CN206209292U - A kind of silicon wafer conveying device of litho machine - Google Patents
A kind of silicon wafer conveying device of litho machine Download PDFInfo
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- CN206209292U CN206209292U CN201621294606.1U CN201621294606U CN206209292U CN 206209292 U CN206209292 U CN 206209292U CN 201621294606 U CN201621294606 U CN 201621294606U CN 206209292 U CN206209292 U CN 206209292U
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Abstract
The utility model discloses a kind of silicon wafer conveying device of litho machine, including frame, the first carriage and the second carriage are slidably fitted with frame, first carriage includes horizontal slide, it is slidably fitted with vertically on horizontal slide at the top of the vertical connecting rod of vertical connecting rod and is fixed with suction piece frame, the suction piece frame of the first carriage is lower than the height of the suction piece frame of the second carriage, avoidance mouth is provided with suction piece frame, the suction piece hole connected with suction system is provided with suction piece frame, horizontal slide is connected with the horizontal sliding power device being fixed in frame, vertical connecting rod is connected with the lifting power plant being fixed on horizontal slide, set in frame the first carriage or the second carriage are positioned at take piece station take piece positioner, first carriage or the second carriage are positioned at the correction positioner of correction station.The silicon wafer conveying device can accurately convey silicon chip and reasonably using the stand-by period, improve the transfer efficiency of silicon chip.
Description
Technical field
The utility model is related to a kind of conveying device, more particularly to a kind of silicon wafer conveying device of litho machine.
Background technology
In the production process of IC chip, the exposure transfer of the design configuration of chip on silicon chip surface photoresist
(photoetching) is one of most important of which operation, and the equipment used by the operation is referred to as litho machine (exposure machine).Litho machine is integrated
The equipment of most critical in circuit fabrication process.And, it is necessary to using slice getting device by the silicon in film magazine in the photoetching process of litho machine
Piece takes out piecewise, and then on transmission silicon wafer conveying device, silicon chip is delivered to and silicon is carried out on dressing plate by silicon wafer conveying device
Piece is corrected, and finally recycles another set of feeding mechanism that silicon chip is delivered into photoetching station photoetching, and after the completion of photoetching, and reverse return is most
Silicon chip is recycled in film magazine by slice getting device eventually.
So current silicon wafer conveying device has the following disadvantages：1. current silicon wafer conveying device is that level slip is carried out
, it is necessary to slice getting device goes to take out silicon chip in film magazine, then silicon chip is placed on silicon chip by slice getting device for reciprocal operation between station
In conveying device；The action process of slice getting device is complicated, cause slice getting device take piece or inserted sheet position is inaccurate, influence photoetching
It is normally carried out；2. current silicon wafer conveying device transfer efficiency is very low, and silicon chip is delivered to correction station school by silicon wafer conveying device
Timing, silicon wafer conveying device needs to coordinate correction in correction station, it is also desirable to wait the silicon chip for conveying photoetching again, because
This, the efficiency of whole work silicon wafer conveying device conveying is very low, and the time of wait is long, and then have impact on the photoetching of whole silicon chip
Efficiency.
Utility model content
Technical problem to be solved in the utility model is：A kind of silicon wafer conveying device of litho machine is provided, the silicon chip is defeated
Send device accurately to convey silicon chip and reasonably using the stand-by period, improve the transfer efficiency of silicon chip.
In order to solve the above technical problems, the technical solution of the utility model is：A kind of silicon wafer conveying device of litho machine, bag
Including rack, is provided with the frame and takes piece station and correction station, is slidably fitted with the frame and mutually staggers first defeated
Frame and the second carriage, first carriage and the second carriage is sent to be slidably mounted on and take between piece station and correction station,
The structure of first carriage and the second carriage is identical, and first carriage includes horizontal slide, the horizontal slide
Level is slidably mounted in frame, is slidably fitted with vertical connecting rod, the top of the vertical connecting rod on the horizontal slide vertically
Horizontally disposed suction piece frame is fixed with, the suction piece frame of the first carriage is lower than the height of the suction piece frame of the second carriage, the suction
Avoidance mouth is provided with horse, the suction piece hole connected with suction system is provided with the suction piece frame, the horizontal slide with it is solid
Due to the horizontal sliding power device connection in frame, the vertical connecting rod and the lifting power plant being fixed on horizontal slide
Connection, set in the frame the first carriage or the second carriage are positioned at take piece station take piece positioner, will
First carriage or the second carriage are positioned at the correction positioner of correction station.
