CN107946225A - A kind of silicon chip aligning gear - Google Patents

A kind of silicon chip aligning gear Download PDF

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Publication number
CN107946225A
CN107946225A CN201711384048.7A CN201711384048A CN107946225A CN 107946225 A CN107946225 A CN 107946225A CN 201711384048 A CN201711384048 A CN 201711384048A CN 107946225 A CN107946225 A CN 107946225A
Authority
CN
China
Prior art keywords
silicon chip
angle
inclination
suction mechanism
side plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201711384048.7A
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Chinese (zh)
Inventor
丁力
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wuxi Unite Energy Technology Co Ltd
Original Assignee
Wuxi Unite Energy Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Wuxi Unite Energy Technology Co Ltd filed Critical Wuxi Unite Energy Technology Co Ltd
Priority to CN201711384048.7A priority Critical patent/CN107946225A/en
Publication of CN107946225A publication Critical patent/CN107946225A/en
Withdrawn legal-status Critical Current

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6838Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Registering Or Overturning Sheets (AREA)

Abstract

The invention discloses a kind of silicon chip aligning gear, including carrier device base, transport block is provided with the top of the carrier device base, silicon chip is provided between the delivery side plate, the bottom of the silicon chip is connected to inside the card slot at the top of transport block, the side of the silicon chip is stuck between delivery side plate, the silicon chip is tilted and is connected to inside the card slot at the top of transport block, angle of inclination is identical with the angle of inclination for delivering side plate, the side of the silicon chip is provided with sheet suction mechanism, the suction disc of the sheet suction mechanism tilts installation, angle of inclination is identical with the angle of inclination of silicon chip, the sheet suction mechanism is provided with suction nozzle in face of the one side of silicon chip, the one side that the sheet suction mechanism facing away from silicon chip is provided with attachment device.This silicon chip aligning gear, sheet suction mechanism because its own it is close with the angle that silicon chip is inclined to angle, contacted between sheet suction mechanism and silicon chip for face, so as to reduce fragment rate, the present apparatus is simple in structure, efficiently solves the problems, such as that fragment rate is done.

Description

A kind of silicon chip aligning gear
Technical field
The present invention relates to silicon chip aligning gear technical field, is specially a kind of silicon chip aligning gear.
Background technology
Relation of the general device silicon chip during the motion between bogey is not known, and is waved it and is added broken Piece rate.
The content of the invention
It is an object of the invention to provide a kind of silicon chip aligning gear, have the advantages that fragment rate is low, solve existing skill The problem of in art.
To achieve the above object, the present invention provides following technical solution:A kind of silicon chip aligning gear, including toter bottom Seat, is provided with transport block at the top of the carrier device base, the transport block carrier device base top slide, it is described The side of transport block is provided with delivery side plate, and the delivery side plate is tiltedly mounted on the top both sides of carrier device base, described Delivery side plate is symmetrically mounted on the top both sides of carrier device base in pairs, and silicon chip is provided between the delivery side plate, described The bottom of silicon chip is connected to inside the card slot at the top of transport block, and the side of the silicon chip is stuck between delivery side plate, the silicon chip Inclination is connected to inside the card slot at the top of transport block, and angle of inclination is identical with the angle of inclination for delivering side plate, and the one of the silicon chip Side is provided with sheet suction mechanism, and the suction disc of the sheet suction mechanism tilts installation, and angle of inclination is identical with the angle of inclination of silicon chip, described Sheet suction mechanism is provided with suction nozzle in face of the one side of silicon chip, and the one side that the sheet suction mechanism facing away from silicon chip is provided with attachment device.
Preferably, card slot is provided with the top of the transport block, the size of card slot is identical with the size of silicon chip bottom.
Preferably, the attachment device is connected with vacuum machine.
Preferably, the delivery side plate is fixedly mounted on the top both sides of carrier device base.
Preferably, the angle of inclination of the suction nozzle and the angle of inclination of silicon chip are identical.
Compared with prior art, beneficial effects of the present invention are as follows:
This silicon chip aligning gear, silicon chip are tilted and are connected to inside the card slot at the top of transport block, and angle of inclination is inclined with delivery side plate Rake angle is identical, and the side of silicon chip is provided with sheet suction mechanism, and the suction disc of sheet suction mechanism tilts installation, and angle of inclination and silicon chip incline Rake angle is identical, and sheet suction mechanism is provided with suction nozzle, the angle of inclination of suction nozzle and the angle of inclination phase of silicon chip in face of the one side of silicon chip Together, sheet suction mechanism because its own it is close with the angle that silicon chip is inclined to angle, be face between sheet suction mechanism and silicon chip Contact, so as to reduce fragment rate, the present apparatus is simple in structure, efficiently solves the problems, such as that fragment rate is done.
Brief description of the drawings
Fig. 1 is the overall structure operating diagram of the present invention;
Fig. 2 is that the toter of the present invention and silicon chip install side view;
Fig. 3 is that the toter of the present invention and silicon chip install front view;
Fig. 4 is the sheet suction mechanism structure diagram of the present invention.
In figure:1 carrier device base, 11 transport blocks, 2 delivery side plates, 3 silicon chips, 4 sheet suction mechanisms, 41 suction nozzles, 42 connection dresses Put.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work Embodiment, belongs to the scope of protection of the invention.
- 4 are please referred to Fig.1, a kind of silicon chip aligning gear, including carrier device base 1, the top of carrier device base 1 are set Transport block 11 is equipped with, the top of transport block 11 is provided with card slot, and the size of card slot is identical with the size of 3 bottom of silicon chip, transport block Card slot on 11 is stuck in the both sides of 3 bottom of silicon chip, and silicon chip 3 is clamped from both sides, does not influence picking and placeing for silicon chip 3, and transport block 11 is being transported The top slide of device pedestal 1 is carried, top movements of the silicon chip 3 in carrier device base 1 is transported, realizes the delivery of silicon chip 3, The side of transport block 11 is provided with delivery side plate 2, and delivery side plate 2 is tiltedly mounted on the top both sides of carrier device base 1, delivery Side plate 2 is symmetrically mounted on the top both sides of carrier device base 1 in pairs, and delivery side plate 2 is fixedly mounted on carrier device base 1 Top both sides, are not moved with the movement of transport block 11, and delivery side plate 2 is clipped in the both sides of silicon chip 3, effectively maintains silicon chip 3 Angle of inclination, delivers and is provided with silicon chip 3 between side plate 2, the bottom of silicon chip 3 is connected to inside the card slot at the top of transport block 11, silicon The side of piece 3 is stuck between delivery side plate 2, and silicon chip 3, which tilts, to be connected to inside the card slot at the top of transport block 11, angle of inclination and fortune The angle of inclination of load side plate 2 is identical, and the side of silicon chip 3 is provided with sheet suction mechanism 4, and the suction disc of sheet suction mechanism 4 tilts installation, tilts Angle is identical with the angle of inclination of silicon chip 3, and sheet suction mechanism 4 is provided with suction nozzle 41, the inclination angle of suction nozzle 41 in face of the one side of silicon chip 3 Degree is identical with the angle of inclination of silicon chip 3, and the one side that sheet suction mechanism 4 facing away from silicon chip 3 is provided with attachment device 42, attachment device 42 Be connected with vacuum machine, sheet suction mechanism 4 because its own it is close with the angle that silicon chip 3 is inclined to angle, sheet suction mechanism 4 with Contacted between silicon chip 3 for face, so as to reduce fragment rate, this silicon chip aligning gear, silicon chip 3, which tilts, is connected to the top of transport block 11 Card slot inside, angle of inclination with deliver side plate 2 angle of inclination it is identical, the side of silicon chip 3 is provided with sheet suction mechanism 4, suction piece The suction disc of mechanism 4 tilts installation, and angle of inclination is identical with the angle of inclination of silicon chip 3, and sheet suction mechanism 4 is pacified in face of the one side of silicon chip 3 Equipped with suction nozzle 41, the angle of inclination of suction nozzle 41 is identical with the angle of inclination of silicon chip 3, and sheet suction mechanism 4 is because its own institute's band angle It is close with the angle that silicon chip 3 is inclined to, so being contacted between sheet suction mechanism 4 and silicon chip 3 for face, so as to reduce fragment rate, this dress Put simple in structure, efficiently solve the problems, such as that fragment rate is done.
In summary:This silicon chip aligning gear, silicon chip 3, which tilts, to be connected to inside the card slot at the top of transport block 11, inclination angle Degree is identical with the angle of inclination for delivering side plate 2, and the side of silicon chip 3 is provided with sheet suction mechanism 4, and the suction disc of sheet suction mechanism 4 tilts peace Dress, angle of inclination is identical with the angle of inclination of silicon chip 3, and sheet suction mechanism 4 is provided with suction nozzle 41, suction nozzle 41 in face of the one side of silicon chip 3 Angle of inclination it is identical with the angle of inclination of silicon chip 3, sheet suction mechanism 4 because its own institute with angle and silicon chip 3 deviation angle Close, so being contacted between sheet suction mechanism 4 and silicon chip 3 for face, so as to reduce fragment rate, the present apparatus is simple in structure, effectively solution Fragment rate of having determined does to obtain problem.
Although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with Understanding without departing from the principles and spirit of the present invention can carry out these embodiments a variety of changes, modification, replace And modification, the scope of the present invention is defined by the appended.

Claims (5)

1. a kind of silicon chip aligning gear, including carrier device base(1), it is characterised in that:The carrier device base(1)Top Portion is provided with transport block(11), the transport block(11)In carrier device base(1)Top slide, the transport block(11)'s Side is provided with delivery side plate(2), the delivery side plate(2)It is tiltedly mounted on carrier device base(1)Top both sides, it is described Deliver side plate(2)It is symmetrically mounted on carrier device base in pairs(1)Top both sides, the delivery side plate(2)Between be provided with Silicon chip(3), the silicon chip(3)Bottom be connected to transport block(11)Inside the card slot at top, the silicon chip(3)Side be stuck in Deliver side plate(2)Between, the silicon chip(3)Inclination is connected to transport block(11)Inside the card slot at top, angle of inclination and delivery Side plate(2)Angle of inclination it is identical, the silicon chip(3)Side be provided with sheet suction mechanism(4), the sheet suction mechanism(4)Suction Plate tilts installation, angle of inclination and silicon chip(3)Angle of inclination it is identical, the sheet suction mechanism(4)In face of silicon chip(3)One side peace Equipped with suction nozzle(41), the sheet suction mechanism(4)It facing away from silicon chip(3)One side attachment device is installed(42).
A kind of 2. silicon chip aligning gear according to claim 1, it is characterised in that:The transport block(11)Top set There are card slot, the size and silicon chip of card slot(3)The size of bottom is identical.
A kind of 3. silicon chip aligning gear according to claim 1, it is characterised in that:The attachment device(42)With vacuum machine Connection.
A kind of 4. silicon chip aligning gear according to claim 1, it is characterised in that:The delivery side plate(2)It is fixedly mounted In carrier device base(1)Top both sides.
A kind of 5. silicon chip aligning gear according to claim 1, it is characterised in that:The suction nozzle(41)Angle of inclination with Silicon chip(3)Angle of inclination it is identical.
CN201711384048.7A 2017-12-20 2017-12-20 A kind of silicon chip aligning gear Withdrawn CN107946225A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711384048.7A CN107946225A (en) 2017-12-20 2017-12-20 A kind of silicon chip aligning gear

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711384048.7A CN107946225A (en) 2017-12-20 2017-12-20 A kind of silicon chip aligning gear

Publications (1)

Publication Number Publication Date
CN107946225A true CN107946225A (en) 2018-04-20

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Family Applications (1)

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CN201711384048.7A Withdrawn CN107946225A (en) 2017-12-20 2017-12-20 A kind of silicon chip aligning gear

Country Status (1)

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CN (1) CN107946225A (en)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000177842A (en) * 1998-12-10 2000-06-27 Mitsubishi Heavy Ind Ltd Carrying device and vacuum processing device
CN102623372A (en) * 2012-03-27 2012-08-01 江西赛维Ldk太阳能高科技有限公司 Automatic wafer-separating device for wet silicon wafers
CN203491239U (en) * 2013-10-12 2014-03-19 英利能源(中国)有限公司 Device for transferring silicon chips between chip boxes
CN106680289A (en) * 2017-01-25 2017-05-17 江苏东旭亿泰智能装备有限公司 Macroscopic inspection system for glass substrate
CN206209292U (en) * 2016-11-29 2017-05-31 张家港晋宇达电子科技有限公司 A kind of silicon wafer conveying device of litho machine
CN207558772U (en) * 2017-12-20 2018-06-29 无锡优耐特能源科技有限公司 A kind of silicon chip aligning gear

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000177842A (en) * 1998-12-10 2000-06-27 Mitsubishi Heavy Ind Ltd Carrying device and vacuum processing device
CN102623372A (en) * 2012-03-27 2012-08-01 江西赛维Ldk太阳能高科技有限公司 Automatic wafer-separating device for wet silicon wafers
CN203491239U (en) * 2013-10-12 2014-03-19 英利能源(中国)有限公司 Device for transferring silicon chips between chip boxes
CN206209292U (en) * 2016-11-29 2017-05-31 张家港晋宇达电子科技有限公司 A kind of silicon wafer conveying device of litho machine
CN106680289A (en) * 2017-01-25 2017-05-17 江苏东旭亿泰智能装备有限公司 Macroscopic inspection system for glass substrate
CN207558772U (en) * 2017-12-20 2018-06-29 无锡优耐特能源科技有限公司 A kind of silicon chip aligning gear

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
郭志球;柳锡运;沈辉;刘正义;: "各向同性腐蚀法制备多晶硅绒面", 材料科学与工程学报 *

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Application publication date: 20180420