CN107946228A - A kind of vacuum WAND - Google Patents
A kind of vacuum WAND Download PDFInfo
- Publication number
- CN107946228A CN107946228A CN201711184472.7A CN201711184472A CN107946228A CN 107946228 A CN107946228 A CN 107946228A CN 201711184472 A CN201711184472 A CN 201711184472A CN 107946228 A CN107946228 A CN 107946228A
- Authority
- CN
- China
- Prior art keywords
- vacuum
- cups
- switch
- penholder
- metals
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052751 metal Inorganic materials 0.000 claims abstract description 51
- 239000002184 metal Substances 0.000 claims abstract description 51
- 210000005239 tubule Anatomy 0.000 claims abstract description 35
- 150000002739 metals Chemical class 0.000 claims abstract description 29
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000003373 anti-fouling effect Effects 0.000 description 2
- 229910002601 GaN Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68368—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used in a transfer process involving at least two transfer steps, i.e. including an intermediate handle substrate
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Geophysics And Detection Of Objects (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The present invention is a kind of vacuum WAND, its structure includes vacuum cups, vacuum cups Multi-angle adjusting mechanism and vacuum detecting system, and the vacuum cups Multi-angle adjusting mechanism includes A vacuum metals tubule, B vacuum metals tubule, rubber hose, fixed metal tube, screw, rotary rail；Vacuum detecting system includes vacuum indicator light, micro power and vacuum sensing sensor, and vacuum indicator light, micro power and vacuum sensing sensor are connected in series.Advantage：1st, vacuum cups Multi-angle adjusting mechanism can adjust rotation and fix, and meet various equipment and the needs of manually carrying.2. the vacuum detecting system of vacuum WAND, can avoid because wafer scrap caused by vacuum blockage or switching damage.
Description
Technical field
The present invention relates to a kind of vacuum WAND, belongs to chip aspiration technique field.
Background technology
In semiconductor manufacturing industry, manufacturing process have to it is antifouling dust-proof, but processing and product circulation when can inevitably contact
Or manual handling chip, particularly in some compound manufacturing process, since the degree of automation is relatively low, manual contact chip
Probability can greatly increase.Since the cost of GaAs, gallium nitride is much higher relative to silicon chip, so not only to ensure antifouling
It is dust-proof, it is often more important that to ensure the safety of chip.
The content of the invention
The present invention proposes a kind of vacuum WAND, it is desirable to provide a kind of vacuum cups adjusts rotation and fixes while prevent
The vacuum WAND of wafer breakage.
Technical scheme：
A kind of vacuum WAND, its structure include vacuum cups 9 and vacuum cups Multi-angle adjusting mechanism, and the vacuum cups is polygonal
Spend adjusting mechanism include A vacuum metals tubule 10, B vacuum metals tubule 18, rubber hose 11, fixed metal tube 12, screw 13,
Rotary rail 14；Wherein, vacuum cups 9 is connected with the A ends of A vacuum metals tubule 10, and the B ends of A vacuum metals tubule 10 pass through
Rubber hose 11 is connected with the A ends of B vacuum metals tubule 18, and the A ends of fixed metal tube 12 are connected with A vacuum metals tubule 10, B
End is equipped with screw 13, and the B ends of fixed metal tube 12 can adjust angle along guide rail 14 and be fixed by screw 13, guide rail 14 and B
Vacuum metal tubule 18 connects；The B ends of the B vacuum metals tubule 18 are equipped with internal thread link connector 15.
Beneficial effects of the present invention：
1st, vacuum cups Multi-angle adjusting mechanism can adjust rotation and fix, and meet various equipment and the needs of manually carrying.
2. the vacuum detecting system of vacuum WAND, can avoid because chip report caused by vacuum blockage or switching damage
It is useless.
Brief description of the drawings
Fig. 1 is a kind of fragmentary front view of vacuum WAND.
Fig. 2 is a kind of Multi-angle adjusting mechanism of vacuum WAND.
Fig. 3 is a kind of vacuum detecting system schematic of vacuum WAND.
