CN107984101A - A kind of processing method of adjustment sheet class ceramic matric composite cutting - Google Patents
A kind of processing method of adjustment sheet class ceramic matric composite cutting Download PDFInfo
- Publication number
- CN107984101A CN107984101A CN201711249390.6A CN201711249390A CN107984101A CN 107984101 A CN107984101 A CN 107984101A CN 201711249390 A CN201711249390 A CN 201711249390A CN 107984101 A CN107984101 A CN 107984101A
- Authority
- CN
- China
- Prior art keywords
- processing
- adjustment sheet
- matric composite
- ceramic matric
- cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
A kind of processing method of adjustment sheet class ceramic matric composite cutting, belongs to nozzle of aircraft engine tail adjustment sheet cutting processing technical field.This method includes：The workpiece of adjustment sheet class ceramic matric composite is cleaned, drying；Gripped using the frock of femtosecond machining tool, use the distance measuring sensor on femtosecond machining tool and CCD paraxonic detecting systems, positioning；Open dust-extraction unit；A cutting processing is carried out using femtosecond laser processing head part；Secondary cut processing is carried out using femtosecond laser galvanometer part, obtains the adjustment sheet class ceramic matric composite after cutting processing.This method is cut using femtosecond laser, solve traditional diamond-making technique efficiency it is low, it is of high cost, there are the difficult cutting of ceramic matric composite, can not ensure the flawless problem of finished surface.It is processed using this method, efficient, cost is low, reduces substantial amounts of cutter consumption.
Description
Technical field
The present invention relates to nozzle of aircraft engine tail adjustment sheet cutting processing technical field, and in particular to a kind of adjustment sheet class
The processing method of ceramic matric composite cutting.
Background technology
Nozzle of aircraft engine tail is divided into adjustable type and non-adjustable type according to area of injection orifice, in order to make engine various
Good performance can be obtained under operating mode, the engine with reinforcing must use adjustable jet pipe, by varying spout face
Accumulate to change operating mode, its main Types has：It is adjust chip, double adjusting chip, mobile coccygeal body formula and pneumatic adjustable types more.Tradition
The material that adjustment sheet uses is titanium alloy, some adjustment sheet can occur to be broken completely after military service, and nowadays ceramic base is compound
Material becomes the main material of adjustment sheet, but because adjusting the particular/special requirement of chip architecture, using traditional processing means not
It can meet the requirements.
The principle of the processing of femtosecond laser is to absorb laser energy by non-linear absorption process, formed in material internal etc.
Gas ions, non-linear absorption process are mainly realized by multiphoton ionization and avalanche ionization.Then, when plasma density reaches
During certain critical value, material starts to absorb laser energy strongly, until material is removed.Its processing one pulse time is shorter, meaning
Taste act on workpiece time it is very short, heat is not diffused into matrix also, is achieved in " cold working " of femtosecond laser.
Femtosecond laser processing is a non-linear, nonequilibrium process, have threshold effect obvious, minimization heat affected area,
Minimization re cast layer, the features such as controllability is high.
At present, cutter cutting and length are added using traditional machine for such adjustment sheet ceramic matric composite processing current technology
Pulse laser cutting process method.Since the material integral hardness is larger, mechanical processing technique tool wear is serious at present, and is processing
During easily produce burr, deformation layer, surface or the defects of sub-surface micro-crack, cause workpiece quality to decline.Long pulse impulse
It is larger that light processes its power, causes heat affecting serious, micro-crack is difficult to avoid that during retrofit.
Meanwhile in the trimming time contrast test of certain ceramic base composite material member, the wire cutting total time is about 90
Hour/part, efficiency is low and surface roughness is poor；When the Long Pulse LASER trimming total time is about 2 small/part, efficiency can expire
Sufficient production capacity demand, but heat affecting, than more serious, especially there are serious melting trace, taper are larger for marginal position, it is necessary to stays
There is the refine surplus of 1~1.5mm, increase by 10~15 times of workload to follow-up mill processing.
The problem of for presently, there are, propose using femtosecond laser processing technology to such adjustment sheet class ceramic base composite wood
Expect the scheme of cutting, to improve the machining accuracy of product, effectively avoid microdefect, meet that batch production requires.
