CN108018584A - A kind of million acoustic-electric casting machines and method for improving the micro- electroforming uniformity of metal - Google Patents
A kind of million acoustic-electric casting machines and method for improving the micro- electroforming uniformity of metal Download PDFInfo
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- CN108018584A CN108018584A CN201711154700.6A CN201711154700A CN108018584A CN 108018584 A CN108018584 A CN 108018584A CN 201711154700 A CN201711154700 A CN 201711154700A CN 108018584 A CN108018584 A CN 108018584A
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/20—Electroplating using ultrasonics, vibrations
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Abstract
The present invention provides a kind of million acoustic-electric casting machines and method for improving the micro- electroforming uniformity of metal, and during two way alternate mega sonic wave is coupled into electroforming, which includes million sound casting groove, and the million sound casting groove includes piezoelectric ceramics group, electroforming tank, capillary groove and water bath.Electroforming tank adherent fixation inside capillary groove, capillary groove is in water bath by being fixed on the upper cover plate of capillary groove one on water bath.Wherein piezoelectric ceramics group is pasted on outside the two side of electroforming tank, and electroforming tank is quartz material, and wall thickness is half-wavelength of million acoustic frequency used in quartz.Piezoelectric ceramics group is passed through mega sonic wave signal, realizes the time control of two-way million acoustic vibration.The method that million sound improve micro- electroforming uniformity is the making photoresist micro-structure on substrate, realizes that glued membrane is graphical, and applies the mega sonic wave irradiation of two way alternate during electroforming.Operation is simple for the million acoustic-electric casting machines and method of the present invention, and can effectively improve the uniformity of cast layer during the micro- electroforming of metal.
Description
Technical field
The invention belongs to micro-fabrication technology field, is related to a kind of million acoustic-electric casting machines and electrocasting method, more particularly to one
Kind improves the million acoustic-electric casting machines and method of the micro- electroforming uniformity of metal.
Background technology
Prevailing technology of the galvanoplastics as metal micro manufacturing, because it has the characteristics that accuracy of repetition is high, repeatable accuracy is good,
It is commonly used for manufacturing some with the part that Conventional machining methods making is difficult or processing cost is very high, with complex shape.
With the development of nanometer technique, the demand of micro- metal device is continuously increased.During the electroforming of metal microdevices, electric current
Edge effect can cause electric field line easily to be concentrated in edge, metal microdevices after electroforming often there are cast layer fringe region and
The inconsistent cast layer problem of non-uniform of intermediate zone thicknesses.This defect can not only influence the dimensional accuracy and surface matter of device
Amount, reduce electroforming efficiency, extend fabrication cycle, also add the post-processing difficulty and cost of micro-devices fabrication.《Plating and painting
Decorations》The 732-736 pages of 17 phases of volume 33 in 2014 improve CURRENT DISTRIBUTION by adding auxiliary cathode, and then improve the uniform of cast layer
Property.But after adding auxiliary cathode, the current density of cathode surface can reduce, and influence the efficiency of micro- electroforming.《Light laser and ion
Beam》The 63-67 pages of 6 phases of volume 28 in 2016 propose to improve the uniformity of micro- electroforming mould using ultrasound, with no ultrasound contrast, mould
Uniformity improves about 30%.However, the presence of the strong cavitation of ultrasound can produce a degree of damage to micro-structure, influence micro-
The performance of electroforming mould.
