CN107815661A - 圆形磁力电极装置及包括其的卷绕式表面改性设备 - Google Patents
圆形磁力电极装置及包括其的卷绕式表面改性设备 Download PDFInfo
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- CN107815661A CN107815661A CN201711303886.7A CN201711303886A CN107815661A CN 107815661 A CN107815661 A CN 107815661A CN 201711303886 A CN201711303886 A CN 201711303886A CN 107815661 A CN107815661 A CN 107815661A
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- electrode
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- magnetic pole
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
Description
Claims (7)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910042849.8A CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
CN201711303886.7A CN107815661B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201711303886.7A CN107815661B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Related Child Applications (1)
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CN201910042849.8A Division CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
Publications (2)
Publication Number | Publication Date |
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CN107815661A true CN107815661A (zh) | 2018-03-20 |
CN107815661B CN107815661B (zh) | 2019-08-20 |
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CN201910042849.8A Active CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
CN201711303886.7A Active CN107815661B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
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CN201910042849.8A Active CN109706432B (zh) | 2017-12-11 | 2017-12-11 | 圆形磁力电极装置及包括其的卷绕式表面改性设备 |
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CN (2) | CN109706432B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110220048A (zh) * | 2019-04-18 | 2019-09-10 | 厦门阿匹斯智能制造系统有限公司 | 一种磁场角度可调的磁钢 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0115119A2 (en) * | 1983-01-26 | 1984-08-08 | Materials Research Corporation | Shaped field magnetron electrode |
JPS59197569A (ja) * | 1983-04-25 | 1984-11-09 | Kawasaki Heavy Ind Ltd | スパツタリング装置の電極部構造 |
CN201746583U (zh) * | 2010-06-25 | 2011-02-16 | 合肥科烨电物理设备制造有限公司 | 一种潘宁放电离子源柔性材料真空镀膜电极 |
CN103643221A (zh) * | 2013-09-14 | 2014-03-19 | 北京印刷学院 | 具有磁场增强旋转阵列电极的等离子体装置 |
CN203881703U (zh) * | 2014-03-17 | 2014-10-15 | 天津英科联合科技有限公司 | 一种可调节磁性大小的磁性电极 |
CN104532200A (zh) * | 2014-12-24 | 2015-04-22 | 四川亚力超膜科技有限公司 | 一种柱状旋转磁控溅射靶 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN2067281U (zh) * | 1990-02-26 | 1990-12-12 | 辽宁省环境保护科学研究所 | 一种多功能的磁控溅射离子镀膜装置 |
JP3611324B2 (ja) * | 2002-06-03 | 2005-01-19 | 信越化学工業株式会社 | マグネトロンプラズマ用磁場発生装置 |
CN102822381B (zh) * | 2010-03-31 | 2015-06-17 | 野马真空系统股份有限公司 | 圆柱形旋转磁控管溅射阴极装置以及使用射频发射来沉积材料的方法 |
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2017
- 2017-12-11 CN CN201910042849.8A patent/CN109706432B/zh active Active
- 2017-12-11 CN CN201711303886.7A patent/CN107815661B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0115119A2 (en) * | 1983-01-26 | 1984-08-08 | Materials Research Corporation | Shaped field magnetron electrode |
JPS59197569A (ja) * | 1983-04-25 | 1984-11-09 | Kawasaki Heavy Ind Ltd | スパツタリング装置の電極部構造 |
CN201746583U (zh) * | 2010-06-25 | 2011-02-16 | 合肥科烨电物理设备制造有限公司 | 一种潘宁放电离子源柔性材料真空镀膜电极 |
CN103643221A (zh) * | 2013-09-14 | 2014-03-19 | 北京印刷学院 | 具有磁场增强旋转阵列电极的等离子体装置 |
CN203881703U (zh) * | 2014-03-17 | 2014-10-15 | 天津英科联合科技有限公司 | 一种可调节磁性大小的磁性电极 |
CN104532200A (zh) * | 2014-12-24 | 2015-04-22 | 四川亚力超膜科技有限公司 | 一种柱状旋转磁控溅射靶 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110220048A (zh) * | 2019-04-18 | 2019-09-10 | 厦门阿匹斯智能制造系统有限公司 | 一种磁场角度可调的磁钢 |
Also Published As
Publication number | Publication date |
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CN109706432A (zh) | 2019-05-03 |
CN109706432B (zh) | 2021-04-06 |
CN107815661B (zh) | 2019-08-20 |
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Effective date of registration: 20190522 Address after: 317700 No. 136 Wushicun, Wanyuan Street, Jiaojiang District, Taizhou City, Zhejiang Province Applicant after: Chen Yanyu Address before: 101100 Building 5062, No. 6, Caoyuan Yijia, Tongzhou District, Beijing Applicant before: Chen Liguo |
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Effective date of registration: 20210108 Address after: No.18-91, Gongye Road, South Taihu high tech Industrial Park, Wuxing District, Huzhou City, Zhejiang Province Patentee after: Zhejiang julibao Textile Technology Co., Ltd Address before: 317700 No. 136 Wushicun, Wanyuan Street, Jiaojiang District, Taizhou City, Zhejiang Province Patentee before: Chen Yanyu |