CN108037315A - A kind of test device and method of high-impact acceleration meter thermal sensitivity drift - Google Patents
A kind of test device and method of high-impact acceleration meter thermal sensitivity drift Download PDFInfo
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- CN108037315A CN108037315A CN201711033844.6A CN201711033844A CN108037315A CN 108037315 A CN108037315 A CN 108037315A CN 201711033844 A CN201711033844 A CN 201711033844A CN 108037315 A CN108037315 A CN 108037315A
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- accelerometer
- measured
- temperature
- acceleration meter
- control box
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P21/00—Testing or calibrating of apparatus or devices covered by the preceding groups
Abstract
The present invention relates to a kind of test device of high-impact acceleration meter thermal sensitivity drift, including temperature control box, metallic rod, the first signal amplification circuit, secondary signal amplifying circuit and computer, described metallic rod one end is used to fix accelerometer to be measured, the other end is used for fixed reference accelerometer, described one end for being used to fix accelerometer to be measured is placed in temperature control box, and one end for fixed reference accelerometer is placed in outside temperature control box；First signal amplification circuit is used for the output signal for amplifying the accelerometer to be measured, output signal of the secondary signal amplifying circuit based on amplifying reference acceleration；The computer is connected with the first signal amplification circuit and secondary signal amplification circuit output end respectively, and obtaining accelerometer response to be measured by comparison method exports variation with temperature relation.The invention further relates to test method.The present invention has the characteristics that impact acceleration is big, direct, quick, safe and reliable and accurate.
Description
Technical field
The present invention relates to the mechanical test analysis technical field of microsensor, more particularly to a kind of high-impact acceleration meter
The test device and method of thermal sensitivity drift.
Background technology
High-range acceleration transducer, for example range is in 100,000 g (1g=9.8m/s2) or the acceleration higher than 100,000 g
Sensor, not only needs to measure the sensitivity under room temperature, it is also necessary to understand sensitivity variation with temperature relation, i.e. heat sensitivity
Drift.In general, into the temperature test of line sensitivity, it is that the transmission lever of shake table is passed through into temperature control babinet using shake table
Bottom or side wall be placed in temperature control box.Such as national standard 5347-17：This method is used in 1993, and is with reference to sensing with one
Device is positioned over outside temperature control box and is compared.The advantages of method is can be tested at multiple frequencies, and shortcoming is excitation
Acceleration load is smaller.Therefore, this method is for high-impact acceleration sensor and improper, because high-impact acceleration
The sensitivity of sensor is very small, and usually in microvolt magnitude, the acceleration that shake table is capable of providing is very limited, generally tens
The scope of a g, it is difficult to which excitation obtains effectively output.Seldom related in data at present disclosed high-impact acceleration sensitivity with
The test method of temperature change.A kind of test of high-impact acceleration sensor sensitivity with temperature of 95 years document reports
Method (Fabrication and characterization of high g-force, silicon piezoresistive
acceleromeers,sensors and actuatorss,A 48(1995)55-61,Yuebin Ning,Yan Loke,
Graham Mckinnon).In the method, comparison method is employed, by reference acceleration meter and tested accelerometer and peace
Dress stationary fixture is together positioned in temperature control box, after a period of time constant temperature is carried out at a given temperature, immediately by whole fixture
Take out, be then mounted on impact device, test within a short period of time is completed.This method thinks, within a short period of time such as 10
In second, the unit temp of accelerometer varies less, and test is influenced little.But this method operation is not safe and reliable, especially
It is pyroprocess, it is dangerous very big.
The content of the invention
The technical problems to be solved by the invention are to provide a kind of test dress of high-impact acceleration meter thermal sensitivity drift
Put and method, have the characteristics that impact acceleration is big, direct, quick, safe and reliable and accurate.