While the characteristics of high sound intensity that million sound have, low latitude, high disturbance, can make between sound wave intervention micro nano structure,
Avoid secondary damage of the million sound effect to workpiece surface or micro-structure.Apply million acoustic disturbances during electroforming, can be significant
Electroforming ability is improved, improves electroforming process.Ph.D. Dissertation《Some microelectromechanical systems developments and correlation LIGA techniques are ground
Study carefully》In 4.1.3 and 4.1.4 section, introduce million sound promote electroforming solution mass transfer, improve the big aspect ratio structures of the limit electroforming finished product
Rate, and obtain the Cantilever structure with the big depth-to-width ratio of the limit.Throw-in type in text by the way that SONOSYS companies are produced
MGM054110 model megasonic cleaning instrument is put into micro- electroforming apparatus Electro-FormingUn of KisslerGmBH companies production
It is middle to produce high frequency components to promote electroforming solution mass transfer, propagation efficiency, the direction of propagation, Energy distribution, acoustic streaming of million sound in groove is cast
The million sound modes of action such as effect are entirely then unordered, random and uncontrollable process.Million sound in groove is cast except it is unordered disturbance with
Other outer advantage performances fail to be played, also, also only apply power to million different sound in this text and evaluated,
In addition to million sound apply influence of the power to electroformed apparatus yield rate, there are no million acoustic energy enough improves micro-electroforming cast layer uniformity
Experimental result.
At present, million sound have obtained a degree of application in fields such as precision cleanings, and obtain splendid cleaning
Effect.In the research in electroforming field and using rare report.Also, propose mega sonic wave technology being applied to there has been no document micro-
Research in terms of electroforming cast layer uniformity, million specialized acoustic-electric casting machines do not occur even more.
The content of the invention
In order to solve the above technical problems, the present invention provides a kind of million acoustic-electric casting machines for improving the micro- electroforming uniformity of metal
And method, among megasonic energy to be introduced to micro- electroforming process in a certain way, the electroforming improved during micro- electroforming is uniform
Property, to solve the problems, such as that cast layer present in metal micro structure eletroforming is in uneven thickness, improve the size of eletroforming
Precision, improves electroforming ability.
The technical scheme is that：
A kind of million acoustic-electric casting machines for improving the micro- electroforming uniformity of metal, including device housings, rabbling mechanism, the cathode back of the body
Plate, positive plate, circulation fluid system, power interface, master switch, control and display, power controling box, wherein, it is power interface, total
Switch, control and display, power controling box are sequentially connected electrically and are fixed on the inside of device housings；Million sound casting groove is further included,
The million sound casting groove includes piezoelectric ceramics group, electroforming tank, capillary groove and water bath；Electroforming tank adherent fixation inside capillary groove,
Capillary groove is in water bath by being fixed on the upper cover plate of capillary groove one on water bath；The capillary groove is meeting piezoelectricity
Requirement during ceramics group live line work to water resistance.The piezoelectric ceramics group is pasted on outside the opposite two sides of electroforming tank
Wall, mega sonic wave is radiated from the both direction parallel to electroforming cathode backplates into casting groove；Electroforming tank is quartz material, quartzy cell wall
Thickness is half-wavelength of the megasonic frequency used in quartz, it is possible to achieve the high efficiency radiation of acoustic wave energy.
Further, million frequency of source of above-mentioned piezoelectric ceramics group are in more than 1MHz.
Further, each piezoelectric ceramic piece is bar shaped sheet piezoelectric ceramics in above-mentioned piezoelectric ceramics group, piezoelectric ceramic piece without
Gap close-packed arrays, and each piezoelectric ceramic piece consistency of thickness, to meet the requirement of emittance uniformity in casting groove.
Further, above-mentioned piezoelectric ceramics group is worked independently by million acoustic generator electrical parallels, each piezoelectric ceramic piece.
Further, above-mentioned circulation fluid system includes pipe fitting, follows liquid pipe, filter, follows liquid pump, it is characterised in that pipe connects
Head is drawn by the collector nozzle at quartz cell bottom, and connection follows liquid pipe A, through capillary groove and water bath, is entered by filter and is followed liquid pump,
And be recycled to again in quartz cell via following liquid pipe B, to realize the circulating filtration of electroforming solution.
Further, above-mentioned minus plate is fixed on rabbling mechanism and suspends in million sound casting groove；Rabbling mechanism passes through fixation
Plate and support column are fixedly installed in million sound casting groove top, realize cathode agitating function.Optionally, positive plate is fixed on mixer
Structure, realizes the agitating function of casting liquid in casting groove.
