CN107958859A - A kind of pendulous device - Google Patents
A kind of pendulous device Download PDFInfo
- Publication number
- CN107958859A CN107958859A CN201711233983.3A CN201711233983A CN107958859A CN 107958859 A CN107958859 A CN 107958859A CN 201711233983 A CN201711233983 A CN 201711233983A CN 107958859 A CN107958859 A CN 107958859A
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- China
- Prior art keywords
- pendulous device
- wabbler mechanism
- plane
- fixed
- deflection
- Prior art date
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/67333—Trays for chips
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Toys (AREA)
Abstract
The present invention discloses a kind of pendulous device, including base and support plate, chassis interior is provided with plane wabbler mechanism and deflection wabbler mechanism, deflection wabbler mechanism is located above plane wabbler mechanism, support plate is installed on above deflection wabbler mechanism, and the surrounding of support plate is provided with limited post, and mounting groove is offered on the inside of limited post, the present invention solves swings inefficient in the prior art, the technical problem that can only be swung in one direction.
Description
Technical field
The present invention relates to technical field of electronic devices, more particularly to a kind of pendulous device.
Background technology
At present on producer bridge production line, traditional handicraft is typically manually putting connection sheet and terminal more than
Into in welding mould, not only take but also need substantial amounts of operating personnel;Chip is typically to use screen tray and sucker design, is manually sieved every time
A disk, then suct chip conversion with sucker and be loaded into welding mould so that some chips regularly enter groove, but such speed
Degree has seriously affected processing efficiency;And use pendulous device and supporting gauge completion side bridge welding connecting terminal, the automatic conversion of chip
Filling, initial estimate production capacity can lift 70%, save manpower, improve efficiency, break traditional all by manually loading
Mode, the patent of Application No. CN201210393280.8, it is a kind of realize new lamination diode manufacturing process chip sieve
Disk, chip screen tray hold chip using vacuum, its upper surface is provided with sucker type hole, and the depth H of sucker type hole is less than the thickness of chip
Degree;The shape of sucker type hole matches with chip, and the size B of sucker type hole is slightly larger than the big face of chip, and the big face of chip accounts for whole type
More than the 90% of bottom hole area;The sucker type hole back side sets vacuum passage, and vacuum passage is small with sucker type hole junction size A
In the size B of sucker type hole, how which is fitted into connection sheet and terminal in screen tray if not handing over.
The content of the invention
The object of the present invention is to provide a kind of pendulous device, solves swing inefficient of the prior art, can only be in list
The technical problem that direction is swung.
A kind of pendulous device, including base and support plate, the chassis interior is provided with plane wabbler mechanism and deflection is shaken
Swinging mechanism, the deflection wabbler mechanism are located above the plane wabbler mechanism, and the support plate is installed on deflection wabbler mechanism
Top, and the surrounding of support plate is provided with limited post, and mounting groove is offered on the inside of the limited post.
Based on the above technical solutions, the present invention can also be improved as follows:
Further, it further includes fixed column, and the fixed column is arranged at intervals, and clamping pincers are provided with above fixed column,
Using this step beneficial effect when in use, screen tray is placed between limited post, is compressed screen tray by clamping pincers.
Further, the deflection wabbler mechanism includes fixed plate, yaw drive motor, driving disc spacing pressing, clutch plate and pallet,
Interval is provided with fixing axle and yaw drive motor above the fixed plate, and driving disc spacing pressing is provided with the yaw drive motor,
The clutch plate is installed in fixing axle, and clutch plate is engaged with driving disc spacing pressing, and the fixing axle upper end is provided with joint hinge, institute
State joint hinge end to be connected with the pallet, the pallet is fixed on below support plate, and the beneficial effect using this step is logical
Overshoot wabbler mechanism swings up and down to realize.
Further, the clutch plate is circumferentially spaced offers groove, and the inside grooves are provided with ball, it is described from
Cam is set above Moving plate, and the pallet lower surface is arranged at intervals with crowning.
Further, the crowning is arcwall face, and the beneficial effect using this step is to ensure to swing by arcwall face
Stability.
Further, the tangent line of the ball upper end is less than the tangent line of the cam upper end, using the beneficial effect of this step
It is easy for realizing upper and lower swing.
Further, the plane wabbler mechanism includes translation auxiliary body, two plane driving motors, two eccentric wheels
With two fixed blocks for being provided with sliding groove, the plane driving motor is arranged at intervals, and is provided with partially above plane driving motor
Heart wheel, the fixed block gap are installed on below fixed plate, and the sliding groove of fixed block is mutually perpendicular to, the eccentric wheel with it is described
Sliding groove is corresponding, and the translation auxiliary body is installed on base, and is translated auxiliary body and be connected with the fixed plate, is used
The beneficial effect of this step is that the swing of horizontal direction is realized using plane wabbler mechanism.
Further, the eccentric wheel includes runner and guide post, and the runner is installed on plane driving motor, described to lead
Column is installed on the eccentric position of runner, and guide post is located inside the sliding groove, and the beneficial effect using this step is by turning
The rotation of wheel, realizes the eccentric rotary of guide post, so as to promote fixed block to move.
Further, the translation auxiliary body includes multiple sliding axles and multiple sliding blocks, the sliding axle interval installation
On base, and sliding axle surrounds rectangular frame, and the sliding block is internally provided with through hole, and the sliding block and the fixed plate spiral shell
Line connects, and the sliding axle is threaded through in through hole, gap is left between the outer wall of the through-hole wall and sliding axle, using this step
Beneficial effect be ensure movement stability.
Further, it further includes controller, and the controller drives motor with the yaw drive motor, plane respectively
Connection, is easy for realizing automated control using the beneficial effect of this step.
Beneficial effects of the present invention:
The present invention is a kind of pendulous device, including two wabbler mechanisms, a swing (X, Y-direction) being horizontally oriented,
The other is Z-direction;It can so ensure connection sheet, chip well into screen tray;Deflection wabbler mechanism in the present invention is adopted
Cooperated with cam and arcwall face, such pallet will produce inclination, then restart plane driving motor, such pallet is just
It can be waved in incline direction, that is, realize the movement of Z-direction;The ball of the present invention is played a supporting role, for limiting what is waved
Amplitude, the amplitude of such tray motion will be stablized;Plane wabbler mechanism in the present invention, is to utilize the eccentric rotation of motor driving
It is dynamic, so as to drive fixed plate to move, the direction of motion of fixed plate is limited by translating auxiliary body, so ensures the stabilization of translation
Property;The configuration of the present invention is simple, it is easy to operate and easy to maintain.
Brief description of the drawings
, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution of the prior art
Embodiment or attached drawing needed to be used in the description of the prior art are briefly described, it should be apparent that, in describing below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
Put, other attached drawings can also be obtained according to these attached drawings.
Fig. 1 is a kind of structure diagram of pendulous device described in the specific embodiment of the invention;
Fig. 2 is a kind of plane wabbler mechanism partial top view of pendulous device described in the specific embodiment of the invention;
Fig. 3 is a kind of fixed plate bottom view of pendulous device described in the specific embodiment of the invention;
Fig. 4 is a kind of deflection wabbler mechanism partial top view of pendulous device described in the specific embodiment of the invention;
Fig. 5 is a kind of pallet bottom view of pendulous device described in the specific embodiment of the invention;
Fig. 6 is the sliding block and the front view of sliding axle assembling of a kind of pendulous device described in the specific embodiment of the invention;
Fig. 7 is a kind of support plate top view of pendulous device described in the specific embodiment of the invention;
Reference numeral:
1- bases;2- support plates;3- plane wabbler mechanisms;4- deflects wabbler mechanism;5- limited posts;6- mounting grooves;7- consolidates
Fixed column;8- clampings clamp;9- fixed plates;10- yaw drive motors;11- driving disc spacing pressings;12- clutch plates;13- pallets;14- fixing axles;
15- joints hinge;16- grooves;17- balls;18- cams;19- crownings;20- planes drive motor;21- eccentric wheels;22- is slided
Dynamic groove;23- fixed blocks;24- runners;25- guide posts;26- sliding axles;27- sliding blocks;28- controllers;29- translates auxiliary body;
30- through holes.
