CN108016969B - 包括制动模块的塔式升降机 - Google Patents
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Abstract
塔式升降机包括沿竖直方向延伸的主框架、配置成沿主框架在竖直方向上可移动的运载模块、设置在主框架上且使用传动带在竖直方向上移动运载模块的驱动模块以及安装在运载模块上与主框架形成紧密接触以防止运载模块在传动带断裂时坠落的制动模块。
Description
技术领域
本发明涉及包括制动模块的塔式升降机。更具体地,本发明涉及包括用于防止升降物体的运载模块坠落的制动模块的塔式升降机。
背景技术
一般而言,在半导体和显示器制备工艺中,半导体晶片或显示器基板可由塔式升降机在多层净室之间沿竖直方向运输。
]塔式升降机可包括用于运送物体的运载模块、在竖直方向上延伸且用于安装引导运载模块的导轨的主框架以及使用传动带在竖直方向上移动运载模块的驱动模块。同时,当传动带断裂时,运载模块可能坠落,因此需要改进塔式升降机以使其能防止运载模块坠落。
发明内容
本发明提供可防止运载模块坠落的改进型塔式升降机。
根据本发明的一些示范实施例,塔式升降机可包括沿竖直方向延伸的主框架、配置成沿主框架在竖直方向上可移动的运载模块、设置在主框架上且使用传动带在竖直方向上移动运载模块的驱动模块、以及安装在运载模块上并且在传动带断裂时与主框架紧密接触以防止运载模块坠落的制动模块。
根据本发明的一些示范实施例,制动模块可包括制动盘、与制动盘联接且与制动盘的中心偏心地设置的转动轴、以及绕转动轴转动制动盘以使制动盘的外周表面与主框架形成紧密接触从而产生制动力的制动驱动单元。
根据本发明的一些示范实施例,转动轴可从制动盘的中心向上隔开,且制动盘的外周表面低于转动轴的一部分可与主框架形成紧密接触。
根据本发明的一些示范实施例,塔式升降机还可包括用于连接传动带和运载模块的连接单元,且该连接单元可包括安装在运载模块上的连接支架、配置成可在竖直方向上移动穿过连接支架且上部连接至传动带的连接杆和设置在连接支架下方且连接至连接杆以防止连接杆从连接支架向上分离的止动元件。
根据本发明的一些示范实施例,连接单元还可包括夹紧元件,其连接至连接杆的上部且用于保持传动带的下部。
根据本发明的一些示范实施例,夹紧元件可具有竖直延伸的导向槽,且运载模块可具有插入导向槽中的导销。
根据本发明的一些示范实施例,连接单元还可包括弹性元件,其设置在连接支架和止动元件之间,且用于在传动带断裂时向下移动连接杆。
根据本发明的一些示范实施例,制动驱动单元可包括制动驱动元件和止动机构,制动驱动元件用于提供转动力以使制动盘的外周表面的一部分与主框架形成紧密接触,止动机构用于在传动带的正常状态下阻断制动盘的转动且在传动带断裂时的异常状态下释放制动盘的阻断状态以使制动盘转动。此时,止动机构可与连接杆的向下运动一同释放制动盘的阻断状态。
根据本发明的一些示范实施例,止动机构可包括止动条和止动销,止动条连接至连接杆的下部,且止动销位于止动条的一个端部以阻断制动盘的转动。此时,制动盘可具有结合元件,其在传动带的正常状态下干扰止动销。
根据本发明的一些示范实施例,塔式升降机还可包括用于感测传动带断裂的传感器。
根据本发明的一些示范实施例,制动驱动单元可根据传感器的信号转动制动盘。
根据本发明的一些示范实施例,塔式升降机还可包括沿主框架在竖直方向延伸的导轨和安装在运载模块上且在竖直方向沿导轨引导运载模块的引导单元。
根据本发明的一些示范实施例,塔式升降机还可包括沿主框架竖直延伸的导轨、安装在运载模块上且包括放置在导轨后表面上的上固定辊和放置在导轨前表面上的上张紧辊的上引导单元、和安装在运载模块上且包括放置在导轨前表面上的下固定辊和放置在导轨后表面上的下张紧辊的下引导单元。此时,可对上、下张紧辊施加预定的压力以使上、下张紧辊分别与导轨的前后表面形成紧密接触。
根据本发明的一些示范实施例,上、下张紧辊中的每一个可包括偏心轴、可转动地安装至偏心轴的辊和安装在偏心轴上以向辊施加压力使得辊与导轨形成紧密接触的扭力弹簧。