1 is vacuum switch in figure；2 be vacuum indicator light；3 be vacuum switch fore vacuum pipeline；4 be branch line；5 are
Vacuum detecting system；6 be vacuum switch rear end vacuum line；7 be vacuum hose；8 be vacuum cups connection screw thread；9 be vacuum
Suction nozzle；10 be vacuum metal tubule；11 be rubber hose connection；12 be fixed metal tube；13 be lock screw；14 be that rotation is led
Rail；15 be internal thread link connector；16 be micro power；17 be vacuum transducer；18 be vacuum metal tubule.
Embodiment
A kind of vacuum WAND, its structure include vacuum cups 9 and vacuum cups Multi-angle adjusting mechanism, the vacuum cups
Multi-angle adjusting mechanism includes A vacuum metals tubule 10, B vacuum metals tubule 18, rubber hose 11, fixed metal tube 12, spiral shell
Silk 13, rotary rail 14；Wherein, vacuum cups 9 is connected with the A ends of A vacuum metals tubule 10, the B ends of A vacuum metals tubule 10
It is connected by rubber hose 11 with the A ends of B vacuum metals tubule 18, the A ends of fixed metal tube 12 connect with A vacuum metals tubule 10
Connect, B ends are equipped with screw 13, and the B ends of fixed metal tube 12 can adjust angle along guide rail 14 and be fixed by screw 13, guide rail 14
It is connected with B vacuum metals tubule 18；The B ends of the B vacuum metals tubule 18 are equipped with internal thread link connector 15.
The guide rail 14 has two, and the screw 13 has two.
It is true that the vacuum WAND further includes penholder, vacuum switch 1, vacuum switch fore vacuum pipeline 3, vacuum switch rear end
Blank pipe road 6；Wherein, vacuum switch 1 is arranged in the middle part of penholder shaft, and the front end of vacuum switch 1 is true for vacuum switch front end in penholder
Blank pipe road 3, the rear end of vacuum switch 1 are vacuum switch rear end vacuum line 6,3 end of vacuum switch fore vacuum pipeline of penholder
Equipped with vacuum cups connection screw thread 8, vacuum cups connection screw thread 8 links connector 15 with the internal thread and is connected through a screw thread, pen
6 end of the vacuum switch rear end vacuum line connection vacuum hose of bar.
Branch line 4 and vacuum detecting system are further included, the vacuum detecting system includes vacuum indicator light 2, micro electric
Source 16 and vacuum sensing sensor 17, vacuum indicator light 2, micro power 16 and vacuum sensing sensor 17 are connected in series；Wherein,
Branch line 4 is located in penholder, connection vacuum switch fore vacuum pipeline 3 and vacuum detecting system.
The micro power 16 is external power supply.
Technical scheme is further illustrated below in conjunction with the accompanying drawings.
Compare attached drawing 1, a kind of vacuum WAND, including penholder, vacuum switch 1, vacuum indicator light 2, vacuum switch front end are true
Blank pipe road 3, branch line 4, vacuum detecting system 5, vacuum switch rear end vacuum line 6, vacuum hose 7 are connected with vacuum cups
Screw thread 8；Wherein, vacuum switch 1 is arranged in the middle part of penholder shaft, and the front end of vacuum switch 1 is vacuum switch fore vacuum in penholder
Pipeline 3, the rear end of vacuum switch 1 is vacuum switch rear end vacuum line 6, and 3 end of vacuum switch fore vacuum pipeline of penholder is set
There is vacuum cups connection screw thread 8, vacuum cups connection screw thread 8 links connector 15 with the internal thread and is connected through a screw thread, penholder
6 end of vacuum switch rear end vacuum line connection vacuum hose 7, branch line 4 be located in penholder, and it is true to connect vacuum switch front end
Blank pipe road 3 and vacuum detecting are 5.