The content of the invention
The object of the present invention is to provide a kind of processing method of adjustment sheet class ceramic matric composite cutting, first by ceramics
Based composites workpiece, which is placed in supersonic wave cleaning machine, to be cleaned, and ceramic matric composite piece-holder is fixed on machine using frock
On bed.Using the distance measuring sensor and CCD paraxonic detecting systems of machine tool, frock and workpiece are positioned, process equipment
In thousand grades of clean rooms, a cutting processing is carried out using processing head part, femtosecond laser galvanometer part is reused and carries out two
Cutting finishing is realized in secondary cutting processing, the part, the defects of achieving the purpose that to remove re cast layer sheet, oxide layer, micro-crack.Should
Method is cut using femtosecond laser, solves that traditional diamond-making technique efficiency is low, of high cost, there are ceramic matric composite difficulty to cut
Cut, can not ensure the flawless problem of finished surface.It is processed using this method, efficient, cost is low, reduces substantial amounts of knife
Tool consumption.
A kind of processing method of adjustment sheet class ceramic matric composite cutting provided by the invention, comprises the following steps：
Step 1, workpiece pre-processes
The workpiece of adjustment sheet class ceramic matric composite is cleaned, drying, obtains pretreated workpiece；
Step 2, workpiece location and installation
(1) femtosecond machining tool is used, pretreated piece-holder is fixed in the mounting base of lathe using frock；
(2) using the distance measuring sensor and CCD paraxonic detecting systems on femtosecond machining tool, to the frock of clamping workpiece into
Row positioning, determines X, Y, Z-direction coordinate, according to frock and the position relationship of work pieces process initial position, compensates the coordinate value, directly
The initial position of pretreated workpiece is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, femtosecond machining tool is in thousand grades of clean rooms；
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment Laser Processing power is 4-12W, single
Layer sweep time is 500-2000ms, and the individual layer amount of feeding is 0.005-0.02mm, and end angle is 80-90 °, and the processing number of plies is 200-
800, realize Continuous maching, obtain the adjustment sheet class ceramic matric composite after a cutting processing, wherein, completion 30%~
50% overlapping rate；
Step 5, secondary cut is processed
The adjustment sheet class ceramic matric composite after cutting processing is carried out using femtosecond laser galvanometer part secondary
Cutting processing, during which adjustment Laser Processing power is 4-12W, and processing number is 1-10000 times, electric current 0.5-2A, and frequency is
10-100Hz, obtains the adjustment sheet class ceramic matric composite after cutting processing.
In the step 1, the adjustment sheet class ceramic matric composite refers specifically to the aeroplane engine of CMC-SiC materials
Tail efflux door.
In the step 1, the cleaning, is specially placed in ultrasound by the workpiece of adjustment sheet class ceramic matric composite
In ripple cleaning machine, cleaning solution uses the mixed liquor of alcohol and water, wherein, by volume, alcohol：Water=1:(5~10), ultrasound are clear
Wash 10-15min.
In the step 1, the drying is dried up using air gun.
In the step 2 (1), the clamping, its method of clamping steps up for two.
In the step 2 (2), the CCD paraxonic detecting systems, are charge coupling device.
In the step 2 (2), the frock of clamping workpiece is positioned, is specially the locating rod of positioning tool, realizes
Positioning to frock.
The step 3, the purpose of the dedusting are, ensure that in laser processing procedure be not in pollution and material
Remove the phenomenon of dross.
In the step 5, secondary cut is processed as cutting finishing, reaches removal re cast layer, oxide layer, micro-crack and lacks
Sunken purpose.
Of the present invention thousand grades of clean rooms, are thousand grades of clean rooms (also known as dust free room or clean room), according to GB/
T16292-1996, air purity grade scale such as table 1：
Air purity grade scale in table 1GB/T16292-1996
A kind of processing method of adjustment sheet class ceramic matric composite cutting of the present invention, relative to the prior art, it has
Beneficial effect is：
1. the present invention ensures that adjustment sheet class ceramic base is answered by clamping workpiece and the femtosecond machining tool location mechanism of itself
The workpiece of condensation material and the relative feed movement of femtosecond laser processing head.
2. in process, ensure pollution-free and dross in process in ultra-clean state all the time.
Add 3. the processing method that the present invention uses is the compound femtosecond laser of processing head and femtosecond laser under galvanometer two-way
Work method, the pulsewidth of laser are short by 10-12s、10-15S magnitudes, the injection of instantaneous energy, by adjustment sheet class ceramic matric composite
Material direct boiling, the action time of femtosecond laser are short so that energy is taken away rapidly in the form of plasma, and energy comes not
And spread in material internal, it is the process of a cold working, may be regarded as no heat affected area.
4. the processing method of the present invention ensure that the surface quality after the cutting of adjustment sheet adjustment sheet class ceramic matric composite,
Wherein, in whole process, the removing method of material is carried out in the form of evaporating and vaporizing, no material damage, no melting
Phase, therefore without the formation of re cast layer and micro-crack；Due to instantaneous vaporization, material flash evapn in gaseous form, material surface
There is no any splash, reduce the roughness on rapidoprint surface.
5. the processing method of the present invention realizes adjustment sheet class ceramic base by selecting machined parameters and processing program to work out
Composite material cutting processing, it is possible to achieve batch production efficiently, inexpensive.Especially with respect to NC Milling method, swash
Light processing cost is only the 10% of numerical control mill cost, and efficiency is its more than 2 times.Meanwhile it ensure that adjustment sheet ceramic base composite wood
Expect processing quality, suitable for batch production, there is huge potential benefit.
6. the present invention solves the difficult cutting of ceramic matric composite, can not ensure the flawless problem of finished surface, propose
A kind of process of new femtosecond laser cutting, ensures the finishing of workpiece.Relative to Conventional machining methods, femtosecond swashs
Light processing is lost without cutter, processes complete part, can be time control within 30h.Lifting processing efficiency reaches 3 times
More than.
Brief description of the drawings
Fig. 1 cuts into adjustment sheet class ceramic matric composite single process pass and surface quality SEM figures for the present invention；
Fig. 2 is that the super depth of field in the embodiment of the present invention 1 using workpiece after cutting processing of processing head part progress is micro-
Mirror figure；
Fig. 3 is that the super depth of field in the embodiment of the present invention 1 using the workpiece after the progress secondary cut processing of galvanometer part is micro-
Mirror figure.
Embodiment
With reference to embodiment, the present invention is described in further detail.
In following embodiments, the femtosecond machining tool used is 100 type femtosecond laser numerically-controlled machine tool of Microdrill.
In following embodiments, the processing dimension and shape of adjustment sheet class ceramic matric composite are shown in Table 2.
Each structural member processing dimension of 2 adjustment sheet of table and shape
| Sequence number | Key dimension/mm | Shape | Cut lengths/mm |
| 1 | Upper bottom：94；Bottom：120.2；It is high by 76.5 | Approximate trapezoid | 380 |
| 2 | Upper bottom：112.5；Bottom：179；It is high by 203 | Approximate trapezoid | 686 |
| 3 | It is long：494.5；It is wide：114 | Approximate trapezoid | 1161 |
| 4 | Upper bottom：26；Bottom：100；It is high：262 | Approximate trapezoid | 650 |
| 5 | Upper bottom；112 bottoms：177 is high by 257.7 | Approximate trapezoid | 810 |
Embodiment 1
A kind of processing method of adjustment sheet class ceramic matric composite cutting, comprises the following steps：
Step 1, workpiece pre-processes
By in table 2, the workpiece of the adjustment sheet class ceramic matric composite of sequence number 1 is placed in supersonic wave cleaning machine, cleaning solution
Using alcohol and the mixed liquor of water, wherein, by volume, alcohol：Water=1:10, it is cleaned by ultrasonic 10-15min, is blown using air gun
It is dry, obtain pretreated workpiece；
In the step 1, the adjustment sheet class ceramic matric composite refers specifically to the aeroplane engine of CMC-SiC materials
Tail efflux door.
Step 2, workpiece location and installation
(1) 100 type femtosecond machining tools of Microdrill are used, are fixed pretreated piece-holder using frock
In the mounting base of lathe；Fixture should use the mode of two head clampings to be clamped.
