CN107958645A - Oled panel probe unit more changing device - Google Patents
Oled panel probe unit more changing device Download PDFInfo
- Publication number
- CN107958645A CN107958645A CN201610980035.5A CN201610980035A CN107958645A CN 107958645 A CN107958645 A CN 107958645A CN 201610980035 A CN201610980035 A CN 201610980035A CN 107958645 A CN107958645 A CN 107958645A
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- CN
- China
- Prior art keywords
- probe unit
- room
- oled panel
- changing device
- hermatic door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000000523 sample Substances 0.000 title claims abstract description 173
- 239000011261 inert gas Substances 0.000 claims abstract description 19
- 238000011068 loading method Methods 0.000 claims description 23
- 238000012360 testing method Methods 0.000 claims description 21
- 238000007789 sealing Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 2
- 238000011049 filling Methods 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 description 7
- 239000000306 component Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000003197 gene knockdown Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000011218 segmentation Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008358 core component Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/006—Electronic inspection or testing of displays and display drivers, e.g. of LED or LCD displays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/06705—Apparatus for holding or moving single probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2825—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere in household appliances or professional audio/video equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/70—Testing, e.g. accelerated lifetime tests
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/861—Repairing
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Multimedia (AREA)
- General Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Theoretical Computer Science (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
The present invention relates to a kind of oled panel probe unit more changing device, the replacement automated execution for the probe unit that can be used when detecting the image quality and characteristic of oled panel.The oled panel probe unit more changing device of the present invention includes：Possesses the replacement room that the front hermatic door for allowing probe unit to come in and go out and rear hermatic door and inert gas are filled；A pair of of the pick-up for making probe unit come in and go out by the front hermatic door and rear hermatic door of the replacement room；By it is described replacement room bottom surface both sides vertically through pair of right and left support bar；It is fixed in bottom surface in the state of the support bar upper end, the replacement chamber interior is located at horizontality, and the multiple pick-up makes the inner bay that the probe unit of discrepancy is placed；And it is arranged at the outside of the replacement room and the lifting gear of lifting force is assigned to the support bar.The filling time of inert gas can be greatly reduced in the present invention, can rapidly replace probe unit in a short time.
Description
Technical field
The present invention relates to the probe unit used when detecting the image quality and characteristic of oled panel to replace what is be performed automatically
Oled panel probe unit more changing device.
Background technology
In general, the image quality and Characteristics Detection of oled panel are, in order to prevent display screen oxidation, it is full of in inert gas
Test cabinet in carried out by probe unit.
The probe unit is the core component detected needed for OLDE glass display screens, is put into behind test cabinet inside and test
The input end in contact of the oled panel of chamber interior.And apply power supply and signal to the glass display screen of each OLED and carry out electrically
Detection and vision-based detection.
The probe unit reaches the high price precision checking equipment of 20kg as weight, safely can be carried and deposited with carrier
It is put in probe unit more exchange device.
At this time, according to the oled panel species as detection object, it is necessary to a variety of probe units, therefore probe list
Member can load multiple probe unit storages successively more on changing device.
After detection starts, new probe unit corresponding with knocking down oled panel inside test cabinet is selected into test cabinet
It is interior, or be replaced with the old probe unit in.
As depicted in figs. 1 and 2, the composition of traditional oled panel probe unit more changing device includes：It is filled inertia
The replacement room 10 of gas；The multiple probe unit B supplied by carrier are knocked down to the front pick-up 20 replaced inside room 10；If
It is placed in the inner bay 30 being loaded inside the switch room by the probe unit B that the front pick-up 20 is put into；And
It is arranged at 10 inside of replacement room and the lifting gear 40 for lifting the inner bay 30.
Before the front and back for replacing room 10 is respectively arranged with the discrepancy for allowing the replacement room 10 to probe unit
Square hermatic door 50 and rear hermatic door 60.Wherein replace behind room 10 with connecting knot while test cabinet T holding sealing states
Close.
The rear pick-up replaced the probe unit B inside room 10 and drawn will be put into by being provided with the test cabinet T sides
70。
Traditional probe unit more changing device possesses to be filled to the carrier 80 for the front supply probe unit B for replacing room 10
The loading part 90 entered.The front pick-up 20 will be loaded into inner bay successively after the probe unit B of carrier 80 pickups
30。
Tradition oled panel as described above is as follows with the operation of probe unit more changing device.
First, front hermatic door 50 opens when carrier 80 is loaded into loading part 90, and preceding pick-up 20 is by carrier
The multiple probe unit B loaded on 80 are loaded into the inner bay 30 for replacing room 10.The probe unit B is all loaded into inside
After frame 30, front hermatic door 50 is closed, and inert gas, which is filled into, to be replaced inside room 10.
Replace and be internally formed same environment with test cabinet T when being filled with inert gas inside room 10, in this case, more
The rear hermatic door 60 for changing room 10 opens, and then rear pick-up 70 draws probe unit B.
In addition, if being to replace probe unit, then replace the inside of room 10 and be full of in the state of inert gas, replace room 10
Rear hermatic door 60 opens, and rear pick-up 70 is by old probe unit（It is not shown）Inner bay 30 is launched to wait later.It is internal
Frame 30 is 70 waiting time of rear pick-up, rises or falls while new probe unit B is located at the rear pick-up waited for
70 front.The rear pick-up 70 waited for is to be guided to after new probe unit B is located at front inside replacement room 10.
But there are problems with for traditional probe unit more changing device.
Firstth, traditional probe unit more changing device loads multiple probe unit B on the inner bay 30 replaced in room 10,
The inner bay 30 should also lifted, therefore the replacement room 10 of the big volume of demand, further inert gas filling time also become
It is longer and the problem of cause productivity to decline to a great extent.
Secondth, traditional probe unit more changing device is, due to being arranged at the lifting unit 40 replaced inside room 10, to replace
The internal structure of room 10 is complicated and is difficult to make, and maintenance is also remarkable.
3rd, on the problem of traditional probe unit more changing device is, 20 pickup probe unit of front pick-up, due to visiting
The " loaded " position of pin unit B is flowing, as long as so 80 crooked 2mm of carrier will also result in front pick-up to 3mm degree
20 can not correctly pickup probe unit B the problem of.
Even if probe unit B is picked, but front pick-up 20 is the pickup probe unit B in off-normal position, therefore
When probe unit B is placed to inner bay 30 by front pick-up 20, probe unit B and inner bay 30 mutually collide and probe occur
The major accident that unit B is fallen.
The content of the invention
Technical task
It is an object of the present invention to provide a kind of volume for making replacement room to minimize, and internal structure also becomes simple OLED
Panel probe unit more changing device.
It is picked all the time in correct position it is an object of the present invention to provide a kind of probe unit for being loaded into carrier
Probe unit more changing device.
Technical solution
The oled panel probe unit more changing device of the present invention, including：Possesses the front hermatic door for allowing probe unit to come in and go out
With rear hermatic door, and with inert gas fill replacement room；Pass through the front hermatic door and rear hermatic door of the replacement room
A pair of of the pick-up for making probe unit come in and go out；By it is described replacement room bottom surface both sides vertically through pair of right and left support bar；
Bottom surface is fixed in the state of the support bar upper end, is located at the replacement chamber interior, and the multiple pickup with horizontality
Device makes the inner bay that the probe unit of discrepancy is placed；And it is arranged at the outside of the replacement room and is assigned to the support bar
The lifting gear of lifting force.
The lifting gear can possess：It is fixed on the Support bracket for replacing room bottom surface；Institute is arranged at vertically movablely
State the mobile son of Support bracket；And the mobile son and support bar are connected as to the connecting component of horizontality.
Preferably, the connecting component includes：With free end, and respectively in connection with the level of multiple support bar lower ends
Bar；And the mobile son is fixed on, and the connection strap that both ends are combined with the free end of each horizontal bar with horizontality.
The free end of the horizontal bar and the two side ends of connection strap are combined to vertical direction.
Preferably, the free end of the horizontal bar vertically forms the first segment difference section, the two side ends of the connection strap formed with
Corresponding second segment difference section in first segment difference section, what second segment difference section was tightened by the upper vertical in the first segment difference section
Bolt is combined into the first segment difference section is close to state.
The guide rail for guiding the horizontal bar lifting is set before the Support bracket.
On each support bar seal member is provided with to keep sealing with replacement room.
The seal member preferably possesses the top clip end that is combined with replacing room bottom surface to be close to and outer with support bar
It is close to the collapsible hose of the lower part clip end combined in side.
The rear for replacing room is provided with test cabinet；The pick-up includes：By front hermatic door by probe unit
Knock down the front pick-up replaced room or drawn from replacement room；And it is arranged inside test cabinet and is incited somebody to action by rear hermatic door
Probe unit knocks down the rear pick-up replaced room or drawn from replacement room.
The present invention can also possess：The probe unit housing that probe unit is loaded；The probe unit housing is supported
Possesses carrier in both sides for the supporting rack of horizontality；The lower part for replacing room is formed at, and the carrier is loaded into
Open space, that is, loading part；Be arranged at it is described replacement room and loading part between, and from load loading part carrier pickup it is more
The exterior frame that a probe unit is stored.
Preferably, the two side ends bottom surface of the probe unit housing forms the adjustment groove portion of up-narrow and down-wide shape, the loading
It is provided with the both sides in portion and possesses a pair of of lifting cylinder that the up-narrow and down-wide shape for being inserted into the adjustment groove portion harmonizes convex block.
And the upper end of each supporting rack forms the guiding projection of up-narrow and down-wide shape, the bottom surface of the probe unit housing can be with
Possesses up-narrow and down-wide shape guide groove corresponding with the guiding projection.
Preferably, the guide groove is formed on first piece that the bottom surface of probe unit is pasted.
Preferably, the adjustment groove portion is formed on second piece that probe unit housing both side ends bottom surface is pasted.
Beneficial effect
Oled panel probe unit more changing device, its effect are according to the present invention,
Replacing chamber interior will not load to replacing unnecessary probe unit, and the lifting gear for lifting inner bay is arranged at
It can be reduced when replacing the outside of room and making and replace room, and then the filling time of inert gas is greatly decreased, and in the short time
It is interior to replace probe unit rapidly.
The present invention forms up-narrow and down-wide shape in the two side ends bottom surface of probe unit and harmonizes groove portion, the loading that carrier is loaded into
Portion both sides, which are provided with, possesses a pair of of lifting cylinder that the up-narrow and down-wide shape for being inserted into the adjustment groove portion harmonizes convex block, therefore lifts
When cylinder performs lifting action, harmonize probe unit while convex block is inserted into adjustment groove portion and naturally harmonized, therefore
No matter load in the change in location of the carrier of main body, can be all the time in dot picking probe unit exactly.
Brief description of the drawings
Fig. 1 is traditional oled panel probe unit more changing device；
Fig. 2 is the sectional view of Fig. 1；
Fig. 3 is the perspective view of the oled panel probe unit more changing device of the present invention；
Fig. 4 is the front view of the oled panel probe unit more changing device of the present invention；
Fig. 5 is the decomposition diagram for replacing room and lifting gear for forming the present invention；
Fig. 6 is the recess sectional view of the oled panel probe unit more changing device of the present invention；
Fig. 7 and Fig. 8 is as the carrier and the recess detail drawing of probe unit housing for forming the present invention, is that display carrier makes spy
The schematic diagram of the horizontal process risen of pin cell enclosure；
Fig. 9 to Figure 14 is respectively to show the oled panel of the present invention with what the use state of probe unit more changing device was shown successively
It is intended to.
Symbol description：
110：Replace room； 111：Front hermatic door；
112：Rear hermatic door； 120：Pick-up；
121：Front pick-up； 122：Rear pick-up；
130：Support bar； 140：Inner bay；
150：Lifting gear； 151：Support bracket；
152：Mobile son； 153：Connecting component；
153a：Horizontal bar； 153b：Connection strap；
154：First segment difference section； 155：Second segment difference section；
156：Bolt； 157：Guide rail；
160：Seal member； 161：Top clip end；
162：Lower part clip end； 200：Carrier；
210：Supporting rack； 230：Guiding projection；
300：Loading part 310：Lift cylinder；
320：Harmonize convex block 400：Exterior frame；
500：Probe unit housing； 510：Guide groove；
520：First piece； 530：Harmonize groove portion；
540：Second piece； B,C：Probe unit；
T：Test cabinet.
Embodiment
To make the feature of the present invention, technical solution and advantage clearer, below in conjunction with attached in the embodiment of the present invention
Figure, is clearly and completely described the preferred embodiment of the present invention.For the use used in specification and claims scope
Language or word, inventor is suitably to define the concept of term to illustrate itself invention with the best approach in principle, therefore should
Explained with meeting the implication of technical solution of the present invention and concept.
One embodiment of the present of invention is described in detail below in conjunction with the accompanying drawings, same symbol is used for same structure, during explanation pair
Identical part is not repeated, stresses different parts, clearly to illustrate.
As shown in Figures 3 to 6, oled panel of the invention is generally included with probe more changing device：Replace room 110；Make
A pair of of pick-up 120 inside room 110 is replaced in probe unit B, C discrepancy；It is arranged at a pair of of support of replacement 110 bottom surface of room
Bar 130；It is arranged inside the replacement room 110, and the inner bay 140 that probe unit B, C are placed；To the support bar 130
Assign the lifting gear 150 of lifting force.
The front hermatic door 111 and rear hermatic door 112 replaced room 110 and possess probe unit B, C discrepancy.It is described more
The rear for changing room 110 is provided with test cabinet T and can select to connect by rear hermatic door 112.
The test cabinet T is supplied new probe unit B by rear hermatic door 112.Put into the new probe inside test cabinet T
Unit B is moved to inside test cabinet T, the input end in contact with oled panel, further applies power supply and signal to each display screen
And carry out electrically detection and vision-based detection.
The front hermatic door 111 and rear hermatic door 112 are individually controlled, and can be moved back and forth with lifting moving
Set.That is the front hermatic door 111 and rear hermatic door 112 are by moving back and forth to the replacement room 110 faced respectively
Entrance side be close to and be released from being close to, by lifting moving and the entrance side of replacement room 110 that respectively faces close to and
Mutually from.
The inner space portion filling inert gas for replacing room 110.The inert gas is existed to reduce the filling time
Put under vacuum state.Although not shown, it is described replace room 110 side on connection by inert gas to replace room
The feed tube of 110 inside supplies, on opposite side connection the inner space of replacement room 110 can be made to form the true of vacuum state
Sky pump.
On the other hand, more promptly to fill inert gas, adding setting on the inner space side of replacement room 110 will
The discharge unit of the air discharge in 110 inner space portion of room is replaced, setting can also be added on opposite side and is chased after inside room 110 to replacing
Add the exhaust module that the air for replacing 110 inner space portion of room is discharged to outside while supplying inert gas.At this time, the row
Gas module is replaced inside room 110 existing for the inner space portion along the state for being easy to stop with air of the replacement room 110
The lower part corner of spatial portion sets most effective.
The pick-up 120 of the present invention is in the front point for replacing the front hermatic door 111 of room 110 and rear hermatic door 112
Independent-lifting and it can not set movably forward and backward.
The pick-up 120 includes：The front of front hermatic door 111 is arranged at, new probe unit is put into room 110 is replaced
B, or the front pick-up 121 that the old probe unit C being replaced is drawn from replacement room 110；It is arranged inside test cabinet T,
New probe unit B is drawn by rear hermatic door 112, or the old probe unit C that should be replaced is knocked down and is replaced inside room 110
Rear pick-up 122.
On the other hand, the support bar 130 for replacing the bottom surface setting of room 110 is set with penetrating through to the plane perpendicular for replacing room 110
Put, and left and right partners.By fixing internal on the upper end for multiple support bars 130 that the plane perpendicular for replacing room 110 is penetrated through
Frame 140.
The state that the inner bay 140 is fixed on the upper end of the support bar 130 with bottom surface is located at replacement with horizontality
The inside of room 110.The inner bay 140, which possesses the multiple pick-up 121,122, makes what probe unit B, C of discrepancy were placed
Table top.At this time, the table top in order to reduce replace room 110 size, it is preferable that only with top table top 141 and lower part table top 142
Composition.
The inner bay 140 is lifted by support bar 130 inside replacement room 110.
The outside for replacing room 110 sets the lifting gear 150 that lifting force is assigned to support bar 130.At this time, the liter
Falling unit 150 can possess：It is fixed on the Support bracket 151 for the bottom surface for replacing room 110；Vertical with the supporting bracket 151 it can move
Mobile sub 152 set dynamicly；The connecting component 153 that the mobile son 152 is connected with support bar 130 with horizontality.
The mobile son 152 is that ball-screw or line slideway etc. are proper.
The connecting component 153 can with respectively in connection with multiple 130 lower ends of support bar horizontal bar 153a and be fixed on
The connection strap 153b segmentation compositions of mobile son 152.
The horizontal bar 153a is that a side is incorporated into the lower end of each support bar 130 and has free end.Connection strap 153b
Both ends combined with the free end of each horizontal bar 153 with horizontality.
At this time, the free end of the horizontal bar 153a and the two side ends of connection strap 153b are to make horizontal bar 153a and company
Narrow bars 153b is connected under horizontality all the time, it is preferable that is combined to vertical direction.
That is the first segment difference section 154 is vertically formed on the free end of the horizontal bar 153a, the connection strap 153b's
Corresponding with first segment difference section 154 second segment difference section 155 is formed in two side ends, make second segment difference section 155 by
The bolt 156 vertically tightened of first segment difference section 154, is combined into the first segment difference section 154 and is closely adjacent to state.
As described above, connecting component 153 by horizontal bar 153a and connection strap 153b segmentation form, the horizontal bar 153a and
When connection strap 153b is close to combine by the first segment difference section 154 vertically formed and the second segment difference section 155, both just each support bars
130 vertical direction position is mutually different, but the first segment difference section 154 and the second segment difference section 155 are close to during combining, and can hang down
Each horizontal bar 153a of straight mobile status is subject to the connection strap 153b of stationary state and is moved up and down and connection strap 153b is arranged
In in same horizontal line.
Further, each support bar 130 is to support inner bay 140 in sustained height with the state of superprecision.
It is preferably set up guiding the guide rail 157 of the horizontal bar 153a liftings before the Support bracket 151.
At this time, formed behind the horizontal bar 153a and the 157 corresponding groove portion of guide rail, or with reference to along described
The slide unit 157 that guide rail 157 moves.
Be incorporated into therewith the support bar 130 of horizontal bar 153a can be ensured that very stable precision to vertical direction move,
Inner bay 140 is smoothed out lifting action while the horizontality of precision is formed by the multiple support bar 130.
Although not shown, for the more smoothly lifting of inner bay 140, can also possess inside the replacement room 110 and draw
Lead the vertical guide rail of the lifting of inner bay 140（It is not shown）.
To keep the sealing with replacing room 110 on each support bar 130, seal member 160 can also be set.At this time, it is described
Seal member 160 is preferably, possess with replace room 110 bottom surface be close to combine top clip end 161 and with support bar 130
Lateral surface is close to the collapsible hose of the lower part clip end 162 combined.
It is easily to be close to combine with the lower part clip end 162 of seal member 160 on the side of the support bar 130, can be with shape
Into export-oriented flange part.Although not shown, the extroversion flange part and lower part clip end 162 can firmly be twisted with screw bolt and nut
Tightly, it is even closer combination, it is preferable that gasket is set between the export-oriented flange part and lower part clip end 162.It is described close
Packing is that can also possess between top clip end 161 and the bottom surface for replacing room 110.
According to the invention, it is further possible to the open sky that the carrier 200, the carrier 200 that possess supply probe unit B are loaded into
Between loading part 300 and store the exterior frame 400 of multiple probe unit B, C.
The both sides of the carrier 200 set the supporting rack 210 supported probe unit B as horizontality.At this time, it is described
Probe unit B horizontal loads are in other probe unit housings 500.Support frame as described above 210 supports the probe unit housing 500
For horizontality, supporting probe unit B is in horizontality.
On the upper end of support frame as described above 210, to stablize supporting probe unit housings 500, pasting has and probe list
The supporting block 220 in certain area levels face that first 500 bottom surface of housing is close to.
The upper end of the supporting block 220 forms guiding projection 230, and the corresponding probe unit shell of existing convex block 230 is led with described
The guide groove 510 that the guiding projection 230 is inserted into is formed on the bottom surface of body 500.The guiding projection 230 is with up-narrow and down-wide
Shape is protruded to be formed to top, and the guide groove 510 forms up-narrow and down-wide shape.
Probe unit housing 500 is is shared by the guide groove 510, it is preferable that the pasted in the bottom surface of probe unit B
Formed on one piece 520.At this time, can also be made using flexible material for described first piece 520, for absorbing supporting block 220
Impact between probe unit housing 500.
The loading part 300 is formed in the lower part for replacing room 110.
The exterior frame 400 possesses between the loading part 300 and replacement room 110.Loaded on the exterior frame 400 from
The new probe unit B that is loaded into before the use that the carrier 200 of loading part 300 is picked up by front pick-up 121 and from replacement
The more Geju City probe unit C used that room 110 is picked up by front pick-up 121.
The two side ends bottom surface of probe unit housing 500 can form the adjustment groove portion 530 of up-narrow and down-wide shape.
The both sides of the loading part 300 form lifting cylinder 310 respectively.The microscope carrier end of the lifting cylinder 310 possesses
It is inserted into the adjustment convex block 320 of the up-narrow and down-wide shape of the adjustment groove portion 530.
The lifting cylinder 310 is that carrier 110 is loaded into the state of loading part 300, makes adjustment convex block 320 positioned at spy
Set to 530 lower part of adjustment groove portion of pin unit housings 500.
The lifting cylinder 310 is that the adjustment convex block 320 can be made to increase positioned at the top of guiding projection 230, and is made
It declines positioned at the lower part of the guiding projection 230.
It is described to harmonize groove portion 530 preferably in order to which probe unit housing 500 is shared, in 500 both sides of probe unit housing
Formed on second piece 540 pasted on the bottom surface of end.At this time, described second piece 540 is to use flexible material effects, for inhaling
Receive second piece of 540 impact between probe unit 540.
The oled panel of the invention formed as described above is as follows with the operation of probe unit more changing device.
First, carrier 110 loads the probe unit housing 500 for being placed with new probe unit B.The probe unit shell of this state
Body 500 is that the guiding projection 230 that 220 upper end of supporting block of supporting rack 210 is formed is inserted into guide groove 510 and is close to first piece
115 state, the guiding projection 230 are up-narrow and down-wide shape, and guide groove 510 is up-narrow and down-wide shape, therefore convex being oriented to
Block 230 is inserted into during guide groove 510 by self-alignment.Further, the probe unit housing 500 is loaded into perseverance all the time
Positioning is put, even and if be subject to external impact in moving, but be not easy to come off from carrier 110.
After the loading of probe unit housing 500 is completed, carrier 110 is loaded the loading part of main body 120 by operating personnel
300。
As shown in fig. 7, when carrier 110 is loaded into loading part 300, the vertical motion of lifting cylinder 310 is opened and declined
The microscope carrier of state is brought out from cylinder.After microscope carrier is brought out, the rising of adjustment convex block 320 for being arranged at microscope carrier end is inserted into position
In in the adjustment groove portion 530 of the probe unit housing 500 on top.Lifting cylinder 310 draws microscope carrier, until harmonizing convex block 320
Positioned at the top of guiding projection 230.
As shown in figure 8, microscope carrier, after cylinder is drawn completely, probe unit housing 500 is begun to ramp up from supporting rack 210
Supported at the same time by lifting cylinder 310 as horizontality.Harmonize groove portion 530 formed with up-narrow and down-wide shape, and harmonize convex block 320 with
Up-narrow and down-wide shape is formed, therefore is harmonized convex block 320 and be inserted into and harmonize groove portion 530, and probe unit housing 500 is from supporting rack 210
During rising, probe unit housing 500 can be harmonized naturally.
Further, no matter the probe unit B for being loaded into probe unit housing 500 is the carrier 110 for being loaded into main body 120
Change in location, be always positioned at accurately picking up place, and front pick-up 121 is all the time in accurate location pickup probe unit
B and be safely placed to exterior frame 400.
As described above, carrier 80 is loaded into after exterior frame 400, what front pick-up 121 was loaded from carrier 80
Probe unit housing 500 picks up new probe unit B and is loaded into exterior frame 400 successively.
New probe unit B is loaded onto after exterior frame 400, as shown in figure 9, the front hermatic door 111 for replacing room 110 is opened
Put.After front pick-up 121 draws the new probe unit B for being loaded into exterior frame 400, the new probe unit B of extraction is placed on
The 140 top table top 141 of inner bay inside room 110 is replaced, is then moved to and replaces wait outside room 110.
As shown in Figure 10, new probe unit B is inserted into front hermatic door 111 when replacing 110 inside of room and is closed, Ran Hougeng
Change inside room 110 and be filled inert gas and formed and environment same inside test cabinet T.According to the present invention, room 110 is replaced
Size is minimum, so as to reduce the filling time of inert gas.
As shown in figure 11, rear hermatic door 112 after being filled inert gas inside room 110 is replaced to open.Rear is close
Closure door 112 is replaced room 110 after opening and is connected with test cabinet T, and the rear hermatic door opened by rear pick-up 122
112 knock down old probe unit C inside replacement room 110.At this time, inner bay 140 is the state risen by lifting gear.
As shown in figure 12, transfer the rear of old probe unit C in the lower part table top 142 of the inner bay 140 of rising and pick up
It is mobile to outside replacement room 100 wait to take device 122.
As shown in figure 13, after rear pick-up 122 is moved to outside replacement room 110, inner bay 140 drops to original position
Pick up after replacing the rear pick-up 122 waited outside room 110 and reentering replacement room 110 and placed on top table top 141 at the same time
New probe unit B.
As shown in figure 14, after the rear pick-up 122 for picking up new probe unit B is mobile to outside replacement room 110
The new probe unit B of pickup is placed on test position and is waited in the original location.
After rear pick-up 122 draws new probe unit B from replacement room 110, surveyed to prevent extraneous air from entering
Room T is tried, front hermatic door 111 opens after rear hermatic door 112 is closed.
Front pick-up 121, which enters, after front hermatic door 111 opens replaces room 110.Inner bay 140 passes through lifting at this time
The state that device 150 rises, front pick-up 121 is placed on after the old probe unit C pickups of lower part table top 142, to replacement
Movement waits in the original location after being loaded into exterior frame 400 outside room 110.
By a series of processes, probe unit is replaced, but the oled panel of the present invention is more changed the outfit with probe unit
Putting is, replaces with unnecessary probe unit replacing not loading inside room 110, the lifting gear 150 for lifting inner bay 140
It is arranged at the outside for replacing room 110 and can be reduced from making and replace room 110, the filling of inert gas is further greatly decreased
Time, replaces rapidly probe unit in a short time.
On the other hand, it is not the replacement of probe unit, but to start operation preparation, probe unit 121 is knocked down
Replace inside room 110, the process for being drawn the probe unit knocked down by rear pick-up 122 is also similar to above-mentioned substitute mode
Ground carries out, therefore is no longer described in detail.
In the present embodiment, although new probe unit B to be placed on to the top table top of inner bay 140 with front pick-up 121
141, old probe unit C is placed on exemplified by the lower part table top 142 of inner bay 140 and is illustrated by rear pick-up 122, but not
It is to be limited, new probe unit B is placed on by lower part table top 142 with front pick-up 121, rear pick-up 122 will be old
Probe unit C is placed on the mode of the top table top 141 of inner bay 140, and run can also.
The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although with reference to the foregoing embodiments
The present invention is described in detail, it will be understood by those of ordinary skill in the art that：It still can be to foregoing each implementation
Technical solution described in example is deformed；And these are deformed, the essence of appropriate technical solution is departed from the present invention and respectively implement
The scope of the example technical solution.
Claims (14)
- A kind of 1. oled panel probe unit more changing device, it is characterised in that including：Possess the front hermatic door and rear hermatic door for allowing probe unit to come in and go out, and the replacement room filled with inert gas；A pair of of the pick-up for making probe unit come in and go out by the front hermatic door and rear hermatic door of the replacement room；By it is described replacement room bottom surface both sides vertically through pair of right and left support bar；It is fixed in bottom surface in the state of the support bar upper end, the replacement chamber interior is located at horizontality, and it is described more A pick-up makes the inner bay that the probe unit of discrepancy is placed；AndIt is arranged at the outside of the replacement room and the lifting gear of lifting force is assigned to the support bar.
- 2. oled panel according to claim 1 probe unit more changing device, it is characterised in thatThe lifting gear possesses：It is fixed on the Support bracket for replacing room bottom surface；It is arranged at the mobile son of the Support bracket with can vertically moving；AndThe mobile son and support bar are connected as to the connecting component of horizontality.
- 3. oled panel according to claim 2 probe unit more changing device, it is characterised in thatThe connecting component includes：With free end, and respectively in connection with the horizontal bar of multiple support bar lower ends；AndIt is fixed on the mobile son, and the connection strap that both ends are combined with the free end of each horizontal bar with horizontality.
- 4. oled panel according to claim 3 probe unit more changing device, it is characterised in thatThe free end of the horizontal bar and the two side ends of connection strap are combined to vertical direction.
- 5. oled panel according to claim 4 probe unit more changing device, it is characterised in thatThe free end of the horizontal bar vertically forms the first segment difference section；The two side ends of the connection strap form the second segment difference section corresponding with first segment difference section；Second segment difference section is combined into by the bolt that the upper vertical in the first segment difference section is tightened with the first segment difference section to be close to State.
- 6. the oled panel probe unit more changing device according to any one in claim 3-5, it is characterised in thatThe guide rail for guiding the horizontal bar lifting is set before the Support bracket.
- 7. oled panel according to claim 1 probe unit more changing device, it is characterised in thatOn each support bar seal member is provided with to keep sealing with replacement room.
- 8. oled panel according to claim 7 probe unit more changing device, it is characterised in thatThe seal member possesses the top clip end combined with replacing room bottom surface to be close to and is close to tie with the lateral surface of support bar The collapsible hose of the lower part clip end of conjunction.
- 9. oled panel according to claim 1 probe unit more changing device, it is characterised in thatThe rear for replacing room is provided with test cabinet；The pick-up includes：Probe unit is knocked down by front hermatic door and replaces room or is picked up from the front drawn room is replaced Device；And it is arranged inside test cabinet and probe unit is knocked down by rear hermatic door and replaces room or after room extraction is replaced Square pick-up.
- 10. oled panel according to claim 1 probe unit more changing device, it is characterised in that further include：The probe unit housing that probe unit is loaded；The supporting rack as horizontality is supported to possess in the carrier of both sides the probe unit housing；It is formed at the lower part for replacing room, and the open space i.e. loading part that the carrier is loaded into；AndIt is arranged between the replacement room and loading part, and is deposited from the multiple probe units for the carrier pickup for loading loading part The exterior frame put.
- 11. oled panel according to claim 10 probe unit more changing device, it is characterised in thatAdjustment groove portion of the two side ends bottom surface of the probe unit housing formed with up-narrow and down-wide shape；It is provided with the both sides of the loading part and possesses a pair that the up-narrow and down-wide shape for being inserted into the adjustment groove portion harmonizes convex block Lift cylinder.
- 12. the oled panel probe unit more changing device according to claim 10 or 11, it is characterised in thatThe upper end of each supporting rack forms the guiding projection of up-narrow and down-wide shape；The bottom surface of the probe unit housing possesses up-narrow and down-wide shape guide groove corresponding with the guiding projection.
- 13. oled panel according to claim 12 probe unit more changing device, it is characterised in thatThe guide groove is formed on first piece that the bottom surface of probe unit is pasted.
- 14. oled panel according to claim 11 probe unit more changing device, it is characterised in thatThe adjustment groove portion is formed on second piece that probe unit housing both side ends bottom surface is pasted.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020160134217A KR101872876B1 (en) | 2016-10-17 | 2016-10-17 | Apparatus for exchanging OLED probe unit |
| KR10-2016-0134217 | 2016-10-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107958645A true CN107958645A (en) | 2018-04-24 |
Family
ID=61954410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610980035.5A Pending CN107958645A (en) | 2016-10-17 | 2016-11-08 | Oled panel probe unit more changing device |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR101872876B1 (en) |
| CN (1) | CN107958645A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113467199A (en) * | 2021-09-06 | 2021-10-01 | 宁波润华全芯微电子设备有限公司 | Device convenient to dismantle and capable of preventing wafer from being polluted by splashing liquid |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102097455B1 (en) * | 2019-07-01 | 2020-04-07 | 우리마이크론(주) | Probe block assembly for inspecting display panel, control method thereof and display panel inspection device |
| KR102097456B1 (en) * | 2019-07-01 | 2020-04-07 | 우리마이크론(주) | Probe block assembly for inspecting display panel, control method thereof and display panel inspection device |
| CN114424274B (en) * | 2019-07-01 | 2024-07-09 | 迈格森株式会社 | Probe block assembly for inspecting display panel, control method thereof, and display panel inspection apparatus |
| KR102473786B1 (en) * | 2021-01-07 | 2022-12-06 | (주)유니젯 | Enclosure system |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101872876B1 (en) | 2018-07-11 |
| KR20180041891A (en) | 2018-04-25 |
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