CN108032210B - 一种全自动半导体材料研磨设备 - Google Patents
一种全自动半导体材料研磨设备 Download PDFInfo
- Publication number
- CN108032210B CN108032210B CN201711406317.5A CN201711406317A CN108032210B CN 108032210 B CN108032210 B CN 108032210B CN 201711406317 A CN201711406317 A CN 201711406317A CN 108032210 B CN108032210 B CN 108032210B
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- CN
- China
- Prior art keywords
- cavity
- wall
- grinding
- rotation
- electric machine
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000463 material Substances 0.000 title claims abstract description 25
- 239000004065 semiconductor Substances 0.000 title claims abstract description 25
- 238000003801 milling Methods 0.000 title claims abstract description 14
- 238000000227 grinding Methods 0.000 claims abstract description 63
- 238000003825 pressing Methods 0.000 claims description 21
- 230000005540 biological transmission Effects 0.000 claims description 9
- 238000009434 installation Methods 0.000 claims description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 7
- 239000007787 solid Substances 0.000 claims description 5
- 230000000149 penetrating effect Effects 0.000 claims 1
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711406317.5A CN108032210B (zh) | 2017-12-22 | 2017-12-22 | 一种全自动半导体材料研磨设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201711406317.5A CN108032210B (zh) | 2017-12-22 | 2017-12-22 | 一种全自动半导体材料研磨设备 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN108032210A CN108032210A (zh) | 2018-05-15 |
CN108032210B true CN108032210B (zh) | 2018-12-04 |
Family
ID=62100767
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201711406317.5A Expired - Fee Related CN108032210B (zh) | 2017-12-22 | 2017-12-22 | 一种全自动半导体材料研磨设备 |
Country Status (1)
Country | Link |
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CN (1) | CN108032210B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108994670B (zh) * | 2018-08-02 | 2020-08-11 | 湖南德晟智能科技有限公司 | 一种伺服电机转子智能加工系统 |
CN109127595A (zh) * | 2018-08-09 | 2019-01-04 | 广州和井贸易有限公司 | 一种管道去污方法 |
CN114055268B (zh) * | 2021-06-11 | 2023-10-17 | 浙江工业职业技术学院 | 一种智能型铲墙机及磨墙装置 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR689101A (fr) * | 1929-02-01 | 1930-09-02 | Cincinnati Grinders Inc | Perfectionnements aux machines à rectifier |
CN101712138A (zh) * | 2009-12-16 | 2010-05-26 | 中山庆琏金属制品有限公司 | 一种结构改良的研磨机 |
CN101774146A (zh) * | 2010-02-04 | 2010-07-14 | 重庆师范大学 | 微型非球面元件研磨及抛光装置 |
CN102975105A (zh) * | 2012-11-26 | 2013-03-20 | 天津工业大学 | 切割机自补偿转角装置 |
CN204819163U (zh) * | 2015-08-14 | 2015-12-02 | 麦斯克电子材料有限公司 | 一种晶棒滚磨前对中装置 |
CN205888799U (zh) * | 2016-08-12 | 2017-01-18 | 温州市宝饰五金制品有限公司 | 一种生产用铜板快速打磨抛光装置 |
CN106475881A (zh) * | 2016-12-08 | 2017-03-08 | 杨田文 | 一种钢管表面快速除锈装置 |
-
2017
- 2017-12-22 CN CN201711406317.5A patent/CN108032210B/zh not_active Expired - Fee Related
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR689101A (fr) * | 1929-02-01 | 1930-09-02 | Cincinnati Grinders Inc | Perfectionnements aux machines à rectifier |
CN101712138A (zh) * | 2009-12-16 | 2010-05-26 | 中山庆琏金属制品有限公司 | 一种结构改良的研磨机 |
CN101774146A (zh) * | 2010-02-04 | 2010-07-14 | 重庆师范大学 | 微型非球面元件研磨及抛光装置 |
CN102975105A (zh) * | 2012-11-26 | 2013-03-20 | 天津工业大学 | 切割机自补偿转角装置 |
CN204819163U (zh) * | 2015-08-14 | 2015-12-02 | 麦斯克电子材料有限公司 | 一种晶棒滚磨前对中装置 |
CN205888799U (zh) * | 2016-08-12 | 2017-01-18 | 温州市宝饰五金制品有限公司 | 一种生产用铜板快速打磨抛光装置 |
CN106475881A (zh) * | 2016-12-08 | 2017-03-08 | 杨田文 | 一种钢管表面快速除锈装置 |
Also Published As
Publication number | Publication date |
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CN108032210A (zh) | 2018-05-15 |
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PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20181029 Address after: 064200 Xinglong Village, Tuan Zhuang Township, Zunhua, Tangshan City, Hebei Applicant after: Great Ming mining machinery Co.,Ltd. of Zunhua City Address before: 435000 Jinqiao Industrial Park, Daye, Huangshi, Hubei, 23 Applicant before: Zhu Jiangfan |
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GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200813 Address after: 215500 No.13, Caotang Road, Changshu, Suzhou, Jiangsu Province Patentee after: Changshu intellectual property operation center Co.,Ltd. Address before: 064200 Xinglong Village, Tuan Zhuang Township, Zunhua, Tangshan City, Hebei Patentee before: Great Ming mining machinery Co.,Ltd. of Zunhua City |
|
CP02 | Change in the address of a patent holder | ||
CP02 | Change in the address of a patent holder |
Address after: 215500 5th floor, building 4, 68 Lianfeng Road, Changfu street, Changshu City, Suzhou City, Jiangsu Province Patentee after: Changshu intellectual property operation center Co.,Ltd. Address before: 215500 No.13, Caotang Road, Changshu, Suzhou, Jiangsu Province Patentee before: Changshu intellectual property operation center Co.,Ltd. |
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TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20210602 Address after: 215500 No.13-1 Liantang Avenue, Shanghu Town, Changshu City, Suzhou City, Jiangsu Province Patentee after: SUZHOU COUTEN XISITEMU INTELLIGENT EQUIPMENT Co.,Ltd. Address before: 215500 5th floor, building 4, 68 Lianfeng Road, Changfu street, Changshu City, Suzhou City, Jiangsu Province Patentee before: Changshu intellectual property operation center Co.,Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181204 Termination date: 20211222 |