CN107958859B - Swinging device - Google Patents

Swinging device Download PDF

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Publication number
CN107958859B
CN107958859B CN201711233983.3A CN201711233983A CN107958859B CN 107958859 B CN107958859 B CN 107958859B CN 201711233983 A CN201711233983 A CN 201711233983A CN 107958859 B CN107958859 B CN 107958859B
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China
Prior art keywords
sliding
deflection
plane
fixed
tray
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CN201711233983.3A
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CN107958859A (en
Inventor
袁丁
陈荣
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Yangzhou Hy Technology Development Co Ltd
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Yangzhou Hy Technology Development Co Ltd
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Priority to CN201711233983.3A priority Critical patent/CN107958859B/en
Publication of CN107958859A publication Critical patent/CN107958859A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333Trays for chips

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Toys (AREA)

Abstract

The application discloses a swinging device, which comprises a base and a supporting plate, wherein a plane swinging mechanism and a deflection swinging mechanism are arranged in the base, the deflection swinging mechanism is positioned above the plane swinging mechanism, the supporting plate is arranged above the deflection swinging mechanism, limit posts are arranged around the supporting plate, and mounting grooves are formed in the inner sides of the limit posts.

Description

Swinging device
Technical Field
The application relates to the technical field of electronic devices, in particular to a swinging device.
Background
At present, on a production square bridge production line, the traditional process usually places one connecting piece and one terminal into a welding mold manually, which is time-consuming and requires a large number of operators; the chip is usually designed by adopting a sieve tray and a sucking disc, and is manually sieved to obtain a tray every time, and then the sucking disc is used for sucking the chip to be converted and filled into a welding die, so that a plurality of chips are regularly put into a groove, but the processing efficiency is seriously influenced by the speed; the swing device and the matched jig are adopted to complete automatic conversion filling of square bridge welding terminals and chips, the initial capacity measurement and calculation can be improved by 70%, the manpower is saved, the efficiency is improved, the traditional manual filling mode is broken through, the patent with the application number of CN201210393280.8 is applied, the chip screen disc for realizing the novel laminated diode manufacturing process adopts vacuum to suck the chips, the upper surface of the chip screen disc is provided with sucking disc type holes, and the depth H of the sucking disc type holes is smaller than the thickness of the chips; the shape of the sucking disc type hole is matched with that of the chip, the size B of the sucking disc type hole is slightly larger than the large surface of the chip, and the large surface of the chip occupies more than 90% of the whole hole bottom area; the back of the suction cup type hole is provided with a vacuum channel, the size A of the vacuum channel at the joint with the suction cup type hole is smaller than the size B of the suction cup type hole, and the patent does not replace how to load the connecting sheet and the terminal into the screen tray.
Disclosure of Invention
The application aims to provide a swinging device, which solves the technical problems of poor swinging efficiency and only swinging in one direction in the prior art.
The utility model provides a pendulous device, includes base and backup pad, the inside plane wabbler mechanism and the wabbler mechanism that deflects that is provided with of base, the wabbler mechanism that deflects is located plane wabbler mechanism top, the backup pad is installed in the wabbler mechanism top that deflects, and installs spacing post around the backup pad, the mounting groove has been seted up to the inboard of spacing post.
Based on the technical scheme, the application can also be improved as follows:
further, it still includes the fixed column, the fixed column interval sets up, and installs dress clamp above the fixed column, and the beneficial effect of adopting this step is when using, has placed the sieve tray between spacing post, compresses tightly the sieve tray through dress clamp.
Further, the deflection swinging mechanism comprises a fixed plate, a deflection driving motor, a driving disk, a driven disk and a tray, wherein a fixed shaft and the deflection driving motor are installed above the fixed plate at intervals, the driving disk is installed on the deflection driving motor, the driven disk is installed on the fixed shaft and is meshed with the driving disk, a joint hinge is installed at the upper end of the fixed shaft, the tail end of the joint hinge is connected with the tray, the tray is fixed below a supporting plate, and the beneficial effects of the step are that the vertical swinging is realized through the deflection swinging mechanism.
Further, the driven plate is provided with grooves at intervals along the circumferential direction, balls are arranged in the grooves, cams are arranged above the driven plate, and convex surfaces are arranged on the lower surface of the tray at intervals.
Further, the convex surface is an arc surface, and the beneficial effect of the step is that the swing stability is ensured through the arc surface.
Further, the tangent line of the upper end of the ball is lower than the tangent line of the upper end of the cam, and the beneficial effect of adopting the step is that the up-and-down swing is convenient to realize.
Further, plane wabbler mechanism includes translation auxiliary mechanism, two plane driving motor, two eccentric wheels and two fixed blocks that open there is the sliding tray, plane driving motor interval sets up, and installs the eccentric wheel above the plane driving motor, the fixed block interval is installed in the fixed plate below, and the sliding tray mutually perpendicular of fixed block, the eccentric wheel with the sliding tray is corresponding, translation auxiliary mechanism installs on the base, and translation auxiliary mechanism with the fixed plate is connected, adopts the beneficial effect of this step to utilize plane wabbler mechanism to realize the swing of horizontal direction.
Further, the eccentric wheel comprises a rotating wheel and a guide pillar, the rotating wheel is arranged on the plane driving motor, the guide pillar is arranged at the eccentric position of the rotating wheel, and the guide pillar is positioned in the sliding groove.
Further, translation auxiliary mechanism includes a plurality of sliding axles and a plurality of slider, the sliding axle interval is installed on the base, and the sliding axle encloses into rectangular frame, the inside through-hole that is provided with of slider, just the slider with fixed plate threaded connection, the sliding axle wears to establish in the through-hole, leave the clearance between the outer wall of through-hole inner wall and sliding axle, the beneficial effect of adoption this step is the stability of assurance motion.
Further, the automatic control device also comprises a controller which is respectively connected with the deflection driving motor and the plane driving motor, and the beneficial effect of adopting the steps is that the automatic control is convenient to realize.
The application has the beneficial effects that:
the application relates to a swinging device, which comprises two swinging mechanisms, wherein one swinging mechanism swings in the horizontal direction (X, Y directions) and the other swinging mechanism swings in the Z direction; so that the connecting sheet and the chip can be ensured to fully enter the screen disc; the deflection swinging mechanism adopts the mutual matching of the cam and the arc-shaped surface, so that the tray can incline, and then the plane driving motor is started, so that the tray can swing in the inclined direction, namely, the movement in the Z direction is realized; the ball of the application plays a supporting role and is used for limiting the swing amplitude, so that the motion amplitude of the tray is stable; the plane swinging mechanism drives the eccentric wheel to rotate by utilizing the motor, so that the fixed plate is driven to move, and the movement direction of the fixed plate is limited by the translation auxiliary mechanism, so that the translation stability is ensured; the application has simple structure, convenient operation and convenient maintenance.
Drawings
In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present application, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic structural diagram of a swing device according to an embodiment of the present application;
FIG. 2 is a partial top view of a planar rocking mechanism of a rocking device according to an embodiment of the present application;
FIG. 3 is a bottom view of a fixed plate of a swing device according to an embodiment of the present application;
FIG. 4 is a partial top view of a yaw swing mechanism of a swing apparatus according to an embodiment of the present application;
fig. 5 is a bottom view of a tray of a swing device according to an embodiment of the present application;
FIG. 6 is a front view of a slider and sliding shaft assembly of a swing device according to an embodiment of the present application;
FIG. 7 is a top view of a support plate of a swing apparatus according to an embodiment of the present application;
reference numerals:
1-a base; 2-supporting plates; 3-plane rocking mechanism; 4-a yaw swing mechanism; 5-a limit column; 6-a mounting groove; 7-fixing the column; 8-clamping; 9-a fixing plate; 10-a deflection driving motor; 11-an active disc; 12-driven plate; 13-a tray; 14-a fixed shaft; 15-articulation hinge; 16-grooves; 17-balls; 18-cams; 19-a convex surface; 20-a planar drive motor; 21-eccentric wheel; 22-sliding grooves; 23-fixing blocks; 24-rotating wheel; 25-guide posts; 26-sliding shaft; 27-a slider; 28-a controller; 29-a translation assisting mechanism; 30-through holes.
Detailed Description
Embodiments of the technical scheme of the present application will be described in detail below with reference to the accompanying drawings. The following examples are only for more clearly illustrating the technical aspects of the present application, and thus are merely examples, and are not intended to limit the scope of the present application.
