CN103575452B - Be applied to the pressure detecting system of low pressure furnace tube apparatus - Google Patents
Be applied to the pressure detecting system of low pressure furnace tube apparatus Download PDFInfo
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- CN103575452B CN103575452B CN201210249428.0A CN201210249428A CN103575452B CN 103575452 B CN103575452 B CN 103575452B CN 201210249428 A CN201210249428 A CN 201210249428A CN 103575452 B CN103575452 B CN 103575452B
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Abstract
The invention discloses a kind of pressure detecting system being applied to low pressure furnace tube apparatus and comprise control module, mechanical pressure switch and capacitance-type pressure gage; Mechanical pressure switch comprises a base, and base has a pressure introduction port and is fixed with a corrugated tube, and pressure introduction port communicates with corrugated tube open bottom top seal; Corrugated tube top is fixed with support bar, support bar is arranged with the conducting strip of connection signal; Base is fixedly equipped with support cover, and corrugated tube, support bar and conducting strip are positioned at support cover, and support cover top is fixed with two stubs; In the test loop that mechanical pressure switch is formed at capacitance-type pressure gage and control module by two wired in series at stub top.The present invention adds a mechanical pressure switch on original capacitance-type pressure gage basis, not only remain the function of capacitance-type pressure gage, and double acknowledge has been carried out to capacitance-type pressure gage, effectively reduce the damage of product because capacitance-type pressure gage zero migration causes or quartzy component.
Description
Technical field
The present invention relates to a kind of pick-up unit, specifically belong to a kind of pressure detecting system being applied to low pressure furnace tube apparatus.
Background technology
In the manufacture process of semiconductor, often utilize LPCVD (Low Pressure Chemical VaporDeposition, i.e. low-pressure chemical vapor deposition) technique forms the film such as polysilicon, silicon nitride, and this technique is carried out usually in low pressure furnace tube apparatus.At present, in the boiler tube of low pressure furnace tube apparatus, atmospheric pressure is determined by capacitance-type pressure gage usually, described capacitance-type pressure gage 3 and a control module 1 form a test loop, as shown in Figure 1, in order to ensure the safety of product and quartz member, low pressure furnace tube apparatus is set with INTERLOCK (interlocking) function, that is, when the stove overpressure that capacitance-type pressure gage detects is lower than 750torr (holder), do not carry out falling boat action in the boiler tube that boat retains.
But, often there is the defect of zero migration in existing capacitance-type pressure gage, if there is the situation of negative bias in pressure gauge, so can extend the time of capacitance-type pressure gage actual arrival atmospheric pressure, cause boat cannot exit boiler tube in time, add the hot resume of silicon chip in stove, thus affect the characteristic of silicon chip; If there is the situation of positively biased in pressure gauge, when capacitance-type pressure gage is shown as 760torr, the actual pressure of boiler tube inside is less than outside atmospheric pressure, falls boat action and can cause and pour in down a chimney, and then affect the particle of product, if the excessive damage that also can cause boiler tube internal fragment or quartz member of pressure reduction.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of pressure detecting system being applied to low pressure furnace tube apparatus, and the damage of product can effectively avoiding low pressure furnace tube apparatus to cause because of the zero migration of capacitance-type pressure gage occurs.
For solving the problems of the technologies described above, the pressure detecting system being applied to low pressure furnace tube apparatus of the present invention, comprises control module, mechanical pressure switch and capacitance-type pressure gage;
Described mechanical pressure switch comprises a base, and described base has a pressure introduction port, this pressure introduction port with a top seal and the open corrugated tube in bottom communicate, the lower end of described corrugated tube is fixed on base;
The closure tip of described corrugated tube is fixed with a support bar, described support bar is arranged with the conducting strip of a connection signal; Described support bar is threaded rod structure, and conducting strip is fixed on support bar by upper and lower two nuts, and two are respectively equipped with insulating washer between nut and conducting strip, and described two nuts are equipped with retainer nut away from the side of conducting strip;
Described base is fixedly equipped with a support cover, and described corrugated tube, support bar and conducting strip are all positioned at support cover inside, and two stubs are fixedly equipped with at the top of described support cover, and the top of each stub is connected with a wire;
In the test loop that described mechanical pressure switch is formed at capacitance-type pressure gage and control module by two wired in series;
When the pressure in boiler tube is not less than the threshold value of setting, described corrugated tube is in the state that nature is upheld, and conducting strip contacts with stub, and capacitance-type pressure gage is communicated with control module;
When the pressure in boiler tube is lower than the threshold value set, described corrugated tube is in the state of contraction, and conducting strip is separated with stub, and capacitance-type pressure gage is not communicated with control module.
