CN108044479B - Polishing machine platform waste water collection tank - Google Patents
Polishing machine platform waste water collection tank Download PDFInfo
- Publication number
- CN108044479B CN108044479B CN201711153761.0A CN201711153761A CN108044479B CN 108044479 B CN108044479 B CN 108044479B CN 201711153761 A CN201711153761 A CN 201711153761A CN 108044479 B CN108044479 B CN 108044479B
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- China
- Prior art keywords
- water level
- water
- cabinet
- optical sensor
- pipe
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
- B24B55/03—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant designed as a complete equipment for feeding or clarifying coolant
Abstract
The invention discloses a kind of polishing machine platform waste water collection tanks, and using two cabinets, two cabinet tops are connected to by spilling water communicating pipe；When the water level in the transparent water level pipe for being communicated to the first cabinet is higher than high water level optical sensor, if the excessively dirty high water level optical sensor of the inner wall of transparent water level pipe can not detect water level, first case intracorporal waste water level can continue to rise, the second cabinet is entered by spilling water communicating pipe, when water level is higher than floating ball sensor in the second cabinet, the second suction pump can start to work second case intracorporal waste water discharge.Water level can not be detected due to mechanical floating ball sensor will not be due to water be dirty etc., second case intracorporal waste water can be discharged in time, guarantee that first case intracorporal waste water energy is discharged in time by overfall, it avoids water wasting from overflowing from the observation window on the first top cover of box, effectively improves the safety of wastewater trough work.
Description
Technical field
The present invention relates to semiconductor manufacturing facility, in particular to a kind of polishing (POLISH) board waste water collection tank.
Background technique
Common polishing (POLISH) board waste water collection tank is as shown in Figure 1, include cabinet 1, suction pump 21, transparent water level
Pipe 3, optical sensor；
First cabinet, 1 side wall is disposed with water inlet 11, upper port 31, lower port 32, discharge outlet from top to bottom
12；
3 both ends of transparent water level pipe are communicated to the upper port 31 of cabinet 1, lower port 32；
It is disposed with peak level optical sensor 41, high water level optical sensor from top to bottom along the transparent water level pipe 3
42,43 3 optical sensors of low water level optical sensor；
When water level is higher than high water level optical sensor 42 in transparent water level pipe 3, suction pump 21 is started to work；
When water level is lower than low water level optical sensor 42 in transparent water level pipe 3, suction pump 21 stops working；
When high water level optical sensor 42 fails, if water level is higher than peak level optical sensor 41 in transparent water level pipe 3
When, suction pump 21 is started to work.
Because being sewage and waste water slot, the inner wall of transparent water level pipe 3 be easy to it is dirty, and because be optical sensor, when water level arrives
When at up to high water level optical sensor 42, if the excessively dirty high water level optical sensor 42 of the inner wall of transparent water level pipe 3 possibly can not be detected
To water level, suction pump 21 not will start work.Because cabinet 1 will shake when suction pump 21 works, and optical sensor is to be close to
It is mounted in transparent water level pipe 3, prolonged shake, which will lead between optical sensor and transparent water level pipe 3, gap, to make
High water level optical sensor 42 and water level can not be detected, suction pump 21 not will start work.Moreover, if there is suction pump 21 occurs
When failure, suction pump 21 will not start work.Suction pump 21 can normally start work, will lead to water from 1 upper cover of cabinet
Window 13 overflows.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of polishing machine platform waste water collection tanks, are avoided that waste water from cabinet top
Lid overflows, and effectively improves the safety of wastewater trough work.
In order to solve the above technical problems, polishing machine platform waste water collection tank provided by the invention comprising the first cabinet 1,
Two cabinets 6, the first suction pump 21, the second suction pump 22, transparent water level pipe 3, high water level optical sensor 42, low water level optical sensor
43, floating ball sensor 5, spilling water communicating pipe 16, controller；
First cabinet, 1 side wall is disposed with overfall 15, water inlet 11, upper port 31, lower port from top to bottom
32, main discharge outlet 12；
The top cover of first cabinet 1 is provided with observation window 13；
3 both ends of transparent water level pipe are respectively communicated with upper port 31 and lower port 32 to the first cabinet 1；
The high water level optical sensor 42, low water level optical sensor 43 are successively set on the transparent water level pipe from top to bottom
On 3；
First suction pump 21 is communicated to main discharge outlet 12；
Second cabinet, 6 side wall is disposed with from top to bottom overflows into mouth 61, auxiliary discharge 62；
The overfall 15 and second cabinet 6 for being connected to first cabinet 1 the spilling water communicating pipe 16 overflow into mouth 61；
The mouth 61 that overflows into is not higher than the overfall 15；
Second suction pump 22 is communicated to auxiliary discharge 62；
The floating ball sensor 5, which is arranged in second cabinet 6 and is located at the auxiliary discharge 62, overflows into together mouth
Between 61；
When the water level in the second cabinet 6 is higher than the floating ball sensor 5, the floating ball sensor 5 exports assisted drainage
Signal；
The high water level optical sensor 42 exports high water level signal if detecting in transparent water level pipe 3 there is water；
The low water level optical sensor 43 exports low water level signal if detecting anhydrous in transparent water level pipe 3；
The controller then controls 21 work of the first suction pump when the high water level optical sensor 42 output high water level signal
Work draws water from the first cabinet 1；When the low water level optical sensor 43 output low water level signal, then the stopping of the first suction pump 21 is controlled
Work；When the floating ball sensor 5 output assisted drainage signal, then controls the work of the second suction pump 22 and draw water from the second cabinet 6.