Embodiment
The embodiment of technical solution of the present invention is described in detail below in conjunction with attached drawing.Following embodiments are only used for
Clearly illustrate technical scheme, therefore be only used as example, and the protection model of the present invention cannot be limited with this
Enclose.
It should be noted that unless otherwise indicated, technical term or scientific terminology used in this application should be this hair
The ordinary meaning that bright one of ordinary skill in the art are understood.
In the description of the present application, it is to be understood that term " " center ", " longitudinal direction ", " transverse direction ", " length ", " width ",
" thickness ", " on ", " under ", "front", "rear", "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer ", " up time
The orientation or position relationship of the instruction such as pin ", " counterclockwise ", " axial direction ", " radial direction ", " circumferential direction " be based on orientation shown in the drawings or
Position relationship, is for only for ease of and describes the present invention and simplify description, rather than indicates or imply that signified device or element must
There must be specific orientation, with specific azimuth configuration and operation, therefore be not considered as limiting the invention.
In addition, term " first ", " second " etc. are only used for description purpose, and it is not intended that indicating or implying relatively important
Property or the implicit quantity for indicating indicated technical characteristic.In the description of the present invention, " multiple " are meant that two or more,
Unless otherwise specifically defined.
In this application, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integrally;Can be that machinery connects
Connect or be electrically connected;It can be directly connected, can also be indirectly connected by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements.For the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
In this application, unless otherwise clearly defined and limited, fisrt feature can be with "above" or "below" second feature
It is that the first and second features directly contact, or the first and second features pass through intermediary mediate contact.Moreover, fisrt feature exists
Second feature " on ", " top " and " above " but fisrt feature are directly over second feature or oblique upper, or be merely representative of
Fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be
One feature is immediately below second feature or obliquely downward, or is merely representative of fisrt feature level height and is less than second feature.
Embodiment
As shown in Figure 1, a kind of pendulous device provided by the present invention, including base 1 and support plate 2, inside the base 1
Plane wabbler mechanism 3 and deflection wabbler mechanism 4 are provided with, deflection wabbler mechanism 4 is to be used for realization upper and lower angular adjustment, plane
Wabbler mechanism 3 is used for realization plane rocking, can also drive deflection 4 plane rocking of wabbler mechanism;The deflection wabbler mechanism 4 is located at
The top of plane wabbler mechanism 3, the support plate 2 are installed on 4 top of deflection wabbler mechanism, and the surrounding installation of support plate 2
There is limited post 5, the inner side of the limited post 5 offers mounting groove 6, and the mounting groove 6 of the inner side of limited post 5 is right angled triangle, is
For installing screen tray, screen tray can be multilayer, because there is limited post to fix, so can once sieve several disks, improve work efficiency,
Screen tray surface is provided with multiple connection film traps, and when deflecting wabbler mechanism 4 and plane wabbler mechanism 3 works, support plate 2 is shaken
Pendulum, such screen tray just wave, and part connection sheet will enter in connection film trap, are convenient for operating in next step.
Wherein, as shown in fig. 7, it further includes fixed column 7, the fixed column 7 is arranged at intervals, and the installation of the top of fixed column 7
There is clamping to clamp 8, when in use, screen tray is placed between limited post 5, compressed screen tray by clamping pincers 8, because deflection is shaken
Swinging mechanism 4 can adjust angle, and then plane wabbler mechanism 3 is swung, screen tray integrally will wallowing motion, clamping pincers 8 can
Screen tray is fixed, will not be departed from because of swing.
Wherein, the deflection wabbler mechanism 4 includes fixed plate 9, yaw drive motor 10, driving disc spacing pressing 11,12 and of clutch plate
Pallet 13, the top of fixed plate 9, which is spaced, is provided with fixing axle 14 and yaw drive motor 10, on the yaw drive motor 10
Driving disc spacing pressing 11 is installed, the clutch plate 12 is installed in fixing axle 14, and clutch plate 12 is engaged with driving disc spacing pressing 11, the fixation
14 upper end of axis is provided with joint hinge 15, and 15 end of joint hinge is connected with the pallet 13, and the pallet 13 is fixed on
The lower section of support plate 2;Yaw drive motor 10 drives driving disc spacing pressing 11 to rotate, can with this because driving disc spacing pressing 11 is engaged with clutch plate 12
To drive clutch plate 12 to rotate.
