CN108037313A - A kind of shock resistance type quartz pendulous reed and its processing method - Google Patents
A kind of shock resistance type quartz pendulous reed and its processing method Download PDFInfo
- Publication number
- CN108037313A CN108037313A CN201711447152.6A CN201711447152A CN108037313A CN 108037313 A CN108037313 A CN 108037313A CN 201711447152 A CN201711447152 A CN 201711447152A CN 108037313 A CN108037313 A CN 108037313A
- Authority
- CN
- China
- Prior art keywords
- outer shroud
- pendulous reed
- quartz pendulous
- shock resistance
- resistance type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of shock resistance type quartz pendulous reed, the pendulum tongue being connected including outer shroud and with the outer shroud by flexible bridges, further include output axial limit structure and swing axial limit structure, wherein, the output direction of principal axis of output axial limit structure along the quartz pendulous reed is arranged on the both sides of the madial wall of the outer shroud, and the swing direction of principal axis for swinging axial limit structure along the quartz pendulous reed is arranged on the both sides of the madial wall of the outer shroud.The present invention devises position limiting structure on the outer shroud of quartz pendulous reed; pendulum tongue is limited in non-sensitive direction; that is the displacement of output shaft and swing direction of principal axis; while acceleration measuring accuracy of measurement is not sacrificed; play a protective role to accelerometer, the shock proof ability of quartz flexible accelerometer can be brought up to more than 1000g from 100g.
Description
Technical field
The present invention relates to accelerometer technical field, more particularly to a kind of shock resistance type quartz pendulous reed and its processing method.
Background technology
Quartz flexible accelerometer is a kind of dynamic balance pendulous accelerometer, with stability is good, precision is high, simple in structure
The features such as, be Aeronautics and Astronautics, navigation and terrestrial world various strategies/tactical weapon Navigation, Guidance and Control system in extensively
A kind of accelerometer of application.
Quartz pendulous reed is the core component of quartz flexible accelerometer, its material uses quartz glass, has thermal expansion system
The small, stable chemical performances of number, compression strength elasticity are comparatively ideal flexible support materials than the features such as high, sluggish aftereffect is small.But
Quartz glass belongs to the fragile material of high rigidity again, and brittleness is high, and fracture toughness is low, when its flexural deformation exceedes the strong of quartz glass
When spending the limit, quartz pendulous reed will be broken, and cause accelerometer to fail.Accelerated using the quartz flexible of conventional quartz pendulum
Degree meter impact resistance is 100g or so, is not suitable for impacting larger application field.
Therefore, how to improve the impact resistance of quartz pendulous reed becomes those skilled in the art's urgent problem.
The content of the invention
For deficiencies of the prior art, problem to be solved of the present invention is：How to design and process quartz
Pendulum structure, to improve the impact resistance of quartz pendulous reed.
In order to solve the above technical problems, present invention employs following technical solution：
A kind of shock resistance type quartz pendulous reed, including outer shroud and the pendulum tongue that is connected with the outer shroud by flexible bridges, further include defeated
Go out axial limit structure and swing axial limit structure, wherein：
The output direction of principal axis of output axial limit structure along the quartz pendulous reed is arranged on the two of the madial wall of the outer shroud
Side；
The swing direction of principal axis for swinging axial limit structure along the quartz pendulous reed is arranged on the two of the madial wall of the outer shroud
Side.
Preferably, it is provided with the lateral surface of the outer shroud to bracket groove, it is described the outer shroud is in bracket groove to be scratched with described
Side that property bridging connects and on the swinging axle of the quartz pendulous reed.
