CN107761065A - Coating wire planar cathode short circuit repair method - Google Patents
Coating wire planar cathode short circuit repair method Download PDFInfo
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- CN107761065A CN107761065A CN201710832150.2A CN201710832150A CN107761065A CN 107761065 A CN107761065 A CN 107761065A CN 201710832150 A CN201710832150 A CN 201710832150A CN 107761065 A CN107761065 A CN 107761065A
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- Prior art keywords
- planar cathode
- connecting line
- controlling switch
- isolating transformer
- negative electrode
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
Abstract
The invention belongs to glass manufacturing apparatus technical field, a kind of more particularly to coating wire planar cathode short circuit repair method, during operation, determine that short trouble occurs in planar cathode first, and then using isolating transformer, connecting line group and controlling switch group, and 220V or 380v single-phase electricities are accessed into the high-pressure side of isolating transformer, connect to form load output loop by the negative electrode and anode and controlling switch group of connecting line group and planar cathode by the secondary side of isolating transformer, it can so carry out the maintenance and repair to planar cathode short trouble.Disconnect dc source and close controlling switch group n times, and the resistance of measurement plane negative electrode over the ground when controlling switch group is disconnected every time, restart above-mentioned steps if resistance value is zero, illustrated planar negative electrode short trouble eliminates if resistance value is not zero, and so just effectively solves coating wire planar cathode and the technical problem that short circuit causes not being again turned on after jump target occurs.
Description
Technical field
The invention belongs to glass manufacturing apparatus technical field, more particularly to a kind of short-circuit maintenance side of coating wire planar cathode
Method.
Background technology
Magnetron sputtering plating line is in normal productive process, narrow space between planar cathode and anode bottom plate, in magnetic field
The lower easily growth needle-like burr of effect, once planar cathode connects moment with anode bottom plate, just short circuit causes to jump target, dc source
It can not be opened due to there is short-circuit protection.In this case, the common practices of prior art is that direct current is opened in multiple trial
Source, and can not open, need deflation to handle, so not only cause the time to waste, and cost correspondingly improves, it is also possible to cause
The delay of product term.
The content of the invention
It is an object of the invention to provide a kind of coating wire planar cathode short circuit repair method, it is intended to solves in the prior art
Short circuit, which occurs, in coating wire planar cathode to be caused to jump the technical problem that can not be again turned on after target.
To achieve the above object, the technical solution adopted by the present invention is：A kind of coating wire planar cathode short circuit repair method,
Comprise the following steps：
S1：Determine that short trouble occurs in planar cathode, judge that dc source can not be opened, and the planar cathode is over the ground
Resistance be zero；
S2：Isolating transformer, connecting line group and controlling switch group are provided, the high-pressure side of the isolating transformer is accessed
220V or 380v single-phase electricities, the isolating transformer secondary side by the cathode terminal of the connecting line and the planar cathode,
The anode tap of the planar cathode connects to form load output loop with the controlling switch group；
S3：Disconnect the dc source；
S4：Close the controlling switch group n times, N >=2；And measured when the controlling switch group is disconnected every time described flat
The resistance of face negative electrode over the ground；
S5：The resistance size of the planar cathode over the ground is measured, if the resistance of the planar cathode over the ground is
Zero returns to the operation step S4, and direct current source point target is opened if the resistance of the planar cathode over the ground is not zero.
Further, the high-pressure side of the isolating transformer is provided with the high input voltage for being used for connecting 220V or 380v single-phase electricities
End, the secondary side of the isolating transformer are provided with the low-voltage output for being used for exporting 12V or 24V single-phase electricities.
Further, the connecting line group includes anode connecting line and negative electrode connecting line, the both ends of the anode connecting line
It is electrically connected with respectively with the low-voltage output of the isolating transformer and the anode tap of the planar cathode, the negative electrode connecting line
Both ends be electrically connected with respectively with the cathode terminal of the low-voltage output of the isolating transformer and the planar cathode.
Further, the low-voltage output of the isolating transformer, which is provided with, is used for what is be electrically connected with the anode connecting line
Anode interface and the negative electrode interface for being electrically connected with the negative electrode connecting line.