Compare attached drawing 2, a kind of vacuum WAND, including vacuum cups 9 and vacuum cups Multi-angle adjusting mechanism, vacuum cups
Multi-angle adjusting mechanism includes A vacuum metals tubule 10, B vacuum metals tubule 18, rubber hose 11, fixed metal tube 12, spiral shell
Silk 13, rotary rail 14；Wherein, vacuum cups 9 is connected with the A ends of A vacuum metals tubule 10, the B ends of A vacuum metals tubule 10
It is connected by rubber hose 11 with the A ends of B vacuum metals tubule 18, the A ends of fixed metal tube 12 connect with A vacuum metals tubule 10
Connect, B ends are equipped with screw 13, and the B ends of fixed metal tube 12 can adjust angle along guide rail 14 and be fixed by screw 13, guide rail 14
It is connected with B vacuum metals tubule 18；The B ends of the B vacuum metals tubule 18 are equipped with internal thread link connector 15；Guide rail 14 has
Two, screw 13 has two.
Attached drawing 3 is compareed, vacuum detecting system includes vacuum indicator light 2, micro power 16 and vacuum sensing sensor 17,
Vacuum indicator light 2, micro power 16 and vacuum sensing sensor 17 are connected in series.Micro power 16 can also be external power supply.
Embodiment 1
The presetting preset value of vacuum transducer in vacuum detecting system 5, when the vacuum WAND trip switch 1 installed is held
After chip, a voltage is exported after the vacuum values in vacuum switch fore vacuum pipeline 3 reach the preset value, vacuum is attached to and opens
The vacuum indicator light 2 closed on fore vacuum pipeline 3 can light.Whether operator can judge chip according to vacuum indicator light 2
Safely and whether vacuum WAND is faulty.
13 screws are unclamped, required angle in practical operation, fastening screw 13 are adjusted along guide rail 14.Can level can band
The vacuum cups of angle can meet most equipment and carry demand.
Micro power（Can also be external）16 improve power supply to indicator light and vacuum transducer 17, when the vacuum detected
Equivalent to the conducting wire of conducting, indicator light 2 brightens vacuum transducer when reaching setting value.
Vacuum cups connection screw thread 8 links connector 15 with the internal thread in Fig. 2 and is connected through a screw thread.
Claims (5)
1. a kind of vacuum WAND, it is characterised in that its structure includes vacuum cups and vacuum cups Multi-angle adjusting mechanism, described
Vacuum cups Multi-angle adjusting mechanism includes A vacuum metals tubule, B vacuum metals tubule, rubber hose, fixed metal tube, spiral shell
Silk, rotary rail；Wherein, vacuum cups is connected with the A ends of A vacuum metal tubules, and the B ends of A vacuum metal tubules pass through rubber
Hose is connected with the A ends of B vacuum metal tubules, and the A ends of fixed metal tube are connected with A vacuum metal tubules, the B of fixed metal tube
End is equipped with screw, and the B ends of fixed metal tube can adjust angle and be screwed along guide rail, and guide rail and B vacuum metals are thin
Pipe connects；The B ends of the B vacuum metals tubule are equipped with internal thread link connector.
A kind of 2. vacuum WAND according to claim 1, it is characterised in that：The guide rail has two, and the screw has two
It is a.
A kind of 3. vacuum WAND according to claim 1, it is characterised in that：The vacuum WAND further includes penholder, vacuum
Switch, vacuum switch fore vacuum pipeline, vacuum switch rear end vacuum line；Wherein, vacuum switch is arranged in the middle part of penholder shaft,
The front end of vacuum switch is vacuum switch fore vacuum pipeline in penholder, and the rear end of vacuum switch is vacuum switch rear end vacuum tube
Road, the vacuum switch fore vacuum pipeline end of penholder are equipped with vacuum cups connection screw thread, vacuum cups connection screw thread with it is described interior
Screw thread link connector is connected through a screw thread, the vacuum switch rear end vacuum tube terminal connection vacuum hose of penholder.
A kind of 4. vacuum WAND according to claim 1, it is characterised in that：Further include branch line and vacuum detecting system
System, the vacuum detecting system include vacuum indicator light, micro power and vacuum sensing sensor, vacuum indicator light, micro electric
Source and vacuum sensing sensor are connected in series；Wherein, vacuum indicator light is arranged on the vacuum switch fore vacuum pipeline 3 of penholder shaft
Section, branch line are located in penholder, branch line connection vacuum switch fore vacuum pipeline and vacuum detecting system.
A kind of 5. vacuum WAND according to claim 4, it is characterised in that：The micro power is external power supply.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711184472.7A CN107946228A (en) | 2017-11-23 | 2017-11-23 | A kind of vacuum WAND |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711184472.7A CN107946228A (en) | 2017-11-23 | 2017-11-23 | A kind of vacuum WAND |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107946228A true CN107946228A (en) | 2018-04-20 |
Family
ID=61930143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711184472.7A Pending CN107946228A (en) | 2017-11-23 | 2017-11-23 | A kind of vacuum WAND |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107946228A (en) |
Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW383751U (en) * | 1999-01-22 | 2000-03-01 | United Microelectronics Corp | Vacuum suction pen with adjustable vacuum display |
| TW459330B (en) * | 2000-12-04 | 2001-10-11 | United Microelectronics Corp | Connection-operated varying-angle suction pen |
| JP2002346963A (en) * | 2001-05-29 | 2002-12-04 | Seiko Epson Corp | Vacuum tweezers with terminal input pen function, electro-optical device manufacturing method, electro- optical device and electronic appliance |
| TW518307B (en) * | 2000-10-04 | 2003-01-21 | United Microelectronics Corp | Multi-angle bent sucking pen |
| KR20070016789A (en) * | 2005-08-05 | 2007-02-08 | 삼성전자주식회사 | Apparatus for transferring wafer |
| CN201233467Y (en) * | 2008-06-04 | 2009-05-06 | 安润科技股份有限公司 | Reflection mechanism having non-directional adjustment |
| GB201011148D0 (en) * | 2010-07-02 | 2010-08-18 | Lai Peng C | Shooting angle adjuster |
| CN202601707U (en) * | 2012-05-15 | 2012-12-12 | 浙江宝利特新能源股份有限公司 | Vacuum suction pen |
| CN202839575U (en) * | 2012-09-11 | 2013-03-27 | 彩虹集团公司 | Vacuum nozzle self-adaptive to any angle for crystalline silicon cell |
| CN205140320U (en) * | 2015-11-27 | 2016-04-06 | 林建伟 | Air pressure experiences pipe |
| CN205469575U (en) * | 2016-03-15 | 2016-08-17 | 天津市菲佳自行车工贸有限公司 | Can regulate and control bicycle frame |
| CN105895571A (en) * | 2016-01-22 | 2016-08-24 | 苏州能讯高能半导体有限公司 | Vacuum sucking pen |
| JP2016162914A (en) * | 2015-03-03 | 2016-09-05 | 株式会社ディスコ | Vacuum tweezer |
| CN207966951U (en) * | 2017-11-23 | 2018-10-12 | 中国电子科技集团公司第五十五研究所 | A kind of vacuum WAND |
-
2017
- 2017-11-23 CN CN201711184472.7A patent/CN107946228A/en active Pending
Patent Citations (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW383751U (en) * | 1999-01-22 | 2000-03-01 | United Microelectronics Corp | Vacuum suction pen with adjustable vacuum display |
| TW518307B (en) * | 2000-10-04 | 2003-01-21 | United Microelectronics Corp | Multi-angle bent sucking pen |
| TW459330B (en) * | 2000-12-04 | 2001-10-11 | United Microelectronics Corp | Connection-operated varying-angle suction pen |
| JP2002346963A (en) * | 2001-05-29 | 2002-12-04 | Seiko Epson Corp | Vacuum tweezers with terminal input pen function, electro-optical device manufacturing method, electro- optical device and electronic appliance |
| KR20070016789A (en) * | 2005-08-05 | 2007-02-08 | 삼성전자주식회사 | Apparatus for transferring wafer |
| CN201233467Y (en) * | 2008-06-04 | 2009-05-06 | 安润科技股份有限公司 | Reflection mechanism having non-directional adjustment |
| GB201011148D0 (en) * | 2010-07-02 | 2010-08-18 | Lai Peng C | Shooting angle adjuster |
| CN202601707U (en) * | 2012-05-15 | 2012-12-12 | 浙江宝利特新能源股份有限公司 | Vacuum suction pen |
| CN202839575U (en) * | 2012-09-11 | 2013-03-27 | 彩虹集团公司 | Vacuum nozzle self-adaptive to any angle for crystalline silicon cell |
| JP2016162914A (en) * | 2015-03-03 | 2016-09-05 | 株式会社ディスコ | Vacuum tweezer |
| CN205140320U (en) * | 2015-11-27 | 2016-04-06 | 林建伟 | Air pressure experiences pipe |
| CN105895571A (en) * | 2016-01-22 | 2016-08-24 | 苏州能讯高能半导体有限公司 | Vacuum sucking pen |
| CN205469575U (en) * | 2016-03-15 | 2016-08-17 | 天津市菲佳自行车工贸有限公司 | Can regulate and control bicycle frame |
| CN207966951U (en) * | 2017-11-23 | 2018-10-12 | 中国电子科技集团公司第五十五研究所 | A kind of vacuum WAND |
Non-Patent Citations (2)
| Title |
|---|
| TAKAHIRO YAMASHITA ET.AL: "Ultra-thin Piezoelectric Strain Sensor Array Integrated on Flexible Printed Circuit for Structural Health Monitoring", IEEE SENSORS. PROCEEDINGS, 31 December 2016 (2016-12-31), pages 1 - 3 * |
| 郭东等: "自动排片机在IC芯片分选中的应用研究", 电子工业专用设备, 30 April 2011 (2011-04-30), pages 21 - 24 * |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN104117847B (en) | A kind of screw locking device | |
| CN101710565B (en) | Device for realizing picking-up and turning-over of chip | |
| US8454210B2 (en) | Cable receiving apparatus and lamp using the same | |
| CN207966951U (en) | A kind of vacuum WAND | |
| CN213727904U (en) | Online paperboard thickness detection and control equipment | |
| CN109676480A (en) | A kind of cookware automatic grinding bottom vehicle mouth device | |
| CN107946228A (en) | A kind of vacuum WAND | |
| CN105866550A (en) | Pantograph carbon slide plate bonding resistor test device | |
| CN208109386U (en) | A kind of motor driven lift LED desk lamp bending testing agency | |
| CN208117856U (en) | A kind of semiconductor mechanical hand end effector of real-time monitoring wafer offset | |
| CN210128734U (en) | Multi-channel flow monitoring device of hollow glass argon filling machine | |
| CN208509123U (en) | A kind of power transmission line monitoring device | |
| CN203607385U (en) | Manual wafer picker suitable for large-diameter wafer processing | |
| CN103575452B (en) | Be applied to the pressure detecting system of low pressure furnace tube apparatus | |
| CN205973752U (en) | Automatic filling cap screwing machine's of self -reliance bag filling nitrogen flushing belt cleaning device | |
| CN207234252U (en) | In a kind of, the special clamp for machining of pellet shapes GIS High-Voltage Electrical Appliances housings | |
| CN220466812U (en) | Rod-type suction device and production line | |
| CN208054444U (en) | A kind of glass manufacture sheet devices | |
| CN206216269U (en) | Plane walking mechanism | |
| CN104493207A (en) | Boring machine main shaft with liquid pipe | |
| CN209665230U (en) | Hose runs through ratchet handle | |
| CN205208858U (en) | Air conditioner and temperature sensing package thereof | |
| CN212239946U (en) | Integrated deep hole automatic screw locking mechanism | |
| CN208079541U (en) | One kind just repairing motor protecter | |
| CN210774433U (en) | Temperature transmitter with detection function |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |