CN107868938A - 一种安全的金属薄膜蒸镀方法 - Google Patents
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- 238000000576 coating method Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 14
- 229910000611 Zinc aluminium Inorganic materials 0.000 claims abstract description 12
- HXFVOUUOTHJFPX-UHFFFAOYSA-N alumane;zinc Chemical compound [AlH3].[Zn] HXFVOUUOTHJFPX-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000004519 grease Substances 0.000 claims abstract description 9
- 239000011248 coating agent Substances 0.000 claims abstract description 7
- 239000000463 material Substances 0.000 claims abstract description 6
- 229910000838 Al alloy Inorganic materials 0.000 claims description 6
- 230000008018 melting Effects 0.000 claims description 6
- 238000002844 melting Methods 0.000 claims description 6
- 238000007747 plating Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 3
- 238000009826 distribution Methods 0.000 claims description 3
- 239000000446 fuel Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000003754 machining Methods 0.000 claims description 3
- 238000007738 vacuum evaporation Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 26
- 239000003990 capacitor Substances 0.000 description 6
- 238000010276 construction Methods 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000004411 aluminium Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010025 steaming Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000007888 film coating Substances 0.000 description 1
- 238000009501 film coating Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000011104 metalized film Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/20—Metallic material, boron or silicon on organic substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/002—Details
- H01G4/005—Electrodes
- H01G4/015—Special provisions for self-healing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G4/00—Fixed capacitors; Processes of their manufacture
- H01G4/33—Thin- or thick-film capacitors
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Abstract
本发明涉及一种安全的金属薄膜蒸镀方法,在蒸镀时,气态锌铝微粒按一定大小区域间断式蒸镀在有机薄膜基材上,每个区域横向间是独立的,纵向用一条窄镀层与公共区连接,所述蒸镀时在每个区域横向增加一条安全线,并且每个区域之间的安全线采用非水平布置,被镀有机薄膜基材在被气态锌铝微粒蒸镀之前还包括经过油脂涂抹准确屏蔽非蒸镀区的步骤,产品在生产过程中即使因为滚轮划伤到安全线,每个区域间仍有横向安全线相连,因为横向安全线采用非水平布置,连续划伤的概率大幅度降低,采用油脂涂抹的方法准确的屏蔽非蒸镀区简单方便,可操作性强。
Description
技术领域
本发明涉及镀层技术领域,尤其涉及一种安全的金属薄膜蒸镀方法。
背景技术
金属化薄膜电容器的原材料金属化薄膜是在有机薄膜表面蒸镀一层铝或锌铝合金使之形成导体,从而变成电容器的电极,传统的金属化薄膜通常是连续蒸镀法,即将铝或锌铝合金连续不间断的均匀蒸镀在薄膜表面,工艺相对简单成本也低,但因为薄膜电容器在工作时不可避免的会受电流冲击而出现局部蒸镀层击穿现象(俗称自愈),严重的自愈会将电容器造成短路从而失效。
基于此情况行业内不断创新蒸镀方法,出现了安全结构的蒸镀方式,并已被行业内普遍使用。安全结构是将金属层按一定大小区域间断式蒸镀在薄膜上,每个区域横向间是独立的,纵向用一条窄镀层(俗称安全保险线)与公共区连接。
安全结构的蒸镀法的优点是:当有电流冲击而出现自愈现象时,出现自愈区域的安全装置同时也会被电流冲击而断开,此时此块区域与金属薄膜独立开来,电容器不会因此而发生断路现象,仍可以有效工作,因一个电容由很多个小方块组成,少数区域因自愈而断开也不影响电容器整体容量,因此,安全型薄膜蒸镀法目前广泛应用在行业中。
安全型薄膜蒸镀方法尽管理论上有诸多优点,但在实际生产制造过程中,由于电容器是由薄膜卷绕在一起而形成,卷绕生产过程薄膜经过卷绕机滚轮时不可避免会出现蒸镀层被滚轮划伤而出现镀层脱落现象,划伤的长度长短不一,轻重不一,时常出现划伤区恰巧处于安全线位置,破坏一连串安全线,从而在生产过程即将产品全线装置破坏,造成产品不良。
另外目前现有技术中,薄膜上非蒸镀区域在蒸镀生产时需要用物体屏蔽才能保证不被镀上金属层,操作不便。
发明内容
为了解决上述存在的技术问题,本发明提供了一种安全的金属薄膜蒸镀方法,具体的技术方案为:
一种安全的金属薄膜蒸镀方法,包括以下步骤;
步骤一:将被镀有机薄膜基材装在真空蒸镀机中,用真空泵抽出真空;
步骤二:加热铝合金熔化槽使得锌铝合金在高温条件下溶化并蒸发气态;
步骤三:气态锌铝微粒在经卷绕机滚轮作用下而移动的被镀有机薄膜基材的表面上沉积、冷却还原,所述气态锌铝微粒按一定大小区域间断式蒸镀在有机薄膜基材上,每个区域横向间是独立的,纵向用一条窄镀层与公共区连接;其特征在于:所述蒸镀时在每个区域横向增加一条安全线,并且每个区域之间的安全线采用非水平布置,所述被镀有机薄膜基材在被气态锌铝微粒蒸镀之前还包括经过油脂涂抹准确屏蔽非蒸镀区的步骤,所述油脂涂抹准确屏蔽非蒸镀区的方法为:采用油屏滚轮外圆加工出油沟槽的方式,使屏蔽油按照油屏滚轮表面加工好的沟槽均匀准确的涂覆在经过油屏滚轮表面的有机薄膜上,油屏滚轮一端有进油孔,进油和表面出油槽内部相连通,油品滚轮表面设计的沟槽按横向安全线高低错开分布。
所述被镀有机薄膜基材为圆筒状。
所述真空度为1.3*10-2~1.3*10-3Pa。
所述铝合金熔化槽加热温度为1200℃-1400℃。
本发明与现有技术相比具有如下技术效果:蒸镀时在每个方块横向增加一条安全线,并且每个区域之间的安全线采用非水平布置,这样,产品在生产过程中即使因为滚轮划伤到安全线,每个区域间仍有横向安全线相连,因为横向安全线采用非水平布置,连续划伤的概率大幅度降低,采用油脂涂抹的方法准确的屏蔽非蒸镀区简单方便,可操作性强。
具体实施方式
一种安全的金属薄膜蒸镀方法,包括以下步骤;
步骤一:将被镀有机薄膜基材装在真空蒸镀机中,用真空泵抽出真空;
步骤二:加热铝合金熔化槽使得锌铝合金在高温条件下溶化并蒸发气态;
步骤三:气态锌铝微粒在经卷绕机滚轮作用下而移动的被镀有机薄膜基材的表面上沉积、冷却还原,所述气态锌铝微粒按一定大小区域间断式蒸镀在有机薄膜基材上,每个区域横向间是独立的,纵向用一条窄镀层与公共区连接;其特征在于:所述蒸镀时在每个区域横向增加一条安全线,并且每个区域之间的安全线采用非水平布置,所述被镀有机薄膜基材在被气态锌铝微粒蒸镀之前还包括经过油脂涂抹准确屏蔽非蒸镀区的步骤,所述油脂涂抹准确屏蔽非蒸镀区的方法为:采用油屏滚轮外圆加工出油沟槽的方式,使屏蔽油按照油屏滚轮表面加工好的沟槽均匀准确的涂覆在经过油屏滚轮表面的有机薄膜上,油屏滚轮一端有进油孔,进油和表面出油槽内部相连通,油品滚轮表面设计的沟槽按横向安全线高低错开分布。
所述被镀有机薄膜基材为圆筒状。所述真空度为1.3*10-2~1.3*10-3Pa。所述铝合金熔化槽加热温度为1200℃-1400℃。
Claims (4)
1.一种安全的金属薄膜蒸镀方法,包括以下步骤;
步骤一:将被镀有机薄膜基材装在真空蒸镀机中,用真空泵抽出真空;
步骤二:加热铝合金熔化槽使得锌铝合金在高温条件下溶化并蒸发气态;
步骤三:气态锌铝微粒在经卷绕机滚轮作用下而移动的被镀有机薄膜基材的表面上沉积、冷却还原,所述气态锌铝微粒按一定大小区域间断式蒸镀在有机薄膜基材上,每个区域横向间是独立的,纵向用一条窄镀层与公共区连接;其特征在于:所述蒸镀时在每个区域横向增加一条安全线,并且每个区域之间的安全线采用非水平布置,所述被镀有机薄膜基材在被气态锌铝微粒蒸镀之前还包括经过油脂涂抹准确屏蔽非蒸镀区的步骤,所述油脂涂抹准确屏蔽非蒸镀区的方法为:采用油屏滚轮外圆加工出油沟槽的方式,使屏蔽油按照油屏滚轮表面加工好的沟槽均匀准确的涂覆在经过油屏滚轮表面的有机薄膜上,油屏滚轮一端有进油孔,进油和表面出油槽内部相连通,油品滚轮表面设计的沟槽按横向安全线高低错开分布。
2.根据权利要求1所述的蒸镀方法,其特征在于:所述被镀有机薄膜基材为圆筒状。
3.根据权利要求2所述的蒸镀方法,其特征在于:所述真空度为1.3*10-2~1.3*10-3Pa。
4.根据权利要求3所述的蒸镀方法,其特征在于:所述铝合金熔化槽加热温度为1200℃-1400℃。
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