(2) it is right using the distance measuring sensor and the locating rod of CCD paraxonic detecting system positioning tools on femtosecond machining tool
The frock of clamping workpiece is positioned, and determines X, Y, Z-direction coordinate, according to frock and the position relationship of work pieces process initial position,
The coordinate value is compensated, directly the initial position of pretreated workpiece is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, femtosecond machining tool is in thousand grades of clean rooms, ensures laser
It is not in the phenomenon that pollution and material remove dross in process.
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment Laser Processing power is 10W, selection
Four wedge processing heads, set the Single Slice Mode time as 1500ms, and the individual layer amount of feeding is 0.008mm, and end angle is 90 °, machined layer
Number is 500, and sets the aperture 90DEG of adjustment sheet, process starting 20DEG, rotary speed 2400RPM, mould taper control amount 40mm,
Single hole processing is carried out, its SEM figure is shown in Fig. 1 after single hole processing.Travelling workpiece, each displacement distance are 0.85mm, form 50%
Overlapping rate, Continuous maching is carried out again according to above-mentioned steps, and then completes unilateral processing, and workpiece then is rotated predetermined angular,
The processing on second side is completed, until four edges are all completed to process, the adjustment sheet class ceramic base after a cutting processing is obtained and answers
Condensation material；Super depth-of-field microscope figure using workpiece after cutting processing of processing head part progress is shown in Fig. 2.
Step 5, secondary cut is processed
The adjustment sheet class ceramic matric composite after cutting processing is carried out using femtosecond laser galvanometer part secondary
Cutting processing, during which adjustment laser machine the 12W under 100% state of power selection, and processing number is 500 times, electric current 2A, frequency
Rate is 20Hz, and sweep length is arranged to unilateral each dimensions length, and each edge is processed successively, obtains the adjusting after cutting processing
Piece class ceramic matric composite, the super depth-of-field microscope figure that the workpiece after secondary cut processing is carried out using galvanometer part are shown in Fig. 3.
Embodiment 2
A kind of processing method of adjustment sheet class ceramic matric composite cutting, comprises the following steps：
Step 1, workpiece pre-processes
By in table 2, the workpiece of the adjustment sheet class ceramic matric composite of sequence number 2 is placed in supersonic wave cleaning machine, cleaning solution
Using alcohol and the mixed liquor of water, wherein, by volume, alcohol：Water=1:5, it is cleaned by ultrasonic 15min, is dried up, obtained using air gun
To pretreated workpiece；
In the step 1, the adjustment sheet class ceramic matric composite refers specifically to the aeroplane engine of CMC-SiC materials
Tail efflux door.
Step 2, workpiece location and installation
(1) 100 type femtosecond machining tools of Microdrill are used, are fixed pretreated piece-holder using frock
In the mounting base of lathe；Fixture should use the mode of two head clampings to be clamped.
(2) it is right using the distance measuring sensor and the locating rod of CCD paraxonic detecting system positioning tools on femtosecond machining tool
The frock of clamping workpiece is positioned, and determines X, Y, Z-direction coordinate, according to frock and the position relationship of work pieces process initial position,
The coordinate value is compensated, directly the initial position of pretreated workpiece is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, femtosecond machining tool is in thousand grades of clean rooms, ensures laser
It is not in the phenomenon that pollution and material remove dross in process.
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment Laser Processing power is 11.4W, choosing
Four wedge processing heads are selected, set the Single Slice Mode time as 2000ms, the individual layer amount of feeding is 0.005mm, and end angle is 90 °, processing
The number of plies is 800, and sets the aperture 90DEG of adjustment sheet, and process originates 20DEG, rotary speed 2400RPM, mould taper control amount
40mm, carries out single hole processing, its SEM figure is shown in Fig. 1 after single hole processing.Travelling workpiece, each displacement distance are 0.85mm, are formed
50% overlapping rate, Continuous maching is carried out again according to above-mentioned steps, and then completes unilateral processing, is then rotated workpiece and is provided
Angle, completes the processing on second side, until four edges are all completed to process, obtains the ceramics of the adjustment sheet class after a cutting processing
Based composites；
Step 5, secondary cut is processed
The adjustment sheet class ceramic matric composite after cutting processing is carried out using femtosecond laser galvanometer part secondary
Cutting processing, during which adjustment laser machine the 12W under 100% state of power selection, and processing number is 1000 times, and electric current is
0.5A, frequency 10Hz, sweep length are arranged to unilateral each dimensions length, and each edge is processed successively, obtains cutting processing
Adjustment sheet class ceramic matric composite afterwards.
Claims (8)
1. a kind of processing method of adjustment sheet class ceramic matric composite cutting, it is characterised in that comprise the following steps：
Step 1, workpiece pre-processes
The workpiece of adjustment sheet class ceramic matric composite is cleaned, drying, obtains pretreated workpiece；
Step 2, workpiece location and installation
(1) femtosecond machining tool is used, pretreated piece-holder is fixed in the mounting base of lathe using frock；
(2) using the distance measuring sensor and CCD paraxonic detecting systems on femtosecond machining tool, the frock of clamping workpiece is determined
Position, determines X, Y, Z-direction coordinate, according to frock and the position relationship of work pieces process initial position, compensates the coordinate value, directly will be pre-
The initial position of workpiece after processing is moved under laser Machining head；
Step 3, dedusting
Dust-extraction unit, and pass hull closure protective door are opened, femtosecond machining tool is in thousand grades of clean rooms；
Step 4, a cutting processing
A cutting processing is carried out using femtosecond laser processing head part, during which adjustment Laser Processing power is 4-12W, and individual layer is swept
It is 500-2000ms to retouch the time, and the individual layer amount of feeding is 0.005-0.02mm, and end angle is 80-90 °, and the processing number of plies is 200-800,
Realize Continuous maching, obtain the adjustment sheet class ceramic matric composite after a cutting processing, wherein, complete 30%~50%
Overlapping rate；
Step 5, secondary cut is processed
Secondary cut is carried out to the adjustment sheet class ceramic matric composite after a cutting processing using femtosecond laser galvanometer part
Processing, during which adjustment Laser Processing power is 4-12W, and processing number is 1-10000 times, electric current 0.5-2A, frequency 10-
100Hz, obtains the adjustment sheet class ceramic matric composite after cutting processing.
2. the processing method of adjustment sheet class ceramic matric composite cutting as claimed in claim 1, it is characterised in that described
In step 1, the nozzle of aircraft engine tail that the adjustment sheet class ceramic matric composite refers specifically to CMC-SiC materials is adjusted
Piece.
3. the processing method of adjustment sheet class ceramic matric composite cutting as claimed in claim 1, it is characterised in that described
In step 1, the workpiece of adjustment sheet class ceramic matric composite, is specially placed in supersonic wave cleaning machine, clearly by the cleaning
Washing lotion uses the mixed liquor of alcohol and water, wherein, by volume, alcohol：Water=1:(5~10), are cleaned by ultrasonic 10-15min.
4. the processing method of adjustment sheet class ceramic matric composite cutting as claimed in claim 1, it is characterised in that described
In step 1, the drying is dried up using air gun.
5. the processing method of adjustment sheet class ceramic matric composite cutting as claimed in claim 1, it is characterised in that described
In step 2 (1), the clamping, its method of clamping steps up for two.
6. the processing method of adjustment sheet class ceramic matric composite cutting as claimed in claim 1, it is characterised in that described
In step 2 (2), the CCD paraxonic detecting systems, are charge coupling device.
7. the processing method of adjustment sheet class ceramic matric composite cutting as claimed in claim 1, it is characterised in that described
In step 2 (2), the frock of clamping workpiece is positioned, is specially the locating rod of positioning tool.
8. the processing method of adjustment sheet class ceramic matric composite cutting as claimed in claim 1, it is characterised in that described
In step 5, secondary cut is processed as cutting finishing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711249390.6A CN107984101B (en) | 2017-12-01 | 2017-12-01 | A kind of processing method of adjustment sheet class ceramic matric composite cutting |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711249390.6A CN107984101B (en) | 2017-12-01 | 2017-12-01 | A kind of processing method of adjustment sheet class ceramic matric composite cutting |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107984101A true CN107984101A (en) | 2018-05-04 |
| CN107984101B CN107984101B (en) | 2019-04-23 |
Family
ID=62035060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711249390.6A Active CN107984101B (en) | 2017-12-01 | 2017-12-01 | A kind of processing method of adjustment sheet class ceramic matric composite cutting |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107984101B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109967885A (en) * | 2019-03-04 | 2019-07-05 | 大族激光科技产业集团股份有限公司 | A kind of laser processing and equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101391860A (en) * | 2007-09-21 | 2009-03-25 | 韩国情报通信大学校产学协力团 | A cutter for substrate using microwaves laser beam and method thereof |
| CN103143841A (en) * | 2013-03-08 | 2013-06-12 | 西北工业大学 | Method for hole machining with picosecond laser |
| WO2014159464A1 (en) * | 2013-03-14 | 2014-10-02 | Applied Materials, Inc. | Multi-layer mask including non-photodefinable laser energy absorbing layer for substrate dicing by laser and plasma etch |
| CN104607808A (en) * | 2014-12-11 | 2015-05-13 | 西北工业大学 | Method for machining micro holes in ceramic matrix composite through femtosecond lasers |
| WO2016083609A2 (en) * | 2014-11-27 | 2016-06-02 | Siltectra Gmbh | Laser-based separation method |
-
2017
- 2017-12-01 CN CN201711249390.6A patent/CN107984101B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101391860A (en) * | 2007-09-21 | 2009-03-25 | 韩国情报通信大学校产学协力团 | A cutter for substrate using microwaves laser beam and method thereof |
| CN103143841A (en) * | 2013-03-08 | 2013-06-12 | 西北工业大学 | Method for hole machining with picosecond laser |
| WO2014159464A1 (en) * | 2013-03-14 | 2014-10-02 | Applied Materials, Inc. | Multi-layer mask including non-photodefinable laser energy absorbing layer for substrate dicing by laser and plasma etch |
| WO2016083609A2 (en) * | 2014-11-27 | 2016-06-02 | Siltectra Gmbh | Laser-based separation method |
| CN104607808A (en) * | 2014-12-11 | 2015-05-13 | 西北工业大学 | Method for machining micro holes in ceramic matrix composite through femtosecond lasers |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109967885A (en) * | 2019-03-04 | 2019-07-05 | 大族激光科技产业集团股份有限公司 | A kind of laser processing and equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107984101B (en) | 2019-04-23 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107127459A (en) | A kind of laser accurate processing method of diamond cutter | |
| WO2019109659A1 (en) | Machining process for mold cavity of semiconductor packaging mold | |
| CN108081137B (en) | A kind of grinding wheel double excitation trimming device and method with gas-liquid parallel connection tubular type | |
| WO2010075716A1 (en) | Digital processing method and device of large or medium-size sand mold | |
| CN102528280A (en) | Laser-water jet composite micromachining process and device | |
| CN101767252A (en) | Laser tool grinding method and tool grinding machine | |
| CN110193755A (en) | A kind of carbon fibre composite grinding processing method | |
| CN206578672U (en) | A kind of integral machining apparatus of full-automatic monocrystalline silicon flour milling rounding | |
| CN110076464B (en) | Method for synchronous processing of attitude-controllable laser milling composite polishing | |
| CN108714771A (en) | A kind of aero-engine compressor stator blade processing method and products thereof | |
| CN109894888B (en) | Freezing support device and method for large thin-walled part | |
| CN108296722A (en) | A kind of multigroup processing technology for closing multi-angle curved surface | |
| CN105081587A (en) | Combined multichannel ceramic cutting method through water jet laser | |
| CN104924040B (en) | A kind of processing method of plate structure part | |
| CN107984101B (en) | A kind of processing method of adjustment sheet class ceramic matric composite cutting | |
| CN109048054B (en) | Multi-axis laser-abrasive water jet precise polishing synchronous processing method | |
| CN110090992A (en) | A kind of processing method of planar targets | |
| CN204182942U (en) | A kind of cutter processing drum barrel ultra-deep inner chamber | |
| CN110586994A (en) | Method for milling large ultrahigh-precision sealing plane by inclined cutter shaft | |
| CN114260826B (en) | Method for improving cutting quality of triaxial low-pressure abrasive jet | |
| CN103111791A (en) | Vane surface ultrasonic wave machining process | |
| CN110977207B (en) | Clamp for thin-wall piece profiled groove and machining method | |
| CN109483153B (en) | Ultrasonic machining method of honeycomb cavity structure | |
| CN210523925U (en) | Coaxial double-edged cutter oblique-insertion machining tool | |
| CN104816129A (en) | Method for processing V-shaped groove of stainless steel composite plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |