equipment；And/or

The non-high vacuum growth apparatus of movable type includes one or more of following equipment or system: mobile chemical gaseous phase Depositing device, separate type glove box, mobile sample transport system and separate type sample dissociate system；And/or

The mobile vacuum measuring device includes one or more of following system: room temperature scanning-tunnelling or atomic force microscopy System；Portable spectral measurement system；Sample transfer platform in fixed measuring system；And/or

The fixed device of main interconnection includes: one or more fixed vacuum growth or test device, butterfly sample transfer With distributor and linear transfer and distributor.