The technical solution adopted by the present invention to solve the technical problems is：A kind of high-impact acceleration meter heat sensitivity is provided
The test device of drift, including temperature control box, metallic rod, the first signal amplification circuit, secondary signal amplifying circuit and computer, institute
State metallic rod one end to be used to fix accelerometer to be measured, the other end is used for fixed reference accelerometer, described to be measured for fixing
One end of accelerometer is placed in temperature control box, and one end for fixed reference accelerometer is placed in outside temperature control box；First letter
Number amplifying circuit is used for the output signal for amplifying the accelerometer to be measured, and the secondary signal amplifying circuit, which is used to amplify, to be referred to
The output signal of accelerometer；The computer respectively with the first signal amplification circuit and secondary signal amplification circuit output end phase
Even, accelerometer response to be measured is obtained by comparison method and exports variation with temperature relation.
One end of the metallic rod is equipped with the first recess, and the other end is equipped with the second recess, and first recess is used to fix
Accelerometer to be measured, second recess are used for fixed reference accelerometer.
Overshoot protection device is equipped with the temperature control box.
Described one end for being used to fix accelerometer to be measured is placed in temperature control box, and make it that the part that metallic rod stretches into is complete
Long a quarter is to 1/5th.
The metallic rod keeps horizontality by balanced support body.
The metallic rod is used to be additionally provided with contact thermography sensor device on one end of fixed reference accelerometer, with prison
Controlling temperature changes.
The computer passes through formula S2(T)=S1(T0)×U2/U1Accelerometer response to be measured is obtained, wherein, U1, U2
It is the output crest voltage of reference acceleration meter and accelerometer to be measured two main waveforms during one-shot respectively, S2
(T) it is to be tested the sensitivity that accelerometer is calculated at a temperature of certain, S1(T0) it is the spirit of reference acceleration meter at room temperature
Sensitivity.
The metallic rod is made of aluminum alloy materials, length 1m, a diameter of 16mm.
The technical solution adopted by the present invention to solve the technical problems is：A kind of high-impact acceleration meter heat sensitivity is provided
The test method of drift, using above-mentioned test device, comprises the following steps：Make the temperature stabilization in temperature control box during test, then
Be placed in one end of metallic rod outside temperature control box using hammer impact, computer record at the same time collect from reference acceleration meter and
The waveform signal of accelerometer to be measured, reads the magnitude of voltage of first waveform medium wave peak in two paths of signals, passes through comparison method respectively
Obtain the sensitivity of accelerometer to be measured at such a temperature；Change temperature control box temperature, repeat above-mentioned testing procedure, obtain not equality of temperature
The sensitivity of accelerometer to be measured under degree, that is, obtain the quantitative relationship of accelerometer response and temperature to be measured, pass through curve
Fitting, obtains the thermal sensitivity drift of accelerometer to be measured.
Just reference acceleration meter is fixed in metallic rod when test, takes reference acceleration meter after being completed
Under.
Beneficial effect
As a result of above-mentioned technical solution, compared with prior art, the present invention having the following advantages that and actively imitating
Fruit：
The tested accelerometer of the present invention is positioned within temperature control box all the time, and reference acceleration meter is then placed in temperature control box
Outside, tested by horizontal impact comparison method, be extremely readily available the defeated of tested accelerometer and reference acceleration meter
Go out voltage magnitude, by reference to the sensitivity of known accelerometer and the comparison of two voltage magnitudes, be relatively easy to obtain not
The sensitivity of synthermal lower tested accelerometer, it is big, direct, quick, safe and reliable and more accurate with impact acceleration
The characteristics of.
The present invention carries out the test of HI high impact accelerometer sensitivity temperature characteristic using ballistic method is compared, generally in thousands of g
To between 10,000 g, by varying impact mode, the acceleration of bigger can be obtained, obtains more obvious signal output, the party
Method has the characteristics that easy to operate, is relatively easy to obtain the Relation Parameters that vary with temperature of accelerometer response.
Brief description of the drawings
Fig. 1 is the structure diagram of the present invention；
Fig. 2 is that the present invention is carved with the structure diagram that recess is used to install the metallic rod of acceleration transducer；
Fig. 3 is the structure diagram of the metallic rod for being provided with acceleration transducer of the present invention；
Fig. 4 is measured data curve map in the embodiment of the present invention；
Fig. 5 is the relative ratio that the sensitivity that measured data curve of the embodiment of the present invention is calculated varies with temperature
Curve map.