Used as a kind of preferred scheme, the suction piece frame includes the connecting rod being fixedly connected with vertical connecting rod top, connection
Two support bars vertical with horizontal slide glide direction are fixed with bar, two support bars and connecting rod constitute rectangle
Frame shape, described suction piece hole is arranged on support bar, and avoidance mouth is formd between two support bars.
Used as a kind of preferred scheme, the length of described two support bars is different.
As a kind of preferred scheme, it is described take piece positioner and include being arranged in frame take piece locating piece, it is described
Take piece locating piece and be located at the side for taking piece station away from correction station, it is described to take piece locating piece and the first carriage or the second conveying
The side of frame coordinates.
As a kind of preferred scheme, it is described to take be provided with piece locating piece take piece contact-making switch, it is described take piece contact open
Close and coordinate with the side of the first carriage or the second carriage.
Used as a kind of preferred scheme, the correction positioner includes the corrected positioning block being arranged in frame, described
Corrected positioning block is located at correction station away from the side for taking piece station, the corrected positioning block and the first carriage or the second conveying
Another side of frame coordinates.
As a kind of preferred scheme, correction contact-making switch is provided with the corrected positioning block, the correction contact is opened
Close and coordinate with the side of the first carriage or the second carriage.
Used as a kind of preferred scheme, the horizontal sliding power device includes rotating the active synchronization for being installed on rack rows
Belt wheel and driven synchronous pulley, Timing Belt is provided between the active synchronization belt wheel and driven synchronous pulley；The active is same
Step belt wheel is connected with the output shaft of horizontal servo motor, and the horizontal slide of first carriage is fixed on Timing Belt, and second
The horizontal sliding power device of carriage is identical with the horizontal sliding power apparatus structure of the first carriage.
Used as a kind of preferred scheme, first carriage and the second carriage are by same horizontal sliding power device
Drive, the horizontal sliding power device includes rotating the active synchronization belt wheel and driven synchronous pulley for being installed on rack rows, described
Timing Belt is provided between active synchronization belt wheel and driven synchronous pulley；The active synchronization belt wheel is defeated with horizontal servo motor
Shaft is connected, the horizontal slide of first carriage and the horizontal slide of the second carriage be fixed on same Timing Belt and
Positioned at active synchronization band and the both sides of the driven Timing Belt line of centres.
Used as a kind of preferred scheme, the lifting power plant includes the lift cylinder being fixed on horizontal slide, institute
Lift cylinder is stated to be connected with vertical link transmission.
After employing above-mentioned technical proposal, effect of the present utility model is：Because this silicon wafer conveying device make use of slip
Mutually stagger the first carriage and the second carriage in frame are installed on, first carriage and the second carriage slide peace
Loaded on take piece station and correction station between, and using take piece positioner and correction positioner can accurately position first
Carriage and the second carriage are in and take piece station and correction station；So, the first carriage and the second carriage can be transported alternately
OK, the first carriage and the second carriage can not only be moved horizontally, and can be lifted, when the first carriage is horizontally slid to
Take when on piece station, the first carriage rises so as to by the silicon chip jack-up on slice getting device and vacuum suction, need not so take piece
Device is lifted, so that slice getting device more facilitates and accurately takes piece or inserted sheet；And the first carriage is moved after silicon chip is adsorbed
Move and corrected on dressing plate, the first carriage is waited and auxiliary corrective on dressing plate, delivers to photoetching after the completion of correction again
Photoetching in station, and now the second carriage can be moved to take carried out on piece station and take piece, then during photoetching, take
Sheet devices can continue to take out second silicon chip, and the second carriage also can complete silicon chip between slice getting device and replace；So
The time greatly is shortened, transfer efficiency is improve, and then the photoetching efficiency of silicon chip can be improved.