A kind of processing method of shock resistance type quartz pendulous reed, the processing method of the shock resistance type quartz pendulous reed are used to process
Above-mentioned shock resistance type quartz pendulous reed, including：
The method being combined using laser cutting with reference to hf etching, is processed between the hollow out between the outer shroud and the pendulum tongue
Gap；
The method being combined using laser cutting with reference to hf etching, is processed between the hollow out between the outer shroud and the flexible bridges
Gap；
Using the centre bore on the laser boring processing pendulum tongue；
The flexible bridges are thinned using the method for hf etching until the thickness met the requirements；
The laser is less than 10 picosecond lasers.
Preferably, it is provided with the lateral surface of the outer shroud to bracket groove, it is described the outer shroud is in bracket groove to be scratched with described
Side that property bridging connects and on the swinging axle of the quartz pendulous reed.
In conclusion the invention discloses a kind of shock resistance type quartz pendulous reed, including outer shroud and pass through flexibility with outer shroud
The pendulum tongue that bridging connects, further includes output axial limit structure and swings axial limit structure, wherein, output axial limit structure edge
The output direction of principal axis of quartz pendulous reed is arranged on the both sides of the madial wall of outer shroud, swings swing of the axial limit structure along quartz pendulous reed
Direction of principal axis is arranged on the both sides of the madial wall of outer shroud.The present invention devises position limiting structure on the outer shroud of quartz pendulous reed, limits
Displacement of the tongue in non-sensitive direction, i.e. output shaft and swing direction of principal axis is put, it is right while acceleration measuring accuracy of measurement is not sacrificed
Accelerometer plays a protective role, and the shock proof ability of quartz flexible accelerometer can be brought up to more than 1000g from 100g.
Brief description of the drawings
In order to make the purpose, technical scheme and advantage of invention clearer, the present invention is made into one below in conjunction with attached drawing
The detailed description of step, wherein：
Fig. 1 is a kind of structure diagram of shock resistance type quartz pendulous reed disclosed by the invention.
The correspondence of label in attached drawing is：Outer shroud 1, pendulum tongue 2, flexible bridges 3, output axial limit structure 4, swinging axle
To position limiting structure 5.
Embodiment
The present invention is described in further detail below in conjunction with the accompanying drawings.
As shown in Figure 1, a kind of shock resistance type quartz pendulous reed, including outer shroud and the pendulum that is connected with outer shroud by flexible bridges
Tongue, further includes output axial limit structure and swings axial limit structure, wherein：
The output direction of principal axis of output axial limit structure along quartz pendulous reed is arranged on the both sides of the madial wall of outer shroud；
The swing direction of principal axis of swing axial limit structure along quartz pendulous reed is arranged on the both sides of the madial wall of outer shroud.
In the present invention, output shaft is the axis of outer shroud horizontal direction in Fig. 1, and swinging axle is outer shroud vertical direction in Fig. 1
Axis.
The present invention devises quartz pendulum tongue displacement position-limiting structure, can effectively limit on original quartz pendulous reed architecture basics
The displacement in the non-sensitive direction of quartz pendulum tongue, so as to cause accelerometer to fail from quartz flexible bridge fracture under HI high impact environment.
Traditional quartz flexible accelerometer does not have a position limitation protection structure on non-sensitive direction, and flexible bridges are easily under the conditions of large impact
Fracture, is the main reason of quartz flexible accelerometer failure.The present invention devises spacing guarantor on the outer shroud of quartz pendulous reed
Protection structure, limits pendulum tongue in non-sensitive direction（Including output shaft and swing direction of principal axis）Displacement, do not sacrificing accelerometer
While measurement accuracy, play a protective role to accelerometer, can be by the shock proof ability of quartz flexible accelerometer from 100g
Bring up to more than 1000g.And quartz pendulous reed position limitation protection structure of the present invention processes formation directly on the outer shroud of quartz pendulous reed, no
The special limiting and protecting device for needing other to be used similar to shock resistance accelerometer, reduces assembly complexity.
When it is implemented, being provided with the lateral surface of outer shroud to bracket groove, outer shroud is connected with flexible bridges one is in bracket groove
Side and on the swinging axle of quartz pendulous reed.
