CN107782745A - bubble defect detection system and method - Google Patents
bubble defect detection system and method Download PDFInfo
- Publication number
- CN107782745A CN107782745A CN201710675383.6A CN201710675383A CN107782745A CN 107782745 A CN107782745 A CN 107782745A CN 201710675383 A CN201710675383 A CN 201710675383A CN 107782745 A CN107782745 A CN 107782745A
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- Prior art keywords
- infrared
- shadow
- bubble
- ultraviolet
- intercepting filter
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- 238000001514 detection method Methods 0.000 title claims abstract description 13
- 238000000034 method Methods 0.000 title claims abstract description 8
- 230000007547 defect Effects 0.000 title abstract description 5
- 230000003287 optical effect Effects 0.000 claims abstract description 21
- 239000011521 glass Substances 0.000 claims description 31
- 239000000758 substrate Substances 0.000 claims description 28
- 238000003384 imaging method Methods 0.000 claims description 23
- 230000005540 biological transmission Effects 0.000 claims description 21
- 239000013307 optical fiber Substances 0.000 claims description 21
- 238000005516 engineering process Methods 0.000 claims description 6
- 230000005855 radiation Effects 0.000 claims description 2
- 239000010410 layer Substances 0.000 claims 9
- 239000002344 surface layer Substances 0.000 claims 2
- 238000003908 quality control method Methods 0.000 abstract 1
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 230000013011 mating Effects 0.000 description 3
- 238000002310 reflectometry Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000005321 cobalt glass Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
- G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9511—Optical elements other than lenses, e.g. mirrors
Abstract
The invention relates to a bubble defect detection system and a method, which are used for simultaneously detecting whether bubbles remain in an infrared cut-off filter and whether defects exist on the surface, wherein the system comprises an illuminating device, an optical component, an image capturing device and an image processing unit, the illuminating device can simultaneously output ultraviolet rays and infrared rays, the optical component comprises an objective lens aligned with the infrared cut-off filter, the image capturing device is used for capturing a shadow image formed after the infrared cut-off filter reflects the ultraviolet rays and the infrared rays and enters the optical component, and the image processing unit is connected with the image capturing device and is used for detecting whether a shadow exists in the shadow image; if yes, judging the black shadow is caused by bubbles or surface flaws according to the gray level degree of the black shadow. The bubble defect detection system and method provided by the invention can enhance the quality control of the infrared cut-off filter.
Description
Technical field
The present invention can check that infrared ray cut is filtered on a kind of detection technique of infrared intercepting filter, especially one kind
Bubble artifacts person in the glass substrate of mating plate.
Background technology
Infrared intercepting filter (Infrared Cut-Off Filter) is common in digital optical devices, such as numeral
Camera, DVR or astronomical telescope etc..As its name suggests, infrared intercepting filter be for block infrared ray enter it is photosensitive
A kind of image sensor such as optical filter of element, its CCD or CMOS to digital camera lens is even more important, because these images
Sensor generally to infrared ray extrasensitivity, causes detected image to produce colour cast or the image that human eye can't see occur.
The kind capture quality that can be used to correct image sensor with infrared intercepting filter, uses acquirement and is closer to human eye vision sense
The image known.
As shown in figure 4, known infrared intercepting filter 5 generally comprises three-decker, it is an infrared ray at the middle and upper levels
Reflecting layer 51 (Infrared Reflective coating), lower floor are (the Anti-Reflective c of an anti-reflecting layer 53
Oating), it is middle then to clip one layer of glass substrate 52.Wherein, the glass substrate 52 is usually to select smalt (B lue
Glass), it adds to found after iron, nickel etc. are formulated in frit and formed, and itself material can absorb infrared ray, Jin Erda
To the characteristic without infrared penetration.The infrared-reflecting layers 51 are usually to reflect infrared ray, reduce penetrating for infrared ray.Should
Anti-reflecting layer 53 is mainly the reflection for reducing visible ray, lifts the penetrance of visible ray.
Again as shown in figure 5, infrared intercepting filter 6 known to another kind is except anti-including the infrared ray as described in foregoing
Penetrate outside the three-deckers such as layer 61, glass substrate 62 and anti-reflecting layer 63, further include a ultraviolet photoresist layer (UV Cut
Coating) 64, positioned at orlop, close to the anti-reflecting layer 63.Wherein, the ultraviolet photoresist layer 64 blocking purple completely
Outer light, it is ensured that enter photo-sensitive cell without any ultraviolet.
In detail, the infrared-reflecting layers 61 almost 100% reflection in IR wavelength 650nm~950nm wave band,
Infrared ray can effectively be blocked and enter the infrared intercepting filter 6.The glass substrate 62 is all extremely low in the reflectivity of any wave band,
Light if it were not for the glass substrate 62 (such as visible ray) is directed through, be exactly by the glass substrate 62 material absorb (such as
Infrared ray), therefore fresh few reflection.The anti-reflecting layer 63 is almost in the reflectivity of the wave-length coverage (400nm~700nm) of visible ray
Zero, that is, with excellent antireflection ability.It is worth noting that, the anti-reflecting layer 63 has in the wave band of part ultraviolet light
High reflectance, display also have the characteristic of reflecting part band ultraviolet.Wave band of the ultraviolet photoresist layer 64 near ultraviolet ray
In (UVA, 315nm~400nm) almost reflectivity 100%, expression can block ultraviolet light really.
As noted previously, as infrared intercepting filter 5 or 6 is made up of sandwich construction and the wherein one side of the optical filter
Typically it is temporarily fixed to only expose another side on a UV films, therefore in the exfactory inspection of product, can only be examined mostly
Whether the surface that the optical filter exposes has the surface blemishes such as dirty or washmarking, but whether there is among the glass substrate of internal layer has
Micro-bubble, it is fresh for a long time few detected, also fail to be detected.
The content of the invention
In view of this, the present invention provides a kind of the bubble artifacts detecting system and method for infrared intercepting filter, its energy
Detect in an infrared intercepting filter whether remaining has bubble.Wherein, the infrared intercepting filter comprises at least a glass
Substrate, the infrared-reflecting layers for being formed at the glass substrate top surface, and it is formed at an anti-reflecting layer of the glass substrate bottom surface.
Specifically, bubble artifacts detecting system of the invention includes a lighting device, an optical module, a capturing images
Device and a graphics processing unit.The lighting device is exporting ultraviolet.The optical module includes an object lens, and it is infrared to be directed at this
Line edge filter.The image capturing device to capture the infrared intercepting filter reflect the ultraviolet and enter the optics
The light and shadow imaging formed after component.The graphics processing unit connects the image capturing device, to check the light and shadow imaging
In whether have a shadow；If so, then judge whether the shadow is that bubble causes according to the GTG degree of the shadow.
It is preferred that the bubble artifacts detecting system of the present invention is except that can check the bubble inside the infrared intercepting filter
Whether there is, moreover it is possible to while whether the surface for detecting the infrared intercepting filter has the surface blemishes such as foul or washmarking.On the other hand, the photograph
The lighting device of double light sources can be selected in bright device, to export ultraviolet and infrared ray simultaneously.Its middle-ultraviolet lamp is detecting gas
Presence or absence is steeped, and infrared ray is checking surface blemish.The image capturing device is filtered to capture the infrared ray cut simultaneously
Mating plate reflects the ultraviolet and the infrared ray and enters after the optical module light and shadow imaging formed.The graphics processing unit
To check whether there is a shadow in the light and shadow imaging, if so, then according to the GTG degree of the shadow, it is bubble to judge the shadow
Or surface blemish causes.
It is preferred that the lighting device includes an a ultraviolet light source, infrared light sources, multiple first optical fiber transmission lines, more
Individual second optical fiber transmission line and a light out part, wherein one end of the plurality of first optical fiber transmission line connects the ultraviolet light source, and
The other end connects the light out part, and one end of the plurality of second optical fiber transmission line connects the infrared light sources, and the other end connects
The light out part, and the other end of the plurality of first optical fiber transmission line mixes with the other end of the plurality of second optical fiber transmission line
The light out part is collected in, to project mixed uniformly ultraviolet and infrared ray.
The bubble artifacts detection method of the present invention, to detect, whether remaining has bubble in an infrared intercepting filter,
The detection method includes beneath step：
(a) irradiates the infrared intercepting filter with ultraviolet, and the wherein ultraviolet is from the infrared intercepting filter
Infrared-reflecting layers enter the infrared intercepting filter；
(b) obtains the infrared intercepting filter with an image capturing device and reflects after the ultraviolet light formed
Shadow is imaged；
(c) whether is checked a shadow in the light and shadow imaging；And
(d) is if so, further judge whether the shadow is that bubble causes.
It is preferred that check in the light and shadow imaging whether there is the shadow with image recognition technology in step (c).
It is preferred that in step (d) the computing shadow GTG degree, use judge the shadow whether be that bubble causes.
Similarly, whether bubble artifacts detection method of the invention can also detect residual in an infrared intercepting filter simultaneously
There is bubble and whether has surface blemish, the detection method includes beneath step：
(a) is simultaneously with ultraviolet and the infrared radiation infrared intercepting filter, and the wherein ultraviolet is from the infrared ray
The infrared-reflecting layers of edge filter enter the infrared intercepting filter, and the infrared ray then will be by the infrared-reflecting layers
Reflection；
(b) obtains that the infrared intercepting filter reflects the ultraviolet and this is infrared simultaneously with an image capturing device
The light and shadow imaging formed after line；
(c) whether is checked a shadow in the light and shadow imaging；And
(d) is if so, further judge whether bubble or surface blemish cause the shadow.
It is preferred that another rise irradiates the infrared ray cut after the ultraviolet and infrared ray first pass through mixed light in step (a)
Optical filter.
It is preferred that check in the light and shadow imaging whether there is the shadow with image recognition technology in step (c).
It is preferred that in step (d) the computing shadow GTG degree, use judge the shadow be bubble or the surface flaw
Defect causes.
Brief description of the drawings
Fig. 1 is the block schematic diagram of bubble artifacts detecting system of the present invention.
Fig. 2 is the block schematic diagram of the lighting device in Fig. 1.
Fig. 3 be display infrared intercepting filter to ultraviolet (UV) and infrared ray (IR) penetrate and reflection condition.
Fig. 4 is the structural representation of infrared intercepting filter known to one.
Fig. 5 is the structural representation of another known infrared intercepting filter.
Drawing reference numeral
Bubble artifacts detecting system 100
Lighting device 1
Ultraviolet light source 11
Infrared light sources 12
First optical fiber transmission line 13
Second optical fiber transmission line 14
Light out part 15
Optical module 2
Object lens 21
Spectroscope 22
Imaging len 23
Image capturing device 3
Graphics processing unit 4
Bubble 7
Infrared intercepting filter 5,6
Infrared-reflecting layers 51,61
Glass substrate 52,62
Anti-reflecting layer 53,63
Ultraviolet photoresist layer 64
Embodiment
Fig. 1 is a preferred embodiment of the bubble artifacts detecting system 100 of the display present invention, and it can detect an infrared ray
Whether remaining has bubble in edge filter, moreover it is possible to while whether the surface for detecting the infrared intercepting filter has dirty or water
The surface blemishes such as trace.Wherein, testing sample can be the infrared intercepting filter 5,6 as shown in Fig. 4 or Fig. 5, and it is common special
Sign is to include basic three-decker, that is, a glass substrate 52,62, be formed at the glass substrate 52, be the one of 62 top surfaces red
Outside line reflecting layer 51,61, and it is formed at the glass substrate 52, an anti-reflecting layer 53,63 of 62 bottom surfaces.For simplicity, it is modern
Only illustrate by taking Fig. 4 infrared intercepting filter 5 as an example.