根据本发明的一些示范实施例,上、下引导单元还可包括分别放置在导轨侧表面上的上、下固定侧辊。
根据本发明的一些示范实施例,塔式升降机还可包括设置在运载模块后面且连接至传动带的配重模块、将运载模块和配重模块彼此连接的平衡带以及设置在主框架下部以向平衡带施加预定张力的自动张紧器。
根据本发明的一些示范实施例,运载模块可包括连接至传动带的升降框架和安装至升降框架且用于处理待运输的物体的运载机械手。
上述关于本发明的概述不意图描述本发明的每一所示实施例或所有实施方式。以下详细说明和权利要求更具体地例证了这些实施例。
附图说明
参照结合附图的以下说明可更详细地理解示范实施例,其中:
图1是显示根据本发明一示范实施例的塔式升降机的示意图;
图2是显示图1所示的运载模块的示意图;
图3是显示图1所示的主框架和导轨的平面图;
图4是显示图2所示的制动模块和引导单元的后视图;
图5和6是显示图4所示的制动模块操作的示意图;
图7是显示图4所示的上、下引导单元的侧视图。
尽管各种实施例可修改成不同的修改和替代形式,其具体实施例已通过附图中的示范例的形式被示出且将予以详细说明。但是,应理解,其意图不在于将所主张的发明限定在所述的特定实施例。相反,其意图是涵盖落入由权利要求限定的主题的实质和范围内的所有修改、等值和替代。
具体实施例
下文中,本发明的实施例将参照附图予以详细说明。然而,本发明不限于以下所述的实施例且可以多种其他形式实施。以下实施例被提供不旨在完整完成本发明,而在于将本发明的范围完整传达给本领域的技术人员。
在说明书中,当提及一个元件在另一元件或层之上或连接至另一元件或层,其可直接在另一元件或层之上或直接连接至另一元件或层,或可存在中间元件或层。相反,应理解当提及一元件直接在另一元件或层之上或直接连接至另一元件或层,则是指不存在中间元件。另外,尽管诸如第一、第二和第三之类的术语在本发明的各种实施例中被用于描述各种区域或层,该区域或层不限于上述术语。
以下使用的技术术语仅用于描述特定的实施例,但不限制本发明。此外,除非本文另有限定,包括技术或科学术语在内的所有的术语可具有本领域技术人员所通常理解的含义。
本发明的实施例是参照理想实施例的示意图来说明的。相应地,从附图形式中可预期制备方法的改变和/或可允许的错误。相应地,本发明的实施例并未描述成限定与附图中的特定形式或区域,且包括所述形式的变形。该区域可以完全是示意性的,且其形式可不描述或描绘任何给定区域的精确形式或结构,且不意图限制本发明的范围。
图1是显示根据本发明一示范实施例的塔式升降机的示意图,且图2是显示图1所示的运载模块的示意图。
参照图1和2,根据本发明一示范实施例,塔式升降机100可用于沿竖直方向运输物体。例如,塔式升降机100可用于在半导体或显示器制备工艺中在多层净室之间沿竖直方向运输半导体晶片或显示器基板。
根据本发明一示范实施例,塔式升降机100可包括沿竖直方向延伸的主框架102、设置在主框架102前面且配置成沿主框架102竖直移动的运载模块110、设置在主框架102上且使用传动带142竖直移动运载模块110的驱动模块140、以及安装在运载模块110上并与主框架102紧密接触以防止运载模块110在传动带142断裂时坠落的制动模块150。
此外,塔式升降机100可包括在竖直方向上沿主框架102彼此平行延伸的导轨104、和安装至运载模块110且在竖直方向上沿导轨104引导运载模块110的引导单元120和130。例如,导轨104可分别设置在主框架102的两侧表面上,且上引导单元120和下引导单元130可安装至运载模块110并与导轨104连接。
驱动模块140可包括马达、传动皮带轮等,且传动带142的第一端部可连接至运载模块110。例如,正时皮带可用作传动带142,且传动带142的第二端部可连接至配重模块144。配重模块144可设置在运载模块110后面且可用于稳定地竖直移动运载模块110。此外,运载模块110和配重模块144可通过平衡带146彼此连接,且自动张紧器148可设置在主框架102的下部上以对平衡带146施加预定张力。