Further, above-mentioned power controling box includes mega sonic wave generator, DC power supply, temperature control with control and display
Table, contactor, the time relay, electroforming power supply, wherein, on DC power supply, mega sonic wave generator and million sound casting groove two side
Piezoelectric ceramics is sequentially connected electrically, and is passed through mega sonic wave signal for both sides piezoelectric ceramics, is realized the time control of sound source vibration, make million sound
Energy is by specific form in casting groove internal irradiation；DC power supply is electrically connected with rabbling mechanism electrode, to realize rabbling mechanism
Reciprocating action；DC power supply is electrically connected with following liquid pump, and control follows the work of liquid pump break-make；Electroforming power supply and cathode backplates, positive plate
It is electrically connected, realizes and control the progress of electrochemical reaction process；Temp controlled meter is electrically connected with thermocouple, electric heating tube, realizes water-bath
The water bath with thermostatic control of groove.The method that above-mentioned million acoustic-electrics casting machine improves the micro- electroforming uniformity of metal, including step are as follows：
(1) standards such as photoresist micro-structure, substrate grinding, polishing, spin coating, photoresist exposure, development are made on substrate
Technique, realizes that glued membrane is graphical, exposes conductive substrates；
(2) the mega sonic wave irradiation of two way alternate is applied during electroforming：Substrate is fixed on the cathode of million acoustic-electric casting machines
Backboard, passage time relay control mega sonic wave generator excitation casting groove both sides piezoelectric ceramic vibration, piezoelectric ceramics radiate million sound
Ripple replaces radiative acoustic wave parallel to substrate through quartzy cell wall, sound wave in casting groove.
Specially：During work, power on, master switch is opened, and temperature detect switch (TDS) is opened, and is set water bath heating temperature, is treated water
After temperature is heated to required operating temperature, electroforming solution is poured into million sound casting groove, rabbling mechanism will be provided with the moon of substrate to be deposited
Pole backboard, which is fixed, to be placed into casting groove, and positive plate is inserted in casting groove, is started DC power supply and is powered for mega sonic wave generator, mega sonic wave
Generator produces high-frequency ac electric signal, timely by adjusting time relay setting excited target piezoelectric ceramic piece sequence of movement
Between, both sides piezoelectric ceramics is alternately produced megasonic vibration in casting groove by certain sequential；Meanwhile open and follow liquid pump switch and stir
Switch is mixed, promotes the circulation and stirring of electroforming solution.Finally, electroforming power supply box switch is opened, powers for cathode-anode plate, realizes million sound
Electroforming process is aided in, to improve the uniformity of cast layer.
1. the present invention develop it is a kind of can improve million acoustic-electric casting machines of the micro- electroforming uniformity of metal, and propose and pass through
Two way alternate is acted into million acoustical couplings to the method for improvement uniformity during the micro- eletroforming of metal.The acoustic streaming of mega sonic wave
Effect can promote fresh cast layer to be accumulated to away from Sounnd source direction, and under two-way million sound effect, alternate million several streams push away long-pending effect,
Just deposited non-homogeneous cast layer can be pushed away to product and shakeout, the weak cavitations of million sound can also improve CURRENT DISTRIBUTION, two kinds
Mechanism collective effect, can effectively improve the uniformity of cast layer during the micro- electroforming of metal, improve micro- eletroforming size essence
Degree, improves electroforming process, improves electroforming efficiency.
2. million sound effect of the invention：Sound source working frequency is more than 1MHz, and big with energy density, penetration capacity is strong, empty
The characteristics of change effect is small, to all kinds of micro-structures and micro element not damaged while high frequency components are produced.
3. the quartz material electroforming tank of specific thicknesses has splendid acoustic characteristic, the electroacoustic conversion of million acoustic equipments of the invention
Excellent in efficiency, capacity usage ratio is high, while sound source also belongs to high frequency ultrasound, noiseless interference.