Again because the suction piece frame includes the connecting rod being fixedly connected with vertical connecting rod top, two are fixed with connecting rod
The support bar vertical with horizontal slide glide direction, two support bars and connecting rod constitute rectangle frame shape, described suction
Film perforation is arranged on support bar, and avoidance mouth is formd between two support bars, the suction rack structure rationally, can not only facilitate with
Slice getting device achieves a butt joint and completes silicon chip transfer, but also convenience avoids means for correcting on correction station, meets multiple demand.
Brief description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the side structure schematic diagram of the utility model embodiment；
Fig. 2 is the schematic top plan view of the utility model embodiment；
In accompanying drawing：1. frame；2. the second carriage；21. second horizontal slides；22. second vertical connecting rods；23. second liters
Sending down abnormally ascending cylinder；24. second suction piece framves；3. the first carriage；31. first level slides；32；First lift cylinder；33. first is vertical
Connecting rod；34. first suction piece framves；341. head rods；342. first support bars；4. slice getting device；5. piece positioner is taken；6.
Correction positioner；7. dressing plate.
Specific embodiment
The utility model is described in further detail below by specific embodiment.
As depicted in figs. 1 and 2, a kind of silicon wafer conveying device of litho machine, including frame 1, is provided with the frame 1 and takes
Piece station and correction station, take piece station and are mounted with slice getting device 4, the glide direction of slice getting device 4 and the first carriage 3 and the
The glide direction of two carriages 21 is vertical；Slice getting device 4 takes piece or inserted sheet in can be slidably inserted into film magazine.
Mutually stagger the first carriage 3 and the second carriage 21, the He of the first carriage 3 are slidably fitted with the frame 1
Second carriage 21 possesses respective sliding pair respectively, and the first carriage 3 and the second carriage 21 mutually stagger and facilitate each leisure
Take and reciprocatingly slided between piece station and correction station；The carriage 21 of first carriage 3 and second is slidably mounted on and takes piece work
Between position and correction station, first carriage 3 is identical with the structure of the second carriage 21.
Describe for convenience, the parts title of the first carriage 3 and the second carriage 21 is defined respectively.It is described
First carriage 3 includes first level slide 31, and the level of first level slide 31 is slidably mounted in frame 1, described the
The first vertical connecting rod 33 is slidably fitted with vertically on one horizontal slide 31, the top of the first vertical connecting rod 33 is fixed with level
Set the first suction piece frame 34, the second suction piece frame 24 of the carriage 21 of the first suction piece frame 34 to the second of the first carriage 3 it is high
Degree is low, and avoidance mouth is provided with the first suction piece frame 34, is provided with what is connected with suction system on the first suction piece frame 34
Suction piece hole, the first level slide 31 is connected with the horizontal sliding power device being fixed in frame 1, and described first connects vertically
Bar 33 is connected with the lifting power plant being fixed on first level slide 31.
Equally, the horizontal slide 21 of the second carriage 21 second, the level of the second horizontal slide 21 is slidably mounted on frame 1
On, it is slidably fitted with the second vertical connecting rod 22, the top of the second vertical connecting rod 22 vertically on second horizontal slide 21
Horizontally disposed second suction piece frame 24 is fixed with, avoidance mouth, the second suction piece frame 24 are provided with the second suction piece frame 24
On be provided with the suction piece hole connected with suction system, second horizontal slide 21 slides dynamic with the level being fixed in frame 1
Power apparatus are connected, and the second vertical connecting rod 22 is connected with the lifting power plant being fixed on the second horizontal slide 21.
In the present embodiment, horizontal sliding power device can have at least two structure types.
