CN110988396A - Sensitive component of quartz vibrating beam accelerometer - Google Patents
Sensitive component of quartz vibrating beam accelerometer Download PDFInfo
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- CN110988396A CN110988396A CN201911191906.5A CN201911191906A CN110988396A CN 110988396 A CN110988396 A CN 110988396A CN 201911191906 A CN201911191906 A CN 201911191906A CN 110988396 A CN110988396 A CN 110988396A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/097—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by vibratory elements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
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- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
The invention relates to the technical field of accelerometers, and discloses a quartz vibrating beam accelerometer sensitive component. The assembly comprises an outer frame, flexible supporting pieces, an isolation frame, an outer connecting piece, an inner connecting piece, a support, a detection mass block and vibration beams, wherein the isolation frame is positioned inside the outer frame, one end of the isolation frame is connected with the inner side of the outer frame through the outer connecting piece, the other end of the isolation frame is connected with the support through the inner connecting piece, one end of each vibration beam is connected with the detection mass block, the other end of each vibration beam is connected with the support, the flexible supporting pieces are arranged between the upper end surface of the support and the lower end surface of the detection mass block and are symmetrically distributed on two sides of each vibration beam, the vibration beams are not coplanar. Therefore, the vibration beam energy dissipation channel can be blocked by adding the isolation frame and the related parts, the double-interdigital structure is simplified into a single interdigital, and the occurrence of a narrow gap is avoided. In addition, the isolation frame can block the transmission of external thermal stress, and the temperature environment adaptability of the accelerometer is improved.
Description
Technical Field
The invention relates to the technical field of accelerometers, in particular to a quartz vibrating beam accelerometer sensitive component.
Background
The new generation of strategic weapons represented by cruise missiles, remote bombers, submarines, intercontinental missiles and hypersonic aircrafts has urgent need for small high-precision accelerometers with high precision, high reliability, high stability and low cost. Typical indices are measurement range. + -.50 g, off-set stability 5. mu.g, scale factor stability 5 ppm. At present, a gyro pendulum accelerometer (PIGA for short) is adopted, but the characteristics of complex structure, larger volume and weight, difficult maintenance and the like are difficult to meet the development requirement of strategic weapons in the future. The MEMS accelerometer taking the vibration beam as the principle is the most important technical development direction of the current small-sized high-precision accelerometer, can cover the application in the strategic field, and is the first choice core device of the strategic weapon high-precision inertial navigation system.
The quartz vibration beam accelerometer is characterized in that a pair of precise flexible supports are used for binding a detection mass block to move in a single degree of freedom, a pair of force-sensitive quartz vibration beams loaded in a push-pull mode are arranged in the direction of an input shaft of the detection mass block, when acceleration is input, the detection mass block generates a force effect and transmits the force to the quartz vibration beams, so that the frequency of the action of one quartz vibration beam bearing tension is increased, the frequency of the action of the other quartz vibration beam bearing pressure is reduced, the two frequency differences are in direct proportion to the input acceleration, the two frequency values are detected through a crystal oscillator circuit, and the acceleration value is calculated according to a mathematical model between the two frequency values.
The quartz vibration beam accelerometer is mainly composed of a quartz vibration beam and a metal pendulum, wherein the quartz vibration beam and the metal pendulum are bonded through a gluing process, the quartz vibration beam accelerometer has higher performance and meets the requirement of models, and the following problems need to be solved in the design of the current quartz vibration beam accelerometer sensitive structure:
1. the coefficients of thermal expansion are mismatched. The quartz vibrating beam accelerometer is mainly sensitive to external stress, when the thermal expansion coefficients of materials of the quartz vibrating beam and the metal pendulum are different, and when the ambient temperature changes, the expansion rates of the quartz vibrating beam and the metal pendulum are different, so that the quartz vibrating beam and the metal pendulum generate larger internal stress at a connecting part, and the measurement accuracy of the accelerometer is greatly influenced;
2. the cross-coupling is large. The large change of the output before and after the vibration and the large vibration rectification error in the vibration process due to the large cross coupling coefficient are shown.