Preferably, the polishing machine platform waste water collection tank further includes peak level optical sensor 41；
The peak level optical sensor 41 is arranged in the transparent water level pipe 3 and is located at the high water level optical sensor
42 tops；
The peak level optical sensor 41 exports peak level letter if detecting in transparent water level pipe 3 there is water
Number；
The controller then controls the first suction pump when the peak level optical sensor 41 output peak level signal
21 work are drawn water from the first cabinet 1.
Preferably, the controller, when the floating ball sensor 5 does not export assisted drainage signal, then control second is drawn water
Pump 22 stops working.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, be all larger than be equal to it is described into
The internal diameter at the mouth of a river 11.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, are the water inlet 11
1 to 1.5 times of internal diameter.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, are the water inlet 11
1,1.1 or 1.2 times of internal diameter.
Preferably, the material of the transparent water level pipe 3 is Teflon.
Preferably, 6 top cover of the second cabinet is equipped with auxiliary observation window 63.
Preferably, being provided with valve on the spilling water communicating pipe 16.
Polishing (POLISH) board waste water collection tank of the invention, using 6 two the first cabinet 1, the second cabinet cabinets, two
A cabinet top is connected to by spilling water communicating pipe 16；When the water level in the transparent water level pipe 3 for being communicated to the first cabinet 1 is higher than Gao Shui
When the optical sensor 42 of position, if the excessively dirty high water level optical sensor 42 of the inner wall of transparent water level pipe 3 can not detect water level, Huo Zhegao
21 failure of 42 failure of water level optical sensor or the first suction pump, the waste water for flowing into the first cabinet 1 will not pass through main discharge outlet 12
Discharge, the waste water level in the first cabinet 1 can continue to rise later, by entering the second cabinet 6 spilling water communicating pipe 16, when the
When water level is higher than the floating ball sensor 5 in two cabinets 6, the second suction pump 22 can start to work the waste water in the second cabinet 6
Discharge.Water level can not be detected since mechanical floating ball sensor 5 will not be due to water be dirty etc., it is useless in the second cabinet 6
Water can be discharged in time, guarantee that the waste water energy in the first cabinet 1 is discharged in time by overfall 15, avoid waste water from the first cabinet 1
Observation window 13 on top cover overflows, and effectively improves the safety of wastewater trough work.
Detailed description of the invention
In order to illustrate more clearly of technical solution of the present invention, the required attached drawing of the present invention is made below simple
It introduces, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ordinary skill people
For member, without creative efforts, it is also possible to obtain other drawings based on these drawings.
Fig. 1 common polishing machine platform wastewater collection slot structure schematic diagram；
Fig. 2 is one example structure schematic diagram of polishing machine platform waste water collection tank of the invention.
Specific embodiment
Below in conjunction with attached drawing, clear, complete description is carried out to the technical solution in the present invention, it is clear that described
Embodiment is a part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is general
Logical technical staff all other embodiment obtained without making creative work, belongs to protection of the present invention
Range.
Embodiment one
As shown in Fig. 2, polishing (POLISH) board waste water collection tank is drawn water including the first cabinet 1, the second cabinet 6, first
Pump the 21, second suction pump 22, transparent water level pipe 3, high water level optical sensor 42, low water level optical sensor 43, floating ball sensor 5,
Spilling water communicating pipe 16, controller；
First cabinet, 1 side wall is disposed with overfall 15, water inlet 11, upper port 31, lower port from top to bottom
32, main discharge outlet 12；
The top cover of first cabinet 1 is provided with observation window 13；
3 both ends of transparent water level pipe are respectively communicated with upper port 31 and lower port 32 to the first cabinet 1；
The high water level optical sensor 42, low water level optical sensor 43 are successively set on the transparent water level pipe from top to bottom
On 3；
First suction pump 21 is communicated to main discharge outlet 12；
Second cabinet, 6 side wall is disposed with from top to bottom overflows into mouth 61, auxiliary discharge 62；
The overfall 15 and second cabinet 6 for being connected to first cabinet 1 the spilling water communicating pipe 16 overflow into mouth 61；
The mouth 61 that overflows into is not higher than the overfall 15；
Second suction pump 22 is communicated to auxiliary discharge 62；
The floating ball sensor 5, which is arranged in second cabinet 6 and is located at the auxiliary discharge 62, overflows into together mouth
Between 61；
When the water level in the second cabinet 6 is higher than the floating ball sensor 5, the floating ball sensor 5 exports assisted drainage
Signal；
The high water level optical sensor 42 exports high water level signal if detecting in transparent water level pipe 3 there is water；
The low water level optical sensor 43 exports low water level signal if detecting anhydrous in transparent water level pipe 3；
The controller then controls 21 work of the first suction pump when the high water level optical sensor 42 output high water level signal
Work draws water from the first cabinet 1；When the low water level optical sensor 43 output low water level signal, then the stopping of the first suction pump 21 is controlled
Work；When the floating ball sensor 5 output assisted drainage signal, then controls the work of the second suction pump 22 and draw water from the second cabinet 6.
Polishing (POLISH) board waste water collection tank of embodiment one, using 6 two the first cabinet 1, the second cabinet cabinets,
Two cabinet tops are connected to by spilling water communicating pipe 16；When the water level in the transparent water level pipe 3 for being communicated to the first cabinet 1 is higher than height
When water level optical sensor 42, if the excessively dirty high water level optical sensor 42 of the inner wall of transparent water level pipe 3 can not detect water level, or
21 failure of 42 failure of high water level optical sensor or the first suction pump, the waste water for flowing into the first cabinet 1 will not pass through main discharge outlet
12 discharges, the waste water level in the first cabinet 1 can continue to rise later, by entering the second cabinet 6 spilling water communicating pipe 16, when
When water level is higher than the floating ball sensor 5 in second cabinet 6, the second suction pump 22 can start to work will be useless in the second cabinet 6
Water discharge.Water level can not be detected due to mechanical floating ball sensor 5 will not be due to water be dirty etc., in the second cabinet 6
Waste water can be discharged in time, guarantee that the waste water energy in the first cabinet 1 is discharged in time by overfall 15, avoid waste water from the first cabinet
Observation window 13 on 1 top cover overflows, and effectively improves the safety of wastewater trough work.
Embodiment two
Based on embodiment one, the polishing machine platform waste water collection tank further includes peak level optical sensor 41；
The peak level optical sensor 41 is arranged in the transparent water level pipe 3 and is located at the high water level optical sensor
42 tops；
The peak level optical sensor 41 exports peak level letter if detecting in transparent water level pipe 3 there is water
Number；
The controller then controls the first suction pump when the peak level optical sensor 41 output peak level signal
21 work are drawn water from the first cabinet 1.
Preferably, the controller, when the floating ball sensor 5 does not export assisted drainage signal, then control second is drawn water
Pump 22 stops working.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, be all larger than be equal to it is described into
The internal diameter at the mouth of a river 11.
Preferably, the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, are the water inlet 11
1 to 1.5 times of internal diameter.Such as the spilling water communicating pipe 16 and the overfall 15, the internal diameter for overflowing into mouth 61, it is the water inlet
1,1.1 or 1.2 times of 11 internal diameter.
Preferably, the material of the transparent water level pipe 3 is Teflon.
Preferably, 1 top cover of the second cabinet is equipped with auxiliary observation window 63.
Preferably, being provided with valve on the spilling water communicating pipe 16.By the opening and closing of valve, make even cabinet connection or every
From.
The above is only preferred embodiment of the present application, it is not used to limit the application.Come for those skilled in the art
It says, various changes and changes are possible in this application.Within the spirit and principles of this application, made any modification, equivalent
Replacement, improvement etc., should be included within the scope of protection of this application.
