CN107889474A - 偏振控制的激光线投射器 - Google Patents
偏振控制的激光线投射器 Download PDFInfo
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Abstract
在激光线投射设备(10)中,六个间隔开的非偏振激光束通过薄膜偏振器(14)、反射器(18)和两个偏振旋转器(20A,20B)组合而低损耗地平面偏振化。两个光束在三个偏振取向中的每一个偏振。两个偏振取向在P和S取向彼此正交对齐。其他偏振取向在中间取向非正交对齐。光束被强度均匀化并投射到辐射线中。辐射线上的任何点由这样的光线形成,其具有通过中间取向从S到P并且通过中间取向回到S的偏振取向的角分布。
Description
本申请要求2015年3月4日提交的美国临时申请序列号62/128,139的优先权,其全部内容通过引用并入本文。
技术领域
本发明通常涉及非晶硅涂层板的激光退火。本发明特别涉及使用从一个或多个准分子激光束投射的辐射线激光退火这种面板。
背景技术
准分子雷射退火(ELA)是制造高品质显示面板中薄膜晶体管(TFT)背板的制备工艺。通常,ELA涉及用从准分子激光束投射的辐射线照射涂覆有非晶硅的面板。准分子激光辐射将非晶硅变为多晶硅。
TFT的电性能利用当非晶硅变成多晶硅时产生的改性微结构。多晶硅微晶的布置对于特定的TFT电路设计可是重要的。通常,微晶布置在迭代准分子激光照射后遵循高度的顺序。已经发现激光辐射的角分布和偏振可以影响微晶布置。
准分子激光线投射装置在现有技术中被广泛描述。作为示例,这种装置描述于美国专利No.7,428,039和美国专利No.8,937,770。美国专利No.7,408,714详细描述了用于增加这种设备中照射功率的光束的光学组合。美国专利No.8,238,400详细描述了来自光束组合激光器的脉冲光束的同步。所有上述专利转让给本发明的受让人,所有这些都通过引用并入本文。
在现有技术中没有描述在准分子激光线投射装置中控制偏振分布的有效手段。通常,在这种装置中使用的准分子激光器不会发射平面偏振的光束,并且使得这种激光发射平面偏振的光束将导致可用功率的实质(50%)损失。在实际的激光投射装置中,可以通过来自转向镜、衰减器或通过双折射光学部件的非法入射反射将一些程度的偏振(椭圆率)引入光束。这将是附带的,并且肯定不会在投射辐射线的任何入射点处提供受控的偏振角分布。
需要准分子激光线投射装置,其可以在硅涂覆面板上的投射辐射线中的任何入射点处提供受控的偏振分布。优选地,应该实现这种受控的偏振分布,而不会明显损失激光功率,并且应当保持入射辐射的角分布。
发明概述
在一方面,依照本发明的光学设备包括多个偏振器,布置为接收对应多个激光束并平面-偏振激光束。偏振器被构造为使得至少两个激光束以不同偏振取向平面-偏振化。多个光学元件被构造和布置为使得将平面-偏振的激光束以激光辐射线投射在工件上,激光束中每个的光线以不同的角度入射到线上的任何点上。光线的偏振取向以预定方式随入射角变化。
附图简述
并入并构成说明书的一部分的附图示意性地示出了本发明的优选实施例,并且与以上给出的一般描述以及下面给出的优选实施例的详细描述一起用于解释本发明。
图1A示意性描述准分子激光线投射设备的优选实施方案,其被布置为接收六个激光束,平面-偏振化六个激光束中的每个,而没有明显的损失和具有预定的偏振取向,并且投射激光束,其中沿投射的线方向辐射强度均匀化,但是在沿着投射线的点处具有特定的偏振取向的角分布。
图1B示意性描述相对于设备的正交对齐的横向(长和短)轴图1A的设备中的平面-偏振取向。
图1C示意性描述在图1A的投射线末端的点处随着入射角改变的偏振取向的分布,其中在最高入射角处S取向偏振化,在最低入射角处P取向偏振化,并且在最高和最低之间的入射角处中间取向偏振化。
图2示意性描述在图1A的设备中的六个偏振选择性分束器中的两个的细节,被布置为平面-偏振化六个激光束中的每个,而没有明显的损失和具有预定的偏振取向。
发明详述
现在参考附图,图1A示意性描述依照本发明的准分子激光线投射设备10的优选实施方案。设备仅在长轴平面(线长度平面)中描绘。长轴、短轴和传播轴(x轴、y轴和z轴)的笛卡尔轴系显示在图中。
设备10被布置为接收六个、名义上非偏振化、名义上是准直的间隔开的激光束,这里被指定为光束-1、光束-2、光束3、光束-4、光束-5和光束-6。光束可以由六个单独的准分子激光器提供,或者由不到六个激光器提供,每个激光器由高效光束分离器划分。作为示例,来自三个激光器的光束可以各自被分成两个相等的部分,以通过提供光束-1至光束-6。
每个光束的特征在于具有长轴(y轴)、垂直于长轴的短轴(y轴)和垂直于长轴和短轴的传播轴,如准分子-激光器领域已知。该轴系相邻显示在图1A中的图中,其在y-z平面中,具有长轴方向上的投射线的长度。光束在长轴方向上对齐。
继续参考图1A并参考图2,每个光束通过包括透镜L1和L2的无焦束放大镜(望远镜)12。光束放大镜将光束的长轴尺寸减小约2倍。缩小尺寸光束被引导到偏振选择性分束器(偏振器)14,分别分别包括偏振-选择性分光镜16、反射器18以及上和下偏振-旋转器20A和20B,如半波片。存在偏振器14,一个用于每个激光束。偏振器在激光束的长轴方向对齐。
在偏振器14中,直径减小的光束被偏振-选择性分光镜16截取,其传输以P-取向平面-偏振化的辐射,即在分束器16的入射平面中偏振化;和反射以S-取向平面-偏振化的辐射,即垂直于分束器16的入射平面。S-偏振化辐射由平行于传输的P-偏振化辐射的反射器18反射。
六个光束中的每一个的S和P光束部分分别被上和下(在附图中)偏振-旋转器20A和20B相应截取。在光束1和光束6的S和P部分的情况下,下偏振-旋转器被布置为使得没有净偏振-旋转发生。上偏振-旋转器被调节为使得90°净偏振-旋转发生,并且P-取向改变为S-取向。按照这种方式,光束1和光束6有效地以S-取向平面-偏振化,并且损耗仅是与偏振器和偏振旋转器的制造相关联的通常的低光损耗。这些光学损耗预计总共小于约10%。
在光束-3和光束4的S和P部分的情况下,上偏振-旋转器被布置为使得没有净偏振-旋转发生。下偏振-旋转器器被布置为使得没有净偏振-旋转发生。上偏振-旋转器被调节为使得90°净偏振-旋转发生,并且S-取向改变为P-取向。按照这种方式,光束3和光束4有效地以P-取向平面-偏振化。
在光束-2和光束5的S和P部分的情况下,上和下偏振-旋转器被布置为使得在每个光束部分发生非正交偏振-旋转,例如净45°旋转。按照这种方式,光束-2和光束-5有效地以相对于长轴和短轴的非正交(I)取向平面-偏振化。S、I和P相对于长和短(正交排列的横向)系统轴的取向在图1B中示意性地示出。
按照上述光束-1、光束-2、光束-3、光束4、光束-5和光束-6的上述平面偏振,本发明设备被布置为以现有技术的方式投射辐射线。六个偏振化(两部分)光束中的每一个通过长轴“均化器”22传输,包括用作长轴均化器的柱面透镜(“小透镜”)的两个间隔开的阵列24A和24B。虽然在图1A的布置中为每个光束提供一对阵列,但是相邻阵列可以以单个阵列与一些未使用的小透镜组合。作为示例,一对这样的组合阵列可以用于两个相邻光束。
在通过透镜阵列传输之后,光束通过下列传输:仅在长轴具有动力的长轴圆柱形聚光透镜L3、仅在短轴具有动力的短轴圆柱形聚光透镜L4、仅在长轴具有动力的长轴圆柱形聚光透镜L5和仅在短轴具有动力的短轴圆柱形投射透镜。这导致在被辐射的面板上的长度为L的投射的投射线,其中L是设备的长轴出射光瞳的宽度。在出口瞳孔中有均匀的短轴光束(未示出)。通过均化器22的透镜阵列与长轴聚光器和投射透镜的组合使沿着线的辐射强度均匀化。然而,在线上形成任何点的光线在长轴(y-z)平面中具有特定预定的偏振角分布。
为了说明平面偏振在本发明设备中提供角度分布的影响,在投射线的每一端形成点、以及投射线中心处的点,通过对于每个点对S、I和P偏振取向中的每一个进行跟踪来示出。S-偏振化光线用短划线表示;I-偏振化光线用中虚线表示;并且P-偏振化光线用长虚线表示。
图1C示意性描述在投射线上形成端点的光线的放大视图。可以看出,所述点由光线风扇形成,其中在面板上具有最高入射角的光线被S-偏振化,在面板上具有最低入射角的光线被P-偏振化,并且具有最高和最低之间的入射角的光线被I-偏振化。在投射线上的任何点上,偏振的角分布是相同的(至少在角度方向上)。
这里要指出的是,为了理解本发明的原理,本发明的装置的短轴视图是不必要的,为了简化描述,本文不提供本发明的装置的短轴图。本领域技术人员将能够从线投射装置的先前知识构建图1A的装置的短轴视图,或者通过咨询上述参考和并入的专利之一,特别是美国专利号No.8,937,770。为了简化说明和描述,已经从图1A中省略了与本发明装置的短轴操作相关的某些特征,但将存在于实际装置中。这些包括短轴柱面透镜阵列,其将被放置在偏振限定布置之前的长轴缩小的光束中,以及将放置在短轴中间像场处的短轴狭缝孔径(未示出)在透镜L4和L5之间。
本领域技术人员将从上述发明的详细描述中认识到,尽管组合的至少两个光束必须具有不同的偏振取向,但是或多或少的光束可以被组合以形成不同的长轴偏振角分布。作为例子,偏振分布可以布置为使得最高的入射角为P-偏振化,并且最低入射角为S-偏振化。更一般地,该装置可以被布置成使得偏振态取决于光线的入射角,但是可以或不可以被S或P偏振化。还可以在光束放大镜前面设置偏振器、反射器和偏振旋转器的偏振布置。在不脱离本发明的精神和范围的情况下,本领域技术人员可以设想任何这样的替代设置。
综上所述,在上述优选实施方式中对本发明进行了说明。然而,本发明不限于本文描述和描述的实施例。相反,本发明仅由所附权利要求限制。
Claims (14)
1.光学设备,包括:
多个偏振器,布置为接收相应的多个激光束并平面-偏振所述激光束;
偏振器,被构造为使得所述激光束的至少两个使用不同偏振取向平面-偏振;和
多个光学元件,被构造和布置为将平面-偏振的激光束以激光辐射线投射在工件上,激光束中每个的光线以不同的角度入射到线上的任何点上,其中
光线的偏振取向以预定方式随入射角变化。
2.权利要求1所述的设备,其中所述激光束具有横向长轴和横向短轴,并且所述光束和所述偏振器沿着所述激光束的长轴方向对齐。
3.权利要求2所述的设备,其中有六个激光束和六个偏振器,其中所述偏振器的最外面两个布置为以第一偏振取向平面-偏振对应的激光束;所述偏振器的最里面两个布置为以和所述第一偏振取向成90度的第二偏振取向平面-偏振对应的激光束;和剩余两个偏振器布置为以与所述第一和第二偏振取向成非正交角的第三偏振取向平面-偏振对应的激光束。
4.权利要求3所述的设备,其中所述第三偏振取向与所述第一和第二取向成45-度。
5.权利要求3所述的设备,其中在最高和最低入射角处入射的投射的辐射线光线上的任何点分别以所述第一和第二偏振取向平面-偏振,并且入射角的角度在最高和最低入射中间的光线以第三偏振取向平面-偏振。
6.权利要求1所述的设备,其中每个偏振器均包括:
偏振选择性分光镜,布置为将对应的激光束分成传输的第一部分和反射的第二部分,其中所述第一和第二部分分别以彼此成90度的第一和第二偏振取向来平面-偏振;
反射器,引导所述光束的第二部分平行于光束的第一部分;和
第一和第二偏振旋转器,分别在所述光束的第一和第二部分的路径中,并且布置为使用共同偏振取向传输所述光束的第一和第二部分。
7.权利要求6所述的设备,其中所述共同偏振取向是所述第一偏振取向、所述第二偏振取向以及与所述第一和第二偏振取向成非正交角的第三偏振取向中的一种。
8.将多个激光束投射在工件上的线焦点中的设备,包括:
用于接收所述激光束的一组偏振光学件;和
透镜系统,用于接收偏振束并布置为沿着所述工件上的线焦点投射光束,所述偏振光学件和透镜系统布置为使得在沿线焦点的每个位置,具有最低入射角的光线具有第一偏振,并且具有最高入射角的光线具有与第一偏振正交的第二偏振,以及具有中间入射角的光线具有中间偏振态。
9.权利要求8所述的设备,其中所述偏振光学件组包括至少一个部分传输偏振器和一个偏振旋转器,所述部分传输偏振器用于传输第一或第二偏振中的一个并反射剩余的偏振,并且所述偏振旋转器定位成将光的传输部分或反射部分旋转90度。
10.权利要求9所述的设备,其中所述偏振光学件组包括至少一个部分传输偏振器和第一和第二偏振旋转器,所述部分传输偏振器用于传输第一或第二偏振中的一个并反射剩余的偏振,并且其中所述第一偏振旋转器定位成将光的传输部分旋转45度以及所述第二偏振旋转器定位成将光的反射部分旋转45度。
11.将三个激光束投射在工件上的线焦点中的设备,所述三个激光束阵列对齐,其中第二光束位于第一和第三光束之间,所述设备包括:
用于接收所述第一激光束的第一组偏振光学件,所述第一组偏振光学件包括部分传输偏振器和一个偏振旋转器,所述部分传输偏振器用于传输P-偏振光并反射S-偏振光,并且其中所述偏振旋转器定位成将光的传输部分旋转90度;
用于接收所述第三激光束的第二组偏振光学件,所述第二组偏振光学件包括部分传输偏振器和一个偏振旋转器,所述部分传输偏振器用于传输P-偏振光并反射S-偏振光,并且其中所述偏振旋转器定位成将光的反射部分旋转90度;
位于所述第一和第三组之间并且接收所述第二激光束的第三组偏振光学件,所述第三组偏振光学件包括部分传输偏振器和第一和第二偏振旋转器,所述部分传输偏振器用于传输P-偏振光并反射S-偏振光,其中所述第一偏振旋转器定位成将光的传输部分旋转45度以及所述第二偏振旋转器定位成将光的反射部分旋转45度;以及
透镜系统,用于接收偏振束并布置为沿着所述工件上的线焦点投射光束,所述偏振光学件和透镜系统布置为使得在沿线焦点的每个位置,具有最低入射角的光线为P-偏振,并且具有最高入射角的光线为S-偏振,以及具有中间入射角的光线具有中间偏振取向。
12.将多个激光束投射在工件上的线焦点中的设备,包括:
用于接收激光束的一组偏振光学件;和
透镜系统,用于接收偏振束并布置为沿着所述工件上的线焦点投射光束,所述偏振光学件和透镜系统布置为使得在沿线焦点的每个位置,具有不同入射角的光线具有不同的偏振态。
13.将多个激光束投射在工件上的线焦点中的设备,包括:
用于接收激光束的一组偏振光学件;和
透镜系统,用于接收偏振束并布置为沿着所述工件上的线焦点投射光束,所述偏振光学件和透镜系统布置为使得在沿线焦点的每个位置,具有最低入射角的光线具有第一偏振态,并且具有最高入射角的光线具有第二偏振态。
14.权利要求13所述的设备,其中具有中间入射角的光线具有第三偏振态。
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TWI731848B (zh) | 2021-07-01 |
US20160259174A1 (en) | 2016-09-08 |
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