CN108044479A - Polishing machine platform waste water collection tank - Google Patents
Polishing machine platform waste water collection tank Download PDFInfo
- Publication number
- CN108044479A CN108044479A CN201711153761.0A CN201711153761A CN108044479A CN 108044479 A CN108044479 A CN 108044479A CN 201711153761 A CN201711153761 A CN 201711153761A CN 108044479 A CN108044479 A CN 108044479A
- Authority
- CN
- China
- Prior art keywords
- water level
- water
- babinet
- optical sensor
- pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
- B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
The invention discloses a kind of polishing machine platform waste water collection tanks, and using two babinets, two babinet tops are connected by spilling water communicating pipe；When the water level being communicated in the transparent water level pipe of the first babinet is higher than high water level optical sensor, if the excessively dirty high water level optical sensor of the inner wall of transparent water level pipe can not detect water level, first case in vivo waste water level can continue to rise, second babinet is entered by spilling water communicating pipe, when water level is higher than floating ball sensor in the second babinet, the second suction pump can start to work second case in vivo waste water discharge.Mechanical floating ball sensor will not because water it is dirty due to due to can not detect water level, second case in vivo waste water can discharge in time, ensure that first case in vivo waste water energy is discharged in time by overfall, water wasting is avoided to be overflowed from the observation window on the first top cover of box, effectively improves the security of wastewater trough work.
Description
Technical field
The present invention relates to semiconductor manufacturing facility, more particularly to a kind of polishing (POLISH) board waste water collection tank.
Background technology
Common polishing (POLISH) board waste water collection tank is as shown in Figure 1, including babinet 1, suction pump 21, transparent water level
Pipe 3, optical sensor；
First babinet, 1 side wall is disposed with water inlet 11, upper port 31, lower port 32, discharge outlet from top to bottom
12；
3 both ends of transparent water level pipe are communicated to the upper port 31 of babinet 1, lower port 32；
Peak level optical sensor 41, high water level optical sensor are disposed with from top to bottom along the transparent water level pipe 3
42nd, 43 3 optical sensors of low water level optical sensor；
When water level is higher than high water level optical sensor 42 in transparent water level pipe 3, suction pump 21 is started to work；
When water level is less than low water level optical sensor 42 in transparent water level pipe 3, suction pump 21 is stopped；
When high water level optical sensor 42 fails, if water level is higher than peak level optical sensor 41 in fruit transparent water level pipe 3
When, suction pump 21 is started to work.
Because being sewage and waste water slot, the inner wall of transparent water level pipe 3 be easy to it is dirty, and because being optical sensor, when water level arrives
When at up to high water level optical sensor 42, if the excessively dirty high water level optical sensor 42 of the inner wall of transparent water level pipe 3 possibly can not be detected
To water level, suction pump 21 will not start work.Because babinet 1 can be shaken when suction pump 21 works, and optical sensor is close to
In transparent water level pipe 3, prolonged shake can cause have gap between optical sensor and transparent water level pipe 3, so that
High water level optical sensor 42 and water level can not be detected, suction pump 21 will not start work.Moreover, if there is suction pump 21 occurs
During failure, suction pump 21 will not start work.Suction pump 21 can normally start work, can cause water from 1 upper cover of babinet
Window 13 overflows.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of polishing machine platform waste water collection tanks, are avoided that water wasting from babinet top
Lid overflows, and effectively improves the security of wastewater trough work.
