CN107794499A - A kind of evaporation boat regulation fixing device of high deposition rate evaporation - Google Patents
A kind of evaporation boat regulation fixing device of high deposition rate evaporation Download PDFInfo
- Publication number
- CN107794499A CN107794499A CN201710830231.9A CN201710830231A CN107794499A CN 107794499 A CN107794499 A CN 107794499A CN 201710830231 A CN201710830231 A CN 201710830231A CN 107794499 A CN107794499 A CN 107794499A
- Authority
- CN
- China
- Prior art keywords
- evaporation
- fixed plate
- extended column
- electrode extended
- evaporation boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention discloses a kind of evaporation boat regulation fixing device of high deposition rate evaporation, including positive regulator fixed plate, negative regulator fixed plate, positive electrode extended column and negative electrode extended column, positive regulator fixed plate and the difference horizontal connection of negative regulator fixed plate are at the top of positive electrode evaporation and negative electrode evaporation；Positive electrode extended column and negative electrode extended column are fixed on positive regulator fixed plate and negative regulator fixed plate vertically by fixing hole respectively；Fixes sleeve is threaded with respectively at the top of positive electrode extended column and negative electrode extended column, and fixes sleeve side wall is provided with horizontal open slot, and the open slot of two fixes sleeves is oppositely arranged, and two opening trough_likes are inserted into cooperation in evaporation boat both ends respectively；Two fixes sleeve tops are respectively equipped with clamping screw, evaporation boat both ends is fixedly clamped respectively between corresponding clamping screw and electrode extended column；The installation site for making evaporation boat by electrode extended column raises, so as to shorten the distance of evaporation source and substrate, it is possible to increase sedimentation rate.
Description
Technical field
The present invention relates to vacuum evaporation technology field, the fixed dress of evaporation boat regulation of specifically a kind of high deposition rate evaporation
Put.
Background technology
Evaporation is to heat material in vacuum environment and be plated to a kind of plated film mode on substrate.Usually material is put
Enter evaporation boat, evaporation boat both ends fixed electrode, then using electrode electrical heating, realize evaporation.At present, evaporation boat both ends are all straight
Connect and be fixedly linked with the electrode column of evaporated device, the distance of one side evaporation source and substrate is remote, and plated film speed is slow, on the other hand steams
The setting angle of hair boat is fixed, and evaporated device is only applicable to a kind of evaporation boat of model.
The content of the invention
It is an object of the invention to provide a kind of evaporation boat of high deposition rate evaporation to adjust fixing device, and the device can
Shorten the distance of evaporation source and substrate, improve sedimentation rate, and suitable for the evaporation boat of various models, use easy to spread.
The technical solution adopted for the present invention to solve the technical problems is：
A kind of evaporation boat regulation fixing device of high deposition rate evaporation, including positive regulator fixed plate, negative regulator fixed plate, positive electricity
Pole extended column and negative electrode extended column, the plate face of positive regulator fixed plate and negative regulator fixed plate are equipped with fixing hole and the first waist type
Hole, positive regulator fixed plate and negative regulator fixed plate are respectively by the first waist-shaped hole horizontal connection in positive electrode evaporation and negative evaporation electricity
At the top of pole；Positive electrode extended column and negative electrode extended column are fixed on positive regulator fixed plate and negative regulator vertically by fixing hole respectively
Fixed plate；
Fixes sleeve is threaded with the top of positive electrode extended column and negative electrode extended column respectively, fixes sleeve side wall is provided with level
Open slot, the open slot of two fixes sleeves is oppositely arranged, and two opening trough_likes are inserted into cooperation in evaporation boat both ends respectively；
Two fixes sleeve tops are respectively equipped with clamping screw, make evaporation boat both ends be fixedly clamped respectively in corresponding clamping screw with
Between electrode extended column.
Further, the regulation fixing device also includes evaporation boat radome cylinder and the shielding below evaporation boat
Cover cylinder pallet, radome cylinder tray top are provided with circular support groove, and radome cylinder pallet is additionally provided with the second waist-shaped hole, radome
Cylinder pallet is sheathed on the outer wall of positive electrode extended column or negative electrode extended column by the second waist-shaped hole level；Evaporation boat radome cylinder
Comprising the upper cover cylinder and lower cover cylinder being adapted with evaporation boat size, the support groove is formed to the base of upper cover cylinder and lower cover cylinder and held
Support coordinates, and lower cover cylinder is located at below evaporation boat, and the barrel bottom of upper cover cylinder is provided with symmetrical groove, and groove makes evaporation boat horizontal
To through upper cover cylinder.
The beneficial effects of the invention are as follows：
First, the installation site for making evaporation boat by electrode extended column raises, can so as to shorten the distance of evaporation source and substrate
Improve sedimentation rate；And high-melting-point refractory material can be heated and be deposited；
2nd, the installation site and angle of electrode extended column can be changed by the first waist-shaped hole, enable adaptation to various models
The fixed installation of evaporation boat, beneficial to popularization and application；
3rd, the evaporation boat radome cylinder and radome cylinder pallet to cooperate can avoid metal contamination in evaporation process, together
When guide effect is played to boil-off gas, prevent boil-off gas from spreading, deposition more concentrate, improve deposition efficiency.
