CN110919298A - Plane swing mirror processing method - Google Patents

Plane swing mirror processing method Download PDF

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Publication number
CN110919298A
CN110919298A CN201911055790.2A CN201911055790A CN110919298A CN 110919298 A CN110919298 A CN 110919298A CN 201911055790 A CN201911055790 A CN 201911055790A CN 110919298 A CN110919298 A CN 110919298A
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CN
China
Prior art keywords
mirror
plane
mirror surface
workbench
machining
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Pending
Application number
CN201911055790.2A
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Chinese (zh)
Inventor
南水平
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Chengdu Siwi High Tech Industrial Park Co Ltd
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Chengdu Siwi High Tech Industrial Park Co Ltd
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Application filed by Chengdu Siwi High Tech Industrial Park Co Ltd filed Critical Chengdu Siwi High Tech Industrial Park Co Ltd
Priority to CN201911055790.2A priority Critical patent/CN110919298A/en
Publication of CN110919298A publication Critical patent/CN110919298A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23PMETAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS
    • B23P15/00Making specific metal objects by operations not covered by a single other subclass or a group in this subclass

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)

Abstract

The invention discloses a plane swing mirror processing method, which comprises the following steps: firstly, forming a blank to the structural appearance of the plane swing mirror through machining, and keeping a machining allowance of 0.1mm for a large mirror surface and a small mirror surface of the plane swing mirror; then, carrying out low-temperature stress relief annealing on the machined and formed part; and finally, fixing a plurality of parts subjected to low-temperature stress relief annealing treatment on a workbench capable of performing plane motion, feeding a machining main shaft provided with a cutter, performing plane motion on the workbench, and polishing the small mirror surface and the large mirror surface of the plane swing mirror in sequence.

Description

Plane swing mirror processing method
Technical Field
The invention relates to the field of manufacturing of reflection type optical parts, in particular to a method for processing a plane swing mirror.
Background
The plane swing mirror is one of key parts of a reflection type optical system, the used material is aluminum alloy, and the structure is characterized in that: one end is a cylindrical shaft, the other end is a flat double-hexagon mirror structure which comprises a large mirror and a small mirror, and the two mirrors belong to infrared wave reflecting mirrors, so that the requirement on the surface type is high, and a large number of technical difficulties exist in batch processing. For example, chinese patent No. CN201710802231.8, a method for machining a vibrating oscillating mirror, which comprises controlling and processing the dimensional quality of a blank for machining, and then performing finish machining by using a diamond fly cutter and a back support tool.
Disclosure of Invention
In order to solve the above problems, the present invention provides a method for processing a planar oscillating mirror.
Specifically, the plane swing mirror processing method comprises the following steps:
s1, forming the blank to the structural shape of the plane swing mirror through machining, and keeping a machining allowance of 0.1mm for the large mirror surface and the small mirror surface of the plane swing mirror;
s2, carrying out low-temperature stress relief annealing on the part formed in the step S1;
s3, fixing the parts processed by low-temperature stress relief annealing in the step S2 on a workbench capable of performing plane motion, feeding a processing main shaft provided with a cutter, performing plane motion on the workbench, and polishing the small mirror surface and the large mirror surface of the plane pendulum mirror in sequence, wherein the feeding amount of the cutter is 0.005-0.01 mm.
Further, when the cylindrical shaft of the plane pendulum mirror is machined and molded, rough turning is firstly carried out, and the feeding amount is 0.1 mm; then, finish turning is carried out, and the feeding amount is 0.05 mm.
Further, the heat preservation temperature of the low-temperature stress relief annealing is 200 ℃, and the heat preservation time is 3 hours.
Further, the workbench is a vacuum adsorption workbench.
Further, when a large mirror surface is polished, the plane swing mirror is fixed with the workbench through the supporting tool, the supporting tool is provided with a tool profile, and the small mirror surface side of the plane swing mirror is tightly attached to the tool profile.
The invention has the beneficial effects that: by the method, batch production is realized, and the problem of uneven thickness of the product is effectively avoided.
Drawings
FIG. 1 is a front view of a flat oscillating mirror;
FIG. 2 is a rear view of the plane pendulum mirror;
FIG. 3 is a side view of the plane swing mirror;
FIG. 4 is a schematic view of the polishing process of the present invention;
FIG. 5 is a schematic view of the installation of the flat oscillating mirror;
in the figure, 1-a main shaft, 2-a cutter, 3-a plane swing mirror, 4-a supporting tool, 5-a workbench, 6-a cylindrical shaft, 7-a large mirror surface, 8-a small mirror surface and 9-a tool molded surface.
Detailed Description
In order to more clearly understand the technical features, objects, and effects of the present invention, embodiments of the present invention will now be described with reference to the accompanying drawings.
As shown in fig. 1-3, the planar swing mirror has the structural characteristics that: one end is a cylindrical shaft 6, and the other end is a flat double-hexagon mirror structure which comprises a large mirror 7 and a small mirror 8.
A plane swing mirror processing method specifically comprises the following steps:
(1) firstly, selecting a proper bar stock as a product blank, wherein the length of the blank comprises a plurality of milling clamping positions. Firstly, turning, roughly and finely turning the axial part of the front end cylinder, wherein the tool consumption is 0.1mm during rough turning, the tool consumption is 0.05mm during fine turning, and turning to the next procedure.
(2) In the second step, the large mirror 7 and the small mirror 8 of the mirror portion are roughly finished at the machining center, leaving a margin of 0.1mm on one side. Removing the clamping position and the allowance around, and turning to the next working procedure.
(3) Thirdly, carrying out heat treatment and low-temperature stress relief annealing: keeping the temperature at 200 ℃ for 3h, and cooling in air. And turning to the next working procedure.
(4) And fourthly, performing precision polishing on a five-axis single-point diamond lathe, wherein the model of the machine tool adopts MoorenOTech 350FG, as shown in figures 4 and 5, firstly, polishing the small mirror surface 8, uniformly fixing a plurality of parts subjected to low-temperature stress relief annealing treatment on a workbench 5, enabling a large mirror surface 7 to be in contact with the workbench 5, installing a diamond cutter 2 on a main shaft 1, driving the cutter 2 to rotate along the main shaft 1 and feed along a Z axis, and enabling the workbench to move along X and Y axes to polish the small mirror surface 8. The worktable 5 is a vacuum adsorption worktable. The workpiece can be arranged on the tool side by side in a mode that the workpiece moves along the X axis and the Y axis along with the workbench, a plurality of workpieces are clamped at one time, and batch production is realized.
And then, polishing the large mirror surface 7, fixing a plurality of plane oscillating mirrors 3 on a workbench 5 through a back support tool 4, wherein the support tool is provided with a tool molded surface 9, and the small mirror surface side of the plane oscillating mirror is tightly attached to the tool molded surface 9. The main shaft 1 is provided with a diamond cutter 2 and drives the cutter 2 to rotate along the main shaft 1 and feed along the Z axis, and the workbench 5 moves along the X axis and the Y axis to realize the polishing of the large mirror surface 7. When the small mirror 8 and the large mirror 7 are polished, the feeding amount is selected to be 0.005 mm-0.01 mm. By using the supporting tool 4 on the back, the tool molded surface 9 is tightly attached to the molded surface on the back (small mirror surface side) of the swing mirror, the tool molded surface 9 is a concave surface, and the tool molded surface 9 is provided with a plurality of holes, so that the combination strength between a product and the tool is ensured through vacuum adsorption; meanwhile, the machine tool has automatic tool setting, the lower tool point is determined to be just in contact with the surface of the workpiece, the reasonable feeding amount is achieved, and the consistency of the thickness of the product is guaranteed. Through the test of the laser interferometer, the large surface IRR of the surface type precision is less than or equal to 2, and the small surface IRR is less than or equal to 1. After multiple trial processing, the qualification rate can be controlled at 80%. By adopting the movement mode, a tool as large as possible can be installed on the workbench, and meanwhile, workpieces are installed on the tool as many as possible side by side at one time, so that the clamping time is reduced, and the mass production is realized.

Claims (5)

1. A method for processing a plane swing mirror is characterized by comprising the following steps:
s1, forming the blank to the structural shape of the plane swing mirror through machining, and keeping a machining allowance of 0.1mm for the large mirror surface and the small mirror surface of the plane swing mirror;
s2, carrying out low-temperature stress relief annealing on the part formed in the step S1;
s3, fixing the parts processed by low-temperature stress relief annealing in the step S2 on a workbench capable of performing plane motion, feeding a processing main shaft provided with a cutter, performing plane motion on the workbench, and polishing the small mirror surface and the large mirror surface of the plane pendulum mirror in sequence, wherein the feeding amount of the cutter is 0.005-0.01 mm.
2. The method for machining the plane oscillating mirror according to claim 1, wherein when the cylindrical shaft of the plane oscillating mirror is machined and formed, rough turning is firstly carried out, and the feeding amount is 0.1 mm; then, finish turning is carried out, and the feeding amount is 0.05 mm.
3. The method for processing the plane oscillating mirror according to claim 1, wherein the low-temperature stress relief annealing is performed at a temperature of 200 ℃ for 3 hours.
4. The method according to claim 1, wherein the stage is a vacuum chuck stage.
5. The method for processing the plane oscillating mirror according to claim 1, wherein the plane oscillating mirror is fixed with the workbench through a supporting tool during the polishing of the large mirror surface, the supporting tool is provided with a tool profile, and the small mirror surface side of the plane oscillating mirror is tightly attached to the tool profile.
CN201911055790.2A 2019-10-31 2019-10-31 Plane swing mirror processing method Pending CN110919298A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201911055790.2A CN110919298A (en) 2019-10-31 2019-10-31 Plane swing mirror processing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201911055790.2A CN110919298A (en) 2019-10-31 2019-10-31 Plane swing mirror processing method

Publications (1)

Publication Number Publication Date
CN110919298A true CN110919298A (en) 2020-03-27

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CN201911055790.2A Pending CN110919298A (en) 2019-10-31 2019-10-31 Plane swing mirror processing method

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CN (1) CN110919298A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1562565A (en) * 2004-04-01 2005-01-12 广东轻工职业技术学院 High performance mirror polish equipment with double grinding heads and technique method of mirror polish
CN102264509A (en) * 2008-10-29 2011-11-30 居伊·莫努瓦耶尔 Ophthalmic machine and method for machining and/or polishing lens
CN102879902A (en) * 2012-10-08 2013-01-16 同济大学 Cam-driven oscillating mirror mechanism
CN107443026A (en) * 2017-09-07 2017-12-08 云南北方驰宏光电有限公司 Vibration pendulum mirror processing method
CN107953151A (en) * 2017-12-04 2018-04-24 中国人民解放军国防科技大学 Combined polishing method of aluminum alloy reflector

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1562565A (en) * 2004-04-01 2005-01-12 广东轻工职业技术学院 High performance mirror polish equipment with double grinding heads and technique method of mirror polish
CN102264509A (en) * 2008-10-29 2011-11-30 居伊·莫努瓦耶尔 Ophthalmic machine and method for machining and/or polishing lens
CN102879902A (en) * 2012-10-08 2013-01-16 同济大学 Cam-driven oscillating mirror mechanism
CN107443026A (en) * 2017-09-07 2017-12-08 云南北方驰宏光电有限公司 Vibration pendulum mirror processing method
CN107953151A (en) * 2017-12-04 2018-04-24 中国人民解放军国防科技大学 Combined polishing method of aluminum alloy reflector

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Application publication date: 20200327

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