Wherein, the clutch plate 12 is circumferentially spaced offers groove 16, and the groove 16 is internally provided with ball 17, institute
State the top of clutch plate 12 and cam 18 is set, 13 lower surface of pallet is arranged at intervals with crowning 19, and the bottom surface of pallet 13 has more
A crowning 19, the gap between such 13 bottom surface of pallet and 12 upper surface of clutch plate is change, and the present invention is driven
12 surface of disk is additionally provided with ball 17 and cam 18, and when clutch plate 12 rotates, cam 18 will be contacted with crowning 19, so holds in the palm
Disk 13 will produce inclination, and clutch plate 12 ceaselessly rotates, and the position of cam 18 will change, and and diverse location
Crowning 19 contact so that pallet 13 realizes the inclination of different directions;The present invention is additionally provided with ball 17, can so ensure
It can stablize after inclination;The present invention using deflect wabbler mechanism 4 can by reverse connection sheet rocking process from connection film trap
Place skids off, and improves the efficiency waved, and finally enters in connection film trap.
Wherein, the crowning 19 is arcwall face, carries out transition using arcwall face, it is ensured that the stability of swing.
Wherein, the tangent line of 17 upper end of ball is less than the tangent line of 18 upper end of cam, and the height of such cam 18 is high
In the height of ball 17, it can so be capable of the inclination that utility tray produces different directions.
Wherein, the plane wabbler mechanism 3 includes 29, two plane driving 20, two bias of motor of translation auxiliary body
Wheel 21 and two fixed blocks 23 for being provided with sliding groove 22, the plane driving motor 20 are arranged at intervals, and plane driving motor 20
Top is provided with eccentric wheel 21, and the interval of fixed block 23 is installed on the lower section of fixed plate 9, and the sliding groove 22 of fixed block 23 is mutual
Vertically, the eccentric wheel 21 is corresponding with the sliding groove 22, and each eccentric wheel is corresponding with each sliding groove, practical operation
When, as soon as first starting an eccentric wheel, such a wobbler action can drive (such as X-axis) movement in a direction, Ran Houguan
This eccentric wheel is closed, starts another eccentric wheel, can thus drive the movement in another direction (such as Y-axis), the translation
Auxiliary body 29 is installed on base 1, and is translated auxiliary body 29 and be connected with the fixed plate 9, and plane driving motor 20 drives
Eccentric wheel 21 rotates;Eccentric wheel 21 is in 22 inner rotation of sliding groove, so as to promote fixed block 23 to move;And fixed plate 9 and translation
Auxiliary body 3 connects, and such fixed plate 9 can be moved in the plane under the auxiliary of translation auxiliary body 3.
Wherein, the eccentric wheel 21 includes runner 24 and guide post 25, and the runner 24 is installed on plane driving motor 20,
The guide post 25 is installed on the eccentric position of runner 24, and guide post 25 is located inside the sliding groove 22, and guide post 25 is positioned at inclined
Heart position, such guide post 25 will produce certain movement track, so as to promote fixed block 23 to be moved in different directions;And
And the sliding groove 22 of fixed block 23 is mutually perpendicular to, each plane driving motor 20 corresponds to a fixed block 23, such a fixation
Block can just be moved in X-direction, another fixed block can just be moved in Y direction, be class plus foregoing deflection wabbler mechanism 4
Moved like Z-direction, this makes it possible to realize comprehensive movement, so as to improve work efficiency.
Wherein, the translation auxiliary body 29 includes multiple sliding axles 26 and sliding block 27, the interval of sliding axle 26 installation
On base 1, and sliding axle 26 surrounds rectangular frame, and the sliding block 27 is internally provided with through hole 30, and the sliding block 27 and institute
State fixed plate 9 to be threadedly coupled, the sliding axle 26 is threaded through in through hole 30, and at least two sliding blocks on every sliding axle 26
27, gap is left between the outer wall of 30 inner wall of through hole and sliding axle 26, and sliding block 27 moves on sliding axle 26, so moves
With regard to that can limit, the direction of motion of fixed plate 9 can also limit, while leave sky between through hole 30 and sliding axle 26 in direction
Gap, such sliding block along X-axis move when, Y-direction will not be locked;When being moved along Y direction, X-direction will not be locked.
Wherein, it further includes controller 28, and the controller 28 is electric with the yaw drive motor 10, plane driving respectively
Machine 20 connects, and can drive the working frequency of motor 20 and yaw drive motor 10 with control plane using controller 28, improve work
Make efficiency.
The operation principle of the present invention:
When in use, first screen tray is installed in the mounting groove 6 of limited post 5, clamping 8 pairs of screen trays using clamping is fixed,
Start controller 28, controller 28 first starts one of plane driving motor 20, and plane driving motor 20 drives eccentric wheel 21
Rotate so that fixed plate 9 is toward fixed direction movement, and such support plate 2 can also be moved toward certain direction, so as to sieve
Disk also can be toward fixed direction movement;Then another plane driving motor 20 starts, and drives fixed plate 9 toward another direction
Movement, realizes waving for horizontal direction, the foot for being possible to connection sheet at this time can be in the opposite direction;Subsequent start-up yaw drive motor
10, drive driving disc spacing pressing 11 to move, so as to drive clutch plate 12 to move, after clutch plate 12 rotates, cam 18 just can be with crowning
19 contacts, tilt so as to complete pallet 13 toward different directions, as soon as then starting plane driving motor 20, such screen tray can be
Incline direction waves, conversion be loaded into welding mould in, this sample prescription bridge welding connecting terminal, chip just can automatic conversion filling, carry
High workload efficiency.
In the specification of the present invention, numerous specific details are set forth.It is to be appreciated, however, that the embodiment of the present invention can be with
Put into practice in the case of these no details.In some instances, known method, structure and skill is not been shown in detail
Art, so as not to obscure the understanding of this description.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or the spy for combining the embodiment or example description
Point is contained at least one embodiment of the present invention or example.In the present specification, schematic expression of the above terms is not
It must be directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be in office
Combined in an appropriate manner in one or more embodiments or example.In addition, without conflicting with each other, the skill of this area
Art personnel can be tied the different embodiments or example described in this specification and different embodiments or exemplary feature
Close and combine.
Finally it should be noted that:The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations;To the greatest extent
Pipe is described in detail the present invention with reference to foregoing embodiments, it will be understood by those of ordinary skill in the art that:Its according to
Can so modify to the technical solution described in foregoing embodiments, either to which part or all technical characteristic into
Row equivalent substitution;And these modifications or replacement, the essence of appropriate technical solution is departed from various embodiments of the present invention technology
The scope of scheme, it should all cover among the claim of the present invention and the scope of specification.
Claims (10)
1. a kind of pendulous device, it is characterised in that including base and support plate, the chassis interior is provided with plane wabbler mechanism
With deflection wabbler mechanism, the deflection wabbler mechanism is located above the plane wabbler mechanism, and the support plate is installed on deflection
Above wabbler mechanism, and the surrounding of support plate is provided with limited post, and mounting groove is offered on the inside of the limited post.
2. a kind of pendulous device according to claim 1, it is characterised in that it further includes fixed column, the fixed intercolumniation
Clamping pincers are installed every setting, and above fixed column.
A kind of 3. pendulous device according to claim 2, it is characterised in that it is described deflection wabbler mechanism include fixed plate,
Yaw drive motor, driving disc spacing pressing, clutch plate and pallet, fixed plate top interval are provided with fixing axle and deflection driven electricity
Machine, driving disc spacing pressing is provided with the yaw drive motor, the clutch plate is installed in fixing axle, and clutch plate is nibbled with driving disc spacing pressing
Close, the fixing axle upper end is provided with joint hinge, and the joint hinge end is connected with the pallet, and the pallet is fixed on
Below support plate.
A kind of 4. pendulous device according to claim 3, it is characterised in that the clutch plate is circumferentially spaced offer it is recessed
Groove, the inside grooves are provided with ball, set cam above the clutch plate, the pallet lower surface is arranged at intervals with protrusion
Face.
5. a kind of pendulous device according to claim 4, it is characterised in that the crowning is arcwall face.
6. a kind of pendulous device according to claim 5, it is characterised in that the tangent line of the ball upper end is less than described convex
Take turns the tangent line of upper end.
7. a kind of pendulous device according to claim 6, it is characterised in that the plane wabbler mechanism includes translation and aids in
Mechanism, two plane driving motors, two eccentric wheels and two fixed blocks for being provided with sliding groove, the plane driving motor interval
Setting, and eccentric wheel is installed above plane driving motor, the fixed block gap is installed on below fixed plate, and fixed block
Sliding groove is mutually perpendicular to, and the eccentric wheel is corresponding with the sliding groove, and the translation auxiliary body is installed on base, and flat
Auxiliary body is moved to be connected with the fixed plate.
8. a kind of pendulous device according to claim 7, it is characterised in that the eccentric wheel includes runner and guide post, institute
Runner is stated on plane driving motor, the guide post is installed on the eccentric position of runner, and guide post is located at the slip
Inside groove.
9. a kind of pendulous device according to claim 8, it is characterised in that the translation auxiliary body includes multiple slips
Axis and multiple sliding blocks, the sliding axle interval are installed on base, and sliding axle surrounds rectangular frame, is set inside the sliding block
There is through hole, and the sliding block is threadedly coupled with the fixed plate, the sliding axle is threaded through in through hole, the through-hole wall and cunning
Gap is left between the outer wall of moving axis.
10. a kind of pendulous device according to claim 9, it is characterised in that it further includes controller, the controller point
It is not connected with the yaw drive motor, plane driving motor.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201711233983.3A CN107958859B (en) | 2017-11-30 | 2017-11-30 | Swinging device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201711233983.3A CN107958859B (en) | 2017-11-30 | 2017-11-30 | Swinging device |
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CN107958859A true CN107958859A (en) | 2018-04-24 |
CN107958859B CN107958859B (en) | 2023-08-15 |
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CN201711233983.3A Active CN107958859B (en) | 2017-11-30 | 2017-11-30 | Swinging device |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108565234A (en) * | 2018-05-29 | 2018-09-21 | 上海科发电子产品有限公司 | A kind of substrate collating unit for semiconductor devices upside-down mounting assembly |
CN115259883A (en) * | 2022-09-01 | 2022-11-01 | 浙江新纳陶瓷新材有限公司 | Swinging machine for ring installation, ring installation equipment and ring installation method |
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WO2005107931A1 (en) * | 2004-05-03 | 2005-11-17 | Thermo Electron (Oberschleissheim) Gmbh | Agitation device for sample containers |
CN101030551A (en) * | 2006-03-02 | 2007-09-05 | 住友重机械工业株式会社 | Stage device |
WO2014049696A1 (en) * | 2012-09-26 | 2014-04-03 | 三菱電機株式会社 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
CN203820006U (en) * | 2014-05-09 | 2014-09-10 | 扬州虹扬科技发展有限公司 | Swinging discharge device |
CN207558762U (en) * | 2017-11-30 | 2018-06-29 | 扬州虹扬科技发展有限公司 | A kind of pendulous device |
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WO2005107931A1 (en) * | 2004-05-03 | 2005-11-17 | Thermo Electron (Oberschleissheim) Gmbh | Agitation device for sample containers |
CN101030551A (en) * | 2006-03-02 | 2007-09-05 | 住友重机械工业株式会社 | Stage device |
WO2014049696A1 (en) * | 2012-09-26 | 2014-04-03 | 三菱電機株式会社 | Semiconductor device manufacturing method and semiconductor manufacturing apparatus |
CN203820006U (en) * | 2014-05-09 | 2014-09-10 | 扬州虹扬科技发展有限公司 | Swinging discharge device |
CN207558762U (en) * | 2017-11-30 | 2018-06-29 | 扬州虹扬科技发展有限公司 | A kind of pendulous device |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108565234A (en) * | 2018-05-29 | 2018-09-21 | 上海科发电子产品有限公司 | A kind of substrate collating unit for semiconductor devices upside-down mounting assembly |
CN115259883A (en) * | 2022-09-01 | 2022-11-01 | 浙江新纳陶瓷新材有限公司 | Swinging machine for ring installation, ring installation equipment and ring installation method |
Also Published As
Publication number | Publication date |
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CN107958859B (en) | 2023-08-15 |
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