CN108020723B - Ultra-high impedance measuring device for capacitive uncooled focal plane readout circuit - Google Patents
Ultra-high impedance measuring device for capacitive uncooled focal plane readout circuit Download PDFInfo
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- CN108020723B CN108020723B CN201711042176.3A CN201711042176A CN108020723B CN 108020723 B CN108020723 B CN 108020723B CN 201711042176 A CN201711042176 A CN 201711042176A CN 108020723 B CN108020723 B CN 108020723B
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- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/025—Measuring very high resistances, e.g. isolation resistances, i.e. megohm-meters
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Abstract
The invention discloses an ultra-high impedance measuring device for a capacitive uncooled focal plane reading circuit, which comprises a capacitive uncooled focal plane reading circuit input stage array and four ultra-high resistance testing structures, wherein the feedback resistance of the capacitive uncooled focal plane reading circuit can be quickly and accurately measured by using a conventional high resistance instrument through the four ultra-high resistance testing structures; the ultra-high resistance test structures at four corners of the capacitive uncooled focal plane reading circuit are detected, so that the resistance and uniformity requirements of the input stage feedback resistance of the reading circuit are met, the performance of the capacitive uncooled focal plane reading circuit is guaranteed, and the performance of a focal plane detector is guaranteed.
Description
Technical Field
The present invention relates to an ultra-high impedance measuring apparatus, and particularly to an ultra-high impedance measuring apparatus for a capacitive uncooled focal plane readout circuit.
Technical Field
In the design of the capacitance type uncooled focal plane readout circuit, due to the limitation of the uncooled focal plane detector on the size of a pixel, the pixel size generally needs to be less than or equal to 30 micrometers by 30 micrometers, so that the capacitance value of each pixel of the capacitance type uncooled focal plane detector is very small and reaches several pF magnitude. For such small detector capacitance values, the capacitive uncooled focal plane readout circuit may be of the voltage follower (SFD) type, or of the resistive feedback transconductance amplifier (RTIA) type, with RTIA type being the best performing. Because the capacitance value of the detector is in pF magnitude, the feedback resistance is up to more than dozens of G ohms, and the design requirement can be met. In addition, the input-stage unit circuit array has high requirements on the precision and the uniformity of the feedback resistor, and the test method of the large resistor is one of the most important parameters of the readout circuit of the capacitive uncooled focal plane detector, and becomes one of key technologies which must be broken through in the development process of the capacitive uncooled focal plane detector.
The existing technical scheme is that a special ultrahigh impedance measuring instrument is directly used for measuring the ultrahigh feedback resistance of a reading circuit. The ultrahigh feedback resistance of the reading circuit is directly measured by a special ultrahigh impedance measuring instrument, and the defects are as follows:
1. the special ultra-high impedance measuring instrument is expensive;
2. the special ultrahigh impedance measuring instrument is complex to operate, and is difficult to carry out real-time, online and accurate detection on the ultrahigh feedback resistance of the reading circuit;
3. the special ultrahigh impedance measuring instrument is complex to operate, and is difficult to monitor the uniformity of the ultrahigh feedback resistance of the reading circuit in real time.
Disclosure of Invention
The invention aims to provide an ultrahigh impedance measuring device for a capacitive uncooled focal plane reading circuit, so that the resistance value of a feedback resistor can be quickly and accurately measured in the testing and screening processes of a reading circuit chip, and the performance and the quality of the capacitive uncooled focal plane reading circuit are ensured.
The invention discloses an ultrahigh impedance measuring device for a capacitive uncooled focal plane reading circuit, which comprises a capacitive uncooled focal plane reading circuit pixel input unit array and four ultrahigh resistance testing structures.
The four ultra-high resistance test structures are respectively positioned at the upper left corner, the upper right corner, the lower left corner and the lower right corner of the capacitive uncooled focal plane readout circuit pixel input unit array.
The ultrahigh resistance test structure comprises a plurality of ultrahigh resistance modules which are uniformly arranged.
Preferably, the number of the plurality of uniformly arranged ultra-high resistance modules is 50.
The plurality of uniformly arranged ultrahigh resistance modules are connected in parallel through two metal connecting wires.
The ultrahigh resistance test structure comprises two bonding pads connected with the metal connecting lines.
The ultrahigh resistance module comprises a plurality of ultrahigh resistances which are uniformly arranged.
Preferably, the number of the plurality of uniformly arranged super resistors is 20.