Brief description of the drawings
Fig. 1 is electroforming apparatus entirety 3D views of the present invention；
Fig. 2 is electroforming apparatus structure 3D profiles of the present invention；
Fig. 3 is the 3D profiles of million sound casting groove in the present invention；
Fig. 4 is the 3D profiles of million sound tracks in the present invention；
Fig. 5 is the 3D views of quartz cell in the present invention；
Fig. 6 is the 3D views of rabbling mechanism in the present invention；
Fig. 7 is million acoustic-electric casting machine operation principle schematic diagrams of the invention.
In figure：1 device housings；1a supporting racks A；1b shell bottom plates；1c supporting racks C；2 power interfaces；3 master switch；4 controls
And display；41 power controling boxs；411 DC power supplies；412 mega sonic wave generators；413 time relays；414 electroforming power supplys；
415 AC powers；416 temp controlled meters；417 contactors；5000000 sound cast groove；50000000 sound tracks；500 capillary grooves；501 upper cover plates；51 water-baths
Groove；52 quartz cells；520a quartz groove sidewalls A；520b quartz groove sidewalls B；521 lead wire sets；522 piezoelectric ceramics groups；523 times water
Mouthful；6 rabbling mechanisms；60 direct current generators；61 fixed plates；62 support columns；63 cranks；64 rocking bars；65 guide rails；66 sliding blocks；67 cathodes
Backboard；7 wheels；81 filters；810 filter cores；811 shells；82 follow liquid pump；83 follow liquid pipe；83a follows liquid pipe A；83b follows liquid pipe B；
84 pipe fittings；91 electric heating tubes；92 thermocouples；10 minus plates；11 positive plates.
Embodiment
Illustrated embodiment below in conjunction with the accompanying drawings, the invention will be further described.
A kind of million acoustic-electric casting machine structures for improving the micro- electroforming uniformity of metal are as shown in Figure 1, 2.It includes：Device housings
1, power interface 2, master switch 3, control and display 4, power controling box 41, million sound casting groove 5, rabbling mechanism 6, wheel 7, and
Filter 81, follows liquid pump 82, follows the grade of liquid pipe 83 composition.Million sound casting groove 5 is made of million sound tracks 50, water bath 51, and water bath is fixed
In on supporting rack A1a, electrothermal tube 91 and thermocouple 92 are equipped between million sound tracks and water bath, is fixed on 51 slot bottom of water bath.Follow
Liquid pump 82 is placed on shell bottom plate 1b.Follow liquid pipe A83a to pick out through million sound tracks 50 and water bath 51, connect filter 81, follow liquid
The connection of pipe B83b one end follows liquid pump 82, and the other end passes through water bath 51, accesses in million sound tracks 50.Power controling box 41 is fixed on outer
On shell inner support frame C1c.Power interface 2, master switch 3, control and display 4, power controling box is sequentially connected electrically, and controls million sound
Cast groove 5, rabbling mechanism 6 and switch and the adjusting action for following liquid pump 82.
Such as the partial sectional view that Fig. 3 is million sound casting groove 5, million sound cast groove 5 by capillary groove 500, quartz cell 52,51 groups of water bath
Into capillary groove 500 is fixed on water bath 51 by the upper cover plate 501 integrally set up with it, and rabbling mechanism 6 is fixed on capillary groove
On upper cover plate 501, minus plate 10 is fixed on rabbling mechanism 67, and is suspended in quartz cell 52, and positive plate 11 is positioned over quartz
In groove 52.Filter 81 is made of filter core 810 and shell 811.Pipe fitting 84 is fixed on the bottom of quartz cell 52.
Such as the partial sectional view that Fig. 4 is million sound tracks 50, quartz cell 52 is pasted in capillary groove 500, and piezoelectric ceramics 522 is pasted
In in quartz cell.Fig. 5 show the structure type of quartz cell 52, is pasted on quartzy groove sidewall A520a and quartzy groove sidewall B520b
There is piezoelectric ceramics group 522, lead wire set 521 is welded with piezoelectric ceramics group 522, quartzy trench bottom is provided with collector nozzle 523.