Specifically, bubble artifacts detecting system 100 of the invention generally comprise a lighting device 1, an optical module 2,
One image capturing device 3 and a graphics processing unit 4.Wherein, the lighting device 1 is a kind of lighting device of double light sources, such as Fig. 2
It is shown, uniform ultraviolet light and infrared light can be exported simultaneously.The optical module 2 includes an object lens 21, a spectroscope 22 and one one-tenth
As the infrared intercepting filter 5 of lens 23, the wherein object lens 21 alignment lower section.The spectroscope 22 is to by the lighting device
1 output light (ultraviolet light and infrared light) is guided to the infrared intercepting filter 5, to provide illumination.The image capturing device 3
To capture the infrared intercepting filter 5 reflection ultraviolet and/or infrared ray and enter after the optical module 2 what is formed
One light and shadow imaging.The graphics processing unit 4 connects the image capturing device 3, to check in the light and shadow imaging whether have it is one black
Shadow；If so, then according to the GTG degree of the shadow, judge whether the shadow is bubble or the surface blemish such as dirty or washmarking is led
Cause.
Filtered as shown in figure 3, the lighting device 1 irradiates the infrared ray cut with ultraviolet (UV) and infrared ray (IR) simultaneously
Piece 5, particularly irradiated from the side of the infrared-reflecting layers 51, rather than the side of the anti-reflecting layer 53.In this way, the purple
Outside line (UV) will enter the infrared intercepting filter 5 from the infrared-reflecting layers 51, to detect the glass substrate of internal layer
Whether 52 with the presence of bubble；And the infrared ray (IR) then can be most of to be reflected immediately when running into the infrared-reflecting layers 51
Imaging, use the surface state for checking the infrared intercepting filter 5, such as the flaw such as dirty or washmarking.
It is worth noting that, ultraviolet (UV) has portion after the glass substrate 52 for being repeatedly refracted into internal layer
The ultraviolet divided can be reflected when running into the surface of the anti-reflecting layer 53 of lower floor, abbreviation primary event, and another part
Ultraviolet, which can penetrate, enters the anti-reflecting layer 53, then is reflected by the anti-reflecting layer 53, abbreviation secondary reflection.This little experience one
Secondary and secondary reflection ultraviolet will be refracted or scatter when running into bubble 7 so that the bubble 7 forms black after imaging
Shadow.
It is preferred that as shown in Fig. 2 this lighting device 1 for preferably implementing double light sources selected by profit includes a ultraviolet
Source 11, an infrared light sources 12, multiple first optical fiber transmission lines 13, the light out part 15 of multiple second optical fiber transmission lines 14 and one.Its
In, one end of the plurality of first optical fiber transmission line 13 connects the ultraviolet light source 11, and the other end connects the light out part 15, and is somebody's turn to do
One end of multiple second optical fiber transmission lines 14 connects the infrared light sources 12, and the other end connects the light out part 15.The plurality of
The other end of one optical fiber transmission line 13 mixes with the other end of the second optical fiber transmission line 14 and collects in the light out part 15, to throw
Project mixed uniformly ultraviolet and infrared ray.In short, the lighting device 1 passes through the mixed of the plurality of optical fiber transmission line 13,14
Light and be able to project mixed uniformly ultraviolet and infrared ray from the light out part 15.Therefore, operator optionally only opens
Opening the ultraviolet light source 11, whether remaining has bubble in the infrared intercepting filter 5 to check；Or only open the infrared ray
Source 12, to check whether the infrared intercepting filter 5 has the surface blemishes such as dirty or washmarking；Or the ultraviolet is opened simultaneously
Light source 11 and the infrared light sources 12, to check the bubble presence or absence of the infrared intercepting filter 5 simultaneously, and whether have
The surface blemishes such as dirty or washmarking.
With reference to above-mentioned detecting system, bubble artifacts detection method of the invention, filtered to detect the infrared ray cut
Whether remaining has bubble in piece, and whether the surface that more can detect the infrared intercepting filter simultaneously has the surfaces such as dirty or washmarking
Flaw, this method include beneath step：
First, the infrared ray cut is irradiated simultaneously with ultraviolet (UV) and infrared ray (IR) using the lighting device 1 to filter
Piece 5, particularly irradiated from the side of the infrared-reflecting layers 51, rather than the side of the anti-reflecting layer 53.It is preferred that should
Ultraviolet (UV) and infrared ray (IR) expose to infrared ray cut filter together again after can first passing through foregoing optical fiber mixed light
Mating plate 5.Cut in this way, the ultraviolet (UV) can enter the infrared ray from the infrared-reflecting layers 51 of the infrared intercepting filter 5
Only optical filter 5, whether to detect the glass substrate 52 of internal layer with the presence of bubble；And the infrared ray (IR) is then to run into this infrared
It will be immediately reflected back during line reflection layer 51, and use the surface state for checking the infrared intercepting filter 5.
