CN102941528B - Aluminum alloy material with high-precision super-smooth surface, polishing disk, polishing agent and polishing method - Google Patents

Aluminum alloy material with high-precision super-smooth surface, polishing disk, polishing agent and polishing method Download PDF

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Publication number
CN102941528B
CN102941528B CN201210470873.XA CN201210470873A CN102941528B CN 102941528 B CN102941528 B CN 102941528B CN 201210470873 A CN201210470873 A CN 201210470873A CN 102941528 B CN102941528 B CN 102941528B
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polishing
aluminum alloy
disk
roughing
alloy materials
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CN102941528A (en
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尹自强
戴一帆
石峰
聂徐庆
铁贵鹏
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National University of Defense Technology
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National University of Defense Technology
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Abstract

The invention discloses a polishing method for an aluminum alloy material with a high-precision super-smooth surface and further discloses a polishing disk and a polishing agent. The polishing disk comprises a bottom disk body, a polishing pad, a polishing film and a compression piece, wherein the polishing film is coated outside the polishing pad, the compression piece hoops the edge of the polishing film and enables the polishing pad to be closely attached to the lower surface of the bottom disk body, and the polishing pad is made of polydimethylsiloxane (PDMS). The polishing agent is mainly prepared by water, diadust, hydrogen peroxide and a surfactant. The polishing method includes performing primary polishing on the surface of the aluminum alloy material through a single-point diamond turning process and then performing secondary polishing on the surface after the primary polishing through a computer-control optical surface forming process, the polishing disk and the polishing agent. The aluminum alloy material with the high-precision super-smooth surface (the roughness Ra<=2nm and the root-mean-square (RMS) value<=lambda/10) can be obtained according to the polishing disk, the polishing agent and the polishing method.

Description

There is aluminum alloy materials and polishing disk, polishing fluid and the finishing method of high accuracy super-smooth surface
Technical field
The invention belongs to the surface polishing technique field of optical material, particularly relate to the aluminum alloy materials after a kind of polishing and corresponding polissoir, polishing fluid and glossing.
Background technology
Aluminium alloy all has very high reflectivity at infrared, visible ray, in the wider spectral region of ultraviolet light, and this makes it become the good selection of multispectral imaging application.In addition, aluminium alloy good processability, quality are light, low price, have higher thermal conductivity.The support member material that aluminium alloy or many optical systems are particularly first-selected in aerospace applications, the thermal stress that supporting construction and optical element all adopt same aluminum can avoid because different thermal coefficient of expansions causes.But, because aluminium alloy polishing performance is poor, be easy to oxidation, be therefore difficult to obtain high-precision super-smooth surface.
Single point diamond turning o aluminium alloy can obtain the minute surface that roughness Ra (Ra: profile arithmetic average error) is better than 5nm, but the turning knife mark of aluminum alloy surface meeting residual periodicity, affect image quality.Single point diamond turning o belongs to generating method in essence, is limited to lathe kinematic accuracy and workpiece deformation, is difficult to obtain high-precision surface shape by the aluminum alloy surface precision of turning.Chemical mechanical polishing (CMP) is the method that can realize global planarizartion, U.S. NASA Goddard mentions space center in US 6966820B1, joined by prepared Chinese ink in polishing fluid, polished aluminum mirror can obtain super-smooth surface, but the site-directed quantitative that can not realize material is removed; Intel company discloses a kind of particle diameter and is less than or equal to the precipitated silica abrasive of 100 nanometers and the aluminium alloy polish abrasive of chelating buffer composition in CN101208399A Chinese patent literature; The people such as the Hebei University of Technology Liu Yu tinkling of pieces of jade use silicon dioxide gel, oxidant and homemade chelating agent polishing metal alloy, achieve certain effect; But the surface quality that existing aluminium alloy glossing obtains is still poor, and polishing precision and quality of finish need further raising.
Summary of the invention
The technical problem to be solved in the present invention overcomes the deficiencies in the prior art, a kind of aluminum alloy materials with high accuracy super-smooth surface is provided, the also corresponding polishing disk providing a kind of structure simply, easily to make, can be used for the aforementioned aluminum alloy materials of polishing, there is provided a kind of fill a prescription simple, raw material easily obtains, cost is low, can be used for the polishing fluid of the aforementioned aluminum alloy materials of polishing, and comprehensively provides the finishing method of the aforementioned aluminum alloy materials that a kind of technique is simple, polishing effect is good.
For solving the problems of the technologies described above, the technical scheme that the present invention proposes is the roughness Ra≤2nm of a kind of aluminum alloy materials with high accuracy super-smooth surface, described aluminum alloy materials, face shape RMS value (root-mean-square value)≤λ/10 of described aluminum alloy materials.
As a total technical conceive, the present invention also provides a kind of polishing disk that can be used for the above-mentioned aluminum alloy materials of polishing, described polishing disk comprises chassis, polishing pad, polished film and compressing member, described polishing pad is positioned at below chassis, described polishing pad is coated with polished film, described compressing member is waled the edge of polished film and is made polishing pad near the lower surface on chassis, described polishing pad is viscoelastic material---polydimethylsiloxane rubber makes (thickness of polishing pad is preferably 8mm ~ 15mm), described polished film is that polishing damping flannelette makes (thickness of polished film is preferably 0.5mm ~ 1mm).
As a total technical conceive, the present invention also provides a kind of polishing fluid that can be used for the above-mentioned aluminum alloy materials of polishing, and the component primarily of following volume fraction is formulated:
Water 93% ~ 95%
Diadust 2% ~ 3%
Oxidant 1% ~ 2% He
Surfactant 1% ~ 2%; (preferred ion type surfactant, such as higher fatty acid salt etc.)
Described oxidant is the hydrogenperoxide steam generator of mass concentration 20% ~ 30%.
In above-mentioned polishing fluid, the pH value of described polishing fluid preferably controls generally to regulate preferably by interpolation ammoniacal liquor or the pH value of dilute sulfuric acid to polishing fluid at 8 ~ 9().
In above-mentioned polishing fluid, the average grain diameter of described diadust is preferably 0.5 μm ~ 1 μm.The volume ratio of described water and diadust is preferably 100 ︰ 1 ~ 30 ︰ 1.
As a total technical conceive, the present invention also provides a kind of finishing method with the aluminum alloy materials of high accuracy super-smooth surface, comprises the following steps:
(1) prepare polished aluminum alloy materials, first adopt conventional Single point diamond turning o technique to carry out stock removal polishing to the surface of this aluminum alloy materials, obtain roughing aluminum alloy surface;
(2) computer control optical surface formation technique (CCOS) is adopted to carry out second polishing to the roughing aluminum alloy surface that step (1) obtains afterwards, the polishing tool that second polishing adopts is above-mentioned polishing disk, the polishing fluid used in second polishing process is above-mentioned polishing fluid, in second polishing process, first utilize computer control optical surface formation process software according to the primary face shape of the removal function of described polishing disk and described roughing aluminum alloy surface, calculate the processing residence time of roughing aluminum alloy surface each point, recycling digital control system controls described polishing disk in roughing aluminum alloy surface by the polishing path set and the processing residence time pre-entered, complete the second polishing to roughing aluminum alloy surface.
The ultra-smooth aluminum alloy material surface adopting above-mentioned finishing method can obtain roughness Ra value to be better than 2nm, and the object that can reach fixed point, quantitatively finishing aluminium alloy material charge level shape, the aluminium alloy material charge level shape RMS value after finishing is better than λ/10.The aluminum alloy materials of available above-mentioned finishing method processing comprises 6061 common aluminium alloys or 7075 aluminum alloy materials etc., and has no special requirements to the shape of aluminum alloy materials and size.
In the second polishing process of above-mentioned finishing method, polish pressure is preferably not more than 0.04MPa, and the rotating speed of polishing disk is preferably not more than 100rpm.
Above-mentioned finishing method is mainly based on following operation principle: finishing method of the present invention have employed the combined type polishing scheme of twice polishing superposition, namely in the present invention, the aluminium alloy material charge level shape of high accuracy ultra-smooth is that face shape after relying on CCOS technology finishing Single point diamond turning o obtains, why CCOS technology can repair the face shape after Single point diamond turning o, this is mainly because CCOS technology is a kind of method quantitatively removing optical material, according to preston theorem, material removal amount is proportional to polishing pressure p, speed vand polishing time t, that is: Δ= k. pVt, wherein kfor constant; By optical work (such as aluminum alloy materials) surface that the polishing disk polishing relative size that relative size is less is large, then in the height point resident relatively long time, in the low spot resident relatively short time, surface shape of material so just can be made to converge to higher precision gradually.
In addition, the successful Application of the invention described above finishing method also has benefited from the unique texture of the above-mentioned polishing disk of the present invention and the unique advantage of polishing fluid.Aluminum alloy materials due to polishing of the present invention is the very soft metal alloy of quality, the polishing disk of the polydimethylsiloxane rubber using matter soft and damping flannelette composition, the roughing aluminum alloy surface obtained can not be scratched, and damping flannelette has texture exquisiteness and the features such as groove of gathering, this is also conducive to the quality promoting aluminum alloy material surface further.In the polishing fluid that finishing method of the present invention uses, play the diadust be mainly wherein of shear action, because the grain diameter of diadust is very little, stable in properties, it does not react with the oxide of aluminium and aluminium, not easily cohesion forms large grit, it does irregular moulding cutting in aluminum alloy surface, effectively can realize the removal of aluminum alloy materials.In addition, hydrogen peroxide is added in polishing fluid of the present invention, because the chemical property of aluminium is very active, very easily be oxidized, the oxides such as the aluminium oxide generated after oxidation are attached to aluminum alloy surface, very easily form " orange peel " shape polishing defect, therefore by adding oxidants hydrogen peroxide in polishing fluid, the oxidation of aluminium can be promoted, impel oxide to leave aluminum alloy surface fast, improve polishing efficiency.In addition, in preferred technical scheme, by controlling 8 ~ 9 by the pH value of polishing fluid, make polishing fluid be in weakly alkaline benign environment, this is more conducive to the carrying out of polishing, improves the quality of polishing.
Compared with prior art, the invention has the advantages that:
1. by CCOS technology being applied to the surface finish of aluminum alloy materials, achieving and the site-directed quantitative of aluminum alloy materials is removed, obtain the high-accuracy aluminum alloy face shape that roughness Ra is better than 2nm, face shape RMS value is better than λ/10;
2. the polishing disk after being improved by employing the present invention and polishing fluid carry out polishing to aluminum alloy materials, effectively can remove the directionality turning knife mark that roughing aluminum alloy surface stays, and promote the surface quality after polishing further;
3. polishing disk structure of the present invention simply, easily makes, and only needs simple respective material of replacing can obtain good polishing effect;
4. polishing fluid formula of the present invention is simple, and raw material easily obtains, and cost is low, itself and polishing disk of the present invention and glossing with the use of, can significantly optimize polishing effect of the present invention;
5. finishing method step of the present invention is simple, it not only proposes twice polishing combination technique that Single point diamond turning o combines with CCOS technology, and combine the improvement of polishing disk and the optimization of polishing fluid component, obtain with lower process costs, higher polishing efficiency the aluminium alloy polished surface that surface quality promotes further, this is that aluminum alloy materials provides wide application prospect in the extensive use of optical field.
Accompanying drawing explanation
Fig. 1 is the structural representation (sectional view along axis) of polishing disk in the embodiment of the present invention.
Fig. 2 be in the embodiment of the present invention polishing disk at the walking schematic diagram of aluminum alloy material surface polishing.
Fig. 3 is the surface figure accuracy measurement result of roughing aluminum alloy surface in the embodiment of the present invention.
Fig. 4 is surface quality (i.e. roughness value) measurement result of roughing aluminum alloy surface in the embodiment of the present invention.
Fig. 5 is the phenogram of the removal function obtained in the embodiment of the present invention.
Fig. 6 is the surface figure accuracy measurement result in the embodiment of the present invention after aluminum alloy material surface second polishing.
Fig. 7 is the surface quality measurement result in the embodiment of the present invention after aluminum alloy material surface second polishing.
Marginal data:
1, polishing disk; 2, chassis; 3, polishing pad; 4, polished film; 5, compressing member; 6, roughing aluminum alloy surface; 7, polishing path.
Detailed description of the invention
Below in conjunction with Figure of description and concrete preferred embodiment, the invention will be further described, but protection domain not thereby limiting the invention.
embodiment:
An aluminum alloy materials with high accuracy super-smooth surface of the present invention as shown in Figure 6 and Figure 7, the roughness Ra of this aluminum alloy materials is 1.563nm, and the face shape RMS value of this aluminum alloy materials is 0.088 λ.
The aluminum alloy materials of what the present embodiment was above-mentioned have high accuracy super-smooth surface adopts following finishing method to obtain, and specifically comprises the following steps:
1. stock removal polishing: prepare polished aluminum alloy materials, first adopts conventional Single point diamond turning o technique to carry out stock removal polishing to the surface of this aluminum alloy materials, obtains roughing aluminum alloy surface; Laser interferometer is measured the face shape distribution of this roughing aluminum alloy surface, and measurement result as shown in Figure 3; As seen from Figure 3, roughing aluminum alloy surface face shape compares fairing, but surface figure accuracy is lower; In addition, white light interferometer is measured the surface quality (in the present embodiment, the measurement of white light interferometer is unified uses 10X camera lens) of this roughing aluminum alloy surface, detection range is 0.94mm × 0.7mm, testing result as shown in Figure 4, as seen from Figure 4, roughing aluminum alloy surface after Single point diamond turning o remains directive turning knife mark, and the cycle d of knife mark equals turning feeding step pitch δ, that is:
Wherein, vfor the feed speed of cutter, unit mm/s; for the speed of mainshaft, unit radian/s; This turning knife mark belongs to intermediate frequency error percentage, can make light generation small angle scattering, affect image quality.
2. obtain and remove function: the polishing fluid using the special polishing disk of the present invention and the present invention to prepare especially, polished aluminum alloy material of fixing a point under one group of condition be applicable to, obtains corresponding removal function as shown in Figure 5.This removal function characterizes polishing spot size and the polishing efficiency of the present embodiment polishing disk, is the important evidence that subsequent step calculates residence time.In addition, parameter when repairing aluminium alloy material charge level shape in follow-up second polishing must be consistent with the parameter used when obtaining and remove function in this step, and such as, the burnishing parameters provided in the parameter of the removal function shown in Fig. 5 and the present embodiment should be consistent.
3. determine the residence time that CCOS processes: according to the removal function obtained in the face graphic data of the roughing aluminum alloy surface after stock removal polishing in step 1 and step 2, utilize CCOS process software to calculate each point in above-mentioned roughing aluminum alloy surface and carry out the processing residence time of CCOS second polishing, and generate corresponding numerical control code; The principle calculated is: calculate residual error minimum, that is:
Wherein sfor primary face shape, ffor removing function, tfor processing residence time.
4. second polishing: the numerical control code input digital control system that step 3 is generated, according to the polishing path 7(planned in advance see Fig. 2), the polishing disk that recycling the present invention is special and polishing fluid scan in above-mentioned roughing aluminum alloy surface 6 with different speed under the control of this digital control system, polish pressure is 0.025MPa, the rotating speed of polishing disk is 100rpm, finally completes second polishing process.In order to control aluminum alloy surface quality, if the initial face shape error of roughing aluminum alloy surface is comparatively large, then can by total elapsed time tbe divided into 2 ~ 3 processing, because worsen in the long aluminum alloy material surface quality that may cause process time of same point stop.
Finally, the aluminum alloy material surface obtained after second polishing is cleaned, detect face shape error and the surface quality of aluminum alloy material surface after polishing, testing result respectively as shown in Figure 6, Figure 7, from Fig. 6 and Fig. 7, the surface figure accuracy after polishing significantly improves, and the knife mark of turning is removed, roughness is improved further, finally obtains the aluminum alloy materials with high accuracy super-smooth surface.
The polishing disk used in above-mentioned the present embodiment as shown in Figure 1, the diameter of this polishing disk 1 is 20mm, comprise chassis 2, polishing pad 3, compressing member in polished film 4 and compressing member 5(the present embodiment is a pressure ring), polishing pad 3 is positioned at the below on chassis 2, polishing pad 3 is coated with polished film 4, compressing member 5 is waled the edge of polished film 4 and is made polishing pad 3 form half pack arrangement near the lower surface on chassis 2, polishing pad 3 is viscoelastic material---polydimethylsiloxane rubber makes (thickness of polishing pad is 5mm), polished film 4 is that polishing damping flannelette makes (thickness of polished film is 1mm).
The polishing fluid used in above-mentioned the present embodiment, formulated by the component of following volume fraction:
Water 95%;
Diadust 2%; (average grain diameter is 0.5 μm)
Oxidant 2%; With
Higher fatty acids sodium 1%.
Wherein oxidant is the hydrogenperoxide steam generator of mass concentration 30%; The pH value of polishing fluid controls 8 ~ 9.The volume ratio of water and diadust controls at 100 ︰ 1 ~ 30 ︰ 1.

Claims (2)

1. there is a finishing method for the aluminum alloy materials of high accuracy super-smooth surface, comprise the following steps:
(1) prepare polished aluminum alloy materials, first adopt conventional Single point diamond turning o technique to carry out stock removal polishing to the surface of this aluminum alloy materials, obtain roughing aluminum alloy surface;
(2) computer control optical surface formation technique is adopted to carry out second polishing to the roughing aluminum alloy surface that step (1) obtains afterwards, polishing disk and polishing fluid is adopted in second polishing process, first utilize computer control optical surface formation process software according to the primary face shape of the removal function of described polishing disk and described roughing aluminum alloy surface, calculate the processing residence time of roughing aluminum alloy surface each point, recycling digital control system controls described polishing disk in roughing aluminum alloy surface by the polishing path set and the processing residence time pre-entered, complete the second polishing to roughing aluminum alloy surface,
The polishing disk adopted in second polishing process is a kind of polishing disk that can be used for polished aluminum alloy material, described polishing disk comprises chassis, polishing pad, polished film and compressing member, described polishing pad is positioned at below chassis, described polishing pad is coated with polished film, described compressing member is waled the edge of polished film and is made polishing pad near the lower surface on chassis, described polishing pad is that polydimethylsiloxane rubber makes, and described polished film is that polishing damping flannelette makes;
The polishing fluid used in second polishing process is a kind of polishing fluid that can be used for polished aluminum alloy material, and the component primarily of following volume fraction is formulated:
Water 93% ~ 95%
Diadust 2% ~ 3%
Oxidant 1% ~ 2% He
Surfactant 1% ~ 2%;
Described oxidant is the hydrogenperoxide steam generator of mass concentration 20% ~ 30%;
The pH value of described polishing fluid controls 8 ~ 9;
The average grain diameter of described diadust is 0.5 μm ~ 1 μm;
Through the roughness Ra≤2nm of the described aluminum alloy materials of second polishing, shape RMS value≤λ/10, face of described aluminum alloy materials.
2. finishing method according to claim 1, is characterized in that: in described second polishing process, polish pressure is not more than 0.04MPa, and the rotating speed of polishing disk is not more than 100rpm.
CN201210470873.XA 2012-11-20 2012-11-20 Aluminum alloy material with high-precision super-smooth surface, polishing disk, polishing agent and polishing method Expired - Fee Related CN102941528B (en)

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CN103495929B (en) * 2013-09-18 2017-05-31 杭州百木表面技术有限公司 A kind of abrasive polishing method of sheet metal strip
CN103934741B (en) * 2014-04-01 2016-08-17 壹埃光学(苏州)有限公司 Surface roughness reaches 0. 1 nano level design techniques
CN104073170B (en) * 2014-06-24 2015-11-18 江苏天恒纳米科技股份有限公司 A kind of aluminum alloy surface Ultra-precision Turning special-purpose nanometer slurry and preparation method thereof
CN109176161A (en) * 2018-10-18 2019-01-11 中国人民解放军国防科技大学 High-surface-quality processing method for aluminum alloy reflector

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