The first structure type is：The horizontal sliding power device of the first carriage 3 and the second carriage 21 is separate
And structure is identical, then the first carriage 3 and the second carriage 21 can be each independent slip；Now, level is slided dynamic
Power apparatus include that the horizontal sliding power device includes rotating the active synchronization belt wheel and driven Timing Belt for being installed on the row of frame 1
Wheel, Timing Belt is provided between the active synchronization belt wheel and driven synchronous pulley；The active synchronization belt wheel and horizontal servo
The output shaft connection of motor, the horizontal slide of first carriage 3 is fixed on Timing Belt, and the level of the second carriage 21 is slided
Dynamic power set are identical with the horizontal sliding power apparatus structure of the first carriage 3.So, the operation of the first carriage 3 is not
The operation of the second carriage 21 is hindered, different demands are more adapted to, simply cost is of a relatively high.
And second structure type is that the first carriage 3 and the second carriage 21 are driven by same horizontal sliding power device
It is dynamic, and form symmetrical expression movement, i.e., in when taking piece station, the second carriage 21 is in correction station for the first carriage 3, then
After the completion of photoetching, new silicon chip is delivered to correction station by the first carriage 3, and the second carriage 21 is simultaneously by the good silicon of photoetching
Piece is delivered to and takes piece station；And now, the carriage 21 of first carriage 3 and second is driven by same horizontal sliding power device
Dynamic, the horizontal sliding power device includes rotating the active synchronization belt wheel and driven synchronous pulley for being installed on the row of frame 1, the master
It is dynamic to be provided with Timing Belt between synchronous pulley and driven synchronous pulley；The output of the active synchronization belt wheel and horizontal servo motor
Axle is connected, and the horizontal slide of the horizontal slide of first carriage 3 and the second carriage 21 is fixed on same Timing Belt
And positioned at active synchronization band and the both sides of the driven Timing Belt line of centres.
Certain lifting power plant is independent lifting power plant, and the lifting power plant of the first carriage 3 includes
First lift cylinder 32, the first cylinder is directly fixed on first level slide 31 and piston rod is set and vertical with first upward
Connection, the lifting power plant of same second carriage 21 includes the second lift cylinder 23, its mounting means and the first lifting air
Cylinder 32 is identical.
Set in the frame 1 first carriage 3 or the second carriage 21 are positioned at take piece station take piece positioning
Device 5, the correction positioner 6 that the first carriage 3 or the second carriage 21 are positioned at correction station.
As shown in Fig. 2 the piece positioner 5 that takes takes piece locating piece including being arranged in frame 1, the piece that takes is positioned
Block is located at the side for taking piece station away from correction station, piece locating piece and the first carriage 3 or second carriage 21 of taking
Side coordinates.It is described to take be provided with piece locating piece take piece contact-making switch, it is described to take piece contact-making switch and the first carriage 3 or the
The side of two carriages 21 coordinates.
Equally, the correction positioner 6 includes the corrected positioning block being arranged in frame 1, the corrected positioning block position
In correction station away from the side for taking piece station, the corrected positioning block and the first carriage 3 or the second carriage 21 it is another
Individual side coordinates.Be provided with correction contact-making switch on the corrected positioning block, the correction contact-making switch and the first carriage 3 or
The side of the second carriage 21 coordinates.Opened the light by correcting contact and taken piece contact-making switch coordinates can the real He of first carriage 3
The run location of the second carriage 21, makes it accurately in piece station or correction station is taken, and facilitates the transfer of silicon chip.
As shown in Fig. 2 the first suction piece frame 34 is identical with the structure of the second suction piece frame 24, the first suction piece frame 34 include with
The head rod 341 that the top of first vertical connecting rod 33 is fixedly connected, is fixed with two and horizontal slide on head rod 341
The vertical first support bar 342 of glide direction, two first support bars 342 and head rod 341 constitute rectangle frame
Shape, described suction piece hole is arranged in first support bar 342, and avoidance mouth is formd between two first support bars 342.Described
One or two length of support bar is different.
When silicon chip transfer is carried out with slice getting device 4, the first suction piece frame 34 is moved horizontally to and takes piece the first suction piece frame 34
On station, and avoiding mouth can facilitate the slip of slice getting device 4 to take piece, and after slice getting device 4 takes out silicon chip, the first carriage 3 rises
Now the first suction piece frame 34 heads on silicon chip and adsorbs silicon chip using principle of negative pressure, so as to avoid silicon chip from dropping；Then the first conveying
Frame 3 is moved on correction station.
Equally, after the first suction piece frame 34 is run on the dressing plate 7 of correction station, the first suction piece frame 34 declines makes silicon chip
Sucker suction is corrected, and correction sucker corrects the position of silicon chip and silicon chip prevented again to the first suction piece after adjusting the center of circle of silicon chip
On frame 34, and the circle centre position that post-equalization sucker moves again to silicon chip adsorbs silicon chip again, and now the first suction piece frame 34 is still in
Correction station is waited, and after the completion of correction, silicon chip delivers to photoetching station photoetching by other conveying mechanisms, and silicon chip is sent after the completion of photoetching
To the first suction piece frame 34, then it is transmitted back to and takes on piece station.
Embodiment described above is only the description to the preferred embodiment of the present invention, not as the limit to the scope of the invention
Fixed, on the basis of design spirit of the present invention is not departed from, the various modifications made to technical solution of the present invention and transformation all should fall
Enter in the protection domain of claims of the present invention determination.
Claims (10)
1. a kind of silicon wafer conveying device of litho machine, including frame, it is characterised in that：Be provided with the frame take piece station and
Correction station, is slidably fitted with mutually stagger the first carriage and the second carriage in the frame, first carriage and
Second carriage is slidably mounted on and takes between piece station and correction station, the structure phase of first carriage and the second carriage
Together, first carriage includes horizontal slide, and the horizontal slide level is slidably mounted in frame, on the horizontal slide
Vertical connecting rod is slidably fitted with vertically, and horizontally disposed suction piece frame is fixed with the top of the vertical connecting rod, the first carriage
Suction piece frame is lower than the height of the suction piece frame of the second carriage, and avoidance mouth is provided with the suction piece frame, is set on the suction piece frame
There is the suction piece hole connected with suction system, the horizontal slide is connected with the horizontal sliding power device being fixed in frame, institute
State vertical connecting rod and be connected with the lifting power plant being fixed on horizontal slide, set the first carriage in the frame or
Second carriage is positioned at and takes taking piece positioner, the first carriage or the second carriage being positioned at into correction station for piece station
Correction positioner.
2. a kind of silicon wafer conveying device of litho machine as claimed in claim 1, it is characterised in that：The suction piece frame includes and erects
The connecting rod that straight connecting rod top is fixedly connected, is fixed with two support bars vertical with horizontal slide glide direction in connecting rod,
Two support bars and connecting rod constitute rectangle frame shape, and described suction piece hole is arranged on support bar, two support bars it
Between form avoidance mouth.
3. a kind of silicon wafer conveying device of litho machine as claimed in claim 2, it is characterised in that：The length of two support bars
Degree is different.
4. a kind of silicon wafer conveying device of litho machine as claimed in claim 3, it is characterised in that：It is described to take piece positioner bag
Include to be arranged in frame and take piece locating piece, the piece locating piece that takes is located at the side for taking piece station away from correction station, described
The side for taking piece locating piece and the first carriage or the second carriage coordinates.
5. a kind of silicon wafer conveying device of litho machine as claimed in claim 4, it is characterised in that：Described taking set on piece locating piece
It is equipped with and takes piece contact-making switch, the side cooperation for taking piece contact-making switch and the first carriage or the second carriage.
6. a kind of silicon wafer conveying device of litho machine as claimed in claim 5, it is characterised in that：The correction positioner bag
The corrected positioning block being arranged in frame is included, the corrected positioning block is located at correction station away from the side for taking piece station, described
Another side of corrected positioning block and the first carriage or the second carriage coordinates.
7. a kind of silicon wafer conveying device of litho machine as claimed in claim 6, it is characterised in that：Set on the corrected positioning block
It is equipped with correction contact-making switch, the side cooperation of the correction contact-making switch and the first carriage or the second carriage.
8. a kind of silicon wafer conveying device of litho machine as claimed in claim 7, it is characterised in that：The horizontal sliding power dress
Put the active synchronization belt wheel and driven synchronous pulley that rack rows are installed on including rotating, the active synchronization belt wheel and driven synchronization
Timing Belt is provided between belt wheel；The active synchronization belt wheel is connected with the output shaft of horizontal servo motor, first conveying
The horizontal slide of frame is fixed on Timing Belt, and the horizontal sliding power device of the second carriage and the level of the first carriage are slided
Powerplant configuration is identical.
9. a kind of silicon wafer conveying device of litho machine as claimed in claim 7, it is characterised in that：First carriage and
Two carriages are driven by same horizontal sliding power device, and the horizontal sliding power device includes that rotation is installed on rack rows
Active synchronization belt wheel and driven synchronous pulley, Timing Belt is provided between the active synchronization belt wheel and driven synchronous pulley；Institute
State active synchronization belt wheel to be connected with the output shaft of horizontal servo motor, the horizontal slide and the second carriage of first carriage
Horizontal slide be fixed on same Timing Belt and positioned at active synchronization band and the both sides of the driven Timing Belt line of centres.
10. a kind of silicon wafer conveying device of litho machine as claimed in claim 8, it is characterised in that：The lifting power plant
Including the lift cylinder being fixed on horizontal slide, the lift cylinder is connected with vertical link transmission.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621294606.1U CN206209292U (en) | 2016-11-29 | 2016-11-29 | A kind of silicon wafer conveying device of litho machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621294606.1U CN206209292U (en) | 2016-11-29 | 2016-11-29 | A kind of silicon wafer conveying device of litho machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206209292U true CN206209292U (en) | 2017-05-31 |
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ID=58750867
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201621294606.1U Active CN206209292U (en) | 2016-11-29 | 2016-11-29 | A kind of silicon wafer conveying device of litho machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206209292U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107946225A (en) * | 2017-12-20 | 2018-04-20 | 无锡优耐特能源科技有限公司 | A kind of silicon chip aligning gear |
| WO2019010944A1 (en) * | 2017-07-10 | 2019-01-17 | 深圳丰盛装备股份有限公司 | Automatic chip assembly and disassembly apparatus for graphite boat |
-
2016
- 2016-11-29 CN CN201621294606.1U patent/CN206209292U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2019010944A1 (en) * | 2017-07-10 | 2019-01-17 | 深圳丰盛装备股份有限公司 | Automatic chip assembly and disassembly apparatus for graphite boat |
| CN107946225A (en) * | 2017-12-20 | 2018-04-20 | 无锡优耐特能源科技有限公司 | A kind of silicon chip aligning gear |
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| GR01 | Patent grant | ||
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| CP01 | Change in the name or title of a patent holder |
Address after: 215600 Fuxin Road, Zhangjiagang economic and Technological Development Zone, Suzhou, Jiangsu 2 Patentee after: Jiangsu jinyuda Semiconductor Co.,Ltd. Address before: 215600 Fuxin Road, Zhangjiagang economic and Technological Development Zone, Suzhou, Jiangsu 2 Patentee before: SUZHOU JYD INDUSTRIAL Co.,Ltd. |
|
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 215600 Fuxin Road, Zhangjiagang economic and Technological Development Zone, Suzhou, Jiangsu 2 Patentee after: SUZHOU JYD INDUSTRIAL Co.,Ltd. Address before: 215600 Zhangjiagang jinyuda Electronic Technology Co., Ltd., No.2, Fuxin Road, Zhangjiagang Economic and Technological Development Zone, Suzhou City, Jiangsu Province Patentee before: ZHANGJIAGANG JINYUDA ELECTRONIC TECHNOLOGY Co.,Ltd. |