Then, the infrared intercepting filter 5 reflection ultraviolet is obtained with the image capturing device 3 simultaneously and this is red
The light and shadow imaging formed after outside line, then check in the light and shadow imaging whether there is shadow with image recognition technology.If so, enter one
The GTG degree of the computing shadow is walked, uses and judges whether bubble or surface blemish cause the shadow.
By above-mentioned setting, bubble artifacts detecting system of the invention and method can not only detect infrared ray cut optical filtering
Whether remaining has bubble in piece, moreover it is possible to while whether the surface for detecting the infrared intercepting filter has the surfaces such as dirty or washmarking
Flaw, use the quality management and control for strengthening infrared intercepting filter.
Anyway, anyone can obtain enough teachings from the explanation of above-mentioned example, and according to and understand in the present invention
Hold and be different from prior art really, and with the usability in industry, and foot tool progressive.It is that the patent of the invention that indeed meets will
Part, whence are filed an application in accordance with the law.
Claims (6)
1. a kind of bubble artifacts detecting system, to detect, whether remaining has bubble in an infrared intercepting filter, its feature
It is, the infrared intercepting filter includes a glass substrate, is formed at an infrared reflection of the glass substrate top surface
Layer, and an anti-reflecting layer of the glass substrate bottom surface is formed at, and the bubble artifacts detecting system includes：
One lighting device, to export ultraviolet；
One optical module, including an object lens, are directed at the infrared intercepting filter；
One image capturing device, to capture the infrared intercepting filter reflection ultraviolet and enter the optics group
The light and shadow imaging formed after part；And
One graphics processing unit, described image capture device is connected, to check whether there is a shadow in the light and shadow imaging；If
Have, then according to the GTG degree of the shadow, judge whether the shadow is that bubble causes.
2. a kind of bubble artifacts detecting system, to detect simultaneously in an infrared intercepting filter whether remaining have bubble and
Whether surface blemish is had, it is characterised in that the infrared intercepting filter includes a glass substrate, is formed at the glass base
One infrared-reflecting layers of plate top surface, and an anti-reflecting layer of the glass substrate bottom surface is formed at, and the bubble artifacts are examined
Examining system includes：
One lighting device, to export ultraviolet and infrared ray, for being irradiated in the infrared intercepting filter；
One optical module, including an object lens, are directed at the infrared intercepting filter；
One image capturing device, to capture, the infrared intercepting filter reflects the ultraviolet and the infrared ray is gone forward side by side
Enter the light and shadow imaging formed after the optical module；And
One graphics processing unit, described image capture device is connected, to check whether there is a shadow in the light and shadow imaging, if
Have, then according to the GTG degree of the shadow, it is that bubble or surface blemish cause to judge the shadow.
3. bubble artifacts detecting system according to claim 2, it is characterised in that the lighting device includes a ultraviolet
Light source, an infrared light sources, multiple first optical fiber transmission lines, multiple second optical fiber transmission lines and a light out part, wherein described more
One end of individual first optical fiber transmission line connects the ultraviolet light source, and the other end connects the light out part, and the multiple the
One end of two optical fiber transmission lines connects the infrared light sources, and the other end connects the light out part, and the multiple first light
The other end of fine transmission line mixes with the other end of the multiple second optical fiber transmission line and collects in the light out part,
To project mixed uniformly ultraviolet and infrared ray.
4. a kind of bubble artifacts detection method, to detect, whether remaining has bubble in an infrared intercepting filter, its feature
It is, the infrared intercepting filter includes a glass substrate, is formed at an infrared reflection of the glass substrate top surface
Layer, and an anti-reflecting layer of the glass substrate bottom surface is formed at, and the bubble artifacts detection method comprises the following steps：
(a) irradiates the infrared intercepting filter with ultraviolet, wherein the ultraviolet is from the infrared intercepting filter
Infrared-reflecting layers enter the infrared intercepting filter；
(b) obtains the light formed after the infrared intercepting filter reflection ultraviolet with an image capturing device
Shadow is imaged；
(c) checks in the light and shadow imaging whether there is a shadow with image recognition technology；And
(d) is if so, the GTG degree of shadow described in further computing, uses and judge whether the shadow is that bubble causes.
5. a kind of bubble artifacts detection method, to detect simultaneously in an infrared intercepting filter whether remaining have bubble and
Whether surface blemish is had, it is characterised in that the infrared intercepting filter includes a glass substrate, is formed at the glass base
One infrared-reflecting layers of plate top surface, and an anti-reflecting layer of the glass substrate bottom surface is formed at, and the bubble artifacts are examined
Survey method comprises the following steps：
(a) is with infrared intercepting filter described in ultraviolet and infrared radiation, wherein the ultraviolet is cut from the infrared ray
Only the infrared-reflecting layers of optical filter enter the infrared intercepting filter, and the infrared ray then will be anti-by the infrared ray
Penetrate layer reflection；
(b) is obtained the infrared intercepting filter with an image capturing device and reflects the ultraviolet and described red simultaneously
The light and shadow imaging formed after outside line；
(c) checks in the light and shadow imaging whether there is a shadow with image recognition technology；And
(d) is if so, the GTG degree of shadow described in further computing, uses and judge that the shadow is bubble or surface blemish
Cause.
6. bubble artifacts detection method according to claim 5, it is characterised in that in step (a), the ultraviolet and
Infrared ray first passes through another after mixed light and irradiates the infrared intercepting filter.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW105127156 | 2016-08-24 | ||
| TW105127156A TWI601950B (en) | 2016-08-24 | 2016-08-24 | Bubble defect inspection system and method for an infrared cut-off filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN107782745A true CN107782745A (en) | 2018-03-09 |
Family
ID=61010927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710675383.6A Pending CN107782745A (en) | 2016-08-24 | 2017-08-09 | bubble defect detection system and method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN107782745A (en) |
| TW (1) | TWI601950B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1705874A (en) * | 2002-10-25 | 2005-12-07 | 蒂阿马公司 | Method and device for detecting surface defects on a transparent or translucent outer wall |
| CN101614680A (en) * | 2008-06-26 | 2009-12-30 | 株式会社阿迪泰克工程 | Defect detecting device and method |
| CN103675970A (en) * | 2012-09-06 | 2014-03-26 | 日本板硝子株式会社 | Infrared cut filter and imaging apparatus |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWM486062U (en) * | 2014-04-11 | 2014-09-11 | Utechzone Co Ltd | Image capture device and optical inspection equipment |
| US9419407B2 (en) * | 2014-09-25 | 2016-08-16 | Kla-Tencor Corporation | Laser assembly and inspection system using monolithic bandwidth narrowing apparatus |
| TWM515103U (en) * | 2015-06-11 | 2016-01-01 | Univ Nat Cheng Kung | Variable light source Raman spectroscopy capture apparatus |
-
2016
- 2016-08-24 TW TW105127156A patent/TWI601950B/en active
-
2017
- 2017-08-09 CN CN201710675383.6A patent/CN107782745A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1705874A (en) * | 2002-10-25 | 2005-12-07 | 蒂阿马公司 | Method and device for detecting surface defects on a transparent or translucent outer wall |
| CN101614680A (en) * | 2008-06-26 | 2009-12-30 | 株式会社阿迪泰克工程 | Defect detecting device and method |
| CN103675970A (en) * | 2012-09-06 | 2014-03-26 | 日本板硝子株式会社 | Infrared cut filter and imaging apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI601950B (en) | 2017-10-11 |
| TW201809639A (en) | 2018-03-16 |
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