Embodiment
With reference to specific embodiment, the present invention is further explained.It is to be understood that these embodiments are merely to illustrate the present invention
Rather than limit the scope of the invention.In addition, it should also be understood that, after reading the content taught by the present invention, people in the art
Member can make various changes or modifications the present invention, and such equivalent forms equally fall within the application the appended claims and limited
Scope.
Embodiments of the present invention are related to a kind of test device of high-impact acceleration meter thermal sensitivity drift, such as Fig. 1 institutes
Show, including temperature control box 1, metallic rod 2, the first signal amplification circuit 3, secondary signal amplifying circuit 4 and computer 5, the metal
2 one end of bar is used to fix accelerometer 6 to be measured, and the other end is used for fixed reference accelerometer 7, described to be used to fix acceleration to be measured
One end of degree meter 6 is placed in temperature control box 1, and one end for fixed reference accelerometer 7 is placed in outside temperature control box 1；First letter
Number amplifying circuit 3 is used for the output signal for amplifying the accelerometer to be measured 6, and the secondary signal amplifying circuit 4 is used to amplify
The output signal of reference acceleration meter 7；The computer 5 respectively with the first signal amplification circuit 3 and secondary signal amplifying circuit 4
Output terminal is connected, and obtaining 6 sensitivity of accelerometer to be measured by comparison method exports variation with temperature relation.
Test device in present embodiment includes following components：Can programme controlled temperature control box 1, metal hammer 8,
One is carved with the elongated metallic rod 2 of recess, the signal amplification circuit of two accelerometers, and the data that computer 5 is used to control are adopted
Collection, storage and display system.
As shown in Figures 2 and 3, two recesses are carved with the alloying metal bar for impacting and loading acceleration transducer,
One of recess A is in the end of metallic rod, and to install tested accelerometer, which is positioned in temperature control box, is placed in
Length in temperature control box is about a quarter of bar length between 1/5th；Another recess B is in the other end, and apart from another
The end face at end is about at a quarter of bar length, and based on reference acceleration is fixedly mounted, which is placed in outside temperature control box.Test table
Bright, the outer indent of temperature control box is caused metallic rod to be conducted heat and causes the shadow of temperature change by temperature change in temperature control box within the specific limits
Ring very little (in such as this experiment between -40 degrees Celsius to 85 degrees Celsius).Reference acceleration meter is equally high known to sensitivity
Shock accelerometer.
The placement of metallic rod：One end that metal rod ends are provided with to recess A is inserted in temperature control box 1, and the other end is stayed in outside.
In order to ensure the level of metallic rod 2, a support balanced body 10 is placed outside temperature control box 1 to keep metallic rod 2 horizontal.To ensure
Metallic rod 2 is being subject to not produce larger displacement in impact process in temperature control box, prevents metallic rod 2 and 1 another side wall of temperature control box
Collision, installs overload protection arrangement 9 in temperature control box.
The installation of accelerometer：Tested accelerometer 6 is fixed on end to be provided with the temperature control box 1 of recess A,
Conducting wire is connected out to the first signal amplification circuit 3, the signal wire of amplifying circuit and is exported to computer data acquisition system.Ginseng
Examine at the recess B that accelerometer 7 is installed in the outer metallic rod 2 of temperature control box, its conducting wire is equally connected to the second amplifying circuit 4
In, and output a signal in 5 data collecting system of computer.
Opening of device prepares：Temperature control box is powered up, sets temperature program to certain temperature.Open computer acquisition system
System, sets sampled threshold voltage, sample length, display measurement range etc..Amplifying circuit is powered up, and to electrician on sensor
Make, computer data acquisition system etc. is to be collected.
Shock-testing：When temperature control box cooling (or heating) is to certain temperature, and after held for some time, put with hammer impact
In metallic rod one end outside temperature control box, computer records collect the waveform signal from two sensors at the same time, with reference to acceleration
Degree meter will be firstly received impact signal, and then tested accelerometer receives impact signal, and the impact signal formed exists
Propagated in metallic rod according to the velocity of sound, be that the velocity of sound is about 5000m/s in circular Al-alloy metal bar in section.Device is in temperature control box
Inside reach the consideration of temperature equilibrium time, due to a diameter of 1cm of metallic rod, extend into temperature control box at about 1/5th, with
Reduce absorption and influence of the whole metallic rod on heat to the greatest extent.Meanwhile its length of the size of device and width are less than 0.5cm, thickness is in 3mm
Left and right, volume very little, also rapidly, i.e., accelerometer device can reach balance to the response to heat in the short period of time,
And it can be used for testing.
Digital independent is with calculating：Surge waveform is generally sine wave, reads first waveform medium wave in two paths of signals respectively
The magnitude of voltage at peak.The sensitivity of accelerometer is tested in order to obtain, is calculated according to the following equation, S1(T)=S2(T0)*
U1(T)/U2(T0), wherein, U1(T) and U2(T0) it is to be tested with reference acceleration meter two during one-shot respectively
The output voltage of waveform signal, S1(T) it is to be tested the sensitivity that accelerometer is calculated at a temperature of certain, S2(T0) it is ginseng
Examine the sensitivity of accelerometer at room temperature.
Change the shock-testing of temperature：After the test for completing a temperature spot, temperature control box is set arrive as procedure described above
Another temperature, is tested, obtains the voltage output of accelerometer under another temperature spot successively by above-mentioned steps, according still further to
Above-mentioned formula is calculated.The rest may be inferred, that is, obtains the numerical value of sensitivity under different temperatures, that is, obtain accelerometer response
With the quantitative relationship of temperature.By curve matching, further data relationship of the sensitivity with temperature can be obtained, obtains acceleration
The thermal sensitivity drift of meter.Monitor temperature change at the same time.Actually it is placed in temperature control box the length of metal due to considering and puts
In the heat transfer of the metal pole length of outer end, the temperature change very little being placed at end-most reference accelerometer, does not influence test knot
Fruit.
In implementation, influence of the high/low temperature to metallic rod heat conduction in order to prevent, and then influence the sensitive of reference acceleration meter
Degree, therefore contact thermography sensor device 11 is additionally provided with the one end of metallic rod 2 for fixed reference accelerometer 7, with
Temperature change is monitored, so that accuracy when ensureing measurement.Meanwhile only just reference acceleration meter is fixed when test
In in metallic rod, it is completed, then reference acceleration meter is removed.It was found that, it is placed in the outer metallic rod indent of temperature control box
Temperature in the point change be not very greatly, i.e., due to relatively large distance between the hot spot in temperature control box, so at this
The influence very little of accelerometer.Germicidal efficacy, after temperature control box temperature is raised to 85 degree and constant temperature 30 minutes, metallic rod end-most reference
Temperature at accelerometer is raised less than 1 degree.In fact, test process can be completed within the several seconds.It is so warm in metallic rod
Influence of the change of degree to reference acceleration meter is very small.
The present invention is further illustrated below by specific embodiment.
Percussion mechanism and data collecting system used in the present embodiment in Fig. 1 with described be detected as shown in Figure 1, added
The sensitive direction of principal axis of velocity sensor 6 is the length direction along metallic rod 2.In case, accelerometer 6 is detected, with reference to acceleration
Degree meter 7, a coaxial metallic rod 2, cable, two signal amplifiers 3 and 4, computer data acquisition systems 5, hammer 8,
Balanced support body 10, overload protection arrangement 9, and temperature control box 1.As shown in Figures 2 and 3, it is tested the recessed of the installation of accelerometer 6
Mouth A, reference acceleration meter 7 is installed on recess B, and is fixed on the contact-type temp sensor device 11 of outer disconnected indent.Institute
The amplification factor for stating detected accelerometer 6 and the amplifying circuit of reference acceleration meter 7 is 20 times, and -3dB cutoff frequencies are more than
260kHz.The output terminal of the detected accelerometer 6 and reference acceleration meter 7 is connected with respective signal amplifier 3 and 4
Connect, the output terminal of signal amplifier 3 and 4 is connected with the input terminal of the computer data acquisition system 5, the signal of amplification by
Sichuan topology Digital Equipment Co., Ltd Topview4012 multichannel voltage ripples capture card obtains, and is eventually displayed in computer screen
On curtain.Metallic rod is Aluminum alloy round bar in the present embodiment, length 1m, a diameter of 16mm.
