CN108018584B - Megasonic electroforming equipment and method for improving metal micro electroforming uniformity - Google Patents
Megasonic electroforming equipment and method for improving metal micro electroforming uniformity Download PDFInfo
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- 238000005323 electroforming Methods 0.000 title claims abstract description 107
- 238000000034 method Methods 0.000 title claims abstract description 51
- 239000002184 metal Substances 0.000 title claims abstract description 22
- 238000005266 casting Methods 0.000 claims abstract description 44
- 239000000919 ceramic Substances 0.000 claims abstract description 37
- 239000010453 quartz Substances 0.000 claims abstract description 31
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 26
- 230000008569 process Effects 0.000 claims abstract description 23
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000004519 manufacturing process Methods 0.000 claims abstract description 10
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 10
- 230000002457 bidirectional effect Effects 0.000 claims abstract description 8
- 239000007788 liquid Substances 0.000 claims description 27
- 238000003756 stirring Methods 0.000 claims description 27
- 230000007246 mechanism Effects 0.000 claims description 23
- 238000005485 electric heating Methods 0.000 claims description 5
- 238000000227 grinding Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 238000000059 patterning Methods 0.000 abstract description 4
- 239000003292 glue Substances 0.000 abstract 1
- 230000009471 action Effects 0.000 description 13
- 230000000694 effects Effects 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
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- 238000002604 ultrasonography Methods 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
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- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D21/00—Processes for servicing or operating cells for electrolytic coating
- C25D21/10—Agitating of electrolytes; Moving of racks
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
- C25D5/20—Electroplating using ultrasonics, vibrations
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- Chemical Kinetics & Catalysis (AREA)
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- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
The invention provides megasonic electroforming equipment and a method for improving uniformity of metal micro electroforming. The electroforming tank is fixed to the wall inside the waterproof tank, and the waterproof tank is fixed on the water bath through an upper cover plate integrated with the waterproof tank in the water bath. The piezoelectric ceramic group is adhered to the two side walls of the electroforming tank, the electroforming tank is made of quartz, and the wall thickness is half wavelength of the used megasonic frequency in the quartz. The piezoelectric ceramic group is introduced with megasonic signals to realize the time control of bidirectional megasonic vibration. The method for improving the uniformity of micro electroforming by megasonic is to manufacture a photoresist microstructure on a substrate, realize the patterning of a glue film and apply megasonic irradiation in a bidirectional alternation manner in the electroforming process. The megasonic electroforming equipment and the megasonic electroforming method are simple and easy to operate, and can effectively improve the uniformity of a casting layer in the metal micro electroforming process.
Description
Technical Field
The invention belongs to the technical field of micro-manufacturing, relates to megasonic electroforming equipment and an electroforming method, and particularly relates to megasonic electroforming equipment and a method for improving uniformity of metal micro-electroforming.
Background
Electroforming is a mainstream process for metal microfabrication, and because of its high replication precision and good repeatability precision, it is often used to manufacture parts with complex shapes that are difficult or costly to manufacture by conventional machining methods. With the development of micro-nano technology, the demand of micro-metal devices is increasing. In the electroforming process of the metal micro-device, the electric field lines are easy to concentrate at the corners due to the edge effect of the current, and the electroforming metal micro-device often has the problem of uneven thickness of the casting layer, wherein the thickness of the casting layer is inconsistent in the edge area and the middle area of the casting layer. The defects not only influence the size precision and the surface quality of the device, reduce the electroforming efficiency and prolong the manufacturing period, but also increase the post-processing difficulty and the cost of the micro device manufacturing. Plating and coating 2014, page 732-736 at volume 33, 17, improves the current distribution by adding an auxiliary cathode, thereby improving the uniformity of the cast layer. However, when the auxiliary cathode is added, the current density on the cathode surface is reduced, which affects the efficiency of micro-electroforming. Intense laser and ion beam 2016, volume 28, 6, pages 63-67, proposes the use of ultrasound to improve the uniformity of a micromold mold, which is improved by about 30% compared to no ultrasound. However, the existence of the ultrasonic strong cavitation can cause a certain degree of damage to the microstructure, and the service performance of the micro electroforming mold is influenced.