Wherein the plurality of uniformly arranged super high resistances are connected in parallel.
The resistance value of the ultrahigh resistance is completely the same as the feedback resistance of the pixel input unit array of the capacitive uncooled focal plane reading circuit.
The shape, the material and the manufacturing process of the ultrahigh resistance are completely the same as those of the feedback resistance of the pixel input unit array of the capacitive uncooled focal plane readout circuit.
According to the ultrahigh impedance measuring device for the capacitive uncooled focal plane reading circuit, the ultrahigh resistance testing parts are respectively designed at the four corners of the pixel input unit array of the uncooled focal plane reading circuit, and the feedback resistance of the capacitive uncooled focal plane reading circuit can be quickly and accurately measured by using a conventional resistance meter through the four ultrahigh resistance testing structures; the ultra-high resistance test structures at four corners of the capacitive uncooled focal plane reading circuit are detected, so that the resistance and uniformity requirements of the input stage feedback resistance of the reading circuit are met, the performance of the capacitive uncooled focal plane reading circuit is guaranteed, and the performance of a focal plane detector is guaranteed.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments made with reference to the following drawings:
FIG. 1 is a schematic diagram of a capacitive uncooled focal plane detector and readout circuitry according to an embodiment of the present invention;
fig. 2 is a schematic circuit diagram of a pixel input unit of a capacitive uncooled focal plane readout circuit according to an embodiment of the present invention;
fig. 3 is a layout of an ultra-high impedance measurement apparatus for a capacitive uncooled focal plane readout circuit according to an embodiment of the present invention;
fig. 4 is a layout of an ultra-high resistance test structure of the ultra-high impedance measurement apparatus for a capacitive uncooled focal plane readout circuit according to an embodiment of the present invention;
fig. 5 is a layout of an ultra-high resistance module of the ultra-high impedance measurement apparatus for a capacitive uncooled focal plane readout circuit according to an embodiment of the present invention.
The same or similar reference numbers in the drawings identify the same or similar elements.
Detailed Description
In order to make the objects, contents and advantages of the present invention clearer, the following detailed description of the embodiments of the present invention will be made in conjunction with the accompanying drawings and examples.
Fig. 1 is a schematic diagram of a capacitive uncooled focal plane detector and a readout circuit according to the present invention, in which fig. 1 is an enlarged diagram of the readout circuit for a capacitive uncooled focal plane, fig. 2 is a detector array, fig. 3 is a pixel input unit array, fig. 4 is a pixel input unit circuit, and fig. 5 is a pixel input unit circuit.
Fig. 2 is a schematic diagram of a pixel input unit circuit for a capacitive uncooled focal plane readout circuit according to the present invention, which generally requires less than or equal to 30 micrometers by 30 micrometers due to the limitation of the uncooled focal plane detector on the size of the pixel, so that the capacitance of each pixel of the capacitive uncooled focal plane detector is very small, reaching several pF magnitude. For such small detector capacitance values, the capacitive uncooled focal plane readout circuit may be of the voltage follower (SFD) type, or of the resistive feedback transconductance amplifier (RTIA) type. Among them, the best performance is the RTIA type. Because the capacitance value of the detector is in pF magnitude, the feedback resistance is up to more than 100G magnitude, and the effect of low-pass filtering can be achieved. On the other hand, in the input stage unit circuit, the resistance accuracy and the uniformity of the large resistor are one of the most important parameters of the readout circuit of the capacitive uncooled focal plane detector. The feedback resistor 206 in fig. 2 is the ultra-high impedance resistor with a resistance value R f207 is a capacitor, 208 is an operational amplifier, and 209 is a MOS tube.
Fig. 3 is a layout of an ultra-high impedance measurement apparatus for a capacitive uncooled focal plane read circuit, which includes an input stage array of the capacitive uncooled focal plane read circuit and four ultra-high resistance test structures, the four ultra-high resistance test structures are 301, 302, 303, and 304 in fig. 3, and the four ultra-high resistance test structures are placed on four corners of the capacitive uncooled focal plane read circuit 1, wherein layouts, materials, and processes of the four ultra-high resistance test structures are the same.
Fig. 4 is a layout of an ultra-high resistance test structure of an ultra-high impedance measurement apparatus for a capacitive uncooled focal plane readout circuit according to the present invention, where an ultra-high resistance test structure may include a plurality of ultra-high resistance modules connected in parallel, and as an example shown in this embodiment, an ultra-high resistance test structure 300 includes 50 ultra-high resistance modules 1002, 1003 … … 1048, 1049, 1050 connected in parallel, where the ultra-high resistance test structure 300 further includes two metal connection lines 403, 404 and two pads 401, 402, where the two metal connection lines are used for connecting the 50 ultra-high resistance modules in parallel, and the two pads are respectively connected to the two metal connection lines for probe testing.
Fig. 5 is a layout of an ultra-high resistance module in an ultra-high impedance measurement apparatus for a capacitive uncooled focal plane readout circuit according to the present invention, where an ultra-high resistance module may include a plurality of ultra-high resistances connected in parallel, such as an example given in this embodiment where an ultra-high resistance module 100 includes 20 ultra-high resistances 501, 502, 503 … … 518, 519, 520 connected in parallel and two metal connection lines 531, 532, where the two metal connection lines are used for connecting 20 ultra-high resistances in parallel.
In the embodiment of the present invention, the resistances of the ultra high resistors 501, 502, 503 … … 518, 519, and 520 are identical to the feedback resistor 206 in the capacitance type uncooled focal plane readout circuit, that is, the layout, the material, and the process are identical. Therefore, the resistance of the ultra-high resistance module 100, i.e. the resistance of the two ends of the metal connecting wires 431 and 432, is reduced to 1/20 of the feedback resistor 206, i.e. the resistance of an ultra-high resistance module is RAB＝Rf/20。
Referring to fig. 2, 4 and 5, the resistance values of the ultra-high resistance test structure composed of the ultra-high resistance module 1001, the ultra-high resistance module 1002, the ultra-high resistance module 1003 … …, the ultra-high resistance module 1048, the ultra-high resistance module 1049, the ultra-high resistance module 1050, the metal connecting wires 403 and 404 and the pads 401 and 402, which are the same as the ultra-high resistance module 100, that is, the resistance values of the pads 401 and 402, are reduced to the resistance R of the ultra-high resistance module 100AB1/50, i.e., the resistance value of the ultra-high resistance test structure 300 is reduced to 1/1000, i.e., R, of the feedback resistor 206test＝RAB/50＝Rf/1000。
The invention relates to an ultra-high impedance measuring device for a capacitive uncooled focal plane read-out circuit, which consists of an input stage array of the capacitive uncooled focal plane read-out circuit and four ultra-high resistance test structures 301, 302, 303 and 304; each ultra-high resistance test structure is formed by adopting 1000 ultra-high resistances (and a feedback resistor R of a pixel input unit array)fIdentical) are connected in parallel, the resistance of each ultra-high resistance test structure is reduced to 1/1000 of the feedback resistor 206, which is about 600M omega, so that the feedback resistor R of the pixel input unit array of the capacitive uncooled focal plane readout circuit can be realized by using a common high impedance instrumentfCarrying out rapid and accurate measurement; the uniformity of the pixel input unit array of the capacitive uncooled focal plane read-out circuit can also be tested by four ultrahigh resistance test structures 301, 302, 303 and 304 distributed around the capacitive uncooled focal plane read-out circuit.
The invention relates to an ultra-high impedance measuring device for a capacitive uncooled focal plane reading circuit, which can quickly and accurately measure the input stage feedback resistance of the capacitive uncooled focal plane reading circuit by using a conventional high impedance instrument; the ultrahigh resistance test parts at four corners of the capacitive uncooled focal plane reading circuit are detected, so that the resistance value and uniformity requirements of the input stage feedback resistance of the reading circuit are met; the testability of the capacitance type uncooled focal plane reading circuit is also ensured; and simultaneously, the performance of the uncooled focal plane detector is ensured.
Although the present invention has been described in detail with respect to the exemplary embodiments and advantages thereof, it should be understood that various changes, substitutions, and alterations can be made hereto without departing from the spirit and scope of the invention as defined by the appended claims. For other examples, one of ordinary skill in the art will readily appreciate that the order of the measurement methods may be varied while maintaining the scope of the present invention.
Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure of the present invention, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed, that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the present invention. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.