Specifically, one end that the hammer 8 impacts horizontal positioned metallic rod 2 produces elastic collision, end is collided in metallic rod 2
End face forms compression stress wave, is propagated to the other end of the metallic rod 2, and reference acceleration meter is reached by the time of t=L/4C,
Tested accelerometer response is reached by the time of t=L/C (L is the length of metallic rod, and C is the velocity of sound in metallic rod).Institute
State first waveform peak voltage signal of output after reference acceleration meter elapsed time t：U1(t)=S1× a (t), is detected and adds
Speedometer is again after the time (L/C) in 3/4ths cycles, it is assumed that strain wave is nondestructively delivered to detected accelerometer, i.e.,
Acceleration a (t) is remained unchanged, then is detected first peak voltage signal of accelerometer and is：U2(t)=S2× a (t+3L/4C),
S1, S2It is the sensitivity of reference acceleration meter and tested accelerometer respectively.Two paths of signals can relatively be obtained：U2(t)/
U1(t)=S2×a(t+3L/4C)/S1× a (t)=S2/S1.The sensitivity of i.e. tested accelerometer is S2=U2(t)×S1/U1
(t)。
In the case of alternating temperature is considered, accelerometer T at a certain temperature is tested, and reference acceleration meter keeps room temperature T0
When, above-mentioned reference acceleration meter first waveform output voltage peak value is：U1(t,T0)=S1(T0) × a (t), is tested acceleration
The first waveform output voltage peak value of meter is：U2(t, T)=S2(T)×a(t+3L/4C).So under certain temperature, it is tested and adds
The output relation of speedometer and reference acceleration meter is：U2(t,T)/U1(t,T0)=S2(T)×a(t+3L/4C)/S1(T0)×a
(t).To put it more simply, can be without considering the influence of time t, and strain wave is lossless is delivered to detected accelerometer, then is tested
The sensitivity of accelerometer is：S2(T)=U2(T)×S1(T0)/U1(T0).Different temperature points are chosen successively, you can be added
Speedometer sensitivity variation with temperature relation, i.e. the thermal sensitivity drift of accelerometer, then by the way of curve matching, i.e.,
The temperature coefficient of sensitivity can further be obtained.Fig. 4 is shown as an example of the measured data curve waveform of the present invention, in figure
Lower curve is to be shifted 60mV downwards on longitudinal axis.Two are derived from figure for comparing the amplitude voltage value of meter sensitivity
The amplitude of first waveform of curve, because being comparison method, it is possible to without the size for considering absolute acceleration.Fig. 5 is shown
The relative ratio that a sensitivity being calculated for the measured data curve of the present invention varies with temperature.Temperature is set as：-40
DEG C, -20 DEG C, 0 DEG C, 20 DEG C, 40 DEG C, 60 DEG C, 85 DEG C, each corresponding temperature spot is tested, and the acceleration amplitude of impact exists
Between 1000g to 10,000 g.If tested output of the accelerometer during one-shot is 40mV, the times magnification of amplifier
Number is 20 times, and it is 1 μ V/g to be tested the sensitivity of accelerometer at room temperature, then the acceleration amplitude of real impact is
2000g.If impact is under the amplitude of bigger, then acceleration also bigger.Range of measuring temp it, with temperature raise it is sensitive
Degree gradually shows the trend of reduction, this is theoretical consistent with pressure drag.
It is not difficult to find that the accelerometer that the present invention is tested is positioned within temperature control box all the time, and reference acceleration meter is then
It is placed in outside temperature control box, is tested by horizontal impact comparison method, is extremely readily available tested accelerometer and reference adds
The output voltage amplitude of speedometer, by reference to the sensitivity of known accelerometer and the comparison of two voltage magnitudes, more
The sensitivity that accelerometer is tested under different temperatures is readily obtained, it is big, direct, quick, safe and reliable with impact acceleration
With accurate feature.