Claims (9)
1. a kind of polishing machine platform waste water collection tank, which is characterized in that draw water including the first cabinet (1), the second cabinet (6), first
It pumps (21), the second suction pump (22), transparent water level pipe (3), high water level optical sensor (42), low water level optical sensor (43), float
Ball sensor (5), spilling water communicating pipe (16), controller；
First cabinet (1) side wall be disposed with from top to bottom overfall (15), water inlet (11), upper port (31), under
Port (32), main discharge outlet (12)；
The top cover of first cabinet (1) is provided with observation window (13)；
Transparent water level pipe (3) both ends are respectively communicated with upper port (31) and lower port (32) to the first cabinet (1)；
The high water level optical sensor (42), low water level optical sensor (43) are successively set on the transparent water level pipe from top to bottom
(3) on；
First suction pump (21) is communicated to main discharge outlet (12)；
Second cabinet (6) side wall is disposed with from top to bottom overflows into mouth (61), auxiliary discharge (62)；
The spilling water communicating pipe (16) is connected to the overfall (15) of first cabinet (1) and overflowing into for the second cabinet (6)
Mouth (61)；Described overflow into mouth (61) are not higher than the overfall (15)；
Second suction pump (22) is communicated to auxiliary discharge (62)；
Floating ball sensor (5) setting overflows into together in second cabinet (6) and positioned at the auxiliary discharge (62)
Between mouth (61)；
When the water level in the second cabinet (6) is higher than the floating ball sensor (5), floating ball sensor (5) the output auxiliary row
Water signal；
The high water level optical sensor (42) exports high water level signal if detecting in transparent water level pipe (3) there is water；
The low water level optical sensor (43) exports low water level signal if detecting anhydrous in transparent water level pipe (3)；
The controller then controls the first suction pump (21) work when the high water level optical sensor (42) output high water level signal
Work draws water from the first cabinet (1)；When the low water level optical sensor (43) output low water level signal, then the first suction pump is controlled
(21) it stops working；When the floating ball sensor (5) export assisted drainage signal, then the second suction pump (22) work is controlled from the
Two cabinets (6) draw water.
2. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The polishing machine platform waste water collection tank further includes peak level optical sensor (41)；
The peak level optical sensor (41) is arranged on the transparent water level pipe (3) and is located at the high water level optical sensor
(42) top；
The peak level optical sensor (41) exports peak level letter if detecting in transparent water level pipe (3) there is water
Number；
The controller then controls the first suction pump when the peak level optical sensor (41) output peak level signal
(21) work is drawn water from the first cabinet (1).
3. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The controller then controls the second suction pump (22) stopping when the floating ball sensor (5) does not export assisted drainage signal
Work.
4. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The spilling water communicating pipe (16) and the overfall (15), the internal diameter for overflowing into mouth (61), are all larger than equal to the water inlet
(11) internal diameter.
5. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The spilling water communicating pipe (16) and the overfall (15), the internal diameter for overflowing into mouth (61) are the interior of the water inlet (11)
1 to 1.5 times of diameter.
6. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The spilling water communicating pipe (16) and the overfall (15), the internal diameter for overflowing into mouth (61) are the interior of the water inlet (11)
1,1.1 or 1.2 times of diameter.
7. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
The material of the transparent water level pipe (3) is Teflon.
8. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
Second cabinet (6) top cover is equipped with auxiliary observation window (63).
9. polishing machine platform waste water collection tank according to claim 1, which is characterized in that
Valve is provided on the spilling water communicating pipe (16).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711153761.0A CN108044479B (en) | 2017-11-20 | 2017-11-20 | Polishing machine platform waste water collection tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711153761.0A CN108044479B (en) | 2017-11-20 | 2017-11-20 | Polishing machine platform waste water collection tank |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN108044479A CN108044479A (en) | 2018-05-18 |
| CN108044479B true CN108044479B (en) | 2019-11-19 |
Family
ID=62120367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711153761.0A Active CN108044479B (en) | 2017-11-20 | 2017-11-20 | Polishing machine platform waste water collection tank |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108044479B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113230745B (en) * | 2021-06-07 | 2023-04-25 | 仙桃绿色东方环保发电有限公司 | Inlet end sundry filtering and collecting equipment for front-mounted pump of power plant |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4364342B2 (en) * | 1999-04-05 | 2009-11-18 | 株式会社トプコン | Lens grinder deodorization system |
| DE102009044204A1 (en) * | 2009-10-08 | 2011-04-28 | Fab Service Gmbh | Reprocessing process and recycling apparatus for recycling slurry wastewater from a semiconductor processing process, in particular from a chemical mechanical polishing process |
| CN202466780U (en) * | 2012-01-30 | 2012-10-03 | 无锡日窒热交换机器有限公司 | Sewage discharge automatic water level control box |
| CN204346213U (en) * | 2014-12-25 | 2015-05-20 | 七台河宝泰隆煤化工股份有限公司 | A kind of water tank cooler |
| CN206418566U (en) * | 2017-01-03 | 2017-08-18 | 无锡市天宇民防建筑设计研究院有限公司 | A kind of discharge structure of automatic utilization sewage conduct assisted drainage |
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| Publication number | Publication date |
|---|---|
| CN108044479A (en) | 2018-05-18 |
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