In order to solve the above technical problems, polishing machine platform waste water collection tank provided by the invention, including the first babinet 1,
Two babinets 6, the first suction pump 21, the second suction pump 22, transparent water level pipe 3, high water level optical sensor 42, low water level optical sensor
43rd, floating ball sensor 5, spilling water communicating pipe 16, controller；
First babinet, 1 side wall is disposed with overfall 15, water inlet 11, upper port 31, lower port from top to bottom
32nd, main discharge outlet 12；
The head cover of first babinet 1 is provided with observation window 13；
3 both ends of transparent water level pipe are respectively communicated with to the upper port 31 of the first babinet 1 and lower port 32；
The high water level optical sensor 42, low water level optical sensor 43 are successively set on the transparent water level pipe from top to bottom
On 3；
First suction pump 21 is communicated to main discharge outlet 12；
Second babinet, 1 side wall is disposed with from top to bottom overflows into mouth 61, auxiliary discharge 62；
The overfall 15 and second babinet 6 for connecting first babinet 1 the spilling water communicating pipe 16 overflow into mouth 61；
The mouth 61 that overflows into is not higher than the overfall 15；
Second suction pump 22 is communicated to auxiliary discharge 62；
The floating ball sensor 5 is arranged in second babinet 6 and overflows into mouth together positioned at the auxiliary discharge 62
Between 61；
When the water level in the second babinet 6 is higher than the floating ball sensor 5, the floating ball sensor 5 exports assisted drainage
Signal；
The high water level optical sensor 42 if detecting in transparent water level pipe 3 there is water, exports high water level signal；
The low water level optical sensor 43 if detecting anhydrous in transparent water level pipe 3, exports low water level signal；
The controller when the high water level optical sensor 42 output high water level signal, then controls 21 work of the first suction pump
Work draws water from the first babinet 1；When the low water level optical sensor 43 output low water level signal, then the first suction pump 21 is controlled to stop
Work；When the floating ball sensor 5 output assisted drainage signal, then the second suction pump 22 is controlled to work and is drawn water from the second babinet 6.
Preferably, the polishing machine platform waste water collection tank further includes peak level optical sensor 41；
The peak level optical sensor 41 is arranged in the transparent water level pipe 3 and positioned at the high water level optical sensor
42 tops；
The peak level optical sensor 41 if detecting in transparent water level pipe 3 there is water, exports peak level letter
Number；
The controller when the peak level optical sensor 41 output peak level signal, then controls the first suction pump
21 work are drawn water from the first babinet 1.
Preferably, the controller, when the floating ball sensor 5 does not export assisted drainage signal, then control second is drawn water
Pump 22 is stopped.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, be all higher than being equal to it is described into
The internal diameter at the mouth of a river 11.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, are the water inlet 11
1 to 1.5 times of internal diameter.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, are the water inlet 11
1,1.1 or 1.2 times of internal diameter.
Preferably, the material of the transparent water level pipe 3 is Teflon.
Preferably, it is equipped with auxiliary observation window 63 on 6 head cover of the second babinet.
Preferably, it is provided with valve on the spilling water communicating pipe 16.
Polishing (POLISH) board waste water collection tank of the present invention, using 6 two the first babinet 1, the second babinet babinets, two
A babinet top is connected by spilling water communicating pipe 16；When the water level being communicated in the transparent water level pipe 3 of the first babinet 1 is higher than Gao Shui
During the optical sensor 42 of position, if the excessively dirty high water level optical sensor 42 of the inner wall of transparent water level pipe 3 can not detect water level, Huo Zhegao
21 failure of 42 failure of water level optical sensor or the first suction pump, main discharge outlet 12 will not be passed through by flowing into the waste water of the first babinet 1
Discharge, afterwards the waste water level in the first babinet 1 can continue to rise, by entering the second babinet 6 spilling water communicating pipe 16, when the
When water level is higher than the floating ball sensor 5 in two babinets 6, the second suction pump 22 can start to work the waste water in the second babinet 6
Discharge.Mechanical floating ball sensor 5 will not because water it is dirty due to due to can not detect water level, it is useless in the second babinet 6
Water can discharge in time, ensure that the waste water energy in the first babinet 1 is discharged in time by overfall 15, avoid water wasting from the first babinet 1
Observation window 13 on head cover overflows, and effectively improves the security of wastewater trough work.
Description of the drawings
In order to illustrate more clearly of technical scheme, the required attached drawing of the present invention is made below simple
It introduces, it should be apparent that, the accompanying drawings in the following description is only some embodiments of the present invention, for ordinary skill people
For member, without creative efforts, other attached drawings are can also be obtained according to these attached drawings.
Polishing machine platform wastewater collection slot structure schematic diagram common Fig. 1；
Fig. 2 is one example structure schematic diagram of polishing machine platform waste water collection tank of the present invention.
Specific embodiment
Below in conjunction with attached drawing, clear, complete description is carried out to the technical solution in the present invention, it is clear that described
Embodiment is the part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is general
All other embodiment that logical technical staff is obtained on the premise of creative work is not made, belongs to protection of the present invention
Scope.