It is noted that unless otherwise indicated, technical or scientific terms used herein should be given the ordinary meaning as understood by one of ordinary skill in the art to which this application belongs.
In the description of the present application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present application and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present application.
Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. In the description of the present application, the meaning of "plurality" is two or more unless specifically defined otherwise.
In the present application, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art according to the specific circumstances.
In the present application, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.
Examples
As shown in fig. 1, the swinging device provided by the application comprises a base 1 and a supporting plate 2, wherein a plane swinging mechanism 3 and a deflection swinging mechanism 4 are arranged in the base 1, the deflection swinging mechanism 4 is used for realizing the adjustment of an upper angle and a lower angle, the plane swinging mechanism 3 is used for realizing plane swinging, and the deflection swinging mechanism 4 can also be driven to swing in a plane; the deflection rocking mechanism 4 is located above the plane rocking mechanism 3, the supporting plate 2 is installed above the deflection rocking mechanism 4, the limit posts 5 are installed around the supporting plate 2, the installation grooves 6 are formed in the inner sides of the limit posts 5, the installation grooves 6 in the inner sides of the limit posts 5 are right-angled triangles and are used for installing the screen tray, the screen tray can be multi-layered, the screen tray can be fixed through the limit posts, the work efficiency is improved, a plurality of connecting piece grooves are formed in the surface of the screen tray, the supporting plate 2 swings when the deflection rocking mechanism 4 and the plane rocking mechanism 3 work, and therefore the screen tray swings, part of connecting pieces enter the connecting piece grooves and are convenient for the next operation.
Wherein, as shown in fig. 7, it still includes fixed column 7, fixed column 7 interval sets up, and installs dress clamp 8 above the fixed column 7, and when using, has placed the screen tray between spacing post 5, compresses tightly the screen tray through dress clamp 8, because deflection rocking mechanism 4 can angle regulation, then plane rocking mechanism 3 swings, and the screen tray whole will tilt swing, and clamping clamp 8 can fix the screen tray, can not break away from because of the swing.
The deflection swinging mechanism 4 comprises a fixed plate 9, a deflection driving motor 10, a driving disk 11, a driven disk 12 and a tray 13, wherein a fixed shaft 14 and the deflection driving motor 10 are arranged above the fixed plate 9 at intervals, the driving disk 11 is arranged on the deflection driving motor 10, the driven disk 12 is arranged on the fixed shaft 14, the driven disk 12 is meshed with the driving disk 11, a joint hinge 15 is arranged at the upper end of the fixed shaft 14, the tail end of the joint hinge 15 is connected with the tray 13, and the tray 13 is fixed below the supporting plate 2; the deflection driving motor 10 drives the driving disk 11 to rotate because the driving disk 11 is engaged with the driven disk 12, thereby driving the driven disk 12 to rotate.
The application further provides a groove 16 arranged on the surface of the driven disc 12 at intervals along the circumferential direction, wherein the groove 16 is internally provided with a ball 17, a cam 18 is arranged above the driven disc 12, the lower surface of the tray 13 is provided with a convex surface 19 at intervals, the bottom surface of the tray 13 is provided with a plurality of convex surfaces 19, the gap between the bottom surface of the tray 13 and the upper surface of the driven disc 12 is changed, the surface of the driven disc 12 is also provided with the ball 17 and the cam 18, when the driven disc 12 rotates, the cam 18 is contacted with the convex surfaces 19, the tray 13 is inclined, the driven disc 12 continuously rotates, the position of the cam 18 is changed and is contacted with the convex surfaces 19 at different positions, and therefore the tray 13 is inclined in different directions; the application is also provided with the ball 17, so that the stability after the inclination can be ensured; the application utilizes the deflection swinging mechanism 4 to slide the reverse connecting sheet out of the connecting sheet groove in the swinging process, thereby improving the swinging efficiency and finally entering the connecting sheet groove.
Wherein, the convex surface 19 is an arc surface, and the arc surface is utilized for transition, so that the swing stability can be ensured.
Wherein, the tangent line of the upper end of the ball 17 is lower than the tangent line of the upper end of the cam 18, so that the height of the cam 18 is higher than the height of the ball 17, and the tray can be conveniently inclined in different directions.
The plane swinging mechanism 3 comprises a translation auxiliary mechanism 29, two plane driving motors 20, two eccentric wheels 21 and two fixed blocks 23 provided with sliding grooves 22, wherein the plane driving motors 20 are arranged at intervals, the eccentric wheels 21 are arranged above the plane driving motors 20, the fixed blocks 23 are arranged below the fixed plates 9 at intervals, the sliding grooves 22 of the fixed blocks 23 are mutually perpendicular, the eccentric wheels 21 correspond to the sliding grooves 22, each eccentric wheel corresponds to each sliding groove, in actual operation, one eccentric wheel is started firstly, so that one eccentric wheel can be driven to move in one direction (such as an X axis) and then is closed, the other eccentric wheel is started, so that the other eccentric wheel can be driven to move in the other direction (such as a Y axis), the translation auxiliary mechanism 29 is arranged on the base 1, the translation auxiliary mechanism 29 is connected with the fixed plates 9, and the plane driving motors 20 drive the eccentric wheels 21 to rotate; the eccentric wheel 21 rotates in the sliding groove 22, so that the fixed block 23 is pushed to move; and the fixing plate 9 is connected with the translation assisting mechanism 3 so that the fixing plate 9 can move on a plane with the assistance of the translation assisting mechanism 3.
The eccentric wheel 21 comprises a rotating wheel 24 and a guide pillar 25, the rotating wheel 24 is arranged on the plane driving motor 20, the guide pillar 25 is arranged at an eccentric position of the rotating wheel 24, the guide pillar 25 is positioned in the sliding groove 22, and the guide pillar 25 is positioned at the eccentric position, so that the guide pillar 25 generates a certain movement track, and the fixed block 23 can be pushed to move in different directions; and the sliding grooves 22 of the fixed blocks 23 are mutually perpendicular, and each plane driving motor 20 corresponds to one fixed block 23, so that one fixed block can move in the X-axis direction, the other fixed block can move in the Y-axis direction, and the deflection swinging mechanism 4 moves in the Z-axis-like direction, so that the omnibearing motion can be realized, and the working efficiency can be improved.
The translation auxiliary mechanism 29 comprises a plurality of sliding shafts 26 and sliding blocks 27, the sliding shafts 26 are arranged on the base 1 at intervals, the sliding shafts 26 form a rectangular frame, through holes 30 are formed in the sliding blocks 27, the sliding blocks 27 are in threaded connection with the fixed plates 9, the sliding shafts 26 are arranged in the through holes 30 in a penetrating mode, at least two sliding blocks 27 are arranged on each sliding shaft 26, gaps are reserved between the inner walls of the through holes 30 and the outer walls of the sliding shafts 26, the sliding blocks 27 move on the sliding shafts 26, the moving direction can be limited, meanwhile, gaps are reserved between the through holes 30 and the sliding shafts 26, and therefore when the sliding blocks move along the X axis, the Y direction cannot be limited; the X direction is not restricted when moving in the Y-axis direction.
The device further comprises a controller 28, wherein the controller 28 is respectively connected with the deflection driving motor 10 and the plane driving motor 20, and the working frequencies of the plane driving motor 20 and the deflection driving motor 10 can be controlled by the controller 28, so that the working efficiency is improved.
The working principle of the application is as follows:
when the screen disc is used, the screen disc is firstly arranged in the mounting groove 6 of the limit column 5, the screen disc is fixed by the clamp 8, the controller 28 is started, the controller 28 firstly starts one of the plane driving motors 20, the plane driving motor 20 drives the eccentric wheel 21 to rotate, so that the fixed plate 9 moves towards a fixed direction, and the support plate 2 can also move towards a certain direction, so that the screen disc can also move towards the fixed direction; then the other plane driving motor 20 is started to drive the fixed plate 9 to move towards the other direction, so that the horizontal swinging is realized, and at the moment, the feet of the connecting sheet can possibly be in the opposite direction; and then the deflection driving motor 10 is started to drive the driving disc 11 to move so as to drive the driven disc 12 to move, after the driven disc 12 rotates, the cam 18 can be contacted with the convex surface 19, so that the tray 13 is inclined in different directions, and then the plane driving motor 20 is started, so that the screen disc can swing in the inclined direction and is charged into the welding mould in a conversion manner, and the square bridge welding terminals and chips can be charged in an automatic conversion manner, thereby improving the working efficiency.
In the description of the present application, numerous specific details are set forth. However, it is understood that embodiments of the application may be practiced without these specific details. In some instances, well-known methods, structures and techniques have not been shown in detail in order not to obscure an understanding of this description.
In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present application, and not for limiting the same; although the application has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the application, and are intended to be included within the scope of the appended claims and description.

Claims (3)

1. The swinging device is characterized by comprising a base and a supporting plate, wherein a plane swinging mechanism and a deflection swinging mechanism are arranged in the base, the deflection swinging mechanism is positioned above the plane swinging mechanism, the supporting plate is arranged above the deflection swinging mechanism, limit posts are arranged around the supporting plate, and mounting grooves are formed in the inner sides of the limit posts; the mounting groove is a right triangle and is used for mounting the screen disc; the surface of the screen disc is provided with a plurality of connecting sheet grooves;
the deflection swinging mechanism comprises a fixed plate, a deflection driving motor, a driving disc, a driven disc and a tray, wherein a fixed shaft and the deflection driving motor are arranged above the fixed plate at intervals, the driving disc is arranged on the deflection driving motor, the driven disc is arranged on the fixed shaft and is meshed with the driving disc, a joint hinge is arranged at the upper end of the fixed shaft, the tail end of the joint hinge is connected with the tray, and the tray is fixed below the supporting plate;
the plane swinging mechanism comprises a translation auxiliary mechanism, two plane driving motors, two eccentric wheels and two fixed blocks provided with sliding grooves, wherein the plane driving motors are arranged at intervals, the eccentric wheels are arranged above the plane driving motors, the fixed blocks are arranged below the fixed plates at intervals, the sliding grooves of the fixed blocks are mutually perpendicular, the eccentric wheels correspond to the sliding grooves, the translation auxiliary mechanism is arranged on the base, and the translation auxiliary mechanism is connected with the fixed plates;
the driven plate is provided with grooves at intervals along the circumferential direction, balls are arranged in the grooves, a cam is arranged above the driven plate, and convex surfaces are arranged on the lower surface of the tray at intervals;
the convex surface is an arc surface;
the tangent line of the upper end of the ball is lower than the tangent line of the upper end of the cam;
the eccentric wheel comprises a rotating wheel and a guide column, the rotating wheel is arranged on the plane driving motor, the guide column is arranged at the eccentric position of the rotating wheel, and the guide column is positioned in the sliding groove;
the translation auxiliary mechanism comprises a plurality of sliding shafts and a plurality of sliding blocks, wherein the sliding shafts are installed on the base at intervals, the sliding shafts are surrounded to form a rectangular frame, through holes are formed in the sliding blocks, the sliding blocks are in threaded connection with the fixing plates, the sliding shafts are arranged in the through holes in a penetrating mode, and gaps are reserved between the inner walls of the through holes and the outer walls of the sliding shafts.
2. The swing apparatus according to claim 1, further comprising fixing posts spaced apart and having clamps mounted thereon.
3. A swing apparatus according to claim 2, further comprising a controller connected to said yaw drive motor and said planar drive motor, respectively.
CN201711233983.3A 2017-11-30 2017-11-30 Swinging device Active CN107958859B (en)

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Application Number Priority Date Filing Date Title
CN201711233983.3A CN107958859B (en) 2017-11-30 2017-11-30 Swinging device

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Application Number Priority Date Filing Date Title
CN201711233983.3A CN107958859B (en) 2017-11-30 2017-11-30 Swinging device

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CN107958859B true CN107958859B (en) 2023-08-15

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108565234A (en) * 2018-05-29 2018-09-21 上海科发电子产品有限公司 A kind of substrate collating unit for semiconductor devices upside-down mounting assembly
CN115259883B (en) * 2022-09-01 2023-06-09 浙江新纳陶瓷新材有限公司 Swinging machine for ring installation, ring installation equipment and ring installation method

Citations (5)

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Publication number Priority date Publication date Assignee Title
WO2005107931A1 (en) * 2004-05-03 2005-11-17 Thermo Electron (Oberschleissheim) Gmbh Agitation device for sample containers
CN101030551A (en) * 2006-03-02 2007-09-05 住友重机械工业株式会社 Stage device
WO2014049696A1 (en) * 2012-09-26 2014-04-03 三菱電機株式会社 Semiconductor device manufacturing method and semiconductor manufacturing apparatus
CN203820006U (en) * 2014-05-09 2014-09-10 扬州虹扬科技发展有限公司 Swinging discharge device
CN207558762U (en) * 2017-11-30 2018-06-29 扬州虹扬科技发展有限公司 A kind of pendulous device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005107931A1 (en) * 2004-05-03 2005-11-17 Thermo Electron (Oberschleissheim) Gmbh Agitation device for sample containers
CN101030551A (en) * 2006-03-02 2007-09-05 住友重机械工业株式会社 Stage device
WO2014049696A1 (en) * 2012-09-26 2014-04-03 三菱電機株式会社 Semiconductor device manufacturing method and semiconductor manufacturing apparatus
CN203820006U (en) * 2014-05-09 2014-09-10 扬州虹扬科技发展有限公司 Swinging discharge device
CN207558762U (en) * 2017-11-30 2018-06-29 扬州虹扬科技发展有限公司 A kind of pendulous device

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