Such as the 3-D view that Fig. 6 is rabbling mechanism 6, including direct current generator 60, fixed plate 61, support column 62, crank 63, shakes
Bar 64, guide rail 65, sliding block 66, cathode backplates 67.Direct current generator 60, crank 63, rocking bar 64, guide rail 65 and sliding block 66 form song
Handle slide block mechanism, drives 67 king of cathode backplates being fixed on sliding block to move back and forth, forms stirring.
The operation principle schematic diagram of the electroforming apparatus of million acoustic-electrics casting is illustrated in figure 7, DC power supply 411 is mega sonic wave
412 input electric power of device, mega sonic wave generator 412 export mega sonic wave signal excitation both sides piezoelectric ceramics group 522 and produce million sound and vibrations
It is dynamic, radiate mega sonic wave into quartz cell 52, the time relay 413 access mega sonic wave generator 412 and piezoelectric ceramics group 522 it
Between, the switch of each piezoelectric ceramic piece and actuation time in both sides piezoelectric ceramics group 522 are controlled, not similar shape is formed in electroforming solution
The acoustic perturbation of formula.AC power 415 provides electrical power for temp controlled meter 416 and contactor 417, and temp controlled meter passes through thermocouple 92
Feedback control contactor break-make, and then 91 break-make of electric heating tube is controlled, realize the thermostatic control in water bath 51.Liquid pump is followed by electricity
Casting liquid is extracted out from quartz cell 52, and is filtered by filter 81, is sent back to again in quartz cell 52 by following liquid pipe 83, is realized electroforming solution
Circulating filtration.Electroforming power supply 414 is powered for minus plate 10 and positive plate 11, realizes cathode electroforming, while rabbling mechanism 6 acts
Realize cathode agitating function.
The method for improving the micro- electroforming uniformity of metal using million acoustic equipments of the present invention, it is real by following basic process steps
It is existing, make photoresist micro-structure on metallic substrates first, by photoetching offset plate figure, the manufacturing process of photoresist micro-structure includes
Substrate grinding, polishing, cleaning, gluing, front baking, exposure is rear to dry, developing process step.
After glued membrane graphically completes, minus plate 10 is fixed on the cathode backplates 67 of million acoustic-electric casting machines, it is non-heavy
Insulation processing is done in product region, opens electroforming apparatus switch 3, and opens million acoustic vibrations, and the sound wave irradiation directions of both sides is parallel to treating
Minus plate 10 is deposited, adjusts actuation time and the order in two-way million several sources, to casting 5 internal irradiation mega sonic wave of groove, million two-way sound
Ripple produce acoustic streaming effect alternately pushes away long-pending cast layer, by non-homogeneous cast layer just deposited in deposition region be bulldozed stand it is even, with this come
Achieve the purpose that million sound improve micro- electroforming uniformity.
Take out electroforming minus plate 10 after the completion of electroforming to remove photoresist processing, the micro- device of metal in uniform thickness on acquisition minus plate
Part.
The uniformity of cast layer during the micro- electroforming of metal can be significantly improved using the method, ensures the usability of micro element
Energy.In current density 2A/dm2, under conditions of electroforming time 1h, obtained relative to the conventional electroforming process without the effect of million sound micro-
Structure cast layer, and use million acoustic equipment of alternating movement of the present invention and the micro-structure uniformity of method making to improve 27%,
As it can be seen that the more uniform micro-structure cast layer of thickness can be obtained using this mega sonic wave method.
Claims (10)
1. it is a kind of improve the micro- electroforming uniformity of metal million acoustic-electric casting machines, including device housings, rabbling mechanism, cathode backplates,
Positive plate, circulation fluid system, power interface, master switch, control and display, power controling box, wherein, power interface, always open
Close, control and display, power controling box are sequentially connected electrically and are fixed on the inside of device housings；It is characterized in that, further include
Million sound cast groove, and the million sound casting groove includes piezoelectric ceramics group, electroforming tank, capillary groove and water bath；Electroforming tank is inside capillary groove
Adherent fixation, capillary groove is in water bath by being fixed on the upper cover plate of capillary groove one on water bath；The piezoelectric ceramics
Group is pasted on the opposite two sides outer wall of electroforming tank, and electroforming tank is quartz material, and quartz cell wall thickness exists for megasonic frequency used
Half-wavelength in quartz.