3. The processing difficulty is high. The side electrodes are difficult to process due to the unique narrow gap of the double-interdigital quartz vibrating beam.
4. The cost is high. The metal pendulum is machined, and the machining cost is high due to high requirements on dimensional accuracy and consistency.
Disclosure of Invention
The invention aims to overcome the defects in the prior art, and provides a quartz vibrating beam accelerometer sensitive component which can solve the problems in the prior art.
The technical solution of the invention is as follows: a quartz vibration beam accelerometer sensitive assembly comprises an outer frame, a flexible supporting piece, an isolation frame, an outer connecting piece, an inner connecting piece, a support, a detection mass block and a vibration beam, wherein the isolation frame is located inside the outer frame, the outer side of one end of the isolation frame is connected with the inner side of the outer frame through the outer connecting piece, the inner side of the other end of the isolation frame is connected with the support through the inner connecting piece, one end of the vibration beam is connected with the detection mass block, the other end of the vibration beam is connected with the support, the flexible supporting piece is arranged between the upper end face of the support and the lower end face of the detection mass block, the flexible supporting piece is symmetrically distributed on two sides of the vibration beam, the vibration beam is not coplanar with the flexible supporting piece, and the flexible supporting piece is symmetrically distributed on.
Preferably, the outer frame is of a U-shaped or mouth-shaped structure.
Preferably, the isolation frame is of a mouth-shaped structure.
Preferably, the proof mass is of a "horseshoe" type construction.
Preferably, the outer frame, the flexible support, the isolation frame, the outer connecting member, the inner connecting member, the support, the proof mass and the vibration beam are made of quartz.
Preferably, the proof mass and the vibration beam are of an integrated structure.
Through the technical scheme, the isolation frame can be arranged in the outer frame, the outer side of one end of the isolation frame is connected with the inner side of the outer frame through the outer connecting piece, the inner side of the other end of the isolation frame is connected with the support through the inner connecting piece, one end of the vibration beam is connected with the detection mass block, the other end of the vibration beam is connected with the support, and the flexible supporting pieces are arranged between the upper end face of the support and the lower end face of the detection mass block and symmetrically distributed on two sides of the vibration beam. Therefore, by adding the isolation frame and the related parts, the energy dissipation channel of the vibration beam can be blocked, the double-fork structure is simplified into a single fork, the occurrence of narrow and small gaps is avoided, the processing is easy, and the method is suitable for batch production. In addition, the isolation frame can block the transmission of external thermal stress, and the temperature environment adaptability of the accelerometer is improved. Meanwhile, the sensitive components are integrally processed, so that cross coupling caused by asymmetric assembly is avoided.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
Fig. 1 is a schematic structural diagram of a sensitive component of a quartz vibrating beam accelerometer according to an embodiment of the present invention;
fig. 2 is a schematic half-section view of a sensitive component of a quartz vibrating beam accelerometer according to an embodiment of the present invention.
Detailed Description
Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings. In the following description, for purposes of explanation and not limitation, specific details are set forth in order to provide a thorough understanding of the present invention. However, it will be apparent to one skilled in the art that the present invention may be practiced in other embodiments that depart from these specific details.
It should be noted that, in order to avoid obscuring the present invention with unnecessary details, only the device structures and/or processing steps that are closely related to the scheme according to the present invention are shown in the drawings, and other details that are not so relevant to the present invention are omitted.
Fig. 1 is a schematic structural diagram of a sensitive component of a quartz vibrating beam accelerometer according to an embodiment of the present invention.
Fig. 2 is a schematic half-section view of a sensitive component of a quartz vibrating beam accelerometer according to an embodiment of the present invention.