参照图2,运载模块110可包括升降框架112和运载机械手118,升降框架112具有后表面,上、下引导单元120和130以及制动模块150安装在该后表面上,运载机械手118用于处理诸如半导体晶片或显示器基板之类的物体。例如,升降框架112可包括升降板114和支撑板116,升降板114具有后表面,运载机械手118设置在支撑板116上。运载机械手118可处理接收容器10,如用于接收半导体晶片的FOUPs(前开式晶片传送盒)。此外,运载模块110可包括用于保持接收容器10的保持单元119。
制动模块150可安装至升降框架112的后表面,且可将制动盘152(见图5)拉至与主框架102紧密接触以产生用于将运载模块110止动的制动力。也就是说,制动模块150可将制动盘152和主框架102之间的摩擦力用作制动力。
图3是显示图1所示的主框架和导轨的平面图,图4是显示图2所示的制动模块和引导单元的后视图,且图5和6是显示图4所示的制动模块的操作的示意图。
参照图3至6,制动模块150可安装至升降框架112的后表面以对应主框架102的侧表面。例如,一对制动模块150可安装至升降框架112的后表面,且制动模块150中的每一个可包括一个制动盘152、与制动盘152连接且从制动盘152的中心偏心设置的转动轴154以及制动驱动单元156,制动驱动单元156用于绕转动轴154转动制动盘152以使制动盘152的外周表面与主框架102形成紧密接触从而产生制动力。
尤其地,转动轴154可与制动盘152的中心向上间隔开,且制动盘152的外周表面位于转动轴154下的一部分可通过制动驱动单元156被拉至与主框架102紧密接触。此时,由于制动盘152的下旋转半径大于上旋转半径,制动盘152的转动可停止,且足够的制动力可由此在主框架102的侧表面和制动盘152之间产生。
传动带142可通过连接单元170连接至运载模块110。连接单元170中的每一个可包括安装至运载模块110的连接支架172、配置成竖直可移动穿过连接支架172且具有连接至传动带142的上部的连接杆174、以及设置在连接支架172下面且连接至连接杆174以防止连接杆174从连接支架172向上分开的止动元件176。
连接支架172可具有矩形块的形状且可通过紧固元件如螺栓安装至升降板114。例如,双头螺栓可用作连接杆174,且用于保持传动带142下端部的夹紧元件178可通过螺母接合至连接杆174的上端部。夹紧元件178可具有垂直延伸的导槽180,且升降板114可具有插入导槽180中的导销182,如图4所示。
止动元件176可用于支撑运载模块110的重量以及防止连接杆174从连接支架172向上分开。例如,止动元件176可具有圆形盖的形状且可通过螺母接合至连接杆174。
连接单元170可包括弹性元件184,其设置在连接支架172和止动元件176之间。弹性元件184可用于在传动带142断裂时向下移动连接杆174。例如,线圈弹簧可设置在连接支架172和止动元件176之间,且在传动带142断裂时连接杆174和夹紧元件178可通过线圈弹簧的弹性恢复力向下移动。
制动驱动单元156可包括制动驱动元件158和止动机构160,制动驱动元件158用于提供转动力,以使制动盘152的外周表面的一部分被拉至与主框架102紧密接触,止动机构160用于在传动带142的正常状态下阻断制动盘152的转动并在传动带142断裂的异常状态下释放制动盘152的阻断状态以使制动盘152转动。尤其地,止动机构160可与连接杆174的向下运动一同释放制动盘152的断开状态。
例如,线圈弹簧可用作制动驱动元件158,且止动机构160可包括连接至连接杆174的下部的止动条162和设置在止动条162的一个端部上以阻断制动盘152的转动的止动销164。此外,制动盘152可具有接合元件166,其在传动带142的正常状态下干扰止动销164。也就是说,在传动带142的正常状态下,制动盘152的阻断状态可由止动销164和接合元件166维持。然而,当传动带142断裂时,连接杆174和止动条162可由弹性元件184向下移动。此外,止动销164和接合元件166之间的接合状态可被释放,且因此制动盘152可由制动驱动元件158转动。因此,制动盘152的外周表面的部分可被拉至与主框架102紧密接触,由此防止运载模块110坠落。
塔式升降机100可包括传感器190,用于感测传动带142是否断裂。例如,光学传感器可用作传感器190。传感器190可感测止动条162的位置以检测传动带142是否断裂。此外,尽管未在附图中示出,塔式升降机100可包括警报单元(未示出),用于根据传感器190的检测信号通知操作者传动带142的断裂状态。
根据本发明的另一示范例,制动模块150的操作可通过其他的驱动单元(未示出)来进行。例如,其他的驱动单元可包括马达,且马达的操作可通过与传感器190连接的控制器(未示出)来控制。具体地,控制器可根据传感器190的检测信号控制其他驱动单元的操作,以使制动盘152被拉至与主框架102紧密接触。
图7是显示图4所示的上、下引导单元的侧视图。
参照图3、4和7,导轨104可分别设置在主框架102的两侧表面上,且一对上引导单元120和一对下引导单元130可安装在升降板114的后表面上。例如,上引导单元120可设置在升降板114后表面的上侧部上,且下引导单元130可设置在升降板114的后表面的下侧部上。
上引导单元120中的每一个可包括放置在导轨104的后表面104B上的上固定辊122和放置在导轨104前表面104A上的上张紧辊124,且下引导单元130中的每一个可包括放置在导轨104前表面104A上的下固定辊132和放置在导轨104的后表面104B上的下张紧辊134。尤其地,预定的压力可施加在上、下张紧辊124和134上以使上、下张紧辊124和134被拉至分别与导轨104的前表面和后表面104A和104B紧密接触。
同时,参照图2,因为运载模块110的重心位于升降板114前,转矩可以顺时针方向施加在运载模块110上。因此,上、下固定辊122和123可通过转矩被拉至分别与导轨104的后表面和前表面104B和104A紧密接触。
如上所述,因为上、下固定辊122和132和上、下张紧辊124和134可通过转矩和压力被拉至与导轨104紧密接触,运载模块110的竖直运动时的振动和噪音可极大地减少。
参照图7,上引导单元120中的每一个可包括上支架126,上固定辊122和上张紧辊124安装在其上,且下引导单元130中的每一个可包括下支架136,下固定辊132和下张紧辊134安装在其上。同时,制动模块150可安装至上支架126,如图3所示。
根据本发明一示范实施例,上张紧辊124可包括偏心轴124A、使用轴承(未示出)可转动地安装至偏心轴124A的辊124B和安装至偏心轴124A以对辊124B施加压力使得辊124B被拉至与导轨104紧密接触的扭力弹簧124C。此外,下张紧辊134可包括偏心轴134A、使用轴承(未示出)可转动地安装至偏心轴134A的辊134B和安装至偏心轴134A以对辊134B施加压力使得辊134B被拉至与导轨104紧密接触的扭力弹簧134C。
例如,如图7所示,压力通过扭力弹簧124C以逆时针方向施加在偏心轴124A上,且辊124B可因此被拉至与导轨104紧密接触。此外,压力通过扭力弹簧134C以逆时针方向施加在偏心轴134A上,且辊134B可因此被拉至与导轨104紧密接触。
同时,上、下引导单元120和130还可分别包括放置在导轨104的侧表面上的上、下固定侧辊128和138。上、下固定侧辊128和138可用于减少运载模块110竖直移动时的振动和噪音。
根据本发明的示范例,制动模块150可将制动盘152拉至与主框架102紧密接触,以产生用于在传动带142断裂时停止运载模块110的制动力。因此,可防止运载模块110坠落,且此外可极大地减少传动带142的断裂和运载模块110的坠落所导致的费用损失。
尽管已参照特定实施例对塔式升降机100和制动模块150进行了说明,它们并不限于所述实施例。因此,本领域的技术人员应理解,可对其作出各种修改和变化而不背离由所附权利要求所限定的本公开的实质和范围。
Claims (16)
1.塔式升降机,包括:
主框架,其沿竖直方向延伸;
运载模块,其配置成能沿所述主框架在竖直方向上移动;
驱动模块,其设置在所述主框架上且使用传动带在竖直方向上移动所述运载模块;
制动模块,其安装在所述运载模块上并在所述传动带断裂时与所述主框架形成紧密接触以防止所述运载模块坠落;和
连接单元,其用于连接所述传动带和所述运载模块,
其中所述连接单元包括:
连接支架,其安装在所述运载模块上;
连接杆,其配置成在竖直方向上移动穿过所述连接支架且其上部连接至所述传动带;和
止动元件,其设置在所述连接支架以下且联接至所述连接杆以防止所述连接杆从所述连接支架向上分离。
2.如权利要求1所述的塔式升降机,其中所述制动模块包括:
制动盘;
转动轴,其与所述制动盘联接且与所述制动盘的中心偏心设置;和
制动驱动单元,其绕所述转动轴转动所述制动盘以使所述制动盘的外周表面与所述主框架形成紧密接触从而产生制动力。
3.如权利要求2所述的塔式升降机,其中所述转动轴从所述制动盘的中心向上间隔开,且
所述制动盘的所述外周表面位于所述转动轴下方的一部分与所述主框架形成紧密接触。
4.如权利要求2所述的塔式升降机,其中所述连接单元还包括:
夹紧元件,其连接至所述连接杆的上部且用于保持所述传动带的下部。
5.如权利要求4所述的塔式升降机,其中所述夹紧元件具有竖直延伸的导槽;且
所述运载模块可有插入所述导槽中的导销。
6.如权利要求2所述的塔式升降机,其中所述连接单元还包括:
弹性元件,其设置在所述连接支架和所述止动元件之间,且用于在所述传动带断裂时向下移动所述连接杆。
7.如权利要求6所述的塔式升降机,其中所述制动驱动单元包括:
制动驱动元件,其用于提供转动力以使所述制动盘的外周表面的一部分与所述主框架形成紧密接触;和
止动机构,其用于在所述传动带的正常状态下阻断所述制动盘的转动且在所述传动带断裂时的异常状态下释放所述制动盘的转动被阻断的状态以使所述制动盘转动,
其中,所述止动机构与所述连接杆的向下运动一同释放所述制动盘的转动被阻断的状态。
8.如权利要求7所述的塔式升降机,其中所述止动机构包括:
止动条,其连接至所述连接杆的下部;和
止动销,其位于所述止动条的一个端部以阻断所述制动盘的转动,
其中,所述制动盘具有结合元件,其在所述传动带的正常状态下干扰所述止动销。
9.如权利要求2所述的塔式升降机,还包括:
传感器,其用于感测所述传动带的断裂。
10.如权利要求9所述的塔式升降机,其中所述制动驱动单元根据所述传感器的信号转动所述制动盘。
11.如权利要求1所述的塔式升降机,还包括:
导轨,其沿所述主框架在竖直方向延伸;和
引导单元,其安装在所述运载模块上且在竖直方向沿所述导轨引导所述运载模块。
12.如权利要求1所述的塔式升降机,还包括:
导轨,其沿所述主框架在竖直方向延伸;
上引导单元,其安装在所述运载模块上且包括放置在所述导轨后表面上的上固定辊和放置在所述导轨前表面上的上张紧辊;和
下引导单元,其安装在所述运载模块上且包括放置在所述导轨前表面上的下固定辊和放置在所述导轨后表面上的下张紧辊,
其中,可对所述上、下张紧辊施加预定的压力以使所述上、下张紧辊分别与所述导轨的前后表面形成紧密接触。
13.如权利要求12所述的塔式升降机,其中所述上、下张紧辊中的每一个包括:
偏心轴;
辊,其可转动地安装至所述偏心轴;和
扭力弹簧,其安装在所述偏心轴上以向所述辊施加压力使得所述辊与所述导轨形成紧密接触。
14.如权利要求12所述的塔式升降机,其中所述上、下引导单元还包括分别放置在所述导轨侧表面上的上、下固定侧辊。
15.如权利要求1所述的塔式升降机,还包括:
配重模块,其设置在所述运载模块后面且连接至所述传动带;
平衡带,其将所述运载模块和所述配重模块彼此连接;和
自动张紧器,其设置在所述主框架的下部以向所述平衡带施加预定张力。
16.如权利要求1所述的塔式升降机,其中所述运载模块包括:
升降框架,其连接至所述传动带;和
运载机械手,其安装至所述升降框架且用于处理待运输的物体。
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