Claims (6)
1. An ultra-high impedance measuring device for a capacitive uncooled focal plane read-out circuit comprises a capacitive uncooled focal plane read-out circuit pixel input unit array and four ultra-high resistance test structures;
the ultrahigh resistance test structure comprises a plurality of ultrahigh resistance modules which are uniformly arranged;
the plurality of uniformly arranged ultrahigh resistance modules are connected in parallel through two metal connecting wires;
the resistance value of the ultrahigh resistor is completely the same as the feedback resistor of the pixel input unit array of the capacitive uncooled focal plane reading circuit;
the capacitive uncooled focal plane readout circuit is characterized in that the four ultrahigh resistance test structures are respectively positioned at the upper left corner, the upper right corner, the lower left corner and the lower right corner of the capacitive uncooled focal plane readout circuit pixel input unit array;
the ultra-high resistance module comprises a plurality of uniformly arranged ultra-high resistances.
2. The ultra-high impedance measurement device for the capacitive uncooled focal plane readout circuit as claimed in claim 1, wherein the number of the plurality of uniformly arranged ultra-high resistance modules is 50.
3. The ultra-high impedance measurement device of claim 1, wherein the ultra-high resistance test structure comprises two pads connected to the metal connection lines.
4. The ultra-high impedance measurement device of claim 1, wherein the number of the plurality of uniformly arranged ultra-high resistors is 20.
5. The ultra-high impedance measurement device for a capacitive uncooled focal plane readout circuit as claimed in claim 1 or 4, wherein the plurality of uniformly arranged ultra-high resistances are connected in parallel.
6. The ultra-high impedance measurement device for the capacitive uncooled focal plane sensing circuit as claimed in claim 1, wherein the shape, material and fabrication process of the ultra-high impedance measurement device are identical to the feedback resistance of the pixel input unit array of the capacitive uncooled focal plane sensing circuit.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201711042176.3A CN108020723B (en) | 2017-10-30 | 2017-10-30 | Ultra-high impedance measuring device for capacitive uncooled focal plane readout circuit |
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| CN201711042176.3A CN108020723B (en) | 2017-10-30 | 2017-10-30 | Ultra-high impedance measuring device for capacitive uncooled focal plane readout circuit |
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| CN108020723B true CN108020723B (en) | 2020-12-04 |
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| CN1794438A (en) * | 2005-10-27 | 2006-06-28 | 中国科学院上海技术物理研究所 | Reliability screening method of infrared focus planardetector |
| CN102564599A (en) * | 2011-12-23 | 2012-07-11 | 电子科技大学 | Readout circuit in infrared focal plane array and reference resistor of readout circuit as well as manufacturing method of reference resistor |
| CN103776544A (en) * | 2014-01-09 | 2014-05-07 | 电子科技大学 | Readout circuit of uncooled infrared focal plane array |
| CN104729722A (en) * | 2015-04-14 | 2015-06-24 | 中国电子科技集团公司第四十四研究所 | CTIA type CMOS focal plane readout circuit and signal readout control method |
| CN104897290A (en) * | 2014-03-04 | 2015-09-09 | 中航（重庆）微电子有限公司 | Pixel equivalent circuit and testing method for focal plane array infrared detector |
| CN105092054A (en) * | 2015-07-28 | 2015-11-25 | 昆明物理研究所 | Testing evaluation device for pyroelectric non-refrigeration infrared focal plane detector |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0424569A (en) * | 1990-05-18 | 1992-01-28 | Onoda Cement Co Ltd | Calculating system of sheet resistance |
| CN106597111B (en) * | 2016-12-12 | 2019-02-12 | 南京工程学院 | High-precision two-dimensional electric resistance array reading circuit |
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- 2017-10-30 CN CN201711042176.3A patent/CN108020723B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1794438A (en) * | 2005-10-27 | 2006-06-28 | 中国科学院上海技术物理研究所 | Reliability screening method of infrared focus planardetector |
| CN102564599A (en) * | 2011-12-23 | 2012-07-11 | 电子科技大学 | Readout circuit in infrared focal plane array and reference resistor of readout circuit as well as manufacturing method of reference resistor |
| CN103776544A (en) * | 2014-01-09 | 2014-05-07 | 电子科技大学 | Readout circuit of uncooled infrared focal plane array |
| CN104897290A (en) * | 2014-03-04 | 2015-09-09 | 中航（重庆）微电子有限公司 | Pixel equivalent circuit and testing method for focal plane array infrared detector |
| CN104729722A (en) * | 2015-04-14 | 2015-06-24 | 中国电子科技集团公司第四十四研究所 | CTIA type CMOS focal plane readout circuit and signal readout control method |
| CN105092054A (en) * | 2015-07-28 | 2015-11-25 | 昆明物理研究所 | Testing evaluation device for pyroelectric non-refrigeration infrared focal plane detector |
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