As shown in fig. 1-2, an embodiment of the present invention provides a quartz vibrating beam accelerometer sensitive assembly, where the assembly includes an outer frame 1, a flexible support 2, an isolation frame 3, an outer connector 4, an inner connector 5, a support 6, a proof mass 7, and a vibrating beam 8, where the isolation frame 3 is located inside the outer frame 1, an outer side of one end of the isolation frame 3 is connected to an inner side of the outer frame 1 through the outer connector 4, an inner side of the other end of the isolation frame 3 is connected to the support 6 through the inner connector 5, one end of the vibrating beam 8 is connected to the proof mass 7, and the other end is connected to the support 6, the flexible support 2 is disposed between an upper end surface of the support 6 and a lower end surface of the proof mass 7, and the flexible support 2 is symmetrically distributed on two sides of the vibrating beam 8, and the vibrating beam 8 is not coplanar with the flexible support 2, the flexure supports 2 symmetrically disposed on both sides of the vibrating beam 8 are coplanar (as shown in fig. 2).
For example, the number of the flexible supports 2 may be two, wherein one flexible support 2 may be disposed between an upper end face of the support 6 and a lower end face of the proof mass 7 (as shown in the left portion of fig. 1); another flexible support 2 may be provided between the other upper end face of the support 6 and the other lower end face of the proof mass 7 (as shown in the right part of fig. 1).
Through the technical scheme, the isolation frame can be arranged in the outer frame, the outer side of one end of the isolation frame is connected with the inner side of the outer frame through the outer connecting piece, the inner side of the other end of the isolation frame is connected with the support through the inner connecting piece, one end of the vibration beam is connected with the detection mass block, the other end of the vibration beam is connected with the support, and the flexible supporting pieces are arranged between the upper end face of the support and the lower end face of the detection mass block and symmetrically distributed on two sides of the vibration beam. Therefore, by adding the isolation frame and the related parts, the energy dissipation channel of the vibration beam can be blocked, the double-fork structure is simplified into a single fork, the occurrence of narrow and small gaps is avoided, the processing is easy, and the method is suitable for batch production. In addition, the isolation frame can block the transmission of external thermal stress, and the temperature environment adaptability of the accelerometer is improved.
Wherein, the frame 1 is the anchor point of the sensitive subassembly of quartz vibration beam accelerometer.
The working process of the sensitive component of the quartz vibrating beam accelerometer according to the embodiment of the invention is described below with reference to fig. 1.
Specifically, the vibrating beam 8 vibrates in its working mode under the alternating voltage drive. When the external input Z-direction acceleration is input, the detection mass block 7 generates-Z-direction deviation, the vibration frequency of the vibration beam 8 is increased under the action of the tensile force, the variation of the frequency is in direct proportion to the input acceleration, and the input acceleration can be calculated according to the variation of the frequency.
According to an embodiment of the present invention, the outer frame 1 has a "U" or "mouth" shape.
According to one embodiment of the present invention, the isolation frame 3 is a "mouth" structure.
According to one embodiment of the invention, the proof mass 7 is of a "horseshoe" type construction.
It will be understood by those skilled in the art that the above descriptions of the structures of the outer frame, the isolation frame and the proof mass are only exemplary and not intended to limit the present invention.
According to an embodiment of the present invention, the materials of the outer frame 1, the flexible support 2, the isolation frame 3, the outer connecting member 4, the inner connecting member 5, the support 6, the proof mass 7, and the vibrating beam 8 are all quartz.
The sensitive component adopts an all-quartz structure, so that the problem of inconsistent thermal expansion coefficients of different materials is effectively solved, the assembly stress of a connecting part is reduced, and the stability of the accelerometer is improved. In addition, the sensitive component is formed by etching and processing all quartz, so that the cost is low and the batch production is easy.
According to an embodiment of the present invention, the proof mass 7 and the vibrating beam 8 are integrated.
In other words, the detection mass block and the vibration beam are of an integrated structure and are single-beam pendulum assemblies, so that the installation error of the quartz vibration beam is eliminated, and cross coupling is avoided.
Features that are described and/or illustrated above with respect to one embodiment may be used in the same way or in a similar way in one or more other embodiments and/or in combination with or instead of the features of the other embodiments.
It should be emphasized that the term "comprises/comprising" when used herein, is taken to specify the presence of stated features, integers, steps or components but does not preclude the presence or addition of one or more other features, integers, steps, components or groups thereof.
The many features and advantages of these embodiments are apparent from the detailed specification, and thus, it is intended by the appended claims to cover all such features and advantages of these embodiments which fall within the true spirit and scope thereof. Further, since numerous modifications and changes will readily occur to those skilled in the art, it is not desired to limit the embodiments of the invention to the exact construction and operation illustrated and described, and accordingly, all suitable modifications and equivalents may be resorted to, falling within the scope thereof.
The invention has not been described in detail and is in part known to those of skill in the art.
Claims (6)
1. A quartz vibration beam accelerometer sensitive component is characterized by comprising an outer frame (1), a flexible support (2), an isolation frame (3), an outer connecting piece (4), an inner connecting piece (5), a support (6), a detection mass block (7) and a vibration beam (8), wherein the isolation frame (3) is positioned inside the outer frame (1), the outer side of one end of the isolation frame (3) is connected with the inner side of the outer frame (1) through the outer connecting piece (4), the inner side of the other end of the isolation frame (3) is connected with the support (6) through the inner connecting piece (5), one end of the vibration beam (8) is connected with the detection mass block (7) while the other end is connected with the support (6), the flexible support (2) is arranged between the upper end face of the support (6) and the lower end face of the detection mass block (7) and the flexible support (2) is symmetrically distributed on two sides of the vibration beam (8), the vibration beam (8) and the flexible support (2) are not coplanar, and the flexible supports (2) symmetrically distributed on two sides of the vibration beam (8) are coplanar.
2. Assembly according to claim 1, characterized in that the outer frame (1) is of a "U" or "mouth" configuration.
3. Assembly according to claim 2, characterized in that the insulating frame (3) is of a "mouth" type structure.
4. An assembly according to claim 3, characterized in that the proof mass (7) is of a "horseshoe" type construction.
5. Assembly according to any one of claims 1 to 4, characterized in that the materials of the outer frame (1), the flexible support (2), the spacer frame (3), the outer connectors (4), the inner connectors (5), the support (6), the proof mass (7) and the vibrating beam (8) are all quartz.
6. An assembly according to any of claims 1-4, characterized in that the proof mass (7) and the vibrating beam (8) are of a unitary construction.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911191906.5A CN110988396A (en) | 2019-11-28 | 2019-11-28 | Sensitive component of quartz vibrating beam accelerometer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201911191906.5A CN110988396A (en) | 2019-11-28 | 2019-11-28 | Sensitive component of quartz vibrating beam accelerometer |
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| CN110988396A true CN110988396A (en) | 2020-04-10 |
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| CN201911191906.5A Pending CN110988396A (en) | 2019-11-28 | 2019-11-28 | Sensitive component of quartz vibrating beam accelerometer |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112540193A (en) * | 2020-12-25 | 2021-03-23 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum capable of isolating interference torque and processing method |
| CN112730892A (en) * | 2020-12-10 | 2021-04-30 | 北京自动化控制设备研究所 | Vibration beam structure and vibration beam accelerometer sensitive structure |
| CN113791241A (en) * | 2021-08-10 | 2021-12-14 | 北京自动化控制设备研究所 | Sensitive assembly stress relieving structure and vibration beam accelerometer with same |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112730892A (en) * | 2020-12-10 | 2021-04-30 | 北京自动化控制设备研究所 | Vibration beam structure and vibration beam accelerometer sensitive structure |
| CN112540193A (en) * | 2020-12-25 | 2021-03-23 | 中国电子科技集团公司第二十六研究所 | Quartz flexible acceleration detection mass pendulum capable of isolating interference torque and processing method |
| CN113791241A (en) * | 2021-08-10 | 2021-12-14 | 北京自动化控制设备研究所 | Sensitive assembly stress relieving structure and vibration beam accelerometer with same |
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Application publication date: 20200410 |