The megasonic has the characteristics of high sound intensity, low cavitation and high disturbance, so that the megasonic can intervene between the micro-nano structures and simultaneously avoid the secondary damage of the megasonic effect on the surface of a workpiece or a microstructure. Megasonic disturbance is applied in the electroforming process, so that the electroforming capacity can be obviously improved, and the electroforming process is improved. Section 4.1.3 and section 4.1.4 of doctor's academic papers, "development of several microelectronic mechanical systems and related LIGA process research", megasonics is introduced to promote mass transfer of electroforming liquid, improve electroforming yield of extreme large aspect ratio structure, and obtain cantilever beam microstructure with extreme large aspect ratio. The mass transfer of the electroforming liquid is promoted by putting a throwing type MGM054110 megasonic cleaning instrument manufactured by SONOSYS company into micro electroforming equipment Electro-forming Un manufactured by KisslerGmBH company to generate high-frequency disturbance, and the megasonic action modes such as the propagation efficiency, the propagation direction, the energy distribution, the sound flow action and the like of megasonic in a casting groove are completely disordered, random and uncontrollable processes. The advantages of megasonic in the casting groove except disordered disturbance can not be exerted, and only different megasonic applied power is evaluated, and except the influence of megasonic applied power on the yield of the electroforming device, no experimental result that megasonic can improve the uniformity of the micro-electroforming layer is found.
At present, megasonic is applied to a certain degree in the fields of precision cleaning and the like, and obtains excellent cleaning effect. Few studies and applications in the field of electroforming have been reported. In addition, no document proposes the application of megasonic technology to the uniformity of the micro-electroforming layer, and no specialized megasonic electroforming equipment is available.
Disclosure of Invention
In order to solve the technical problems, the invention provides megasonic electroforming equipment and a method for improving the uniformity of metal micro electroforming, which introduce megasonic energy into a micro electroforming process in a certain mode to improve the electroforming uniformity in the micro electroforming process, solve the problem of uneven thickness of a casting layer in the electroforming process of a metal microstructure, improve the dimensional precision of electroforming process and improve the electroforming capacity.
The technical scheme of the invention is as follows:
the megasonic electroforming equipment for improving the uniformity of metal micro electroforming comprises an equipment shell, a stirring mechanism, a cathode back plate, an anode plate, a circulating liquid system, a power supply interface, a master switch, a control and display device and a power supply control box, wherein the power supply interface, the master switch, the control and display device and the power supply control box are sequentially electrically connected and fixed in the equipment shell; the megasonic casting tank comprises a piezoelectric ceramic group, an electroforming tank, a waterproof tank and a water bath tank; the electroforming tank is fixed in the waterproof tank by attaching to the wall, and the waterproof tank is fixed on the water bath tank through an upper cover plate integrated with the waterproof tank in the water bath tank; the waterproof groove is used for meeting the requirement of the piezoelectric ceramic group band electrician on waterproof performance in the working process. The piezoelectric ceramic group is adhered to the outer walls of two opposite side surfaces of the electroforming tank, and megasonic waves are radiated into the electroforming tank from two directions parallel to the electroforming cathode back plate; the electroforming tank is made of quartz, the wall thickness of the quartz tank is half wavelength of the megasonic frequency used in the quartz, and high-efficiency radiation of sonic energy can be realized.
Furthermore, the megasonic source frequency of the piezoelectric ceramic group is more than 1 MHz.
Furthermore, each piezoelectric ceramic piece in the piezoelectric ceramic group is a strip-shaped sheet piezoelectric ceramic, the piezoelectric ceramic pieces are closely arranged without gaps, and the thickness of each piezoelectric ceramic piece is consistent so as to meet the requirement of uniformity of radiation energy in the casting tank.
Furthermore, the piezoelectric ceramic groups are electrically connected in parallel through the megasonic generator, and each piezoelectric ceramic piece works independently.
Furthermore, the circulating liquid system comprises a pipe joint, a liquid circulating pipe, a filter and a liquid circulating pump, and is characterized in that the pipe joint is led out from a water outlet at the bottom of the quartz tank, is connected with the liquid circulating pipe A, passes through the waterproof tank and the water bath tank, enters the liquid circulating pump through the filter, and circulates into the quartz tank through the liquid circulating pipe B again to realize the circulating filtration of the electroforming liquid.
Further, the cathode plate is fixed on the stirring mechanism and is suspended in the megasonic casting tank; the stirring mechanism is fixedly arranged on the upper part of the megasonic casting tank through a fixing plate and a support column, so that the cathode stirring function is realized. Optionally, the anode plate is fixed to the stirring mechanism to achieve a function of stirring the casting solution in the casting tank.
Furthermore, the power supply control box and the control and display comprise a megasonic generator, a direct current power supply, a temperature control meter, a contactor, a time relay and an electroforming power supply, wherein the direct current power supply, the megasonic generator and the piezoelectric ceramics on the two side walls of the megasonic casting groove are sequentially and electrically connected, megasonic signals are introduced into the piezoelectric ceramics on the two sides, the time control of sound source vibration is realized, and the megasonic energy is irradiated in the casting groove in a specific form; the direct current power supply is electrically connected with the electrode of the stirring mechanism and is used for realizing the reciprocating action of the stirring mechanism; the direct current power supply is electrically connected with the circulating pump to control the circulating pump to be switched on and off; the electroforming power supply is electrically connected with the cathode back plate and the anode plate to realize and control the electrochemical reaction process; the temperature control meter is electrically connected with the thermocouple and the electric heating pipe to realize constant temperature water bath of the water bath tank. The method for improving the micro-electroforming uniformity of the metal by the megasonic electroforming equipment comprises the following steps:
manufacturing a photoresist microstructure on a substrate, and performing standard processes of grinding, polishing, photoresist homogenizing, photoresist exposure, developing and the like on the substrate to realize film patterning and expose a conductive substrate;
(II) applying bidirectional alternating megasonic irradiation in the electroforming process: the substrate is fixed on a cathode back plate of megasonic electroforming equipment, a megasonic generator is controlled by a time relay to excite piezoelectric ceramics on two sides of a casting groove to vibrate, the piezoelectric ceramics radiate megasonic waves to penetrate through the wall of the quartz groove, and the sonic waves are parallel to the substrate and radiate the sonic waves in the casting groove alternately.
The method specifically comprises the following steps: when the device works, a power supply is switched on, a main switch is switched on, a temperature control switch is switched on, the water bath heating temperature is set, after the water temperature is heated to the required working temperature, electroforming liquid is poured into a megasonic casting tank, a stirring mechanism fixes and places a cathode back plate installed with a substrate to be deposited into the casting tank, an anode plate is placed into the casting tank, a direct current power supply is started to supply power for a megasonic generator, the megasonic generator generates high-frequency alternating current signals, the action sequence and time of excited piezoelectric ceramic pieces are set through adjusting a time relay, and the piezoelectric ceramics on two sides alternately generate megasonic vibration in the casting tank according to a certain time sequence; meanwhile, a liquid circulating pump switch and a stirring switch are turned on to promote the circulation and the stirring of the electroforming solution. And finally, a switch of the electroforming power box is turned on to supply power to the cathode plate and the anode plate, so that the megasonic auxiliary electroforming process is realized, and the uniformity of a casting layer is improved.
1. The invention develops megasonic electroforming equipment capable of improving the uniformity of metal micro electroforming, and provides a method for improving the uniformity of a casting layer by coupling megasonic with bidirectional alternate action to the metal micro electroforming processing process. The acoustic flow action of megasonic can promote the fresh cast layer to be accumulated in the direction far away from the sound source, under the action of bidirectional megasonic, the alternating megasonic flow accumulation action can accumulate and flatten the non-uniform cast layer just deposited, the megasonic weak cavitation action can also improve the current distribution, and the two mechanisms act together, so that the uniformity of the cast layer in the metal micro-electroforming process can be effectively improved, the micro-electroforming processing dimensional accuracy is improved, the electroforming process is improved, and the electroforming efficiency is improved.
2. The invention has megasonic effect: the working frequency of the sound source is more than 1MHz, the device has the characteristics of high energy density, strong penetrating power and small cavitation, and does not damage various microstructures and microdevices while generating high-frequency disturbance.
3. The quartz electroforming tank with specific thickness has excellent acoustic characteristics, the megasonic equipment has good electroacoustic conversion efficiency and high energy utilization rate, and meanwhile, the sound source belongs to high-frequency ultrasound and has no noise interference.
Drawings
FIG. 1 is an overall 3D view of an electroforming apparatus of the invention;
FIG. 2 is a 3D cross-sectional view of an electroforming apparatus structure of the invention;
FIG. 3 is a 3D cross-sectional view of a megasonic casting tank of the present invention;
fig. 4 is a 3D cross-sectional view of a megasonic tank of the present invention;
FIG. 5 is a 3D view of a quartz cell of the present invention;
FIG. 6 is a 3D view of the stirring mechanism of the present invention;
fig. 7 is a schematic diagram of the working principle of the megasonic electroforming apparatus of the present invention.
In the figure: 1, an equipment housing; 1a supporting frame A; 1b a housing floor; 1C, supporting a frame C; 2, a power interface; 3, a main switch; 4 a control and display; 41 a power supply control box; 411 direct current power supply; a 412 megasonic generator; 413 time relay; 414 electroforming power supply; 415 an alternating current power supply; 416 a temperature control meter; 417 a contactor; 5 megasonic casting groove; a 50 megasonic tank; 500 waterproof grooves; 501, an upper cover plate; a 51 water bath; 52 a quartz cell; 520a quartz groove side wall A; 520B quartz cell sidewall B; 521 lead group; 522 piezoelectric ceramic group; 523, a water outlet; 6, a stirring mechanism; 60 DC motor; 61 fixing the plate; 62 support columns; 63 a crank; 64 rocker levers; 65 a guide rail; 66 sliding blocks; 67 a cathode backing plate; 7, vehicle wheels; 81 a filter; 810 a filter element; 811 housing; 82 a liquid circulating pump; 83a liquid circulation pipe; 83a circulation tube A; 83B a liquid circulation pipe B; 84 pipe joints; 91 an electric heating tube; 92 thermocouple; 10 a cathode plate; 11 an anode plate.
Detailed Description
The invention will be further described with reference to the following examples, which are illustrated in the accompanying drawings.
The structure of a megasonic electroforming device for improving the uniformity of metal micro electroforming is shown in figures 1 and 2. It includes: the device comprises a device shell 1, a power interface 2, a main switch 3, a control and display 4, a power control box 41, a megasonic casting tank 5, a stirring mechanism 6, wheels 7, a filter 81, a circulating liquid pump 82, a circulating liquid pipe 83 and the like. The megasonic casting tank 5 consists of a megasonic tank 50 and a water bath 51, the water bath is fixed on a support frame A1a, an electric heating pipe 91 and a thermocouple 92 are arranged between the megasonic tank and the water bath and fixed at the bottom of the water bath 51. The circulation pump 82 is disposed on the housing bottom plate 1 b. The liquid circulating pipe A83a passes through the megasonic tank 50 and the water bath 51 to be connected with the filter 81, one end of the liquid circulating pipe B83B is connected with the liquid circulating pump 82, and the other end passes through the water bath 51 to be connected into the megasonic tank 50. The power control box 41 is fixed on a support frame C1C in the shell. The power interface 2, the main switch 3, the control and display 4 and the power control box are electrically connected in turn to control the on-off and adjustment actions of the megasonic casting tank 5, the stirring mechanism 6 and the circulating pump 82.
Referring to fig. 3, which is a partial sectional view of the megasonic casting tank 5, the megasonic casting tank 5 is composed of a waterproof tank 500, a quartz tank 52, and a water bath 51, the waterproof tank 500 is fixed on the water bath 51 through an upper cover plate 501 integrated with the waterproof tank 500, a stirring mechanism 6 is fixed on the waterproof tank upper cover plate 501, a cathode plate 10 is fixed on the stirring mechanism 67 and suspended in the quartz tank 52, and an anode plate 11 is placed in the quartz tank 52. The filter 81 is composed of a filter element 810 and a housing 811. The pipe joint 84 is fixed to the bottom of the quartz groove 52.
As shown in fig. 4, which is a partial cross-sectional view of the megasonic tank 50, the quartz tank 52 is attached to the waterproof tank 500, and the piezoelectric ceramic 522 is attached to the quartz tank. Fig. 5 shows the structure of the quartz cell 52, a piezoelectric ceramic group 522 is adhered to the side wall a520a and the side wall B520B of the quartz cell, a lead group 521 is welded to the piezoelectric ceramic group 522, and a drain hole 523 is opened at the bottom of the quartz cell.
Fig. 6 is a three-dimensional view of the stirring mechanism 6, which includes a dc motor 60, a fixed plate 61, a support column 62, a crank 63, a rocker 64, a guide rail 65, a slider 66, and a cathode back plate 67. The DC motor 60, the crank 63, the rocker 64, the guide rail 65 and the slide block 66 form a crank-slide block mechanism, and the crank-slide block mechanism drives the cathode back plate 67 fixed on the slide block to reciprocate to form stirring.
As shown in fig. 7, which is a schematic view of the working principle of the electroforming apparatus for megasonic electroforming, the dc power supply 411 inputs electric power to the megasonic generator 412, the megasonic generator 412 outputs megasonic signals to excite the piezoelectric ceramic sets 522 on both sides to generate megasonic vibrations, and radiates megasonic waves into the quartz groove 52, the time relay 413 is connected between the megasonic generator 412 and the piezoelectric ceramic sets 522 to control the on/off and the operation time of each piezoelectric ceramic piece in the piezoelectric ceramic sets 522 on both sides, and different forms of sonic disturbances are formed in the electroforming solution. The ac power source 415 supplies electric power to the temperature control meter 416 and the contactor 417, and the temperature control meter controls the on-off of the contactor through the feedback of the thermocouple 92, thereby controlling the on-off of the electric heating pipe 91 and realizing the constant temperature control in the water bath 51. The circulating pump pumps the electroforming solution out of the quartz tank 52, filters the electroforming solution through the filter 81, and returns the electroforming solution into the quartz tank 52 through the circulating pipe 83, thereby realizing the circulating filtration of the electroforming solution. The electroforming power source 414 supplies power to the cathode plate 10 and the anode plate 11 to perform cathode electroforming, and the stirring mechanism 6 operates to perform a cathode stirring function.
The method for improving the uniformity of metal micro-electroforming by using the megasonic equipment is realized by the following basic process steps of firstly manufacturing a photoresist microstructure on a metal substrate, and patterning the photoresist, wherein the manufacturing process of the photoresist microstructure comprises the process steps of substrate grinding, polishing, cleaning, gluing, prebaking, exposing, postbaking and developing.
After the film patterning is completed, the cathode plate 10 is fixed on a cathode back plate 67 of megasonic electroforming equipment, insulation processing is carried out on a non-deposition area, a switch 3 of the electroforming equipment is turned on, megasonic vibration is started, the irradiation directions of sound waves at two sides are parallel to the cathode plate 10 to be deposited, the action time and sequence of a bidirectional megasonic sound source are adjusted, megasonic is irradiated into a casting groove 5, a casting layer is alternately pushed and accumulated under the action of sound current generated by the bidirectional megasonic, and a non-uniform casting layer just deposited in the deposition area is pushed and evenly spread, so that the purpose of improving the uniformity of micro electroforming by megasonic is achieved.
After the electroforming is finished, the electroforming cathode plate 10 is taken out for photoresist removing treatment, and the metal micro device with uniform thickness on the cathode plate is obtained.
The method can obviously improve the uniformity of the casting layer in the metal micro-electroforming process and ensure the service performance of the micro device. At a current density of 2A/dm2Compared with the microstructure cast layer obtained in the conventional electroforming process without megasonic effect, the microstructure cast layer manufactured by the alternating action megasonic equipment and the method has the advantages that the uniformity is improved by 27 percent under the condition that the electroforming time is 1h, and thus, the microstructure cast layer with more uniform thickness can be obtained by adopting the megasonic method.
Claims (9)
1. A method for improving the uniformity of metal micro-electroforming by adopting megasonic electroforming equipment is characterized in that the megasonic electroforming equipment comprises an equipment shell, a stirring mechanism, a cathode back plate, an anode plate, a circulating liquid system, a power interface, a main switch, a control and display device and a power control box, wherein the power interface, the main switch, the control and display device and the power control box are sequentially and electrically connected and fixed in the equipment shell; the megasonic casting device is characterized by further comprising a megasonic casting tank, wherein the megasonic casting tank comprises a piezoelectric ceramic group, an electroforming tank, a waterproof tank and a water bath tank; the electroforming tank is fixed in the waterproof tank by attaching to the wall, and the waterproof tank is fixed on the water bath tank through an upper cover plate integrated with the waterproof tank in the water bath tank; the piezoelectric ceramic group is adhered to the outer walls of two opposite side surfaces of the electroforming tank, the electroforming tank is made of quartz, and the wall thickness of the quartz tank is half wavelength of the used megasonic frequency in the quartz;
the method comprises the following steps:
manufacturing a photoresist microstructure on a substrate, grinding, polishing and homogenizing the substrate, exposing and developing the photoresist to expose a conductive base;
(II) applying bidirectional alternating megasonic irradiation in the electroforming process: the substrate is fixed on a cathode back plate of megasonic electroforming equipment, a megasonic generator is controlled by a time relay to excite piezoelectric ceramics on two sides of the casting groove to vibrate, the piezoelectric ceramics radiate megasonic waves, and the megasonic waves penetrate through the wall of the quartz groove and are parallel to the substrate to radiate alternately in the casting groove.
2. The method of claim 1, wherein the megasonic source frequency of the piezo ceramic stack is above 1 MHz.
3. The method according to claim 1 or 2, wherein each piezoceramic sheet in the piezoceramic stack is a strip-shaped sheet-shaped piezoceramic, the piezoceramic sheets are closely arranged without gaps, and the thickness of each piezoceramic sheet is consistent.
4. The method of claim 1 or 2, wherein the sets of piezoelectric ceramics are electrically connected in parallel by megasonic generators, each piezoelectric ceramic piece operating independently.
5. The method of claim 3, wherein the sets of piezoelectric ceramics are electrically connected in parallel by megasonic generators, each piezoelectric ceramic piece operating independently.
6. The method according to claim 1, wherein the circulating liquid system comprises a pipe joint, a circulating liquid pipe, a filter and a circulating liquid pump, and the pipe joint is led out from a drain port at the bottom of the quartz groove, is connected with the circulating liquid pipe A, passes through the waterproof groove and the water bath, enters the circulating liquid pump through the filter and circulates into the quartz groove again through the circulating liquid pipe B.
7. The method of claim 1 wherein the cathode plate is secured to a stirring mechanism and suspended in a megasonic casting tank; the stirring mechanism is fixedly arranged on the upper part of the megasonic casting tank through a fixing plate and a supporting column.
8. The method as claimed in claim 7, wherein the anode plate is fixed to a stirring mechanism for stirring the casting solution in the casting tank.
9. The method of claim 1, wherein the power control box and the control and display comprise a megasonic generator, a dc power supply, a temperature control meter, a contactor, a time relay, and an electroforming power supply, wherein the dc power supply and the megasonic generator are electrically connected to the piezoelectric ceramics on the two side walls of the megasonic casting tank in sequence; the direct current power supply is electrically connected with the electrode of the stirring mechanism; the direct current power supply is electrically connected with the circulating pump; the electroforming power supply is electrically connected with the cathode back plate and the anode plate; the temperature control meter is electrically connected with the thermocouple and the electric heating tube.
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| CN110055563A (en) * | 2019-05-08 | 2019-07-26 | 中国电子科技集团公司第十四研究所 | A method of improving metal heat sink microchannel electroforming uniformity |
| CN113046803A (en) * | 2021-03-16 | 2021-06-29 | 大连理工大学 | Arc-shaped jet cathode moving device and method for improving mask electrolytic machining precision |
| CN114250493A (en) * | 2021-12-21 | 2022-03-29 | 广西科技大学 | Method for processing high-temperature-resistant and smooth-side-wall-surface parts for vacuum devices |
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| WO2014172837A1 (en) * | 2013-04-22 | 2014-10-30 | Acm Research (Shanghai) Inc. | Method and apparatus for uniformly metallization on substrate |
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