Embodiment one
As shown in Fig. 2, polishing (POLISH) board waste water collection tank is drawn water including the first babinet 1, the second babinet 6, first
Pump the 21, second suction pump 22, transparent water level pipe 3, high water level optical sensor 42, low water level optical sensor 43, floating ball sensor 5,
Spilling water communicating pipe 16, controller；
First babinet, 1 side wall is disposed with overfall 15, water inlet 11, upper port 31, lower port from top to bottom
32nd, main discharge outlet 12；
The head cover of first babinet 1 is provided with observation window 13；
3 both ends of transparent water level pipe are respectively communicated with to the upper port 31 of the first babinet 1 and lower port 32；
The high water level optical sensor 42, low water level optical sensor 43 are successively set on the transparent water level pipe from top to bottom
On 3；
First suction pump 21 is communicated to main discharge outlet 12；
Second babinet, 1 side wall is disposed with from top to bottom overflows into mouth 61, auxiliary discharge 62；
The overfall 15 and second babinet 6 for connecting first babinet 1 the spilling water communicating pipe 16 overflow into mouth 61；
The mouth 61 that overflows into is not higher than the overfall 15；
Second suction pump 22 is communicated to auxiliary discharge 62；
The floating ball sensor 5 is arranged in second babinet 6 and overflows into mouth together positioned at the auxiliary discharge 62
Between 61；
When the water level in the second babinet 6 is higher than the floating ball sensor 5, the floating ball sensor 5 exports assisted drainage
Signal；
The high water level optical sensor 42 if detecting in transparent water level pipe 3 there is water, exports high water level signal；
The low water level optical sensor 43 if detecting anhydrous in transparent water level pipe 3, exports low water level signal；
The controller when the high water level optical sensor 42 output high water level signal, then controls 21 work of the first suction pump
Work draws water from the first babinet 1；When the low water level optical sensor 43 output low water level signal, then the first suction pump 21 is controlled to stop
Work；When the floating ball sensor 5 output assisted drainage signal, then the second suction pump 22 is controlled to work and is drawn water from the second babinet 6.
Polishing (POLISH) board waste water collection tank of embodiment one, using 6 two the first babinet 1, the second babinet babinets,
Two babinet tops are connected by spilling water communicating pipe 16；When the water level being communicated in the transparent water level pipe 3 of the first babinet 1 is higher than height
During water level optical sensor 42, if the excessively dirty high water level optical sensor 42 of the inner wall of transparent water level pipe 3 can not detect water level or
21 failure of 42 failure of high water level optical sensor or the first suction pump, main discharge outlet will not be passed through by flowing into the waste water of the first babinet 1
12 discharge, and the waste water level in the first babinet 1 can continue to rise afterwards, by entering the second babinet 6 spilling water communicating pipe 16, when
When water level is higher than the floating ball sensor 5 in second babinet 6, the second suction pump 22 can start to work will be useless in the second babinet 6
Water is discharged.Mechanical floating ball sensor 5 will not because water it is dirty due to due to can not detect water level, in the second babinet 6
Waste water can discharge in time, ensure that the waste water energy in the first babinet 1 is discharged in time by overfall 15, avoid water wasting from the first babinet
Observation window 13 on 1 head cover overflows, and effectively improves the security of wastewater trough work.
Embodiment two
Based on embodiment one, the polishing machine platform waste water collection tank further includes peak level optical sensor 41；
The peak level optical sensor 41 is arranged in the transparent water level pipe 3 and positioned at the high water level optical sensor
42 tops；
The peak level optical sensor 41 if detecting in transparent water level pipe 3 there is water, exports peak level letter
Number；
The controller when the peak level optical sensor 41 output peak level signal, then controls the first suction pump
21 work are drawn water from the first babinet 1.
Preferably, the controller, when the floating ball sensor 5 does not export assisted drainage signal, then control second is drawn water
Pump 22 is stopped.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, be all higher than being equal to it is described into
The internal diameter at the mouth of a river 11.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, are the water inlet 11
1 to 1.5 times of internal diameter.Such as the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, it is the water inlet
1,1.1 or 1.2 times of 11 internal diameter.
Preferably, the material of the transparent water level pipe 3 is Teflon.
Preferably, it is equipped with auxiliary observation window 63 on 1 head cover of the second babinet.
Preferably, it is provided with valve on the spilling water communicating pipe 16.By the opening and closing of valve, make even babinet connection or every
From.
It these are only the preferred embodiment of the application, be not used to limit the application.Come for those skilled in the art
It says, the application can have various modifications and variations.All any modifications within spirit herein and principle, made are equal
Replace, improve etc., it should be included within the protection domain of the application.
Claims (9)
1. a kind of polishing machine platform waste water collection tank, which is characterized in that draw water including the first babinet (1), the second babinet (6), first
It pumps (21), the second suction pump (22), transparent water level pipe (3), high water level optical sensor (42), low water level optical sensor (43), floating
Ball sensor (5), spilling water communicating pipe (16), controller；
First babinet (1) side wall be disposed with from top to bottom overfall (15), water inlet (11), upper port (31), under
Port (32), main discharge outlet (12)；
The head cover of first babinet (1) is provided with observation window (13)；
Transparent water level pipe (3) both ends are respectively communicated with to the upper port (31) of the first babinet (1) and lower port (32)；
The high water level optical sensor (42), low water level optical sensor (43) are successively set on the transparent water level pipe from top to bottom
(3) on；
First suction pump (21) is communicated to main discharge outlet (12)；
Second babinet (1) side wall is disposed with from top to bottom overflows into mouth (61), auxiliary discharge (62)；
The spilling water communicating pipe (16) connects the overfall (15) of first babinet (1) and overflowing into for the second babinet (6)
Mouth (61)；The mouth (61) that overflows into is not higher than the overfall (15)；
Second suction pump (22) is communicated to auxiliary discharge (62)；
The floating ball sensor (5) is arranged in second babinet (6) and is overflowed into together positioned at the auxiliary discharge (62)
Between mouth (61)；
When the water level in the second babinet (6) is higher than the floating ball sensor (5), floating ball sensor (5) the output auxiliary row
Water signal；
The high water level optical sensor (42) if detecting in transparent water level pipe (3) there is water, exports high water level signal；
The low water level optical sensor (43) if detecting anhydrous in transparent water level pipe (3), exports low water level signal；
The controller when the high water level optical sensor (42) output high water level signal, then controls the first suction pump (21) work
Work draws water from the first babinet (1)；When the low water level optical sensor (43) output low water level signal, then the first suction pump is controlled
(21) it is stopped；When the floating ball sensor (5) exports assisted drainage signal, then the second suction pump (22) work is controlled from the
Two babinets (6) draw water.
2. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The polishing machine platform waste water collection tank further includes peak level optical sensor (41)；
The peak level optical sensor (41) is arranged in the transparent water level pipe (3) and positioned at the high water level optical sensor
(42) top；
The peak level optical sensor (41) if detecting in transparent water level pipe (3) there is water, exports peak level letter
Number；
The controller when the peak level optical sensor (41) output peak level signal, then controls the first suction pump
(21) work is drawn water from the first babinet (1).
3. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The controller when the floating ball sensor (5) does not export assisted drainage signal, then controls the second suction pump (22) to stop
Work.
4. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The spilling water communicating pipe (16) and the overfall (15), the internal diameter for overflowing into mouth (61) are all higher than being equal to the water inlet
(11) internal diameter.
5. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The spilling water communicating pipe (16) and the overfall (15), the internal diameter for overflowing into mouth (61) are the interior of the water inlet (11)
1 to 1.5 times of footpath.
6. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The spilling water communicating pipe (16) and the overfall (15), the internal diameter for overflowing into mouth (61) are the interior of the water inlet (11)
1,1.1 or 1.2 times of footpath.
7. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The material of the transparent water level pipe (3) is Teflon.
8. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
Auxiliary observation window (63) is equipped on second babinet (6) head cover.
9. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
Valve is provided on the spilling water communicating pipe (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711153761.0A CN108044479B (en) | 2017-11-20 | 2017-11-20 | Polishing machine platform waste water collection tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711153761.0A CN108044479B (en) | 2017-11-20 | 2017-11-20 | Polishing machine platform waste water collection tank |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108044479A true CN108044479A (en) | 2018-05-18 |
| CN108044479B CN108044479B (en) | 2019-11-19 |
Family
ID=62120367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711153761.0A Active CN108044479B (en) | 2017-11-20 | 2017-11-20 | Polishing machine platform waste water collection tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108044479B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113230745A (en) * | 2021-06-07 | 2021-08-10 | 程蓓 | A get into end debris and filter collecting device for leading pump of power plant |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1043121A1 (en) * | 1999-04-05 | 2000-10-11 | Kabushiki Kaisha Topcon | Deodorization system for lens-grinding machine |
| CN202466780U (en) * | 2012-01-30 | 2012-10-03 | 无锡日窒热交换机器有限公司 | Sewage discharge automatic water level control box |
| US20120261339A1 (en) * | 2009-10-08 | 2012-10-18 | Highq-Factory Gmbh | Recycling method and device for recycling waste water containing slurry from a semi-conductor treatment process, in particular from a chemico-mechanical polishing process |
| CN204346213U (en) * | 2014-12-25 | 2015-05-20 | 七台河宝泰隆煤化工股份有限公司 | A kind of water tank cooler |
| CN206418566U (en) * | 2017-01-03 | 2017-08-18 | 无锡市天宇民防建筑设计研究院有限公司 | A kind of discharge structure of automatic utilization sewage conduct assisted drainage |
-
2017
- 2017-11-20 CN CN201711153761.0A patent/CN108044479B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1043121A1 (en) * | 1999-04-05 | 2000-10-11 | Kabushiki Kaisha Topcon | Deodorization system for lens-grinding machine |
| US20120261339A1 (en) * | 2009-10-08 | 2012-10-18 | Highq-Factory Gmbh | Recycling method and device for recycling waste water containing slurry from a semi-conductor treatment process, in particular from a chemico-mechanical polishing process |
| CN202466780U (en) * | 2012-01-30 | 2012-10-03 | 无锡日窒热交换机器有限公司 | Sewage discharge automatic water level control box |
| CN204346213U (en) * | 2014-12-25 | 2015-05-20 | 七台河宝泰隆煤化工股份有限公司 | A kind of water tank cooler |
| CN206418566U (en) * | 2017-01-03 | 2017-08-18 | 无锡市天宇民防建筑设计研究院有限公司 | A kind of discharge structure of automatic utilization sewage conduct assisted drainage |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113230745A (en) * | 2021-06-07 | 2021-08-10 | 程蓓 | A get into end debris and filter collecting device for leading pump of power plant |
Also Published As
| Publication number | Publication date |
|---|---|
| CN108044479B (en) | 2019-11-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206228987U (en) | A kind of device being automatically separated for water and organic solvent | |
| CN108044479A (en) | Polishing machine platform waste water collection tank | |
| CN205200105U (en) | Glass cleaner | |
| CN103061403B (en) | Rainwater separating, regulating and storing system | |
| CN203640009U (en) | Household water saving system | |
| CN204325016U (en) | Rainwater treatment well | |
| CN205007346U (en) | Blood purification equipment dislysate degassing system | |
| CN104652529B (en) | Well-water supplies system | |
| CN206696716U (en) | Concentrator bowl draining box fluid automatic recovery system | |
| CN206814444U (en) | A kind of unpowered milipore filter water cleaning systems in rural area | |
| CN106115816A (en) | A kind of Treatment of Industrial Water device | |
| CN208672383U (en) | A kind of automatic rainfall runoff sampling apparatus of overall process | |
| CN220091675U (en) | Automatic water replenishing device of clear water circulating pool | |
| CN205975902U (en) | Sewage discharging equipment | |
| CN206033286U (en) | Industrial water treatment device | |
| CN207633435U (en) | A kind of secondary water supply tank | |
| CN106178961B (en) | Device for ultrafiltration membrane cleaning device | |
| CN220419857U (en) | Liquid level control device | |
| CN209178053U (en) | Water circuit system and purifier | |
| CN218709129U (en) | Coconut juice filling processing system | |
| CN108871865A (en) | A kind of automatic rainfall runoff sampling apparatus of overall process | |
| CN217029320U (en) | Continuous liquid pumping system for chemical accident pool | |
| CN209153564U (en) | A kind of cleaning machine | |
| CN208689447U (en) | A kind of swimming pool automatic water supplementing device for water tank | |
| CN219733647U (en) | Nickel electrolysis pit pump vacuum drainage tank |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |