CN107993958A - Orthogonality compensation method and compensation system in semiconductor defect detection/photoetching - Google Patents
Orthogonality compensation method and compensation system in semiconductor defect detection/photoetching Download PDFInfo
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- CN107993958A CN107993958A CN201711273529.0A CN201711273529A CN107993958A CN 107993958 A CN107993958 A CN 107993958A CN 201711273529 A CN201711273529 A CN 201711273529A CN 107993958 A CN107993958 A CN 107993958A
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- motion platform
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
Abstract
The present invention relates to the orthogonality compensation method in a kind of semiconductor defect detection/photoetching and compensation system, the compensation method of this orthogonality to include：During measuring targets are scanned, to get determinand relative to motion platform in misalignment angle both horizontally and vertically, and real time position compensator is carried out to motion platform；This method and system are during mask plate and wafer is scanned, utilize the deviation of the horizontal and vertical angle got, real time position compensator is carried out to motion platform, and this method and system can effectively realize the image that accurate location is got in mask plate and wafer and thin film circuit detection process.
Description
Technical field
The invention belongs to semiconductor defect detection/technical field of lithography, is related in a kind of semiconductor defect detection/photoetching
Orthogonality compensation method.
Background technology
During semiconductor lithography, the last layer image of mask and wafer need accurately to be scribed at another tomographic image it
On., it is necessary to gather the image of mask and wafer in semiconductor detection process, contrasted with design template (such as GDS), and then
It was found that wherein the defects of.Even if the orthogonality of high-accuracy motion platform is done very good, due to carrying mask and wafer it is true
Empty Acetabula device can all cause motion platform to exist when placing mask and wafer there are installation deviation there are misalignment angle
During scanning, image is not orthogonal, eventually results in the excessive generation flase drop i.e. false defect of deviation.
The content of the invention
The object of the present invention is to provide a kind of orthogonality compensation method and compensation system, to realize mask plate and wafer and thin
Film circuit gets the image of accurate location in detection process.
In order to solve the above technical problem, the present invention provides a kind of orthogonality compensation method, including：
Measuring targets are scanned, and get determinand relative to motion platform in the angle of deviation both horizontally and vertically
Degree, to carry out real time position compensator to motion platform.
Further, during measuring targets are scanned, to get determinand relative to motion platform in water
The misalignment angle of gentle vertical direction, and the method that real time position compensator is carried out to motion platform includes：
Step S1, the horizontal line and vertical line of measuring targets carry out angular surveying, obtain image collecting device relative to treating
Survey object both horizontally and vertically on the first misalignment angle；
Step S2, makes object under test uniform motion, gathers image in same position using image collecting device, calculates image
The figure that horizontal line is gathered with vertical line with area array cameras in image collecting device in the image that line-scan digital camera gathers in harvester
The second misalignment angle of horizontal line and vertical line as in, and then obtain image collecting device and mended relative to the orthogonality of object under test
Repay parameter.
Further, the method for the misalignment angle is calculated in the step S1 to be included：
Step S11, measuring targets are placed on the motion platform, and the motion platform is by motion platform controller
It is controlled；
Step S12, sends positioning instruction, i.e., from a main control computer to motion platform controller
Motion platform acts, so that the visual field of the image collecting device above motion platform is navigated in determinand and wrapped
The region of pattern containing horizontal line or vertical line, and motion platform current location is demarcated；
Step S13, the main control computer send positioning instruction to motion platform controller, i.e.,
The rotation axis rotation of controlled motion platform, the horizontal line in image collecting device or vertical line are revolved just；
Step S14, the main control computer send positioning instruction to motion platform controller, i.e.,
Navigate on the left of determinand, two of right side horizontal Mark points, Mark points are moved to regarding for image collecting device
Field center, records the motion platform coordinate (x1, y1) and (x2, y2) of left and right two Mark points, calculates image collecting device phase
For the horizontal quadrature angle, θ 1 of determinand,
θ 1=arctan [(y2-y1)/(x2-x1)]；
The horizontal quadrature angle, θ 1 is the misalignment angle.
Further, the method for orthogonality compensating parameter is obtained in the step S2 to be included：
So that motion platform uniform motion to step S12 acceptance of the bid positioning postpones, synchronization module is triggered to image collecting device
Send pulse signal so that image collecting device obtains the image of current determinand, and calculates horizontal line in the image or hang down
Straight line relative to horizontal direction or vertical direction angle, θ 2, be second misalignment angle, and as the orthogonality mend
Repay parameter.
Further, the main control computer sends positioning instruction to motion platform controller, i.e.,
Rotation axis rotation θ 2 in controlled motion platform, so that the image that image acquisition device arrives is the positive figure of rotation
Picture.
Further, the orthogonality compensation method further includes：
Step S3, the main control computer send positioning instruction to motion platform controller, i.e.,
X-axis in motion platform is set to be moved along the direction of θ 1+ θ 2, then the movement of stepping axial direction step direction is reciprocal, with reality
Now progressively scan.
Another aspect, present invention also offers a kind of orthogonality compensation system.
The orthogonality compensation system includes：
For placing the motion platform of object under test, the motion platform is controlled by motion platform controller；
One main control computer is suitable for sending positioning instruction to motion platform controller；
Side is equipped with image collecting device on the moving platform；And
Further include：The synchronization module being connected with motion platform controller；
The synchronization module is suitable for sending Image Acquisition pulse signal to image collecting device；
Measuring targets are scanned, and get determinand relative to motion platform in the angle of deviation both horizontally and vertically
Degree, to carry out real time position compensator to motion platform.
Further, the main control computer is suitable for the horizontal line of measuring targets and vertical line carries out angular surveying, obtains image and adopts
Acquisition means relative to object under test both horizontally and vertically on the first misalignment angle；
Make object under test uniform motion again, gather image in same position using image collecting device, calculate Image Acquisition
In the image that horizontal line is gathered with vertical line with area array cameras in image collecting device in the image that line-scan digital camera gathers in device
Second misalignment angle of horizontal line and vertical line, and then obtain image collecting device and compensate ginseng relative to the orthogonality of object under test
Number.
Further, the orthogonality compensation system is obtained by performing orthogonality compensation method as claimed in claim 3
First misalignment angle.
Further, the orthogonality compensation system is obtained by performing orthogonality compensation method as claimed in claim 4
The orthogonality compensating parameter.
The invention has the advantages that this method and system are using (as to be measured to mask plate and wafer and thin film circuit
Object) on horizontal line and vertical line carry out angular surveying, obtain image collecting device relative to the level of mask plate and wafer and
The first misalignment angle in vertical direction, then makes object under test uniform motion, is adopted using image collecting device in same position
Collect image, calculate horizontal line and vertical line and face in image collecting device in the image that line-scan digital camera gathers in image collecting device
Second misalignment angle of horizontal line and vertical line in the image of array camera collection, and then image collecting device is obtained relative to mask
The orthogonality compensating parameter of version and wafer and thin film circuit.During being scanned to mask plate and wafer, using getting
Horizontal and vertical angle deviation, to motion platform carry out real time position compensator.This method and system, which can be realized effectively, to be covered
The image of accurate location is got in film version and wafer and thin film circuit detection process.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples.
Fig. 1 is the method flow diagram in orthogonality compensation method of the present invention；
Fig. 2 is the functional block diagram of orthogonality compensation system of the present invention.
In figure：Motion platform 1, object under test 2.
Embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with
Illustration illustrates the basic structure of the present invention, therefore it only shows composition related to the present invention.
Embodiment 1
A kind of orthogonality compensation method is present embodiments provided, including：
During measuring targets are scanned, to get determinand relative to motion platform horizontal and vertical
The misalignment angle in direction, and real time position compensator is carried out to motion platform.
As shown in Figure 1, specifically, during measuring targets are scanned, to get determinand relative to fortune
Moving platform is in misalignment angle both horizontally and vertically, and the method that real time position compensator is carried out to motion platform includes：
Specifically, it is directed to during measuring targets are scanned, to get determinand relative to motion platform
In misalignment angle both horizontally and vertically；Step S1, the horizontal line and vertical line of measuring targets carry out angular surveying, obtain figure
As harvester relative to object under test both horizontally and vertically on the first misalignment angle；
Real time position compensator is carried out for motion platform；Step S2, makes object under test uniform motion, uses image collector
Put and gather image in same position, calculate horizontal line and vertical line and figure in the image that line-scan digital camera gathers in image collecting device
As the second misalignment angle of horizontal line and vertical line in the image of area array cameras collection in harvester, and then obtain Image Acquisition
Device relative to object under test orthogonality compensating parameter.
In the present embodiment, the method for the misalignment angle is calculated in the step S1 to be included：
Step S11, measuring targets are placed on the motion platform, and the motion platform is by motion platform controller
It is controlled；
Step S12, sends positioning instruction, i.e., from a main control computer to motion platform controller
Motion platform acts, so that the visual field of the image collecting device above motion platform is navigated in determinand and wrapped
The region of pattern containing horizontal line or vertical line, and motion platform current location is demarcated；
Step S13, the main control computer send positioning instruction to motion platform controller, i.e.,
The rotation axis rotation of controlled motion platform, the horizontal line in image collecting device or vertical line are revolved just；And
It can utilize and whether be revolved just using the image viewing figure of image acquisition device.
Step S14, the main control computer send positioning instruction to motion platform controller, i.e.,
Navigate on the left of determinand, two of right side horizontal Mark points, Mark points are moved to regarding for image collecting device
Field center, records the motion platform coordinate (x1, y1) and (x2, y2) of left and right two Mark points, calculates image collecting device phase
For the horizontal quadrature angle, θ 1 of determinand,
θ 1=arctan [(y2-y1)/(x2-x1)]；
The horizontal quadrature angle, θ 1 is first misalignment angle.
Further, the method for orthogonality compensating parameter is obtained in the step S2 to be included：
So that motion platform uniform motion to step S12 acceptance of the bid positioning postpones, synchronization module is triggered to image collecting device
Send pulse signal so that image collecting device obtains the image of current determinand, and calculates horizontal line in the image or hang down
Straight line relative to horizontal direction or vertical direction angle, θ 2, be second misalignment angle, and as the orthogonality mend
Repay parameter.
Also, further included for orthogonality compensation method：The main control computer sends positioning instruction to motion platform controller,
Rotation axis rotation θ 2 i.e. in controlled motion platform, so that the image that image acquisition device arrives is the positive image of rotation.
In the present embodiment, the orthogonality compensation method further includes：Step S3, the main control computer are controlled to motion platform
Device sends positioning instruction, even if X-axis is moved along the direction of θ 1+ θ 2 in motion platform, then stepping axis Y-direction step direction moves
Back and forth, progressively scanned with realizing.
In the present embodiment, described image harvester can include：Area array cameras and line-scan digital camera, can unite in fig. 2
Referred to as camera, and microscope or Guan Jing；Also, motion platform includes synchronizing shaft X, stepping axis Y and vertical axis Z composition；It is described
Object under test includes mask plate and wafer, can also attach thin film circuit.
Embodiment 2
As described in Figure 2, on the basis of embodiment 1, the present embodiment 2 provides a kind of orthogonality compensation system.
The orthogonality compensation system includes：
For placing the motion platform of object under test, the motion platform is controlled by motion platform controller；
One main control computer is suitable for sending positioning instruction to motion platform controller；
Side is equipped with image collecting device on the moving platform；And
Further include：The synchronization module being connected with motion platform controller；
The synchronization module is suitable for sending Image Acquisition pulse signal to image collecting device；
During measuring targets are scanned, to get determinand relative to motion platform horizontal and vertical
The misalignment angle in direction, and real time position compensator is carried out to motion platform.
Preferably, in the present embodiment, the orthogonality compensation system further includes active focusing arrangement, it is suitable for poly- in real time
Burnt function, the function can make object under test during the motion, in real time on the focal plane in image collecting device so that image is adopted
Acquisition means persistently obtain clearly image.This active focusing arrangement can be used in the orthogonality compensation method of embodiment 1.
The main control computer is suitable for the horizontal line of measuring targets and vertical line carries out angular surveying, obtains image collecting device phase
For object under test both horizontally and vertically on the first misalignment angle；
Make object under test uniform motion again, gather image in same position using image collecting device, calculate Image Acquisition
In the image that horizontal line is gathered with vertical line with area array cameras in image collecting device in the image that line-scan digital camera gathers in device
Second misalignment angle of horizontal line and vertical line, and then obtain image collecting device and compensate ginseng relative to the orthogonality of object under test
Number.
The orthogonality compensation system is inclined by performing orthogonality compensation method acquisition described first as described in Example 1
Declinate degree.
The orthogonality compensation system obtains the orthogonality by performing orthogonality compensation method as described in Example 1
Compensating parameter.
The accurate figure that so line-scan digital camera collects, available for follow-up detection, such as carries out D2DB with GDS figures
(Die to database) is detected, and the D2D (Die to Die) of wafer and thin film circuit is detected.
The compensation method of this orthogonality and compensation system can utilize area array cameras, obtain the quadrature compensation ginseng of line-scan digital camera
Number；And in semiconductor detection, compensated by orthogonality, collect correct figure, and then realize accurately detection.
It is complete by above-mentioned description, relevant staff using the above-mentioned desirable embodiment according to the present invention as enlightenment
Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention
Property scope is not limited to the content on specification, it is necessary to determines its technical scope according to right.
Claims (10)
- A kind of 1. orthogonality compensation method, it is characterised in that including：Measuring targets are scanned, and get determinand relative to motion platform in misalignment angle both horizontally and vertically, To carry out real time position compensator to motion platform.
- 2. orthogonality compensation method according to claim 1, it is characterised in thatMeasuring targets are scanned, and get determinand relative to motion platform in misalignment angle both horizontally and vertically, Included with carrying out the method for real time position compensator to motion platform：Step S1, the horizontal line and vertical line of measuring targets carry out angular surveying, obtain image collecting device relative to determinand Body both horizontally and vertically on the first misalignment angle；Step S2, makes object under test uniform motion, gathers image in same position using image collecting device, calculates Image Acquisition In the image that horizontal line is gathered with vertical line with area array cameras in image collecting device in the image that line-scan digital camera gathers in device Second misalignment angle of horizontal line and vertical line, and then obtain image collecting device and compensate ginseng relative to the orthogonality of object under test Number.
- 3. orthogonality compensation method according to claim 2, it is characterised in thatThe method of the misalignment angle is calculated in the step S1 to be included：Step S11, measuring targets are placed on the motion platform, and the motion platform is carried out by motion platform controller Control；Step S12, sends positioning instruction, i.e., from a main control computer to motion platform controllerMotion platform acts, so that the visual field of the image collecting device above motion platform, which navigates to, includes water in determinand The region of the pattern of horizontal line or vertical line, and motion platform current location is demarcated；Step S13, the main control computer send positioning instruction to motion platform controller, i.e.,The rotation axis rotation of controlled motion platform, the horizontal line in image collecting device or vertical line are revolved just；Step S14, the main control computer send positioning instruction to motion platform controller, i.e.,Navigate on the left of determinand, two of right side horizontal Mark points, Mark points are moved in the visual field of image collecting device The heart, records the motion platform coordinate (x1, y1) and (x2, y2) of left and right two Mark points, calculate image collecting device relative to The horizontal quadrature angle, θ 1 of determinand,θ 1=arctan [(y2-y1)/(x2-x1)]；The horizontal quadrature angle, θ 1 is first misalignment angle.
- 4. orthogonality compensation method according to claim 3, it is characterised in thatThe method of orthogonality compensating parameter is obtained in the step S2 to be included：So that motion platform uniform motion to step S12 acceptance of the bid positioning postpones, triggering synchronization module is sent to image collecting device Pulse signal so that image collecting device obtains the image of current determinand, and calculates horizontal line or vertical line in the image Relative to horizontal direction or vertical direction angle, θ 2, be second misalignment angle, and as the orthogonality compensation ginseng Number.
- 5. orthogonality compensation method according to claim 4, it is characterised in thatThe main control computer sends positioning instruction to motion platform controller, i.e.,Rotation axis rotation θ 2 in controlled motion platform, so that the image that image acquisition device arrives is the positive image of rotation.
- 6. orthogonality compensation method according to claim 5, it is characterised in thatThe orthogonality compensation method further includes：Step S3, the main control computer send positioning instruction to motion platform controller, i.e.,X-axis in motion platform is moved along the direction of θ 1+ θ 2, then the movement of stepping axial direction step direction is reciprocal, with realize by Row scanning.
- A kind of 7. orthogonality compensation system, it is characterised in that including：For placing the motion platform of object under test, the motion platform is controlled by motion platform controller；One main control computer is suitable for sending positioning instruction to motion platform controller；Side is equipped with image collecting device on the moving platform；AndFurther include：The synchronization module being connected with motion platform controller；The synchronization module is suitable for sending Image Acquisition pulse signal to image collecting device；Measuring targets are scanned, and get determinand relative to motion platform in misalignment angle both horizontally and vertically, To carry out real time position compensator to motion platform.
- 8. orthogonality compensation system according to claim 7, it is characterised in thatThe main control computer be suitable for measuring targets horizontal line and vertical line carry out angular surveying, obtain image collecting device relative to Object under test both horizontally and vertically on the first misalignment angle；Make object under test uniform motion again, gather image in same position using image collecting device, calculate image collecting device It is horizontal in the image that horizontal line is gathered with vertical line with area array cameras in image collecting device in the image of middle line-scan digital camera collection Second misalignment angle of line and vertical line, and then obtain orthogonality compensating parameter of the image collecting device relative to object under test.
- 9. orthogonality compensation system according to claim 8, it is characterised in thatThe orthogonality compensation system obtains first deviation by performing orthogonality compensation method as claimed in claim 3 Angle.
- 10. orthogonality compensation system according to claim 9, it is characterised in thatThe orthogonality compensation system obtains the orthogonality benefit by performing orthogonality compensation method as claimed in claim 4 Repay parameter.
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| CN111025853A (en) * | 2019-10-23 | 2020-04-17 | 苏州源卓光电科技有限公司 | Alignment method and direct-writing photoetching equipment applying same |
| CN112929569A (en) * | 2021-02-04 | 2021-06-08 | 深圳中科飞测科技股份有限公司 | Detection device and detection method thereof |
| CN113176279A (en) * | 2021-03-19 | 2021-07-27 | 哈工大机器人(中山)无人装备与人工智能研究院 | Pre-positioning device for AOI (automatic optical inspection) of panel |
| CN113470119A (en) * | 2021-07-21 | 2021-10-01 | 东莞市中麒光电技术有限公司 | Method and system for sorting chips into BIN |
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