Brief description of the drawings
The present invention is further described with reference to the accompanying drawings and examples：
Fig. 1 is the structural representation of the present invention；
Fig. 2 is the enlarged diagram of positive regulator fixed plate in the present invention；
Fig. 3 is Fig. 2 top view；
Fig. 4 is the enlarged diagram of positive electrode extended column in the present invention；
Fig. 5 is the enlarged diagram of fixes sleeve in the present invention；
Fig. 6 is the enlarged side view of fixes sleeve in the present invention；
Fig. 7 is the enlarged diagram of radome cylinder pallet in the present invention；
Fig. 8 is Fig. 6 top view；
Fig. 9 is the enlarged diagram of upper cover cylinder in the present invention；
Figure 10 is Fig. 8 side view；
Figure 11 is Fig. 8 upward view；
Figure 12 is the enlarged diagram of lower cover cylinder in the present invention.
Embodiment
As shown in figure 1, the present invention provides a kind of evaporation boat regulation fixing device of high deposition rate evaporation, including positive regulator
Fixed plate 1, negative regulator fixed plate 2, positive electrode extended column 3 and negative electrode extended column 4, with reference to shown in Fig. 2 and Fig. 3, positive regulator is solid
Fixed board 1 and the plate face of negative regulator fixed plate 2 are equipped with the waist-shaped hole 6 of fixing hole 5 and first, and positive regulator fixed plate 1 and negative regulator are consolidated
Fixed board 2 can specifically fix positive regulator respectively by the horizontal connection of fixing hole 5 in positive electrode evaporation 7 and the top of negative electrode evaporation 8
Plate 1 and negative regulator fixed plate 2 are respectively sleeved on positive electrode evaporation 7 and negative electrode evaporation 8 by fixing hole 5, then pass through
One nut 9 is fixed.
With reference to shown in Fig. 4, positive electrode extended column 3 and negative electrode extended column 4 are fixed on vertically by the first waist-shaped hole 6 respectively
Positive regulator fixed plate 1 and negative regulator fixed plate 2；Can be in positive electrode extended column 3 and the bottom of negative electrode extended column 4 respectively in axial direction
Screw 10 is set, the first waist-shaped hole 6 is then passed through by bolt 11, and coordinate with the screw thread of screw 10 and be fixed.
With reference to shown in Fig. 5 and Fig. 6, positive electrode extended column 3 and the top of negative electrode extended column 4 are threaded with fixed cover respectively
Cylinder 12, the side wall of fixes sleeve 12 are provided with horizontal open slot 13, and the inwall of fixes sleeve 12 sets internal thread, two fixes sleeves
Open slot be oppositely arranged, two fixing ends of evaporation boat 14 insert two opening trough_likes into cooperation respectively；Two fixes sleeves
Top is respectively equipped with clamping screw 15, make evaporation boat 14 two fixing ends be fixedly clamped respectively in corresponding clamping screw with
Between electrode extended column.
The regulation fixing device also includes evaporation boat radome cylinder and the radome cylinder support positioned at the lower section of evaporation boat 14
Disk 17, with reference to shown in Fig. 7 and Fig. 8, the top of radome cylinder pallet 17 is provided with circular support groove 17a, and radome cylinder pallet 17 is also
Provided with the second waist-shaped hole 17b, radome cylinder pallet 17 is sheathed on positive electrode extended column 3 or negative by the second waist-shaped hole 17b levels
The outer wall of electrode extended column 4, then it is fixed by the second nut 18.
With reference to shown in Fig. 9~12, evaporation boat radome cylinder includes the upper cover cylinder 16a being adapted with evaporation boat size and lower cover
Cylinder 16b, support groove 17a form support to upper cover cylinder 16a and lower cover cylinder 16b base and coordinated, and lower cover cylinder 16b is located at evaporation boat 14
Lower section, upper cover cylinder 16a barrel bottom are provided with symmetrical groove 16c, and groove 16c makes evaporation boat 14 be horizontally through upper cover cylinder
16a。
The above described is only a preferred embodiment of the present invention, any formal limitation not is made to the present invention；Appoint
What those skilled in the art, without departing from the scope of the technical proposal of the invention, all using the side of the disclosure above
Method and technology contents make many possible changes and modifications to technical solution of the present invention, or are revised as the equivalent reality of equivalent variations
Apply example.Therefore, every content without departing from technical solution of the present invention, the technical spirit according to the present invention are done to above example
Any simple modification, equivalent substitution, equivalence changes and modification, still fall within the range of technical solution of the present invention protects.
Claims (2)
1. the evaporation boat regulation fixing device of a kind of high deposition rate evaporation, it is characterised in that including positive regulator fixed plate, negative tune
The plate face of section fixed plate, positive electrode extended column and negative electrode extended column, positive regulator fixed plate and negative regulator fixed plate is equipped with solid
Determine hole and the first waist-shaped hole, positive regulator fixed plate and negative regulator fixed plate are respectively by the first waist-shaped hole horizontal connection in positive evaporation
At the top of electrode and negative electrode evaporation；Positive electrode extended column and negative electrode extended column are fixed on positive regulator vertically by fixing hole respectively
Fixed plate and negative regulator fixed plate；
Fixes sleeve is threaded with the top of positive electrode extended column and negative electrode extended column respectively, fixes sleeve side wall is provided with level
Open slot, the open slot of two fixes sleeves is oppositely arranged, and two opening trough_likes are inserted into cooperation in evaporation boat both ends respectively；
Two fixes sleeve tops are respectively equipped with clamping screw, make evaporation boat both ends be fixedly clamped respectively in corresponding clamping screw with
Between electrode extended column.
A kind of 2. evaporation boat regulation fixing device of high deposition rate evaporation according to claim 1, it is characterised in that institute
Stating regulation fixing device also includes evaporation boat radome cylinder and the radome cylinder pallet below evaporation boat, radome cylinder support
Circular support groove is provided with the top of disk, radome cylinder pallet is additionally provided with the second waist-shaped hole, and radome cylinder pallet passes through the second waist type
Hole horizontal is sheathed on the outer wall of positive electrode extended column or negative electrode extended column；Evaporation boat radome cylinder includes and evaporation boat size phase
The upper cover cylinder and lower cover cylinder of adaptation, the support groove form support to the base of upper cover cylinder and lower cover cylinder and coordinated, and lower cover cylinder is located at
Below evaporation boat, the barrel bottom of upper cover cylinder is provided with symmetrical groove, and groove makes evaporation boat be horizontally through upper cover cylinder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710830231.9A CN107794499B (en) | 2017-09-15 | 2017-09-15 | A kind of fixed device of evaporation boat adjusting of high deposition rate vapor deposition |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710830231.9A CN107794499B (en) | 2017-09-15 | 2017-09-15 | A kind of fixed device of evaporation boat adjusting of high deposition rate vapor deposition |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107794499A true CN107794499A (en) | 2018-03-13 |
| CN107794499B CN107794499B (en) | 2019-10-18 |
Family
ID=61531903
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710830231.9A Active CN107794499B (en) | 2017-09-15 | 2017-09-15 | A kind of fixed device of evaporation boat adjusting of high deposition rate vapor deposition |
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| Country | Link |
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| CN (1) | CN107794499B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108359934A (en) * | 2018-03-26 | 2018-08-03 | 吉林大学 | Upper flange plate for the coating machine of uniform evaporation material on column type substrate |
| CN116676581A (en) * | 2023-08-03 | 2023-09-01 | 杭州众能光电科技有限公司 | Electrode extension rod and application method thereof |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070251457A1 (en) * | 2006-04-28 | 2007-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Electrode cover and evaporation device |
| CN103628029A (en) * | 2012-08-22 | 2014-03-12 | Snu精密股份有限公司 | Selective linear evaporating apparatus |
| CN103866241A (en) * | 2014-02-25 | 2014-06-18 | 广东省工业技术研究院(广州有色金属研究院) | Composite magnetron sputtering coating device for ion-assisted thermal evaporation |
| CN105177510A (en) * | 2015-10-21 | 2015-12-23 | 京东方科技集团股份有限公司 | Evaporation device and evaporation method |
-
2017
- 2017-09-15 CN CN201710830231.9A patent/CN107794499B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070251457A1 (en) * | 2006-04-28 | 2007-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Electrode cover and evaporation device |
| CN103628029A (en) * | 2012-08-22 | 2014-03-12 | Snu精密股份有限公司 | Selective linear evaporating apparatus |
| CN103866241A (en) * | 2014-02-25 | 2014-06-18 | 广东省工业技术研究院(广州有色金属研究院) | Composite magnetron sputtering coating device for ion-assisted thermal evaporation |
| CN105177510A (en) * | 2015-10-21 | 2015-12-23 | 京东方科技集团股份有限公司 | Evaporation device and evaporation method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108359934A (en) * | 2018-03-26 | 2018-08-03 | 吉林大学 | Upper flange plate for the coating machine of uniform evaporation material on column type substrate |
| CN116676581A (en) * | 2023-08-03 | 2023-09-01 | 杭州众能光电科技有限公司 | Electrode extension rod and application method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN107794499B (en) | 2019-10-18 |
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Address after: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233030 Patentee after: Anhui North Microelectronics Research Institute Group Co.,Ltd. Address before: No. 2016, Tanghe Road, economic development zone, Bengbu City, Anhui Province 233030 Patentee before: NORTH ELECTRON RESEARCH INSTITUTE ANHUI Co.,Ltd. |
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