Claims (10)
1. a kind of test device of high-impact acceleration meter thermal sensitivity drift, including the amplification of temperature control box, metallic rod, the first signal
Circuit, secondary signal amplifying circuit and computer, it is characterised in that described metallic rod one end is used to fix accelerometer to be measured,
The other end is used for fixed reference accelerometer, and described one end for being used to fix accelerometer to be measured is placed in temperature control box, for solid
The one end for determining reference acceleration meter is placed in outside temperature control box；First signal amplification circuit is used to amplify the accelerometer to be measured
Output signal, output signal of the secondary signal amplifying circuit based on amplifying reference acceleration；The computer difference
It is connected with the first signal amplification circuit and secondary signal amplification circuit output end, it is sensitive to obtain accelerometer to be measured by comparison method
Degree output variation with temperature relation.
2. the test device of high-impact acceleration meter thermal sensitivity drift according to claim 1, it is characterised in that described
One end of metallic rod is equipped with the first recess, and the other end is equipped with the second recess, and first recess is used to fix accelerometer to be measured,
Second recess is used for fixed reference accelerometer.
3. the test device of high-impact acceleration meter thermal sensitivity drift according to claim 1, it is characterised in that described
Overshoot protection device is equipped with temperature control box.
4. the test device of high-impact acceleration meter thermal sensitivity drift according to claim 1, it is characterised in that described
One end for fixing accelerometer to be measured is placed in temperature control box, and causes a quarter of the part that metallic rod stretches into for total length
To 1/5th.
5. the test device of high-impact acceleration meter thermal sensitivity drift according to claim 1, it is characterised in that described
Metallic rod keeps horizontality by balanced support body.
6. the test device of high-impact acceleration meter thermal sensitivity drift according to claim 1, it is characterised in that described
Metallic rod is used to be additionally provided with contact thermography sensor device on one end of fixed reference accelerometer, to monitor temperature change.
7. the test device of high-impact acceleration meter thermal sensitivity drift according to claim 1, it is characterised in that described
Computer passes through formula S2(T)=S1(T0)×U2/U1Accelerometer response to be measured is obtained, wherein, U1, U2It is to refer to add respectively
The output crest voltage of speedometer and accelerometer to be measured two main waveforms during one-shot, S2(T) it is tested add
The sensitivity that speedometer is calculated at a temperature of certain, S1(T0) it is the sensitivity of reference acceleration meter at room temperature.
8. the test device of high-impact acceleration meter thermal sensitivity drift according to claim 1, it is characterised in that described
Metallic rod is made of aluminum alloy materials, length 1m, a diameter of 16mm.
9. a kind of test method of high-impact acceleration meter thermal sensitivity drift, it is characterised in that using as in claim 1-8
Any test device, comprise the following steps：Make the temperature stabilization in temperature control box during test, be then placed in temperature using hammer impact
One end of the metallic rod outside case is controlled, computer records collect the waveform from reference acceleration meter and accelerometer to be measured at the same time
Signal, reads the magnitude of voltage of first waveform medium wave peak in two paths of signals, obtains accelerometer to be measured by comparison method and exist respectively
Sensitivity at this temperature；Change temperature control box temperature, repeat above-mentioned testing procedure, obtain accelerometer to be measured under different temperatures
Sensitivity, that is, obtain the quantitative relationship of accelerometer response and temperature to be measured, by curve matching, obtains treating measuring acceleration
The thermal sensitivity drift of meter.
10. the test method of high-impact acceleration meter thermal sensitivity drift according to claim 9, it is characterised in that
Just reference acceleration meter is fixed in metallic rod when test, removes reference acceleration meter after being completed.
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Cited By (1)
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| CN108982252A (en) * | 2018-06-07 | 2018-12-11 | 中国科学院上海微系统与信息技术研究所 | A kind of new testing device for temperature properties and test method of double-sided adhesive viscosity mechanical behavior |
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| CN108982252A (en) * | 2018-06-07 | 2018-12-11 | 中国科学院上海微系统与信息技术研究所 | A kind of new testing device for temperature properties and test method of double-sided adhesive viscosity mechanical behavior |
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Application publication date: 20180515 |