In said structure, described capacitance-type pressure gage is connected with two signal wires, and wherein a signal wire is connected with control module, and another root signal wire is connected with a wire of mechanical pressure switch, another root wire connection control unit of mechanical pressure switch.
Wherein, described corrugated tube, conducting strip, support bar and support cover are stainless steel.
Preferably, described stub is threaded rod structure, and each stub is fixedly connected with support cover by upper and lower two nuts, is respectively equipped with insulating washer between nut and support cover.Described nut is equipped with retainer nut away from the side of support cover.
Further, the top of described corrugated tube is by a top plate seal, and described support bar is fixed on top board.Described top board is stainless steel.
In addition, described base is fixed with a protective cover, described support cover and stub are all positioned at protective cover, and described protective cover top is provided with an opening, and two wires stretch out protective cover by this opening.The opening part of described protective cover is equipped with plastic protective sleeve.
Pressure detecting system of the present invention adds a mechanical pressure switch on original capacitance-type pressure gage basis, this mechanical pressure switch and original capacitance-type pressure gage detect the pressure condition of low pressure furnace tube apparatus respectively, and capacitance-type pressure gage just normally works under mechanical pressure switch is normally situation, therefore this system not only remains the measuring ability of capacitance-type pressure gage, and again double acknowledge has been carried out to the capacitance-type pressure gage of equipment itself, the capacitance-type pressure gage effectively reducing low pressure furnace tube apparatus itself is due to the damage of the components such as the product that zero migration occurs causes or quartz.
Accompanying drawing explanation
Fig. 1 is the existing pressure detecting system being applied to low pressure furnace tube apparatus;
Fig. 2 is the structural representation that the present invention is applied to the pressure detecting system of low pressure furnace tube apparatus;
Fig. 3 is the structural representation of mechanical pressure switch in the present invention.
Wherein description of reference numerals is as follows:
1 is control module; 2 is mechanical pressure switch; 3 is capacitance-type pressure gage; 21 is pressure introduction port; 22 is base; 23 is corrugated tube; 24 is top board; 25 is support bar; 26 is nut; 27 is insulating washer; 28 is conducting strip; 29 is retainer nut; 210 is stub; 211 is support cover; 212 is wire; 213 is protective cover; 214 is plastic protective sleeve.
Embodiment
Below in conjunction with accompanying drawing and embodiment, the present invention is further detailed explanation.
The pressure detecting system being applied to low pressure furnace tube apparatus provided by the invention, as shown in Figure 2, comprise control module 1, mechanical pressure switch 2 and capacitance-type pressure gage 3, described control module 1 is computing machine or single-chip microcomputer, and mechanical pressure switch 2 is connected between control module 1 and capacitance-type pressure gage 3 and forms a test loop.
As shown in Figure 3, mechanical pressure switch 2 comprises the base 22 of a flange arrangement, base 22 has the pressure introduction port 21 that connects low pressure furnace tube apparatus, this pressure introduction port 21 with a top seal and the corrugated tube 23 of bottom opening communicate, the lower end of corrugated tube 23 is fixed on base 22;
The closure tip of corrugated tube 23 is fixed with a support bar 25, support bar 25 is arranged with the conducting strip 28 of a connection signal;
A support cover 211 base 22 is fixedly equipped with, it is inner that corrugated tube 23, support bar 25 and conducting strip 28 are all positioned at support cover 211, two stubs 210 are fixedly equipped with at the top of support cover 211, the top of each stub 210 is connected with a wire 212, wherein wire 212 connects a signal wire of capacitance-type pressure gage 3, another root wire 212 connection control unit 1, the direct connection control unit 1 of another root signal wire of capacitance-type pressure gage 3;
When the pressure in boiler tube is not less than threshold value (being generally 750torr) of setting, corrugated tube 23 is in the state that nature is upheld, conducting strip 28 contacts conducting (now mechanical pressure switch 2 is equivalent to a closed switch) with stub 210, capacitance-type pressure gage 3 is communicated with control module 1 by mechanical pressure switch 2, whole test loop closes, and capacitance-type pressure gage carries out pressure detection;
When the pressure in boiler tube is lower than the threshold value set, corrugated tube 23 is in the state of contraction, conducting strip 28 is separated with stub 210 and disconnects (now mechanical pressure switch 2 is equivalent to a not closed switch), capacitance-type pressure gage 3 and control module 1 are in the state of disconnection, and capacitance-type pressure gage 3 cannot carry out pressure detection.
Preferred embodiment, the top of corrugated tube 23 is sealed by a top board 24, and support bar 25 is fixed on top board 24.Wherein, corrugated tube 23, conducting strip 28, support bar 25, support cover 211 and top board 24 are stainless steel.
Wherein, support bar 25 is threaded rod structure, and conducting strip 28 is fixed on support bar 25 by upper and lower two nuts 26, is respectively equipped with insulating washer 27 between two nuts 26 and conducting strip 28.Described two nuts 26 are equipped with retainer nut 29 away from the side of conducting strip 28.Stub 210 is also threaded rod structure, and each stub 210 is fixedly connected with support cover 211 by upper and lower two nuts 26, is respectively equipped with insulating washer 27 between nut 26 and support cover 211.Described nut 26 is equipped with retainer nut 29 away from the side of support cover 211.
In addition, base 22 is also fixed with a protective cover 213, this support cover 211 and stub 210 are all positioned at protective cover 213, and protective cover 213 top is provided with an opening, and opening part is equipped with plastic protective sleeve 214, and two wires 212 stretch out protective cover 213 by this opening.
The present invention has added a mechanical pressure switch on the original capacitance-type pressure gage basis of low pressure furnace tube apparatus, when tube pressure is not less than 750torr, the corrugated tube of this mechanical pressure switch is in nature stretched condition, conducting strip and stub are for contacting conducting state, and capacitance-type pressure gage carries out pressure detection; When pressure is lower than bellows contract during 750torr, conducting strip and stub are off state, capacitance-type pressure gage cannot carry out pressure detection, actual can according to nut, the retainer nut of the nut of the adjusting thresholds fixed-conductive film of pressure demand, retainer nut 10 or fixed conductor rod when using, make conducting strip and stub contacting lower than disconnecting during the force value needed.The capacitance-type pressure gage of mechanical pressure switch and equipment itself is installed in parallel and uses on gas exhaust piping, outside the measuring ability of capacitance-type pressure gage maintaining original equipment itself, double acknowledge is carried out to the capacitance-type pressure gage of equipment itself simultaneously, effectively reduce the loss of capacitance-type pressure gage due to components such as the generation product that causes of zero migration or quartz of equipment itself.
Above by specific embodiment to invention has been detailed description, but these are not construed as limiting the invention.Without departing from the principles of the present invention, those skilled in the art can make many distortion and improvement to the material of the structure of mechanical pressure switch and each parts, and these also should be considered as protection scope of the present invention.
Claims (9)
1. be applied to a pressure detecting system for low pressure furnace tube apparatus, it is characterized in that: comprise control module (1), mechanical pressure switch (2) and capacitance-type pressure gage (3);
Described mechanical pressure switch (2) comprises a base (22), described base (22) has a pressure introduction port (21), this pressure introduction port (21) with a top seal and the open corrugated tube (23) in bottom communicate, the lower end of described corrugated tube (23) is fixed on base (22);
The closure tip of described corrugated tube (23) is fixed with a support bar (25), described support bar (25) is arranged with the conducting strip (28) of a connection signal; Described support bar (25) is threaded rod structure, conducting strip (28) is fixed on support bar (25) by upper and lower two nuts (26), be respectively equipped with insulating washer (27) between two nuts (26) and conducting strip (28), described two nuts (26) are equipped with retainer nut (29) away from the side of conducting strip (28);
Described base (22) is upper is fixedly equipped with a support cover (211), it is inner that described corrugated tube (23), support bar (25) and conducting strip (28) are all positioned at support cover (211), two stubs (210) are fixedly equipped with at the top of described support cover (211), and the top of each stub (210) is connected with a wire (212);
Described mechanical pressure switch (2) is connected in the test loop that capacitance-type pressure gage (3) and control module (1) formed by two wires (212);
When the pressure in boiler tube is not less than the threshold value of setting, described corrugated tube (23) is in the state that nature is upheld, conducting strip (28) contacts with stub (210), and capacitance-type pressure gage (3) is communicated with control module (1);
When the pressure in boiler tube is lower than the threshold value set, described corrugated tube (23) is in the state of contraction, conducting strip (28) is separated with stub (210), and capacitance-type pressure gage (3) is not communicated with control module (1).
2. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 1, it is characterized in that: described capacitance-type pressure gage (3) is connected with two signal wires, wherein a signal wire is connected with control module (1), another root signal wire is connected with a wire (212) of mechanical pressure switch (2), another root wire (212) connection control unit (1) of mechanical pressure switch (2).
3. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 1, is characterized in that: described corrugated tube (23), conducting strip (28), support bar (25) and support cover (211) are stainless steel.
4. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 1, it is characterized in that: described stub (210) is threaded rod structure, each stub (210) is fixedly connected with support cover (211) by upper and lower two nuts (26), is respectively equipped with insulating washer (27) between nut (26) and support cover (211).
5. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 4, is characterized in that: described nut (26) is equipped with retainer nut (29) away from the side of support cover (211).
6. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 3, it is characterized in that: the top of described corrugated tube (23) is sealed by a top board (24), and described support bar (25) is fixed on top board (24).
7. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 6, is characterized in that: described top board (24) is stainless steel.
8. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 1 to 7 any one; it is characterized in that: described base (22) is fixed with a protective cover (213); described support cover (211) and stub (210) are all positioned at protective cover (213); described protective cover (213) top is provided with an opening, and two wires (212) stretch out protective cover (213) by this opening.
9. the pressure detecting system being applied to low pressure furnace tube apparatus according to claim 8, is characterized in that: the opening part of described protective cover (213) is equipped with plastic protective sleeve (214).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210249428.0A CN103575452B (en) | 2012-07-18 | 2012-07-18 | Be applied to the pressure detecting system of low pressure furnace tube apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210249428.0A CN103575452B (en) | 2012-07-18 | 2012-07-18 | Be applied to the pressure detecting system of low pressure furnace tube apparatus |
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| Publication Number | Publication Date |
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| CN103575452A CN103575452A (en) | 2014-02-12 |
| CN103575452B true CN103575452B (en) | 2015-08-19 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201210249428.0A Active CN103575452B (en) | 2012-07-18 | 2012-07-18 | Be applied to the pressure detecting system of low pressure furnace tube apparatus |
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Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110095221A (en) * | 2019-05-31 | 2019-08-06 | 唐根林 | Instrument automation ripple tube sensor |
| CN113047825B (en) * | 2021-05-13 | 2022-08-26 | 中国石油大学(华东) | Pressure detection device for injecting air into tight oil reservoir |
Citations (5)
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| CN2578959Y (en) * | 2002-11-04 | 2003-10-08 | 佛山通宝股份有限公司 | Explosion-proof pressure temperature controller with assistant switch |
| CN2736748Y (en) * | 2004-10-22 | 2005-10-26 | 吉林康信电子有限责任公司 | Digital tire pressure gauge |
| CN200990342Y (en) * | 2006-12-31 | 2007-12-12 | 东阳市华恒温控器厂 | Mechanical forced break pressure thermoregulator |
| CN102358113A (en) * | 2011-07-26 | 2012-02-22 | 宿迁欣宇轮胎有限公司 | Simple tire pressure monitoring alarm device |
| CN202218213U (en) * | 2011-09-01 | 2012-05-09 | 大连美天三有电子仪表有限公司 | Pressure switch |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4545642B2 (en) * | 2005-06-07 | 2010-09-15 | 株式会社堀場エステック | Capacitive pressure gauge mounting structure |
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- 2012-07-18 CN CN201210249428.0A patent/CN103575452B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2578959Y (en) * | 2002-11-04 | 2003-10-08 | 佛山通宝股份有限公司 | Explosion-proof pressure temperature controller with assistant switch |
| CN2736748Y (en) * | 2004-10-22 | 2005-10-26 | 吉林康信电子有限责任公司 | Digital tire pressure gauge |
| CN200990342Y (en) * | 2006-12-31 | 2007-12-12 | 东阳市华恒温控器厂 | Mechanical forced break pressure thermoregulator |
| CN102358113A (en) * | 2011-07-26 | 2012-02-22 | 宿迁欣宇轮胎有限公司 | Simple tire pressure monitoring alarm device |
| CN202218213U (en) * | 2011-09-01 | 2012-05-09 | 大连美天三有电子仪表有限公司 | Pressure switch |
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| CN103575452A (en) | 2014-02-12 |
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| PB01 | Publication | ||
| ASS | Succession or assignment of patent right |
Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140114 |
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| C41 | Transfer of patent application or patent right or utility model | ||
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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| TA01 | Transfer of patent application right |
Effective date of registration: 20140114 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Applicant after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Applicant before: Shanghai Huahong NEC Electronics Co., Ltd. |
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