To bracket groove can be used for quartz pendulous reed assembling when in, the efficiency of assembling of quartz flexible accelerometer can be improved.
The invention also discloses a kind of processing method of shock resistance type quartz pendulous reed, the processing side of shock resistance type quartz pendulous reed
Method is used to process shock resistance type quartz pendulous reed as claimed in claim 1, including：
The method being combined using laser cutting with reference to hf etching, is processed between the hollow out between the outer shroud and the pendulum tongue
Gap；
The method being combined using laser cutting with reference to hf etching, is processed between the hollow out between the outer shroud and the flexible bridges
Gap；
Using the centre bore on the laser boring processing pendulum tongue；
The flexible bridges are thinned using the method for hf etching until the thickness met the requirements；
The laser is less than 10 picosecond lasers.
When it is implemented, being provided with the lateral surface of outer shroud to bracket groove, outer shroud is connected with flexible bridges one is in bracket groove
Side and on the swinging axle of quartz pendulous reed.
Quartz pendulous reed traditional diamond-making technique cannot process narrow slit, and forming residual stress is big, and surface quality is poor, and surface exists
Cut, crackle, surface and sub-surface damage layer so that the performance and environment resistant of accelerometer are less able, or even failure.
The quartz pendulous reed processing method that the present invention uses, combines hydrofluoric acid etch technology using picosecond laser cutting, processes
Narrow slit between spacing protecting mechanism and pendulum tongue.First, using hydrofluoric acid etch hollow out gap, until the quartz of hollow out gap location
Thickness of glass reduces to about 0.2mm；Then picosecond laser is used, the quartz glass hollow out of hollow out gap location is cut off, completes quartz
Contour structures and the spacing protecting mechanism processing of pendulum；Finally, using the method for hf etching be thinned the flexible bridges until
The thickness met the requirements（About 0.02mm）.
Picosecond laser processing belongs to " cold working " technology, compared with traditional long laser " hot-working " technology, has hot shadow
Ring area it is small, without the obvious processed edge such as dross, non-microcracked, be very suitable for the retrofit of small scale structures, particularly pin
To the narrow slit at the position limitation protection structure of the present invention, can not be processed using traditional long laser.Pendulum uses picosecond laser
After cutting hollow out shaping, using hydrofluoric acid etching solution wet etching flexible bridges, chemistry is carried out using hydrofluoric acid and quartz glass
Reaction, achievees the purpose that etch-forming.Chemical etching has the advantages that surface quality is preferable, and without forming residual stress, especially
Suitable for the retrofit of quartz pendulous reed.
Finally illustrate, the above embodiments are merely illustrative of the technical solutions of the present invention and it is unrestricted, although passing through ginseng
According to the preferred embodiment of the present invention, invention has been described, it should be appreciated by those of ordinary skill in the art that can
Various changes are made to it in the form and details, the present invention that is limited without departing from the appended claims
Spirit and scope.
Claims (4)
1. a kind of shock resistance type quartz pendulous reed, including outer shroud and the pendulum tongue that is connected with the outer shroud by flexible bridges, its feature
It is, further includes output axial limit structure and swing axial limit structure, wherein：
The output direction of principal axis of output axial limit structure along the quartz pendulous reed is arranged on the two of the madial wall of the outer shroud
Side；
The swing direction of principal axis for swinging axial limit structure along the quartz pendulous reed is arranged on the two of the madial wall of the outer shroud
Side.
2. impingement quartz pendulous reed as claimed in claim 1, it is characterised in that be provided with centering on the lateral surface of the outer shroud
Groove, the side that the outer shroud is in bracket groove and is connected with the flexible bridges and on the swinging axle of the quartz pendulous reed.
A kind of 3. processing method of shock resistance type quartz pendulous reed, it is characterised in that the processing side of the shock resistance type quartz pendulous reed
Method is used to process shock resistance type quartz pendulous reed as claimed in claim 1, including：
The method being combined using laser cutting with reference to hf etching, is processed between the hollow out between the outer shroud and the pendulum tongue
Gap；
The method being combined using laser cutting with reference to hf etching, is processed between the hollow out between the outer shroud and the flexible bridges
Gap；
Using the centre bore on the laser boring processing pendulum tongue；
The flexible bridges are thinned using the method for hf etching until the thickness met the requirements；
The laser is less than 10 picosecond lasers.
4. the processing method of shock resistance type quartz pendulous reed as claimed in claim 1, it is characterised in that the lateral surface of the outer shroud
On be provided with to bracket groove, the side that the outer shroud is in bracket groove and is connected with the flexible bridges and in the quartz pendulous reed
On swinging axle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711447152.6A CN108037313A (en) | 2017-12-27 | 2017-12-27 | A kind of shock resistance type quartz pendulous reed and its processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711447152.6A CN108037313A (en) | 2017-12-27 | 2017-12-27 | A kind of shock resistance type quartz pendulous reed and its processing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108037313A true CN108037313A (en) | 2018-05-15 |
Family
ID=62097533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711447152.6A Pending CN108037313A (en) | 2017-12-27 | 2017-12-27 | A kind of shock resistance type quartz pendulous reed and its processing method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108037313A (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109100536A (en) * | 2018-09-19 | 2018-12-28 | 中国船舶重工集团公司第七0七研究所 | A kind of Novel quartz glass pendulum |
| CN109142791A (en) * | 2018-09-27 | 2019-01-04 | 重庆天箭惯性科技股份有限公司 | Anti-impact force flexure accelerometers and its method for improving anti-impact force |
| CN109541256A (en) * | 2018-11-23 | 2019-03-29 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of shock proof pendulous accelerometer |
| CN110806495A (en) * | 2019-10-18 | 2020-02-18 | 中国航空工业集团公司西安飞行自动控制研究所 | High-precision accelerometer pendulum assembly fixture |
| CN112540193A (en) * | 2020-12-25 | 2021-03-23 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum capable of isolating interference torque and processing method |
| CN112661392A (en) * | 2021-01-08 | 2021-04-16 | 中国船舶重工集团公司第七0七研究所 | Low-stress forming method for quartz pendulous reed window |
| CN113219206A (en) * | 2021-04-14 | 2021-08-06 | 西安航天精密机电研究所 | Graphene accelerometer |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1687791A (en) * | 2005-06-07 | 2005-10-26 | 中国航天时代电子公司 | Anti-impact quartz flexible accelerometer |
| CN102254741A (en) * | 2011-07-06 | 2011-11-23 | 重庆大学 | Micro-mechanical acceleration switch |
| CN206724832U (en) * | 2017-03-09 | 2017-12-08 | 东莞市圣荣自动化科技有限公司 | A kind of portable set binding clip hole position caliberating device |
-
2017
- 2017-12-27 CN CN201711447152.6A patent/CN108037313A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1687791A (en) * | 2005-06-07 | 2005-10-26 | 中国航天时代电子公司 | Anti-impact quartz flexible accelerometer |
| CN102254741A (en) * | 2011-07-06 | 2011-11-23 | 重庆大学 | Micro-mechanical acceleration switch |
| CN206724832U (en) * | 2017-03-09 | 2017-12-08 | 东莞市圣荣自动化科技有限公司 | A kind of portable set binding clip hole position caliberating device |
Non-Patent Citations (1)
| Title |
|---|
| 周岩 等: "石英器件加工工艺及最新进展", 《中国机械工程》 * |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109100536A (en) * | 2018-09-19 | 2018-12-28 | 中国船舶重工集团公司第七0七研究所 | A kind of Novel quartz glass pendulum |
| CN109142791A (en) * | 2018-09-27 | 2019-01-04 | 重庆天箭惯性科技股份有限公司 | Anti-impact force flexure accelerometers and its method for improving anti-impact force |
| CN109541256A (en) * | 2018-11-23 | 2019-03-29 | 中国航空工业集团公司西安飞行自动控制研究所 | A kind of shock proof pendulous accelerometer |
| CN110806495A (en) * | 2019-10-18 | 2020-02-18 | 中国航空工业集团公司西安飞行自动控制研究所 | High-precision accelerometer pendulum assembly fixture |
| CN110806495B (en) * | 2019-10-18 | 2021-06-01 | 中国航空工业集团公司西安飞行自动控制研究所 | High-precision accelerometer pendulum assembly fixture |
| CN112540193A (en) * | 2020-12-25 | 2021-03-23 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum capable of isolating interference torque and processing method |
| CN112661392A (en) * | 2021-01-08 | 2021-04-16 | 中国船舶重工集团公司第七0七研究所 | Low-stress forming method for quartz pendulous reed window |
| CN113219206A (en) * | 2021-04-14 | 2021-08-06 | 西安航天精密机电研究所 | Graphene accelerometer |
| CN113219206B (en) * | 2021-04-14 | 2022-12-16 | 西安航天精密机电研究所 | Graphene accelerometer |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108037313A (en) | A kind of shock resistance type quartz pendulous reed and its processing method | |
| CN104944790A (en) | Glass-reinforcing composition and method of manufacturing touchscreen glass using the same | |
| CN105387852B (en) | The self-aligned technology preparation method of micro- half spherical top harmonic oscillator | |
| CN107478110B (en) | Rotating elastic attitude angle calculation method based on state observer | |
| CN102944339A (en) | Piezoresistive pressure sensor of MEMS (Micro-Electro-Mechanical Systems) and preparation method thereof | |
| JP2006133245A (en) | Capacitance type acceleration sensor | |
| CN105181231A (en) | Pressure sensor of packaging structure and preparation method thereof | |
| CN102435777A (en) | Silicon microcapacitor type two-dimensional integrated acceleration sensor | |
| KR100928761B1 (en) | Capacitance dynamic mass sensor and manufacturing method thereof | |
| BRPI1102804B1 (en) | PRESSURE MEASUREMENT CELL | |
| CN110988396A (en) | Sensitive component of quartz vibrating beam accelerometer | |
| CN107478198A (en) | A kind of high-precision MEMS angular transducers sensitive structure and processing method | |
| CN108007448A (en) | A kind of axial symmetry silicon micromechanical gyroscope sensitive structure and its manufacture method | |
| CN105115486A (en) | Electrostatic suspension triaxial spherical shell resonance micro-gyroscope and processing method thereof | |
| CN113532481A (en) | Zero offset compensation method of MEMS inertial navigation system | |
| CN103398707B (en) | A kind of three silica-based super-thin micro-hemispherical resonator gyroscope of assembly type and preparation method thereof | |
| CN102507981B (en) | Single-sensitive-mass-element silicon micro-two-dimensional acceleration transducer with coupled beam structure | |
| CN110736482A (en) | under-measurement speed correction method for moon soft landing | |
| CN106199071A (en) | A kind of anti high overload lower range capacitance acceleration transducer and manufacture method thereof | |
| CN102285636B (en) | Wet etching preparation processes for polygonal section silicon beam | |
| CN106134431B (en) | A kind of protective device of quartz micro mechanical accelerometer sensitive structure and processing method | |
| JPS6310578A (en) | Manufacture of ring laser | |
| CN112540193B (en) | Quartz flexible acceleration detection mass pendulum for isolating disturbance moment and processing method | |
| CN111121761B (en) | Method for determining micro-mechanical inertial navigation rolling angle based on airspeed | |
| CN103968997A (en) | SOI mini-type Pirani gage and manufacturing method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20180515 |
|
| RJ01 | Rejection of invention patent application after publication |