Further, the diameter of the diameter of the anode connecting line and the negative electrode connecting line is 2.5mm or 4.0mm.
Further, the anode connecting line and the negative electrode connecting line are single copper cash or multicore copper cash.
Further, the controlling switch group includes the first controlling switch, and first controlling switch is located at the isolation
It is between the output end of transformer and 220V the or 380v single-phase electricities and mono- with the isolating transformer and the 220V or 380v
Mutually the output end of electricity is electrically connected with.
Further, the controlling switch group also includes the second controlling switch, and second controlling switch is located at the sun
It is electrically connected with the connecting line of pole and with the anode tap of the low-voltage output of the isolating transformer and the planar cathode.
Further, first controlling switch and second controlling switch are knife switch.
Further, in the step S4, first first controlling switch is closed, then closes second control
Switch n times, wherein N >=2.
Beneficial effects of the present invention：The coating wire planar cathode short circuit repair method of the present invention, it is first determined go out plane the moon
There is short trouble in pole, and determines that dc source can not start, for the above situation, using isolating transformer, connecting line group and
Controlling switch group, and lead to by the high-pressure side access 220V or 380v single-phase electricities of isolating transformer, by the secondary side of isolating transformer
The negative electrode of connecting line group and the planar cathode, the anode of the planar cathode and the controlling switch group is crossed to be connected to form load
Output loop, it can so carry out maintenance and repair to planar cathode short trouble.Further, direct current is disconnected
Source, and close controlling switch group n times, N >=2；And the resistance of measurement plane negative electrode over the ground when controlling switch group is disconnected every time, together
When measurement plane negative electrode resistance size over the ground, need to restart above-mentioned steps if resistance is zero, if resistance hinders
Value is not zero, and the short trouble of illustrated planar negative electrode has eliminated, then can now open direct current source point target.It is so just fast
There is the technical problem that short circuit causes not being again turned on after jump target in the fast effective coating wire planar cathode that solves.
Brief description of the drawings
Technical scheme in order to illustrate the embodiments of the present invention more clearly, below will be to embodiment or description of the prior art
In the required accompanying drawing used be briefly described, it should be apparent that, drawings in the following description be only the present invention some
Embodiment, for those of ordinary skill in the art, without having to pay creative labor, can also be according to these
Accompanying drawing obtains other accompanying drawings.
Fig. 1 is the process chart of coating wire planar cathode short circuit repair method provided in an embodiment of the present invention.
Fig. 2 is the structural representation of coating wire planar cathode short circuit apparatus for examination and repair provided in an embodiment of the present invention.
Wherein, each reference in figure：
10-isolating transformer, 11-high-pressure side, 12-secondary side
13-high voltage input terminal, 14-low-voltage output, 15-anode interface
16-negative electrode interface 20-connecting line group 21-anode connecting line
22-negative electrode connecting line the 24-the second controlling switch of the 23-the first controlling switch
30-planar cathode, 31-anode tap, 32-cathode terminal
33-220V or 380v single-phase electricities.
Embodiment
Embodiments of the invention are described below in detail, the example of the embodiment is shown in the drawings, wherein from beginning to end
Same or similar label represents same or similar element or the element with same or like function.Below with reference to attached
The embodiment that Fig. 1~2 describe is exemplary, it is intended to for explaining the present invention, and is not considered as limiting the invention.
In the description of the invention, it is to be understood that term " length ", " width ", " on ", " under ", "front", "rear",
The orientation or position relationship of the instruction such as "left", "right", " vertical ", " level ", " top ", " bottom " " interior ", " outer " is based on accompanying drawing institutes
The orientation or position relationship shown, it is for only for ease of the description present invention and simplifies description, rather than instruction or the dress for implying meaning
Put or element there must be specific orientation, with specific azimuth configuration and operation, therefore it is not intended that to limit of the invention
System.
In addition, term " first ", " second " are only used for describing purpose, and it is not intended that instruction or hint relative importance
Or the implicit quantity for indicating indicated technical characteristic.Thus, define " first ", the feature of " second " can be expressed or
Implicitly include one or more this feature.In the description of the invention, " multiple " are meant that two or more,
Unless otherwise specifically defined.
