CN107953151B - Combined polishing method of aluminum alloy reflector - Google Patents
Combined polishing method of aluminum alloy reflector Download PDFInfo
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- CN107953151B CN107953151B CN201711261803.2A CN201711261803A CN107953151B CN 107953151 B CN107953151 B CN 107953151B CN 201711261803 A CN201711261803 A CN 201711261803A CN 107953151 B CN107953151 B CN 107953151B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23P—METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
- B23P15/00—Making specific metal objects by operations not covered by a single other subclass or a group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/005—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using a magnetic polishing agent
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention discloses a combined polishing method of an aluminum alloy reflector, which comprises the implementation steps of carrying out numerical control milling rough machining on a workpiece to be machined, carrying out single-point diamond turning to obtain the surface of the aluminum alloy reflector meeting the requirements of initial surface shape and surface quality, and then carrying out magnetorheological finishing and small grinding head polishing in an iteration mode until whether the surface of the aluminum alloy reflector of the workpiece to be machined meets the index requirements or not. The polishing method can solve the problems of accompanying turning lines in the cutting process of the aluminum alloy reflector, overcoming the defects of the traditional aluminum alloy reflector polishing technology in the aspects of complex curved surface modification and surface quality improvement and the like.
Description
Technical field
The present invention relates to optical element processing technologies, and in particular to a kind of combination polishing method of aluminium alloy reflecting mirror.
Background technique
Aluminium alloy has many advantages, such as easy processing, lightweight, high-termal conductivity and low cost, and many spacecraft optical systems are in low temperature
Use aluminum material as structure member in the case where using under occasion, furthermore aluminum material is from ultraviolet light until infrared light is wider
All there is high reflectance in spectral region and be usually used in manufacturing mirror surface.Speculum is widely used for various spaces and military affairs
Applied optics system, the performance of optical system are heavily dependent on the surface figure accuracy and surface quality of optical element, rather than
The use of spherical optics element can not only increase substantially the image quality of optical system, expand field range, can be with letter
Change the structure of optical system, but undoubtedly increases the difficulty of its processing and manufacturing simultaneously.
Aluminium mirror is processed frequently with single point diamond cutting technology, can be directly obtained relatively inexpensively and be met infrared optics system
The smooth surface that image quality of uniting requires, and influenced inevitably to generate periodically on aluminium mirror surface by its process characteristic
Turning lines, this greatly affected the optical property of aluminium mirror.Micro-structures such as " turning lines " due to surface and the light generated
Scattering, naked aluminium are difficult directly as the specular material for ultraviolet light and visible light application wave band.And aluminium alloy is as a kind of soft
Metal, while chemical property vivaciously causes, conventional polishing process is not ideal enough to its polishing effect, is difficult to obtain high-quality aluminum conjunction
Golden optical element.
Summary of the invention
The technical problem to be solved in the present invention: in view of the above problems in the prior art, a kind of aluminium alloy reflecting mirror is provided
Polishing method is combined, the present invention is able to solve the association turning lines in aluminium alloy reflecting mirror cutting process, conventional aluminum is overcome to close
The problems such as deficiency of the golden reflecting mirror polishing technology in terms of complex-curved correction of the flank shape, surface quality raising, polishing method of the invention
The correction of the flank shape of high-precision certainty can be carried out to aluminium alloy reflecting mirror, while obtain better quality polished surface, further improved
Optical element low defect manufacturing capacity opens up new way for the Ultra-precision Turning of China's optical element.
In order to solve the above-mentioned technical problem, the technical solution adopted by the present invention are as follows:
A kind of combination polishing method of aluminium alloy reflecting mirror, implementation steps include:
1) numerical control milling roughing is carried out to workpiece to be processed and obtains aluminium alloy reflecting mirror blank part；
2) Single point diamond turning o is carried out to workpiece to be processed, obtains meeting primary face shape and the aluminium of surface quality requirements closes
Golden mirror surface；
3) magnetorheological correction of the flank shape is carried out for the aluminium alloy mirror surface of workpiece to be processed；
4) small abrasive nose polishing, the progress small abrasive nose polishing tool are carried out for the aluminium alloy mirror surface of workpiece to be processed
Body refers to be polished using polishing disk；
5) whether the aluminium alloy mirror surface for detecting workpiece to be processed meets index request, if being unsatisfactory for index request
It then jumps and executes step 3), otherwise process finishing and exit.
Preferably, the detailed step of step 2) includes:
2.1) Single point diamond turning o is carried out to workpiece to be processed according to specified parameter；
2.2) workpiece to be processed is cleaned；
2.3) use wavefront interferometer and white light interferometer to aluminium alloy mirror surface the workpiece to be processed after cleaning
Detected, if face shape error evaluation index PV be less than or equal to preset threshold a and surface quality evaluation index Ra be less than or
Equal to preset threshold b, then determines the aluminium alloy mirror surface for obtaining meeting primary face shape and surface quality requirements, jump execution
Step 3)；Otherwise, it jumps and executes step 2.1).
Preferably, the detailed step of step 3) includes:
3.1) the corresponding magnetorheological processing of target material for obtaining workpiece to be processed removes function, according to primary face shape and goes
Except function is calculated in residence time, suitable machining path is selected, generates numerical control machining code, magnetic current is carried out to workpiece to be processed
It turns revisionism shape；
3.2) workpiece to be processed is cleaned；
3.3) surface testing is carried out using wavefront interferometer to the workpiece to be processed after cleaning, if face shape error evaluation refers to
It marks PV and is less than or equal to preset threshold c, then jump iteration and execute step 3.1)；Otherwise, it jumps and executes step 4).
Preferably, the equipment that magnetorheological correction of the flank shape uses is carried out to workpiece to be processed in step 3.1) to polish for wheeled magnetic fluid
Device, and the parameter of wheeled magnetic fluid burnishing device are as follows: polishing wheel rotation revolving speed is 150rpm~240rpm, polishing wheel minimum point
Gap with workpiece to be machined is 0.1~0.25mm, and the maximum magnetic field strength of machining area is 250mT~450mT, polishing fluid
Flow is 100L/h~150L/h, and the viscosity of polishing fluid is 0.35Pas~0.55Pas.
Preferably, the specific steps of step 3.2) refer to: workpiece to be processed is placed in clean room environment, it will be to be processed
Workpiece is dried after being rinsed workpiece to be processed using ionized water with alcohol swab.
Preferably, the detailed step of step 4) includes:
4.1) size, the shape of polishing disk are selected according to the face shape of workpiece to be added, so that polishing disk and mask to be processed paste
It closes；
4.2) reasonable burnishing parameters and motion profile are selected, makes polishing particles while keeping effective removal amount
Motion profile it is more random, realize surface smoothing and error randomization；
4.3) workpiece to be processed is cleaned；
4.4) surface testing is carried out using white light interferometer to the workpiece to be processed after cleaning, if surface quality evaluation refers to
It marks Ra and is less than or equal to preset threshold d, then jump iteration and execute step 4.1)；Otherwise, it jumps and executes step 5).
Preferably, the specific steps of step 4.3) refer to: workpiece to be processed is placed in clean room environment, it will be to be processed
Workpiece is dried using after deionized water progress ultrasonic cleaning with alcohol swab.
The combination polishing method of aluminium alloy reflecting mirror of the present invention has an advantage that the combination of aluminium alloy reflecting mirror of the present invention
Polishing method is studied and has been explored for aluminium alloy mirror optics polishing mechanism and technique, since aluminium alloy property is active
And quality is softer, the surface after general magnetorheological correction of the flank shape can generate directionality lines and " tail of a comet " phenomenon, and furthermore its surface can produce
The oxidation film of raw one layer of burnt hair, influences the surface quality of aluminium alloy reflecting mirror；And small abrasive nose polishing process has to surface profile
The advantages of error reduces and is randomized polishes target workpiece into small abrasive nose after magnetorheological processing, can further improve aluminium
The surface quality of alloy reflecting mirror.For this purpose, the combination polishing method of aluminium alloy reflecting mirror of the present invention is proposed and is turned revisionism using magnetic current
Shape and small abrasive nose polishing group technology aluminum alloy surface after Single point diamond turning o is directly polished, and carried out plane with
The experimental verification of aspherical aluminium alloy reflecting mirror polishing.The present invention is able to solve the association vehicle in aluminium alloy reflecting mirror cutting process
Lines is cut, overcomes the shortcomings of that traditional aluminium alloy reflecting mirror polishing technology is asked in terms of complex-curved correction of the flank shape, surface quality raising etc.
Topic, polishing method of the invention can carry out the correction of the flank shape of high-precision certainty to aluminium alloy reflecting mirror, while obtain better quality throwing
Optical surface further improves optical element low defect manufacturing capacity, opens up new way for the Ultra-precision Turning of China's optical element
Diameter.
Detailed description of the invention
Fig. 1 is the basic procedure schematic diagram of present invention method.
Fig. 2 is the face shape result that step 2) of the embodiment of the present invention obtains.
Fig. 3 is the surface quality results that step 2) of the embodiment of the present invention obtains.
Fig. 4 is removal function used in the embodiment of the present invention.
Fig. 5 is the face shape result that step 3) of the embodiment of the present invention obtains.
Fig. 6 is the surface quality results that step 3) of the embodiment of the present invention obtains.
Fig. 7 is the face shape result that step 4) of the embodiment of the present invention obtains.
Fig. 8 is the surface quality results that step 4) of the embodiment of the present invention obtains.
Specific embodiment
It hereafter will be to prepare the λ of face shape error PV < 0.5, surface using the combination polishing method of aluminium alloy reflecting mirror of the present invention
For certain model cylinder aluminium alloy reflecting mirror of quality Ra < 2nm, the combination polishing method of aluminium alloy reflecting mirror of the present invention is carried out
It is further to be described in detail.
As shown in Figure 1, the implementation steps of the combination polishing method of the present embodiment aluminium alloy reflecting mirror include:
1) roughing: numerical control milling roughing is carried out to workpiece to be processed and obtains aluminium alloy reflecting mirror blank part；
2) ultra-precise cutting: Single point diamond turning o is carried out to workpiece to be processed, obtains meeting primary face shape and surface matter
Measure desired aluminium alloy mirror surface；
3) certainty correction of the flank shape: magnetorheological correction of the flank shape is carried out for the aluminium alloy mirror surface of workpiece to be processed；
4) surface quality improves: carrying out small abrasive nose polishing for the aluminium alloy mirror surface of workpiece to be processed；
5) whether the aluminium alloy mirror surface for detecting workpiece to be processed meets index request, if being unsatisfactory for index request
It then jumps and executes step 3), otherwise process finishing and exit.
Since target part Surface Quality is more demanding, and its face shape be it is complex-curved, step 1) is thick in the present embodiment
Processing uses general NC milling, obtains aluminium alloy reflecting mirror blank part.
In the present embodiment, the detailed step of step 2) includes:
2.1) Single point diamond turning o is carried out to workpiece to be processed according to specified parameter；
2.2) workpiece to be processed is cleaned；
2.3) use wavefront interferometer and white light interferometer to aluminium alloy mirror surface the workpiece to be processed after cleaning
Detected, if face shape error evaluation index PV be less than or equal to preset threshold a and surface quality evaluation index Ra be less than or
Equal to preset threshold b, then determines the aluminium alloy mirror surface for obtaining meeting primary face shape and surface quality requirements, jump execution
Step 3)；Otherwise, it jumps and executes step 2.1).
In the present embodiment, carries out Single point diamond turning o and processed using slow knife servo turning technology, finish parameter
As shown in table 1 below.
Table 1: ultra-precise cutting parameter.
| Key parameter | The speed of mainshaft | The amount of feeding | Cutting depth | Tool radius |
| Parameter value | 30rpm | 0.3mm/min | 2μm | 1.029mm |
Due to face shape to be processed be it is complex-curved, in the present embodiment after process finishing use wavefront interferometer combination computer
It generates hologram image technology (CGH) and measures cylinder aluminium alloy reflecting mirror surface shape Scylinder_1, and measured using white light interferometer
Its surface quality Qcylinder_1, face shape Scylinder_1As a result as shown in Figure 2, surface quality Qcylinder_1As a result as shown in Figure 3.
In the present embodiment, the detailed step of step 3) includes:
3.1) the corresponding magnetorheological processing of target material for obtaining workpiece to be processed removes function, according to primary face shape and goes
Except function is calculated in residence time, suitable machining path is selected, generates numerical control machining code, magnetic current is carried out to workpiece to be processed
It turns revisionism shape；
3.2) workpiece to be processed is cleaned；
3.3) surface testing is carried out using wavefront interferometer to the workpiece to be processed after cleaning, if face shape error evaluation refers to
It marks PV and is less than or equal to preset threshold c, then jump iteration and execute step 3.1)；Otherwise, it jumps and executes step 4).
The corresponding magnetorheological processing removal of target material for obtaining workpiece to be processed for a certain group of parameter in the present embodiment
When function, diameter 100mm is chosen, the identical material aluminium alloy reflecting mirror of the circular flat of thickness 20mm is as production Magnetorheological Polishing
Remove the tests exemplar of function.Use the primary face shape (face i.e. before the production of removal function of wavefront interferometer measurement tests exemplar
Shape) Stest_1.Using technological parameter as shown in Table 2, dedicated magnetorheological fluid is polished using the aluminium mirror of laboratory development, is being tried
Test one group of removal function of fixed point production on exemplar.Face shape S after reusing wavefront interferometer measurement production removal functiontest_2。
By two groups of front and back face shape Stest_1And Stest_2Make difference and obtains Magnetorheological Polishing removal function as shown in Figure 4 after calculation processing
Fremove。
Table 2: Magnetorheological Polishing technological parameter.
By magnetorheological removal function F obtained in upper stepremoveThe cylinder aluminium mirror cutting result face shape obtained above
Scylinder_1The residence time of importing solves software and carries out solution calculating, can get residence time data Dtime.According to be processed
Cylinder face shape selects raster scanning machining path, by upper step residence time data D obtainedtimeIt is soft to import numerical control code generation
Part generates processing numerical control code, carries out magnetorheological correction of the flank shape to workpiece to be processed.3 iteration have been carried out in this example to machined part
Correction of the flank shape, each correction of the flank shape time is about 10min, and the face shape after correction of the flank shape is as shown in Figure 5, surface quality is as shown in Figure 6, the results showed that its
Face shape has met index request, the requirement and surface quality falls short of the target.
In the present embodiment, the equipment that magnetorheological correction of the flank shape uses is carried out for wheeled magnetic fluid to workpiece to be processed in step 3.1)
Burnishing device, and the parameter of wheeled magnetic fluid burnishing device are as follows: polishing wheel rotation revolving speed is 150rpm~240rpm, and polishing wheel is most
The gap of low spot and workpiece to be machined is 0.1~0.25mm, and the maximum magnetic field strength of machining area is 250mT~450mT, polishing
The flow of liquid is 100L/h~150L/h, and the viscosity of polishing fluid is 0.35Pas~0.55Pas.
In the present embodiment, the specific steps of step 3.2) refer to: workpiece to be processed is placed in clean room environment, it will be to
Workpieces processing is dried after being rinsed workpiece to be processed using ionized water with alcohol swab.
In the present embodiment, the detailed step of step 4) includes:
4.1) size, the shape of polishing disk are selected according to the face shape of workpiece to be added, so that polishing disk and mask to be processed paste
It closes；
4.2) reasonable burnishing parameters and motion profile are selected, makes polishing particles while keeping effective removal amount
Motion profile it is more random, realize surface smoothing and error randomization；
4.3) workpiece to be processed is cleaned；
4.4) surface testing is carried out using white light interferometer to the workpiece to be processed after cleaning, if surface quality evaluation refers to
It marks Ra and is less than or equal to preset threshold d, then jump iteration and execute step 4.1)；Otherwise, it jumps and executes step 5).
In the present embodiment, the specific steps of step 4.3) refer to: workpiece to be processed is placed in clean room environment, it will be to
Workpieces processing is dried using after deionized water progress ultrasonic cleaning with alcohol swab.
Due to the uniqueness of cylinder face shape, the plane polishing tool shelf of diameter 20mm is selected in this example, uses laboratory
The aluminium mirror dedicated optical of special configuration is along polishing fluid, and using raster scanning machining path, remaining parameter is shown in Table 3.
Table 3: small polishing disc tool fairing technological parameter.
Software Create numerical control machining code is generated using numerical control code, small abrasive nose polishing is carried out to workpiece to be processed.This reality
2 iteration fairing are carried out to workpiece to be processed in example, each fairing time is about 25min, and the face after fairing is shaped like Fig. 7 institute
Show, surface quality it is as shown in Figure 8, the results showed that its surface quality has met index request, and surface surface figure accuracy also exists
Within the scope of index request, so process finishing.
Show to add using the combination polishing method of aluminium alloy reflecting mirror of the present invention by the comparison of Fig. 7-8 and Fig. 2-3, Fig. 5-6
After work, which has arrived effective inhibition, surface figure accuracy and surface matter
Amount is all largely increased, and quality of finish is higher, this demonstrates the feasible of the combination polishing method of aluminium alloy reflecting mirror of the present invention
Property.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (7)
1. a kind of combination polishing method of aluminium alloy reflecting mirror, it is characterised in that implementation steps include:
1) numerical control milling roughing is carried out to workpiece to be processed and obtains aluminium alloy reflecting mirror blank part；
2) Single point diamond turning o is carried out to workpiece to be processed, obtains meeting primary face shape and the aluminium alloy of surface quality requirements is anti-
Penetrate mirror surface；
3) magnetorheological correction of the flank shape is carried out for the aluminium alloy mirror surface of workpiece to be processed；
4) small abrasive nose polishing is carried out for the aluminium alloy mirror surface of workpiece to be processed, the progress small abrasive nose polishing is specifically
Refer to and is polished using polishing disk；
5) whether the aluminium alloy mirror surface for detecting workpiece to be processed meets index request, jumps if being unsatisfactory for index request
Turn to execute step 3), otherwise process finishing and exit.
2. the combination polishing method of aluminium alloy reflecting mirror according to claim 1, which is characterized in that the detailed step of step 2)
Suddenly include:
2.1) Single point diamond turning o is carried out to workpiece to be processed according to specified parameter；
2.2) workpiece to be processed is cleaned；
2.3) workpiece to be processed after cleaning carries out aluminium alloy mirror surface using wavefront interferometer and white light interferometer
Detection, if face shape error evaluation index PV is less than or equal to preset threshold a and surface quality evaluation index Ra is less than or equal to
Preset threshold b then determines the aluminium alloy mirror surface for obtaining meeting primary face shape and surface quality requirements, jumps execution step
3)；Otherwise, it jumps and executes step 2.1).
3. the combination polishing method of aluminium alloy reflecting mirror according to claim 1, which is characterized in that the detailed step of step 3)
Suddenly include:
3.1) the corresponding magnetorheological processing of target material for obtaining workpiece to be processed removes function, according to primary face shape and removal letter
Number is calculated in residence time, selects suitable machining path, generates numerical control machining code, is carried out magnetic current to workpiece to be processed and is turned revisionism
Shape；
3.2) workpiece to be processed is cleaned；
3.3) surface testing is carried out using wavefront interferometer to the workpiece to be processed after cleaning, if face shape error evaluation index PV
Less than or equal to preset threshold c, then jumps iteration and execute step 3.1)；Otherwise, it jumps and executes step 4).
4. the combination polishing method of aluminium alloy reflecting mirror according to claim 3, which is characterized in that treated in step 3.1)
Workpieces processing carries out the equipment that magnetorheological correction of the flank shape uses as wheeled magnetic fluid burnishing device, and the ginseng of wheeled magnetic fluid burnishing device
Number are as follows: polishing wheel rotation revolving speed is 150rpm~240rpm, the gap of polishing wheel minimum point and workpiece to be machined is 0.1~
0.25mm, the maximum magnetic field strength of machining area are 250mT~450mT, and the flow of polishing fluid is 100L/h~150L/h, polishing
The viscosity of liquid is 0.35Pas~0.55Pas.
5. the combination polishing method of aluminium alloy reflecting mirror according to claim 3, which is characterized in that step 3.2) it is specific
Step refers to: workpiece to be processed being placed in clean room environment, workpiece to be processed is rushed workpiece to be processed using ionized water
It is dried after washing with alcohol swab.
6. the combination polishing method of aluminium alloy reflecting mirror according to claim 1, which is characterized in that the detailed step of step 4)
Suddenly include:
4.1) size, the shape that polishing disk is selected according to the face shape of workpiece to be added, so that polishing disk is bonded with mask to be processed；
4.2) reasonable burnishing parameters and motion profile are selected, the fortune of polishing particles is made while keeping effective removal amount
Dynamic rail mark is more random, realizes surface smoothing and error randomization；
4.3) workpiece to be processed is cleaned；
4.4) surface testing is carried out using white light interferometer to the workpiece to be processed after cleaning, if surface quality evaluation index Ra
Less than or equal to preset threshold d, then jumps iteration and execute step 4.1)；Otherwise, it jumps and executes step 5).
7. the combination polishing method of aluminium alloy reflecting mirror according to claim 6, which is characterized in that step 4.3) it is specific
Step refers to: workpiece to be processed is placed in clean room environment, workpiece to be processed is clear using deionized water progress ultrasonic wave
It is dried after washing with alcohol swab.
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| CN109176161A (en) * | 2018-10-18 | 2019-01-11 | 中国人民解放军国防科技大学 | High-surface-quality processing method for aluminum alloy reflector |
| CN110919298A (en) * | 2019-10-31 | 2020-03-27 | 成都四威高科技产业园有限公司 | Plane swing mirror processing method |
| CN111676501B (en) * | 2020-07-22 | 2021-05-18 | 中山市三美高新材料技术有限公司 | Anodic oxidation coloring process with characteristic spectrum reflection enhancement |
| CN112658815B (en) * | 2020-12-25 | 2023-03-07 | 中国人民解放军国防科技大学 | Processing method for 3D printing silicon carbide reflector |
| CN114952437B (en) * | 2022-05-27 | 2023-08-18 | 中国人民解放军国防科技大学 | Processing method of NiP modified layer |
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