CN107913886A - A kind of rotatable glass substrate washing device of spray head - Google Patents
A kind of rotatable glass substrate washing device of spray head Download PDFInfo
- Publication number
- CN107913886A CN107913886A CN201711367775.2A CN201711367775A CN107913886A CN 107913886 A CN107913886 A CN 107913886A CN 201711367775 A CN201711367775 A CN 201711367775A CN 107913886 A CN107913886 A CN 107913886A
- Authority
- CN
- China
- Prior art keywords
- nozzle
- spray
- glass substrate
- washing device
- round brush
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000007921 spray Substances 0.000 title claims abstract description 60
- 239000000758 substrate Substances 0.000 title claims abstract description 24
- 239000011521 glass Substances 0.000 title claims abstract description 20
- 238000005406 washing Methods 0.000 title claims abstract description 13
- 230000007723 transport mechanism Effects 0.000 claims abstract description 8
- 230000005540 biological transmission Effects 0.000 claims abstract description 6
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 description 17
- 239000000243 solution Substances 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 238000011982 device technology Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000725 suspension Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
- B08B11/04—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto specially adapted for plate glass, e.g. prior to manufacture of windshields
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a kind of rotatable glass substrate washing device of spray head, including the round brush (4) and spray equipment (2) set towards the transmission surface of transport mechanism (6), the spray equipment (2) is located above the round brush (4), spray orifice (23) is provided with the nozzle (22) of the spray equipment (2), it is characterized in that, described device further includes：Slip steady arm (1) equipped with sliding slot, the spray equipment (2) further includes the motor shaft (24) being connected with the nozzle (22), the motor shaft (24) is driven and the nozzle (22) is rotated in the horizontal plane by motor (21), the spray equipment (2) is slidably connected on the slip steady arm (1) by the sliding slot, and the nozzle (22) can be made to move back and forth on the extending direction of the slip steady arm (1).
Description
Technical field
The present invention relates to field of manufacturing semiconductor devices, more particularly to a kind of rotatable cleaning glass substrate dress of spray head
Put.
Background technology
Glass substrate usually requires to use cleaning machine in process as the critical piece in classes of semiconductors device technology
Glass substrate is cleaned multiple times.In the prior art, most commonly seen cleaning device is typically included in above transport mechanism
One or more round brush, and it is fixed on multiple spray equipments above transport mechanism.When rolling-brush cleaning device works, spray dress
Put and open cleaning showers liquid, by the substrate that the transmission surface transport of transport mechanism is to be cleaned, round brush rotation, its bristle contact substrate
Surface, cleaning solution injected directly on the surface of substrate, so that round brush carries out round brush cleaning to substrate.
In the prior art, in cleaning process, because spray equipment itself spray is limited in scope, spray liquid is caused to clean
During can not equably be sprayed onto on bristle, so as to cause the collection pencil that bristle is typically cluster cluster, helically type banding
It is laid on round brush, causes bristle to be unfolded to clean substrate, and then cause cleaning performance bad.
The content of the invention
It is an object of the invention to provide a kind of rotatable glass substrate washing device of spray head.
To achieve the above object, the present invention provides following technical solution：
A kind of rotatable glass substrate washing device of spray head, including the rolling set towards the transmission surface of transport mechanism
Brush and spray equipment, the spray equipment are located above the round brush, and spray orifice is provided with the nozzle of the spray equipment, described
Device further includes：Slip steady arm equipped with sliding slot, the spray equipment further includes the motor shaft being connected with the nozzle, described
Motor shaft is driven and the nozzle is rotated in the horizontal plane by motor, and the spray equipment passes through the sliding slot
It is slidably connected on the slip steady arm, the nozzle can be made to move back and forth on the extending direction of the slip steady arm.
Optionally, single multiple spray orifices are provided with the nozzle, the side surface that the nozzle is equipped with spray orifice is in square
Shape.
Optionally, the length of the nozzle is less than the diameter of the round brush.
Optionally, the motor alternately drives the nozzle to carry out rotation clockwise and anticlockwise in the horizontal plane.
Optionally, the distance between the round brush and the spray orifice are between 5~15cm.
Optionally, the injection direction of the multiple spray orifices set on the nozzle is different.
Compared with prior art, the advantage of the invention is that：
Since nozzle can be rotated in the horizontal plane, it can reach and expand spray in the case where setting limited spray orifice
Area so that cleaning solution can be uniformly sprayed on round brush, and with reference to nozzle it is described slip steady arm extending direction
Upper work moves back and forth, and can further avoid the boundling situation of bristle, improve the cleaning performance to glass substrate.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is attached drawing needed in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
Some embodiments described in invention, for those of ordinary skill in the art, without creative efforts,
Other attached drawings can also be obtained according to these attached drawings.
Fig. 1 show a kind of structure of the rotatable glass substrate washing device of spray head in the specific embodiment of the invention and shows
It is intended to.
Embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, detailed retouch is carried out to the technical solution in the embodiment of the present invention
State, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.Based on the present invention
In embodiment, the every other implementation that those of ordinary skill in the art are obtained on the premise of creative work is not made
Example, belongs to the scope of protection of the invention.
As shown in Figure 1, in one embodiment, a kind of rotatable glass substrate washing device of spray head, including direction pass
The round brush 4 and spray equipment 2 for sending the transmission surface of mechanism 6 to set, the spray equipment 2 is positioned at the top of round brush 4, the spray
Spray orifice 23 is provided with the nozzle 22 of shower device 2, wherein, described device further includes：Slip steady arm 1 equipped with sliding slot, it is described
Spray equipment 2 further includes the motor shaft 24 being connected with the nozzle 22, the motor shaft 24 by motor 21 driving and
The nozzle 22 is rotated in the horizontal plane, and the spray equipment 2 is slidably connected to described slide by the sliding slot and supports
On bar 1, the nozzle 22 can be made to move back and forth on the extending direction of the slip steady arm 1.
Above-mentioned slip steady arm 1 can be suspended by modes such as stents is fixed on the top of spray equipment 2.
In cleaning process, glass substrate 5 is placed on the surface of transport mechanism 6 and is transmitted, since round brush 4 is logical
Cross certain fixed mechanism suspension and be fixed on transmission surface, and the gap between the surface of transport mechanism 6 is usually small
In the thickness of glass substrate, so as to realize cleaning.The round brush 4 can roll.
Preferably, single multiple spray orifices 23 are provided with the nozzle 22, the nozzle 22 is equipped with the side of spray orifice 23
Surface is rectangular, and the purpose so designed is so that nozzle hole number is less, reduces manufacture cost.
Preferably, the length of the nozzle 22 is less than the diameter of the round brush 4, so that manufacture cost is further reduced, and
And it ensure that good cleaning performance.
Preferably, the motor 21 alternately drives the nozzle 22 to carry out rotation clockwise and anticlockwise in the horizontal plane
Turn.For example, motor is replaced according to mode as " 1 circle clockwise -1 circle counterclockwise ", can be with further such that cleaning solution
It is thrown to more in different directions on bristle, so as to reduce the situation of bristle boundling.
Preferably, the distance between described round brush 4 and the spray orifice 23 are between 5~15cm.
Preferably, the injection direction of the multiple spray orifices 23 set on the nozzle 22 is different, the purpose so designed
Also for the further situation for reducing bristle boundling.
To sum up, the advantage of the invention is that：Since nozzle can be rotated in the horizontal plane, it can reach and be provided with
Expand the area of spray in the case of limit spray orifice so that cleaning solution can be uniformly sprayed on round brush, and combines nozzle in institute
State and make to move back and forth on the extending direction for sliding steady arm, can further avoid the boundling situation of bristle, improve to glass base
The cleaning performance of plate.
What the embodiments of the present invention described shown in attached drawing and with reference to the accompanying drawings were merely exemplary, and the present invention is simultaneously
It is not limited to these embodiments.Here, it should also be noted that, in order to avoid having obscured the present invention because of unnecessary details,
It illustrate only the structure and/or processing step closely related with scheme according to the present invention in the accompanying drawings, and eliminate and this
The little other details of inventive relationship.The above is only the embodiment of the application, it is noted that is led for this technology
For the those of ordinary skill in domain, on the premise of the application principle is not departed from, some improvements and modifications can also be made, these
Improvements and modifications also should be regarded as the protection domain of the application.
Claims (6)
1. a kind of rotatable glass substrate washing device of spray head, including set towards the transmission surface of transport mechanism (6)
Round brush (4) and spray equipment (2), the spray equipment (2) are located above the round brush (4), the nozzle of the spray equipment (2)
(22) spray orifice (23) is provided with, it is characterised in that described device further includes：Slip steady arm (1) equipped with sliding slot, the spray
Shower device (2) further includes the motor shaft (24) being connected with the nozzle (22), and the motor shaft (24) is driven by motor (21)
Move and so that the nozzle (22) is rotated in the horizontal plane, the spray equipment (2) is slidably connected to by the sliding slot
On the slip steady arm (1), the nozzle (22) can be made to move back and forth on the extending direction of the slip steady arm (1).
2. the rotatable glass substrate washing device of spray head according to claim 1, it is characterised in that the nozzle
(22) single multiple spray orifices (23) are provided with, the side surface that the nozzle (22) is equipped with spray orifice (23) is rectangular.
3. the rotatable glass substrate washing device of spray head according to claim 2, it is characterised in that the nozzle
(22) length is less than the diameter of the round brush (4).
4. the rotatable glass substrate washing device of spray head according to claim 1, it is characterised in that the motor
(21) nozzle (22) is alternately driven to carry out rotation clockwise and anticlockwise in the horizontal plane.
5. the rotatable glass substrate washing device of spray head according to claim 1, it is characterised in that the round brush
(4) and the distance between the spray orifice (23) is between 5~15cm.
6. the rotatable glass substrate washing device of spray head according to claim 1, it is characterised in that the nozzle
(22) injection direction of the multiple spray orifices (23) set on is different.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711367775.2A CN107913886A (en) | 2017-12-18 | 2017-12-18 | A kind of rotatable glass substrate washing device of spray head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711367775.2A CN107913886A (en) | 2017-12-18 | 2017-12-18 | A kind of rotatable glass substrate washing device of spray head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107913886A true CN107913886A (en) | 2018-04-17 |
Family
ID=61893461
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711367775.2A Withdrawn CN107913886A (en) | 2017-12-18 | 2017-12-18 | A kind of rotatable glass substrate washing device of spray head |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107913886A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110920387A (en) * | 2019-11-09 | 2020-03-27 | 河南美力达汽车有限公司 | Torque transient parameter recording device for new energy automobile |
| CN111825346A (en) * | 2019-11-20 | 2020-10-27 | 苏州殷绿勒精密机械科技有限公司 | 3D curved surface glass cleaning machine |
| CN113770088A (en) * | 2021-09-01 | 2021-12-10 | 彩虹（合肥）液晶玻璃有限公司 | Grinding and cleaning rolling brush device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201410484Y (en) * | 2009-05-13 | 2010-02-24 | 北京京东方光电科技有限公司 | Rolling-brush cleaning device |
| CN203936100U (en) * | 2014-07-07 | 2014-11-12 | 威海韩盛电子科技有限公司 | The cleaning device of small-size glass sheet material for display screen |
| CN107339754A (en) * | 2017-08-11 | 2017-11-10 | 盐城市净博士机械有限公司 | A kind of Quick cleaning device for being used for grid filter screen in domestic purifier |
| CN107413802A (en) * | 2016-05-23 | 2017-12-01 | 安东·耶格 | Device for clean surface |
-
2017
- 2017-12-18 CN CN201711367775.2A patent/CN107913886A/en not_active Withdrawn
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201410484Y (en) * | 2009-05-13 | 2010-02-24 | 北京京东方光电科技有限公司 | Rolling-brush cleaning device |
| CN203936100U (en) * | 2014-07-07 | 2014-11-12 | 威海韩盛电子科技有限公司 | The cleaning device of small-size glass sheet material for display screen |
| CN107413802A (en) * | 2016-05-23 | 2017-12-01 | 安东·耶格 | Device for clean surface |
| CN107339754A (en) * | 2017-08-11 | 2017-11-10 | 盐城市净博士机械有限公司 | A kind of Quick cleaning device for being used for grid filter screen in domestic purifier |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110920387A (en) * | 2019-11-09 | 2020-03-27 | 河南美力达汽车有限公司 | Torque transient parameter recording device for new energy automobile |
| CN110920387B (en) * | 2019-11-09 | 2023-05-19 | 河南美力达汽车有限公司 | Torque transient parameter recording device for new energy automobile |
| CN111825346A (en) * | 2019-11-20 | 2020-10-27 | 苏州殷绿勒精密机械科技有限公司 | 3D curved surface glass cleaning machine |
| CN113770088A (en) * | 2021-09-01 | 2021-12-10 | 彩虹（合肥）液晶玻璃有限公司 | Grinding and cleaning rolling brush device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WW01 | Invention patent application withdrawn after publication |
Application publication date: 20180417 |
|
| WW01 | Invention patent application withdrawn after publication |