In the present invention, unless otherwise clearly defined and limited, term " installation ", " connected ", " connection ", " fixation " etc.
Term should be interpreted broadly, for example, it may be fixedly connected or be detachably connected, or integrally；Can be that machinery connects
Connect or electrically connect；Can be joined directly together, can also be indirectly connected by intermediary, can be in two elements
The connection in portion or the interaction relationship of two elements.For the ordinary skill in the art, can be according to specific feelings
Condition understands the concrete meaning of above-mentioned term in the present invention.
As shown in figure 1, a kind of coating wire planar cathode short circuit repair method provided in an embodiment of the present invention, including following step
Suddenly：
S1：Determine that short trouble occurs in planar cathode 30, judge that dc source can not be opened, and planar cathode 30 is over the ground
Resistance be zero；
S2：Isolating transformer 10, connecting line group 20 and controlling switch group are provided, the high-pressure side 11 of isolating transformer 10 is connect
Enter 220V or 380v single-phase electricities 33, the secondary side 12 of isolating transformer 10 passes through the negative electrode of connecting line and planar cathode 30, plane
The anode of negative electrode 30 connects to form load output loop with controlling switch group；
S3：Disconnect dc source；
S4：Close controlling switch group n times, N >=2；And measurement plane negative electrode 30 is over the ground when controlling switch group is disconnected every time
Resistance；
S5：The resistance size of measurement plane negative electrode 30 over the ground, if the resistance of the planar cathode 30 over the ground is
Zero returns to the operation step S4, and direct current source point is opened if the resistance of the planar cathode 30 over the ground is not zero
Target.
Coating wire planar cathode short circuit repair method provided in an embodiment of the present invention, it is first determined go out planar cathode 30 and occur
Short trouble, and determine that dc source can not start, for the above situation, using isolating transformer 10, connecting line group 20 and control
Switches set processed, and 220V or 380v single-phase electricities 33, two by isolating transformer 10 are accessed into the high-pressure side 11 of isolating transformer 10
Secondary side 12 be connected by connecting line group 20 with the negative electrode of planar cathode 30, the anode of planar cathode 30 and controlling switch group to be formed it is negative
Output loop is carried, can so carry out the maintenance and repair to the short trouble of planar cathode 30.
Specifically, the secondary side 12 of isolating transformer 10 is cloudy by the negative electrode of connecting line group 20 and planar cathode 30, plane
The anode of pole 30 connected with controlling switch group to be formed load output loop after, load the electric current of output loop will act on it is flat
The long needle-like burr is grown under magnetic fields between face negative electrode 30 and anode bottom plate, and then is achieved that the burning to burr
Erosion so that the burr amount between planar cathode 30 and anode bottom plate substantially reduces, and then also avoids planar cathode 30 and sun
Occurred between the bottom plate of pole by the phenomenon of burr electrical communication, so eliminate the need for the feelings that short circuit occurs in coating wire planar cathode 30
Condition.
Further, dc source is disconnected, and closes controlling switch group n times, N >=2；And in disconnection controlling switch group every time
When measurement plane 30 resistance over the ground of negative electrode, while the resistance size of the planar cathode 30 over the ground is measured, if resistance hinders
Value is that zero need restarts above-mentioned steps, and the short trouble of illustrated planar negative electrode 30 has eliminated if resistance is not zero,
It so can now open direct current source point target.So just fast and effectively solve coating wire planar cathode 30 and short circuit occur and make
The technical problem that can not be again turned on after into jump target.
In the present embodiment, as shown in Fig. 2 the high-pressure side 11 of isolating transformer 10 is provided with is used to connect 220V or 380v is mono-
The mutually high voltage input terminal 13 of electricity 33, it is defeated that the secondary side 12 of isolating transformer 10 is provided with the low pressure for being used to export 12V or 24V single-phase electricities
Go out end 14.
Further, it is used to connect 220V or 380v single-phase electricities 33 by being provided with the high-pressure side 11 of isolating transformer 10
High voltage input terminal 13, then 220V or 380v single-phase electricities 33 can self-isolation transformer 10 high voltage input terminal 13 enter isolation become
In depressor 10 and it is changed into the low-voltage output 14 that the secondary side 12 of low tension self-isolation transformer 10 is provided with and exports, it is so just real
Show to transformation of the external normal voltage to safety test voltage, 220V or 380v single-phase electricities 33 were namely both converted into 12V
Or 24V low tension.So that the maintenance process of the short circuit of coating wire planar cathode 30 is carried out under a suitable voltage conditions, such as
This just ensure that the security and operability of the maintenance of the short circuit of coating wire planar cathode 30.
Further, connecing for the high voltage input terminal 13 of isolating transformer 10 is used as by selection 220V or 380v single-phase electricities 33
Enter electricity, due to piece phase line of single-phase electricity and the most commonly seen electrical energy transportation form of a zero line composition, then 220V or 380v
Single-phase electricity 33 is just relatively easy to find in the working environment of coating wire planar cathode 30, so just greatly improves and coating wire is put down
The convenience of the short circuit maintenance of face negative electrode 30.
Further, by select 12V or 24V low tension be used as isolating transformer 10 the institute of low-voltage output 14 it is defeated
The voltage gone out, then within the scope of being in human safety voltage due to the voltage range of 12V or 24V low tensions, and be much smaller than people
The upper limit of body safe voltage, the personal safety of operating personnel is so just effectively protected, improves coating wire planar cathode 30
The security of the upkeep operation environment of short circuit.Meanwhile 12V or 24V low tensions are due to its relatively low voltage range, then it is not yet
The electronic equipment that can be damaged in short-circuit maintenance process in coating wire planar cathode 30.In this way, by selecting, 12V's or 24V is low
The voltage that piezoelectricity is exported as the low-voltage output 14 of isolating transformer 10, has just taken into account the guarantor to operating personnel's personal safety
Shield and the protection to the electronic equipment in coating wire planar cathode 30.
In the present embodiment, as shown in Fig. 2 connecting line group 20 includes anode connecting line 21 and negative electrode connecting line 22, anode
The both ends of connecting line 21 are electrically connected with the low-voltage output 14 of isolating transformer 10 and the anode tap 31 of planar cathode 30 respectively,
The both ends of negative electrode connecting line 22 are electrical with the low-voltage output 14 of isolating transformer 10 and the cathode terminal 32 of planar cathode 30 respectively
Connection.
Further, anode connecting line 21 and negative electrode connecting line 22 are included by connecting line group 20, then isolation becomes
The low-voltage output 14 of depressor 10 and the anode tap 31 of planar cathode 30 just can be by the electrical communications of anode connecting line 21, simultaneously
The low-voltage output 14 of isolating transformer 10 and the cathode terminal 32 of planar cathode 30 can also electrically be connected by negative electrode connecting line 22
It is logical.In this way, the low-voltage output 14 of isolating transformer 10 just can pass through with the anode tap 31 and cathode terminal 32 of planar cathode 30
Anode connecting line 21 and the electrical communication of negative electrode connecting line 22, load circuit is formed, and then realized to planar cathode 30 and anode bottom
Burr between plate carries out ablation.
In the present embodiment, as shown in Fig. 2 the low-voltage output 14 of isolating transformer 10 be provided be used for and anode connecting line
The 21 anode interfaces 15 being electrically connected with and the negative electrode interface 16 for being electrically connected with negative electrode connecting line 22.Specifically, anode connects
Certain distance setting is separated between mouth 15 and negative electrode interface 16, and the surface of anode interface 15 and negative electrode interface 16 scribbles not
Same mark color, while the surface of anode interface 15 and negative electrode interface 16 also is provided with the embossing grid of different lines.
Further, anode interface 15 is provided with by the low-voltage output 14 in isolating transformer 10, then anode connects
Line 21 just can grafting enter in anode interface 15 to be electrically connected with isolating transformer 10, pass through the low pressure in isolating transformer 10
Output end 14 is provided with negative electrode interface 16, then negative electrode connecting line 22 just can grafting enter in negative electrode interface 16 with isolating transformer
10 are electrically connected with.In this way, the both ends of the anode connecting line 21 anode interface 15 with the low-voltage output 14 of isolating transformer 10 respectively
It is electrically connected with the anode tap of planar cathode 30, constitutes the phase line of 12V or 24V low tensions, and the both ends of negative electrode connecting line 22
It is electrically connected with, constitutes with the negative electrode interface 16 of the low-voltage output 14 of isolating transformer 10 and the cathode terminal of planar cathode 30 respectively
The zero line of 12V or 24V low tensions.
Further, set by being separated with certain distance between anode interface 15 and negative electrode interface 16, then
The anode connecting line 21 for being docked with anode interface 15 and the negative electrode connecting line 22 for being docked with negative electrode interface 16 just will not be with isolating
Influenced each other at the low-voltage output 14 of transformer 10, so as to avoid anode connecting line 21 and negative electrode connecting line 22 due to apart from mistake
The problem of closely mutually winding, and then influenceing to use.
Preferably, by scribbling different mark colors on the surface of anode interface 15 and negative electrode interface 16, then behaviour
Making personnel just can fast and accurately identify the anode interface 15 and negative electrode interface 16 of the low-voltage output 14 of isolating transformer 10,
And then just can quick lap joint load circuit, so just save considerably needed for the maintenance to the short circuit of coating wire planar cathode 30
Time.
It is highly preferred that the embossing grid by being provided with different lines on the surface of anode interface 15 and negative electrode interface 16.That
What operating personnel can be just provided with low-light or low light condition by contacting the surface of anode interface 15 and negative electrode interface 16
The embossing grid of different lines judges and distinguishes anode interface 15 and negative electrode interface 16, so just significantly reduces anode connection
The time that line 21 and negative electrode connecting line 22 are plugged into anode interface 15 and the phase of negative electrode interface 16 respectively, so as to reducing in low-light or
The short circuit of coating wire planar cathode 30 is carried out overhauling the required time under low light condition.
In the present embodiment, the diameter of the diameter of anode connecting line 21 and negative electrode connecting line 22 is 2.5mm or 4.0mm.
Further, by the way that the diameter of the diameter of anode connecting line 21 and negative electrode connecting line 22 is set as into 2.5mm or 4.0mm.Such as
This design, the bonding strength and He of reduction anode connecting line 21 for ensureing anode connecting line 21 and negative electrode connecting line 22 is just taken into account
The resistance value of negative electrode connecting line 22.
Preferably, the diameter of the diameter of anode connecting line 21 and negative electrode connecting line 22 is 4.0mm, is so achieved that pair
Meet the bonding strength of anode connecting line 21 and negative electrode connecting line 22 and reduce anode connecting line 21 and negative electrode connecting line 22
Optimal balance between resistance value.
In the present embodiment, anode connecting line 21 and negative electrode connecting line 22 are single copper cash or multicore copper cash.
In the present embodiment, as shown in Fig. 2 controlling switch group includes the first controlling switch 23, the first controlling switch 23 is set
It is between the output end of isolating transformer 10 and 220V or 380v single-phase electricities 33 and mono- with isolating transformer 10 and 220V or 380v
Mutually the output end of electricity 33 is electrically connected with.
Further, the first controlling switch 23 is included by controlling switch group, and the first controlling switch 23 is located at
It is between the output end of isolating transformer 10 and 220V or 380v single-phase electricities 33 and single-phase with isolating transformer 10 and 220V or 380v
The output end of electricity 33 is electrically connected with, so just realize to the output end of isolating transformer 10 and 220V or 380v single-phase electricities 33 it
Between connection circuit break-make control.
In the present embodiment, as shown in Fig. 2 controlling switch group also includes the second controlling switch 24, the second controlling switch 24
It is electrically connected with anode connecting line 21 and with the anode tap of the low-voltage output 14 of isolating transformer 10 and planar cathode 30.
Further, the second controlling switch 24 is included by controlling switch group, and the second controlling switch 24 is set
It is electrically connected with anode connecting line 21 and with the anode tap 31 of the low-voltage output 14 of isolating transformer 10 and planar cathode 30,
So just realize to circuit communication between the low-voltage output 14 of isolating transformer 10 and the anode tap 31 of planar cathode 30
Control.
Further, the first controlling switch 23 and the second controlling switch 24 are included by controlling switch group, and will
First controlling switch 23 is located between isolating transformer 10 and the output end of 220V or 380v single-phase electricities 33, by the second controlling switch
24 between the low-voltage output 14 of isolating transformer 10 and the anode tap 31 of planar cathode 30, then just realizes pair simultaneously
The control and the He of low-voltage output 14 to isolating transformer 10 that isolating transformer 10 and 220V or 380v single-phase electricities 33 input
The control of the electrical communication of anode tap 31 of planar cathode 30, the short circuit of coating wire planar cathode 30 is carried out so as to considerably enhance
The operability of maintenance and the controllability of connecting and disconnecting of the circuit.
In the present embodiment, as shown in Fig. 2 the first controlling switch 23 and the second controlling switch 24 are knife switch.Enter
One step, by the way that the first controlling switch 23 and the second controlling switch 24 are set into knife switch, and have benefited from knife switch knot
Structure is simple, it is easily fabricated and cheap the characteristics of, so overhauling the cost of implementation of the short circuit of coating wire planar cathode 30 can obtain
To declining to a great extent.Have benefited from knife switch functional reliability height simultaneously, and there is high-voltage cutoff ability, it is such and ensure that operation
The personal safety of personnel.
Specifically, in the step S4 in carrying out service work, mainly first the first controlling switch 23 is closed, then closed
Close second controlling switch 24N times, wherein N >=2.
The embodiment of the present invention additionally provides a kind of coating wire planar cathode short circuit apparatus for examination and repair, including isolating transformer 10,
For being opened by isolating transformer 10 with the connecting line group 20 of the electrical communication of planar cathode 30 and for the control of control circuit break-make
Pass group, isolating transformer 10, which is provided with, is used for the high-pressure side 11 for accessing 220V or 380v single-phase electricities 33 and two for exporting low tension
Secondary side 12, one end of connecting line group 20 are electrically connected with the secondary side 12 of isolating transformer 10, the other end of connecting line group 20 with
Planar cathode 30 is electrically connected with, and controlling switch group is electrically connected with connecting line group 20.
The coating wire planar cathode short circuit apparatus for examination and repair of the embodiment of the present invention, by setting isolating transformer 10, and cause
The high voltage input terminal 13 of high-pressure side 11 on isolating transformer 10 accesses 220V or 380v single-phase electricities 33, then 220V or 380v are mono-
Mutually electricity 33 can be converted into the low-voltage output of low tension and the secondary side 12 from isolating transformer 10 in isolating transformer 10
14 outputs, and then be electrically connected with by connecting line group 20 and planar cathode 30, and cause controlling switch group and the electricity of connecting line group 20
Property connection, to cause the low-voltage output 14 of the secondary side 12 of isolating transformer 10 and connecting line group 20, controlling switch group peace
Face negative electrode 30 is collectively forming load output loop, to realize the simple and effective maintenance to the short trouble of planar cathode 30.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all essences in the present invention
All any modification, equivalent and improvement made within refreshing and principle etc., should be included in the scope of the protection.
Claims (10)
- A kind of 1. coating wire planar cathode short circuit repair method, it is characterised in that：Comprise the following steps：S1：Determine that short trouble occurs in planar cathode, judge that dc source can not be opened, and the electricity of the planar cathode over the ground Resistance is zero；S2：Isolating transformer, connecting line group and controlling switch group are provided, by the high-pressure side of the isolating transformer access 220V or 380v single-phase electricities, the secondary side of the isolating transformer pass through the cathode terminal of the connecting line group and the planar cathode, described The anode tap of planar cathode connects to form load output loop with the controlling switch group；S3：Disconnect the dc source；S4：Close the controlling switch group n times, N >=2；And it is cloudy that the plane is measured when the controlling switch group is disconnected every time The resistance of pole over the ground；S5：The resistance size of the planar cathode over the ground is measured, if the resistance of the planar cathode over the ground is zero Return and operate the step S4, direct current source point target is opened if the resistance of the planar cathode over the ground is not zero.
- 2. coating wire planar cathode short circuit repair method according to claim 1, it is characterised in that：The isolating transformer High-pressure side be provided with and be used to connect the high voltage input terminals of 220V or 380v single-phase electricities, the secondary side of the isolating transformer, which is provided with, to be used In the low-voltage output of output 12V or 24V single-phase electricities.
- 3. coating wire planar cathode short circuit repair method according to claim 1, it is characterised in that：The connecting line group bag Include anode connecting line and negative electrode connecting line, the both ends of the anode connecting line low-voltage output with the isolating transformer respectively It is electrically connected with the anode tap of the planar cathode, the both ends of the negative electrode connecting line low pressure with the isolating transformer respectively The cathode terminal of output end and the planar cathode is electrically connected with.
- 4. coating wire planar cathode short circuit repair method according to claim 3, it is characterised in that：The isolating transformer Low-voltage output be provided be used for the anode connecting line be electrically connected with anode interface and for the negative electrode connecting line The negative electrode interface of electric connection.
- 5. coating wire planar cathode short circuit repair method according to claim 3, it is characterised in that：The anode connecting line Diameter and the diameter of the negative electrode connecting line be 2.5mm or 4.0mm.
- 6. coating wire planar cathode short circuit repair method according to claim 3, it is characterised in that：The anode connecting line It is single copper cash or multicore copper cash with the negative electrode connecting line.
- 7. coating wire planar cathode short circuit repair method according to claim 2, it is characterised in that：The controlling switch group Including the first controlling switch, first controlling switch is defeated located at the isolating transformer and 220V the or 380v single-phase electricities Go out between end and be electrically connected with the output end of the isolating transformer and 220V the or 380v single-phase electricities.
- 8. coating wire planar cathode short circuit repair method according to claim 7, it is characterised in that：The controlling switch group Also include the second controlling switch, second controlling switch is on the anode connecting line and low with the isolating transformer The anode tap of output end and the planar cathode is pressed to be electrically connected with.
- 9. coating wire planar cathode short circuit repair method according to claim 8, it is characterised in that：First control is opened Close and second controlling switch is knife switch.
- 10. coating wire planar cathode short circuit repair method according to claim 8, it is characterised in that：In the step S4 In, first first controlling switch is closed, then closes the second controlling switch n times, wherein N >=2.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896856A (en) * | 2018-07-03 | 2018-11-27 | 北方工业大学 | Method and system for rapidly detecting cathode short circuit |
| CN109541370A (en) * | 2018-11-16 | 2019-03-29 | 北方工业大学 | Method and system for detecting cathode short circuit according to voltage drop |
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| CN86105616A (en) * | 1985-07-26 | 1987-04-22 | 西屋电气公司 | The method and apparatus of the sputtering chamber's high-voltage cathode after the cleaning short circuit |
| CN104674178A (en) * | 2015-03-24 | 2015-06-03 | 南华大学 | Power circuit for realizing multi-mode outputting of magnetron sputtering coating and control method |
| CN204959025U (en) * | 2015-09-16 | 2016-01-13 | 河源市璐悦自动化设备有限公司 | Planar cathode that magnetron sputtering coating film was used |
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2017
- 2017-09-15 CN CN201710832150.2A patent/CN107761065B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN86105616A (en) * | 1985-07-26 | 1987-04-22 | 西屋电气公司 | The method and apparatus of the sputtering chamber's high-voltage cathode after the cleaning short circuit |
| CN104674178A (en) * | 2015-03-24 | 2015-06-03 | 南华大学 | Power circuit for realizing multi-mode outputting of magnetron sputtering coating and control method |
| CN204959025U (en) * | 2015-09-16 | 2016-01-13 | 河源市璐悦自动化设备有限公司 | Planar cathode that magnetron sputtering coating film was used |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108896856A (en) * | 2018-07-03 | 2018-11-27 | 北方工业大学 | Method and system for rapidly detecting cathode short circuit |
| WO2020007034A1 (en) * | 2018-07-03 | 2020-01-09 | 北方工业大学 | Method and system for rapidly detecting short circuit of cathode |
| CN109541370A (en) * | 2018-11-16 | 2019-03-29 | 北方工业大学 | Method and system for detecting cathode short circuit according to voltage drop |
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| Publication number | Publication date |
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| CN107761065B (en) | 2019-04-19 |
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