2. million acoustic-electrics casting machine according to claim 1, it is characterised in that million frequency of source of the piezoelectric ceramics group exist
More than 1MHz.
3. million acoustic-electrics casting machine according to claim 1 or 2, it is characterised in that each piezoelectricity pottery in the piezoelectric ceramics group
Tile is bar shaped sheet piezoelectric ceramics, piezoelectric ceramic piece gapless close-packed arrays, and each piezoelectric ceramic piece consistency of thickness.
4. million acoustic-electrics casting machine according to claim 1 or 2, it is characterised in that the piezoelectric ceramics group is sent out by million sound
Raw device electrical parallel, each piezoelectric ceramic piece work independently.
5. million acoustic-electrics casting machine according to claim 3, it is characterised in that the piezoelectric ceramics group passes through million acoustic generators
Electrical parallel, each piezoelectric ceramic piece work independently.
6. million acoustic-electrics casting machine according to claim 1, it is characterised in that the circulation fluid system includes pipe fitting, follows
Liquid pipe, filter, follows liquid pump, it is characterised in that pipe fitting is drawn by the collector nozzle at quartz cell bottom, and connection follows liquid pipe A, through anti-
Sink and water bath, are entered by filter and follow liquid pump, and are recycled to again in quartz cell via following liquid pipe B.
7. million acoustic-electrics casting machine according to claim 1, it is characterised in that the minus plate is fixed on rabbling mechanism and hangs
Insert in million sound casting groove；Rabbling mechanism is fixedly installed in million sound by fixed plate and support column and casts groove top.
8. million acoustic-electrics casting machine according to claim 7, it is characterised in that positive plate is fixed on rabbling mechanism, realizes casting
The agitating function of casting liquid in groove.
9. million acoustic-electrics casting machine according to claim 1, it is characterised in that the power controling box and control and display
Including mega sonic wave generator, DC power supply, temp controlled meter, contactor, the time relay, electroforming power supply, wherein, DC power supply, million
Sonic generator is sequentially connected electrically with the piezoelectric ceramics on million sound casting groove two side；DC power supply is electrically connected with rabbling mechanism electrode
Connect；DC power supply is electrically connected with following liquid pump；Electroforming power supply is electrically connected with cathode backplates, positive plate；Temp controlled meter adds with thermocouple, electricity
Heat pipe is electrically connected.
10. the method that any million acoustic-electric casting machines of claim 1~9 improve the micro- electroforming uniformity of metal, its feature exist
In, including step is as follows：
(1) the standard works such as photoresist micro-structure, substrate grinding, polishing, spin coating, photoresist exposure, development are made on substrate
Skill, realizes that glued membrane is graphical, exposes conductive substrates；
(2) the mega sonic wave irradiation of two way alternate is applied during electroforming：Substrate is fixed on the cathode back of the body of million acoustic-electric casting machines
Plate, passage time relay control mega sonic wave generator excitation casting groove both sides piezoelectric ceramic vibration, piezoelectric ceramics radiation mega sonic wave,
Mega sonic wave is alternately radiated through quartzy cell wall and parallel to substrate in casting groove.
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| CN109773292A (en) * | 2019-03-01 | 2019-05-21 | 大连理工大学 | A kind of device and method of million aural maskings Electrolyzed Processing high aspect ratio microstructures |
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| CN114250493A (en) * | 2021-12-21 | 2022-03-29 | 广西科技大学 | Method for processing high-temperature-resistant and smooth-side-wall-surface parts for vacuum devices |
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| CN108018584B (en) | 2020-04-07 |
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